Other Current Liabilities (Tables)

6 Months Ended

Jun. 30, 2012

Other Current Liabilities [Abstract]

Summary of other current liabilities

	At
	June 30, 2012		December 31, 2011
Accrued warranty	$	4,943	$	4,797
Accrued professional services		897		1,497
Customer deposits		5,085		4,912
Fair value of current portion of contingent payments to Zygo Corporation related to acquisition		885		679
Legal settlement		—		2,500
Other		2,572		2,324
Total other current liabilities	$	14,382	$	16,709