Exhibit 21.1

List of Subsidiaries

Name	Jurisdiction
Accent Optical Technologies France	France
Accent Optical Technologies (Germany) GmbH	Germany
Nanometrics (Switzerland) GmbH	Switzerland
Nanometrics U.K. Ltd.	United Kingdom
Nanometrics China Company Ltd.	China
Nanometrics Israel, Ltd.	Israel
Nanometrics Japan K.K.	Japan
Nanometrics Korea Limited	South Korea
Nanometrics Southeast Asia Pte. Limited	Singapore