Consent of BDO Seidman, LLP

EX-23.1 6 dex231.htm CONSENT OF BDO SEIDMAN, LLP Consent of BDO Seidman, LLP

Exhibit 23.1

Consent of Independent Registered Public Accounting Firm

Nanometrics Incorporated

Milpitas, California

We hereby consent to the incorporation by reference in the Registration Statements on Form S-8 (Nos. 333-33583, 333-40866, 333-91714, 333-101137, 333-108474, 333-136557 and 333-149339) of Nanometrics Incorporated of our report dated March 27, 2009, relating to the consolidated financial statements and financial statement schedule, which appears in this Form 10-K.

/s/ BDO Seidman, LLP

San Francisco, California

March 27, 2009