Consent of PricewaterhouseCoopers LLP, Independent Accountants

EX-23.3 5 dex233.htm CONSENT OF PRICEWATERHOUSECOOPERS LLP, INDEPENDENT ACCOUNTANTS Consent of PricewaterhouseCoopers LLP, Independent Accountants

Exhibit 23.3

CONSENT OF INDEPENDENT ACCOUNTANTS

We hereby consent to the use in this Registration Statement on Form S-4 of Nanometrics Incorporated of our report dated March 24, 2006 relating to the financial statements of Accent Optical Technologies, Inc., which appears in such Registration Statement. We also consent to the reference to us under the heading “Experts” in such Registration Statement.

/s/ PricewaterhouseCoopers LLP

Portland, Oregon

June 8, 2006