-----BEGIN PRIVACY-ENHANCED MESSAGE-----
Proc-Type: 2001,MIC-CLEAR
Originator-Name: webmaster@www.sec.gov
Originator-Key-Asymmetric:
 MFgwCgYEVQgBAQICAf8DSgAwRwJAW2sNKK9AVtBzYZmr6aGjlWyK3XmZv3dTINen
 TWSM7vrzLADbmYQaionwg5sDW3P6oaM5D3tdezXMm7z1T+B+twIDAQAB
MIC-Info: RSA-MD5,RSA,
 WC4VPeURvLlW3KuMWbpVnWy7JZvFMNz1naVZSVRX4mcbu6pqL5qRGo2lnMPb7agn
 UcC37uQR68L3iHuGE4RSkQ==

<SEC-DOCUMENT>0001181431-05-021446.txt : 20050408
<SEC-HEADER>0001181431-05-021446.hdr.sgml : 20050408
<ACCEPTANCE-DATETIME>20050408201151
ACCESSION NUMBER:		0001181431-05-021446
CONFORMED SUBMISSION TYPE:	3
PUBLIC DOCUMENT COUNT:		1
CONFORMED PERIOD OF REPORT:	20050405
FILED AS OF DATE:		20050408
DATE AS OF CHANGE:		20050408

REPORTING-OWNER:	

	OWNER DATA:	
		COMPANY CONFORMED NAME:			Weber-Grabau Michael
		CENTRAL INDEX KEY:			0001323394

	FILING VALUES:
		FORM TYPE:		3
		SEC ACT:		1934 Act
		SEC FILE NUMBER:	000-13470
		FILM NUMBER:		05742662

	BUSINESS ADDRESS:	
		BUSINESS PHONE:		408-435-9600

	MAIL ADDRESS:	
		STREET 1:		1550 BUCKEYE DRIVE
		CITY:			MILPITAS
		STATE:			CA
		ZIP:			95035

ISSUER:		

	COMPANY DATA:	
		COMPANY CONFORMED NAME:			NANOMETRICS INC
		CENTRAL INDEX KEY:			0000704532
		STANDARD INDUSTRIAL CLASSIFICATION:	MEASURING & CONTROLLING DEVICES, NEC [3829]
		IRS NUMBER:				942276314
		STATE OF INCORPORATION:			CA
		FISCAL YEAR END:			1231

	BUSINESS ADDRESS:	
		STREET 1:		1550 BUCKEYE DRIVE
		CITY:			MILPITAS
		STATE:			CA
		ZIP:			95035
		BUSINESS PHONE:		408-435-9600

	MAIL ADDRESS:	
		STREET 1:		1550 BUCKEYE DRIVE
		CITY:			MILPITAS
		STATE:			CA
		ZIP:			95035
</SEC-HEADER>
<DOCUMENT>
<TYPE>3
<SEQUENCE>1
<FILENAME>rrd75235.xml
<TEXT>
<XML>
<?xml version="1.0"?>
<ownershipDocument>

    <schemaVersion>X0202</schemaVersion>

    <documentType>3</documentType>

    <periodOfReport>2005-04-05</periodOfReport>

    <noSecuritiesOwned>1</noSecuritiesOwned>

    <issuer>
        <issuerCik>0000704532</issuerCik>
        <issuerName>NANOMETRICS INC</issuerName>
        <issuerTradingSymbol>NANO</issuerTradingSymbol>
    </issuer>

    <reportingOwner>
        <reportingOwnerId>
            <rptOwnerCik>0001323394</rptOwnerCik>
            <rptOwnerName>Weber-Grabau Michael</rptOwnerName>
        </reportingOwnerId>
        <reportingOwnerAddress>
            <rptOwnerStreet1>1550 BUCKEYE DRIVE</rptOwnerStreet1>
            <rptOwnerStreet2></rptOwnerStreet2>
            <rptOwnerCity>MILPITAS</rptOwnerCity>
            <rptOwnerState>CA</rptOwnerState>
            <rptOwnerZipCode>95035</rptOwnerZipCode>
            <rptOwnerStateDescription></rptOwnerStateDescription>
        </reportingOwnerAddress>
        <reportingOwnerRelationship>
            <isDirector>0</isDirector>
            <isOfficer>1</isOfficer>
            <isTenPercentOwner>0</isTenPercentOwner>
            <isOther>0</isOther>
            <officerTitle>Vice President of Engineering</officerTitle>
        </reportingOwnerRelationship>
    </reportingOwner>

    <remarks>No securities are beneficially owned.</remarks>

    <ownerSignature>
        <signatureName>/s/ Michael Weber-Grabau</signatureName>
        <signatureDate>2005-04-05</signatureDate>
    </ownerSignature>
</ownershipDocument>
</XML>
</TEXT>
</DOCUMENT>
</SEC-DOCUMENT>
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