Share Repurchase Authorization	3 Months Ended
Mar. 30, 2024
Share Repurchase Program [Abstract]
Share Repurchase Authorization	NOTE 15. Share Repurchase Authorization In February 2024, the Onto Innovation Board of Directors approved a new share repurchase authorization, which allows the Company to repurchase up to $200,000 worth of shares of its common stock. Repurchases may be made through both public market and private transactions from time to time with shares purchased being subsequently retired. Any amount paid to repurchase the shares in excess of par value, including transaction costs, would be recorded directly as a decrease to additional paid-in capital and accumulated earnings. During the three month period ended March 30, 2024, no shares of the Company’s common stock were repurchased under the share repurchase authorization. At March 30, 2024, there was $200,000 available for future share repurchases under this share repurchase authorization.

Share Repurchase Authorization

3 Months Ended

Mar. 30, 2024

NOTE 15. Share Repurchase Authorization

In February 2024, the Onto Innovation Board of Directors approved a new share repurchase authorization, which allows the Company to repurchase up to $200,000 worth of shares of its common stock. Repurchases may be made through both public market and private transactions from time to time with shares purchased being subsequently retired. Any amount paid to repurchase the shares in excess of par value, including transaction costs, would be recorded directly as a decrease to additional paid-in capital and accumulated earnings. During the three month period ended March 30, 2024, no shares of the Company’s common stock were repurchased under the share repurchase authorization. At March 30, 2024, there was $200,000 available for future share repurchases under this share repurchase authorization.