<SEC-DOCUMENT>0000950170-24-056963-index.html : 20240509
<SEC-HEADER>0000950170-24-056963.hdr.sgml : 20240509
<ACCEPTANCE-DATETIME>20240509161108
ACCESSION NUMBER:		0000950170-24-056963
CONFORMED SUBMISSION TYPE:	8-K
PUBLIC DOCUMENT COUNT:		13
CONFORMED PERIOD OF REPORT:	20240509
ITEM INFORMATION:		Results of Operations and Financial Condition
ITEM INFORMATION:		Financial Statements and Exhibits
FILED AS OF DATE:		20240509
DATE AS OF CHANGE:		20240509

FILER:

	COMPANY DATA:	
		COMPANY CONFORMED NAME:			ONTO INNOVATION INC.
		CENTRAL INDEX KEY:			0000704532
		STANDARD INDUSTRIAL CLASSIFICATION:	MEASURING & CONTROLLING DEVICES, NEC [3829]
		ORGANIZATION NAME:           	08 Industrial Applications and Services
		IRS NUMBER:				942276314
		STATE OF INCORPORATION:			DE
		FISCAL YEAR END:			1226

	FILING VALUES:
		FORM TYPE:		8-K
		SEC ACT:		1934 Act
		SEC FILE NUMBER:	001-39110
		FILM NUMBER:		24930695

	BUSINESS ADDRESS:	
		STREET 1:		16 JONSPIN ROAD
		CITY:			WILMINGTON
		STATE:			MA
		ZIP:			01887
		BUSINESS PHONE:		9782536200

	MAIL ADDRESS:	
		STREET 1:		16 JONSPIN ROAD
		CITY:			WILMINGTON
		STATE:			MA
		ZIP:			01887

	FORMER COMPANY:	
		FORMER CONFORMED NAME:	Onto Innovation Inc.
		DATE OF NAME CHANGE:	20191025

	FORMER COMPANY:	
		FORMER CONFORMED NAME:	NANOMETRICS INC
		DATE OF NAME CHANGE:	19920703
</SEC-HEADER>
<DOCUMENT>
<TYPE>8-K
<SEQUENCE>1
<FILENAME>onto-20240509.htm
<DESCRIPTION>8-K
<TEXT>
Document 1 - file: onto-20240509.htm
</DOCUMENT> <DOCUMENT> <TYPE>EX-99.1 <SEQUENCE>2 <FILENAME>onto-ex99_1.htm <DESCRIPTION>EX-99.1 <TEXT> Document 2 - file: onto-ex99_1.htm
</DOCUMENT> <DOCUMENT> <TYPE>GRAPHIC <SEQUENCE>3 <FILENAME>img123863179_0.jpg <DESCRIPTION>GRAPHIC <TEXT> Document 3 - file: img123863179_0.jpg
</DOCUMENT> <DOCUMENT> <TYPE>EX-101.SCH <SEQUENCE>4 <FILENAME>onto-20240509.xsd <DESCRIPTION>XBRL TAXONOMY EXTENSION SCHEMA WITH EMBEDDED LINKBASES DOCUMENT <TEXT> Document 4 - file: onto-20240509.xsd
</DOCUMENT> <DOCUMENT> <TYPE>XML <SEQUENCE>6 <FILENAME>R1.htm <DESCRIPTION>IDEA: XBRL DOCUMENT <TEXT> Document 6 - file: R1.htm
</DOCUMENT> <DOCUMENT> <TYPE>EXCEL <SEQUENCE>7 <FILENAME>Financial_Report.xlsx <DESCRIPTION>IDEA: XBRL DOCUMENT <TEXT> Document 7 - file: Financial_Report.xlsx
</DOCUMENT> <DOCUMENT> <TYPE>XML <SEQUENCE>8 <FILENAME>Show.js <DESCRIPTION>IDEA: XBRL DOCUMENT <TEXT> Document 8 - file: Show.js
</DOCUMENT> <DOCUMENT> <TYPE>XML <SEQUENCE>9 <FILENAME>report.css <DESCRIPTION>IDEA: XBRL DOCUMENT <TEXT> Document 9 - file: report.css
</DOCUMENT> <DOCUMENT> <TYPE>XML <SEQUENCE>11 <FILENAME>FilingSummary.xml <DESCRIPTION>IDEA: XBRL DOCUMENT <TEXT> Document 11 - file: FilingSummary.html
Document 11 - RAW XML: FilingSummary.xml
</DOCUMENT> <DOCUMENT> <TYPE>JSON <SEQUENCE>13 <FILENAME>MetaLinks.json <DESCRIPTION>IDEA: XBRL DOCUMENT <TEXT> Document 13 - file: MetaLinks.json
</DOCUMENT> <DOCUMENT> <TYPE>ZIP <SEQUENCE>14 <FILENAME>0000950170-24-056963-xbrl.zip <DESCRIPTION>IDEA: XBRL DOCUMENT <TEXT> Document 14 - file: 0000950170-24-056963-xbrl.zip
</DOCUMENT> <DOCUMENT> <TYPE>XML <SEQUENCE>16 <FILENAME>onto-20240509_htm.xml <DESCRIPTION>IDEA: XBRL DOCUMENT <TEXT> Document 16 - file: onto-20240509_htm.html
Document 16 - RAW XML: onto-20240509_htm.xml
</DOCUMENT> </SEC-DOCUMENT>