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Document and Entity Information - USD ($)
$ in Thousands
 12 Months Ended
Dec. 30, 2023
Feb. 05, 2024
Jun. 30, 2023
Cover [Abstract]      
Entity Registrant Name ONTO INNOVATION INC.    
Trading Symbol ONTO    
Entity Central Index Key 0000704532    
Current Fiscal Year End Date --12-30    
Entity Filer Category Large Accelerated Filer    
Document Type 10-K    
Document Period End Date Dec. 30, 2023    
Document Fiscal Year Focus 2022    
Document Fiscal Period Focus FY    
Amendment Flag false    
Entity Small Business false    
Entity Emerging Growth Company false    
Entity Shell Company false    
Entity Common Stock, Shares Outstanding   49,130,018  
Entity Well-known Seasoned Issuer Yes    
Entity Voluntary Filers No    
Entity Current Reporting Status Yes    
Entity Public Float     $ 5,659,828,744
Entity Interactive Data Current Yes    
Title of 12(b) Security Common Stock, $0.001 par value per share    
Security Exchange Name NYSE    
Entity File Number 001-39110    
Entity Incorporation, State or Country Code DE    
Entity Address, Address Line One 16 Jonspin Road    
Entity Address, City or Town Wilmington    
Entity Address, State or Province MA    
City Area Code 978    
Local Phone Number 253-6200    
Entity Address, Postal Zip Code 01887    
Entity Tax Identification Number 94-2276314    
Document Annual Report true    
Document Transition Report false    
ICFR Auditor Attestation Flag true    
Document Financial Statement Error Correction [Flag] false    
Auditor Name Ernst & Young LLP    
Auditor Location Iselin, New Jersey    
Auditor Firm ID 42    
Documents Incorporated by Reference

DOCUMENTS INCORPORATED BY REFERENCE

Items 10, 11, 12, 13 and 14 of Part III of this Annual Report on Form 10-K incorporate by reference information from the definitive proxy statement for the registrant’s annual meeting of stockholders scheduled to be held on May 22, 2024.