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Filing Detail
Form 10-Q - Quarterly report [Sections 13 or 15(d)]:
SEC Accession No. 0000950170-23-041470
Filing Date
2023-08-10
Accepted
2023-08-10 17:09:52
Documents
88
Period of Report
2023-07-01

Document Format Files

Seq Description Document Type Size
1 10-Q onto-20230701.htm   iXBRL 10-Q 3112359
2 EX-31.1 onto-ex31_1.htm EX-31.1 24665
3 EX-31.2 onto-ex31_2.htm EX-31.2 24710
4 EX-32.1 onto-ex32_1.htm EX-32.1 14309
5 EX-32.2 onto-ex32_2.htm EX-32.2 14929
  Complete submission text file 0000950170-23-041470.txt   12159179

Data Files

Seq Description Document Type Size
6 XBRL TAXONOMY EXTENSION DEFINITION LINKBASE DOCUMENT onto-20230701_def.xml EX-101.DEF 119708
7 XBRL TAXONOMY EXTENSION PRESENTATION LINKBASE DOCUMENT onto-20230701_pre.xml EX-101.PRE 283562
8 XBRL TAXONOMY EXTENSION CALCULATION LINKBASE DOCUMENT onto-20230701_cal.xml EX-101.CAL 61702
9 XBRL TAXONOMY EXTENSION SCHEMA DOCUMENT onto-20230701.xsd EX-101.SCH 50569
10 XBRL TAXONOMY EXTENSION LABEL LINKBASE DOCUMENT onto-20230701_lab.xml EX-101.LAB 383914
82 EXTRACTED XBRL INSTANCE DOCUMENT onto-20230701_htm.xml XML 3112037
Mailing Address 16 JONSPIN ROAD WILMINGTON MA 01887
Business Address 16 JONSPIN ROAD WILMINGTON MA 01887 9782536200
ONTO INNOVATION INC. (Filer) CIK: 0000704532 (see all company filings)

IRS No.: 942276314 | State of Incorp.: DE | Fiscal Year End: 1226
Type: 10-Q | Act: 34 | File No.: 001-39110 | Film No.: 231160587
SIC: 3829 Measuring & Controlling Devices, NEC