<SEC-DOCUMENT>0000950170-23-017837-index.html : 20230504
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<ACCEPTANCE-DATETIME>20230504160626
ACCESSION NUMBER:		0000950170-23-017837
CONFORMED SUBMISSION TYPE:	8-K
PUBLIC DOCUMENT COUNT:		14
CONFORMED PERIOD OF REPORT:	20230504
ITEM INFORMATION:		Results of Operations and Financial Condition
ITEM INFORMATION:		Financial Statements and Exhibits
FILED AS OF DATE:		20230504
DATE AS OF CHANGE:		20230504

FILER:

	COMPANY DATA:	
		COMPANY CONFORMED NAME:			ONTO INNOVATION INC.
		CENTRAL INDEX KEY:			0000704532
		STANDARD INDUSTRIAL CLASSIFICATION:	MEASURING & CONTROLLING DEVICES, NEC [3829]
		IRS NUMBER:				942276314
		STATE OF INCORPORATION:			DE
		FISCAL YEAR END:			1226

	FILING VALUES:
		FORM TYPE:		8-K
		SEC ACT:		1934 Act
		SEC FILE NUMBER:	001-39110
		FILM NUMBER:		23888646

	BUSINESS ADDRESS:	
		STREET 1:		16 JONSPIN ROAD
		CITY:			WILMINGTON
		STATE:			MA
		ZIP:			01887
		BUSINESS PHONE:		9782536200

	MAIL ADDRESS:	
		STREET 1:		16 JONSPIN ROAD
		CITY:			WILMINGTON
		STATE:			MA
		ZIP:			01887

	FORMER COMPANY:	
		FORMER CONFORMED NAME:	Onto Innovation Inc.
		DATE OF NAME CHANGE:	20191025

	FORMER COMPANY:	
		FORMER CONFORMED NAME:	NANOMETRICS INC
		DATE OF NAME CHANGE:	19920703
</SEC-HEADER>
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Document 1 - file: onto-20230504.htm

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Document 2 - file: onto-ex99_1.htm

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Document 3 - file: img123863179_0.jpg

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<TYPE>EX-101.LAB
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<FILENAME>onto-20230504_lab.xml
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Document 4 - file: onto-20230504_lab.xml

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Document 9 - file: Financial_Report.xlsx

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<TEXT>
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<TYPE>ZIP
<SEQUENCE>15
<FILENAME>0000950170-23-017837-xbrl.zip
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Document 15 - file: 0000950170-23-017837-xbrl.zip

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