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Form DEF 14A - Other definitive proxy statements:
SEC Accession No. 0000950170-23-010940
Filing Date
2023-03-30
Accepted
2023-03-30 16:12:54
Documents
28

Document Format Files

Seq Description Document Type Size
1 DEF 14A onto-20230328.htm   iXBRL DEF 14A 1801012
2 GRAPHIC img167961819_0.jpg GRAPHIC 20615
3 GRAPHIC img167961819_1.jpg GRAPHIC 20615
4 GRAPHIC img167961819_2.jpg GRAPHIC 371774
5 GRAPHIC img167961819_3.jpg GRAPHIC 20210
6 GRAPHIC img167961819_4.jpg GRAPHIC 133008
7 GRAPHIC img167961819_5.jpg GRAPHIC 27854
8 GRAPHIC img167961819_6.jpg GRAPHIC 22709
9 GRAPHIC img167961819_7.jpg GRAPHIC 21189
10 GRAPHIC img167961819_8.jpg GRAPHIC 28293
11 GRAPHIC img167961819_9.jpg GRAPHIC 10243
12 GRAPHIC img167961819_10.jpg GRAPHIC 16586
13 GRAPHIC img167961819_11.jpg GRAPHIC 250102
14 GRAPHIC img167961819_12.jpg GRAPHIC 271353
15 GRAPHIC img167961819_13.jpg GRAPHIC 261514
  Complete submission text file 0000950170-23-010940.txt   6254234

Data Files

Seq Description Document Type Size
16 XBRL TAXONOMY EXTENSION PRESENTATION LINKBASE DOCUMENT onto-20230328_pre.xml EX-101.PRE 9946
17 XBRL TAXONOMY EXTENSION DEFINITION LINKBASE DOCUMENT onto-20230328_def.xml EX-101.DEF 5971
18 XBRL TAXONOMY EXTENSION LABEL LINKBASE DOCUMENT onto-20230328_lab.xml EX-101.LAB 14859
19 XBRL TAXONOMY EXTENSION SCHEMA DOCUMENT onto-20230328.xsd EX-101.SCH 5990
22 EXTRACTED XBRL INSTANCE DOCUMENT onto-20230328_htm.xml XML 289280
Mailing Address 16 JONSPIN ROAD WILMINGTON MA 01887
Business Address 16 JONSPIN ROAD WILMINGTON MA 01887 9782536200
ONTO INNOVATION INC. (Filer) CIK: 0000704532 (see all company filings)

IRS No.: 942276314 | State of Incorp.: DE | Fiscal Year End: 1226
Type: DEF 14A | Act: 34 | File No.: 001-39110 | Film No.: 23780830
SIC: 3829 Measuring & Controlling Devices, NEC