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Form 10-K - Annual report [Section 13 and 15(d), not S-K Item 405]:
SEC Accession No. 0000950170-23-004283
Filing Date
2023-02-24
Accepted
2023-02-24 10:52:11
Documents
104
Period of Report
2022-12-31

Document Format Files

Seq Description Document Type Size
1 10-K onto-20221231.htm   iXBRL 10-K 4495215
2 EX-10.13 onto-ex10_13.htm EX-10 143142
3 EX-21.1 onto-ex21_1.htm EX-21 38440
4 EX-23.1 onto-ex23_1.htm EX-23 7741
5 EX-31.1 onto-ex31_1.htm EX-31 24480
6 EX-31.2 onto-ex31_2.htm EX-31 24524
7 EX-32.1 onto-ex32_1.htm EX-32 14113
8 EX-32.2 onto-ex32_2.htm EX-32 14733
9 GRAPHIC img167067152_0.jpg GRAPHIC 437264
  Complete submission text file 0000950170-23-004283.txt   18032464

Data Files

Seq Description Document Type Size
10 XBRL TAXONOMY EXTENSION PRESENTATION LINKBASE DOCUMENT onto-20221231_pre.xml EX-101.PRE 427989
11 XBRL TAXONOMY EXTENSION SCHEMA DOCUMENT onto-20221231.xsd EX-101.SCH 68948
12 XBRL TAXONOMY EXTENSION LABEL LINKBASE DOCUMENT onto-20221231_lab.xml EX-101.LAB 598080
13 XBRL TAXONOMY EXTENSION CALCULATION LINKBASE DOCUMENT onto-20221231_cal.xml EX-101.CAL 90322
14 XBRL TAXONOMY EXTENSION DEFINITION LINKBASE DOCUMENT onto-20221231_def.xml EX-101.DEF 193147
98 EXTRACTED XBRL INSTANCE DOCUMENT onto-20221231_htm.xml XML 4243764
Mailing Address 16 JONSPIN ROAD WILMINGTON MA 01887
Business Address 16 JONSPIN ROAD WILMINGTON MA 01887 9782536200
ONTO INNOVATION INC. (Filer) CIK: 0000704532 (see all company filings)

IRS No.: 942276314 | State of Incorp.: DE | Fiscal Year End: 1226
Type: 10-K | Act: 34 | File No.: 001-39110 | Film No.: 23663630
SIC: 3829 Measuring & Controlling Devices, NEC