Exhibit 23.1

                          INDEPENDENT AUDITORS' CONSENT

We consent to the incorporation by reference in this  Registration  Statement of
Nanometrics  Incorporated  on Form S-8 of our report  dated  February  13,  2003
(which  report  expresses an  unqualified  opinion and  includes an  explanatory
paragraph  concerning the Company's change in method of accounting to conform to
Statement of Financial  Accounting  Standards  No. 142)  appearing in the Annual
Report on Form 10-K of Nanometrics  Incorporated for the year ended December 31,
2002.

/s/ Deloitte & Touche LLP

San Jose, California
August 28, 2003