Exhibit 23.1
                         CONSENT OF INDEPENDENT AUDITOR

We consent to the incorporation by reference in this  Registration  Statement of
Nanometrics  Incorporated  on Form S-8 of our report  dated  February  13,  2002
appearing in the Annual Report on Form 10-K of Nanometrics  Incorporated for the
year ended December 31, 2001.


/s/ Deloitte & Touche LLP
San Jose, California
November 11, 2002