<SEC-DOCUMENT>0000902219-21-000288-index.html : 20210204
<SEC-HEADER>0000902219-21-000288.hdr.sgml : 20210204
<ACCEPTANCE-DATETIME>20210204113538
ACCESSION NUMBER:		0000902219-21-000288
CONFORMED SUBMISSION TYPE:	SC 13G/A
PUBLIC DOCUMENT COUNT:		1
FILED AS OF DATE:		20210204
DATE AS OF CHANGE:		20210204

SUBJECT COMPANY:	

	COMPANY DATA:	
		COMPANY CONFORMED NAME:			ONTO INNOVATION INC.
		CENTRAL INDEX KEY:			0000704532
		STANDARD INDUSTRIAL CLASSIFICATION:	MEASURING & CONTROLLING DEVICES, NEC [3829]
		IRS NUMBER:				942276314
		STATE OF INCORPORATION:			DE
		FISCAL YEAR END:			1226

	FILING VALUES:
		FORM TYPE:		SC 13G/A
		SEC ACT:		1934 Act
		SEC FILE NUMBER:	005-35897
		FILM NUMBER:		21589809

	BUSINESS ADDRESS:	
		STREET 1:		16 JONSPIN ROAD
		CITY:			WILMINGTON
		STATE:			MA
		ZIP:			01887
		BUSINESS PHONE:		9782536200

	MAIL ADDRESS:	
		STREET 1:		16 JONSPIN ROAD
		CITY:			WILMINGTON
		STATE:			MA
		ZIP:			01887

	FORMER COMPANY:	
		FORMER CONFORMED NAME:	Onto Innovation Inc.
		DATE OF NAME CHANGE:	20191025

	FORMER COMPANY:	
		FORMER CONFORMED NAME:	NANOMETRICS INC
		DATE OF NAME CHANGE:	19920703

FILED BY:		

	COMPANY DATA:	
		COMPANY CONFORMED NAME:			WELLINGTON MANAGEMENT GROUP LLP
		CENTRAL INDEX KEY:			0000902219
		STANDARD INDUSTRIAL CLASSIFICATION:	UNKNOWN SIC - 0000 [0000]
		IRS NUMBER:				042683227
		STATE OF INCORPORATION:			MA
		FISCAL YEAR END:			1231

	FILING VALUES:
		FORM TYPE:		SC 13G/A

	BUSINESS ADDRESS:	
		STREET 1:		C/O WELLINGTON MANAGEMENT COMPANY LLP
		STREET 2:		280 CONGRESS STREET
		CITY:			BOSTON
		STATE:			MA
		ZIP:			02210
		BUSINESS PHONE:		6179515000

	MAIL ADDRESS:	
		STREET 1:		C/O WELLINGTON MANAGEMENT COMPANY LLP
		STREET 2:		280 CONGRESS STREET
		CITY:			BOSTON
		STATE:			MA
		ZIP:			02210

	FORMER COMPANY:	
		FORMER CONFORMED NAME:	WELLINGTON MANAGEMENT CO LLP
		DATE OF NAME CHANGE:	19960930

	FORMER COMPANY:	
		FORMER CONFORMED NAME:	WELLINGTON MANAGEMENT CO
		DATE OF NAME CHANGE:	19930426
</SEC-HEADER>
<DOCUMENT>
<TYPE>SC 13G/A
<SEQUENCE>1
<FILENAME>SEC13G_Filing.htm
<DESCRIPTION>SEC SCHEDULE 13G
<TEXT>
Document 1 - file: SEC13G_Filing.htm

</DOCUMENT>
</SEC-DOCUMENT>