<SEC-DOCUMENT>0000899243-19-026254-index.html : 20191029
<SEC-HEADER>0000899243-19-026254.hdr.sgml : 20191029
<ACCEPTANCE-DATETIME>20191029213551
ACCESSION NUMBER:		0000899243-19-026254
CONFORMED SUBMISSION TYPE:	4
PUBLIC DOCUMENT COUNT:		1
CONFORMED PERIOD OF REPORT:	20191025
FILED AS OF DATE:		20191029
DATE AS OF CHANGE:		20191029

REPORTING-OWNER:	

	OWNER DATA:	
		COMPANY CONFORMED NAME:			Aukerman Jeffrey A.
		CENTRAL INDEX KEY:			0001628505

	FILING VALUES:
		FORM TYPE:		4
		SEC ACT:		1934 Act
		SEC FILE NUMBER:	001-39110
		FILM NUMBER:		191177401

	MAIL ADDRESS:	
		STREET 1:		16 JONSPIN ROAD
		CITY:			WILMINGTON
		STATE:			MA
		ZIP:			01887

ISSUER:		

	COMPANY DATA:	
		COMPANY CONFORMED NAME:			Onto Innovation Inc.
		CENTRAL INDEX KEY:			0000704532
		STANDARD INDUSTRIAL CLASSIFICATION:	MEASURING & CONTROLLING DEVICES, NEC [3829]
		IRS NUMBER:				942276314
		STATE OF INCORPORATION:			DE
		FISCAL YEAR END:			1228

	BUSINESS ADDRESS:	
		STREET 1:		16 JONSPIN ROAD
		CITY:			WILMINGTON
		STATE:			MA
		ZIP:			01887
		BUSINESS PHONE:		408-545-6000

	MAIL ADDRESS:	
		STREET 1:		16 JONSPIN ROAD
		CITY:			WILMINGTON
		STATE:			MA
		ZIP:			01887

	FORMER COMPANY:	
		FORMER CONFORMED NAME:	NANOMETRICS INC
		DATE OF NAME CHANGE:	19920703
</SEC-HEADER>
<DOCUMENT>
<TYPE>4
<SEQUENCE>1
<FILENAME>doc4.xml
<DESCRIPTION>FORM 4 SUBMISSION
<TEXT>
Document 1 - file: doc4.html

Document 1 - RAW XML: doc4.xml

</DOCUMENT>
</SEC-DOCUMENT>