<SEC-DOCUMENT>0000899243-19-026244-index.html : 20191029
<SEC-HEADER>0000899243-19-026244.hdr.sgml : 20191029
<ACCEPTANCE-DATETIME>20191029212919
ACCESSION NUMBER:		0000899243-19-026244
CONFORMED SUBMISSION TYPE:	3
PUBLIC DOCUMENT COUNT:		2
CONFORMED PERIOD OF REPORT:	20191025
FILED AS OF DATE:		20191029
DATE AS OF CHANGE:		20191029

REPORTING-OWNER:	

	OWNER DATA:	
		COMPANY CONFORMED NAME:			da Silveira Elvino M
		CENTRAL INDEX KEY:			0001564707

	FILING VALUES:
		FORM TYPE:		3
		SEC ACT:		1934 Act
		SEC FILE NUMBER:	001-39110
		FILM NUMBER:		191177383

	MAIL ADDRESS:	
		STREET 1:		16 JONSPIN ROAD
		CITY:			WILMINGTON
		STATE:			MA
		ZIP:			01887

ISSUER:		

	COMPANY DATA:	
		COMPANY CONFORMED NAME:			Onto Innovation Inc.
		CENTRAL INDEX KEY:			0000704532
		STANDARD INDUSTRIAL CLASSIFICATION:	MEASURING & CONTROLLING DEVICES, NEC [3829]
		IRS NUMBER:				942276314
		STATE OF INCORPORATION:			DE
		FISCAL YEAR END:			1228

	BUSINESS ADDRESS:	
		STREET 1:		16 JONSPIN ROAD
		CITY:			WILMINGTON
		STATE:			MA
		ZIP:			01887
		BUSINESS PHONE:		408-545-6000

	MAIL ADDRESS:	
		STREET 1:		16 JONSPIN ROAD
		CITY:			WILMINGTON
		STATE:			MA
		ZIP:			01887

	FORMER COMPANY:	
		FORMER CONFORMED NAME:	NANOMETRICS INC
		DATE OF NAME CHANGE:	19920703
</SEC-HEADER>
<DOCUMENT>
<TYPE>3
<SEQUENCE>1
<FILENAME>doc3.xml
<DESCRIPTION>FORM 3 SUBMISSION
<TEXT>
Document 1 - file: doc3.html

Document 1 - RAW XML: doc3.xml

</DOCUMENT>
<DOCUMENT>
<TYPE>EX-24
<SEQUENCE>2
<FILENAME>attachment1.htm
<DESCRIPTION>EX-24 DOCUMENT
<TEXT>
Document 2 - file: attachment1.htm

</DOCUMENT>
</SEC-DOCUMENT>