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Stockholders' Equity and Stock-Based Compensation - Stock-based Compensation Expense (Details) (USD $)
In Thousands, unless otherwise specified
3 Months Ended
Mar. 28, 2015
Mar. 29, 2014
Employee Service Share-based Compensation, Allocation of Recognized Period Costs [Line Items]    
Total stock-based compensation expense related to employee stock options and employee stock purchases $ 1,571us-gaap_AllocatedShareBasedCompensationExpense $ 1,634us-gaap_AllocatedShareBasedCompensationExpense
Cost of products [Member]    
Employee Service Share-based Compensation, Allocation of Recognized Period Costs [Line Items]    
Total stock-based compensation expense related to employee stock options and employee stock purchases 73us-gaap_AllocatedShareBasedCompensationExpense
/ us-gaap_IncomeStatementLocationAxis
= nano_CostOfProductsMember
61us-gaap_AllocatedShareBasedCompensationExpense
/ us-gaap_IncomeStatementLocationAxis
= nano_CostOfProductsMember
Cost of service [Member]    
Employee Service Share-based Compensation, Allocation of Recognized Period Costs [Line Items]    
Total stock-based compensation expense related to employee stock options and employee stock purchases 46us-gaap_AllocatedShareBasedCompensationExpense
/ us-gaap_IncomeStatementLocationAxis
= nano_CostOfServiceMember
84us-gaap_AllocatedShareBasedCompensationExpense
/ us-gaap_IncomeStatementLocationAxis
= nano_CostOfServiceMember
Research and development [Member]    
Employee Service Share-based Compensation, Allocation of Recognized Period Costs [Line Items]    
Total stock-based compensation expense related to employee stock options and employee stock purchases 280us-gaap_AllocatedShareBasedCompensationExpense
/ us-gaap_IncomeStatementLocationAxis
= us-gaap_ResearchAndDevelopmentExpenseMember
340us-gaap_AllocatedShareBasedCompensationExpense
/ us-gaap_IncomeStatementLocationAxis
= us-gaap_ResearchAndDevelopmentExpenseMember
Selling [Member]    
Employee Service Share-based Compensation, Allocation of Recognized Period Costs [Line Items]    
Total stock-based compensation expense related to employee stock options and employee stock purchases 500us-gaap_AllocatedShareBasedCompensationExpense
/ us-gaap_IncomeStatementLocationAxis
= us-gaap_SellingAndMarketingExpenseMember
427us-gaap_AllocatedShareBasedCompensationExpense
/ us-gaap_IncomeStatementLocationAxis
= us-gaap_SellingAndMarketingExpenseMember
General and administrative [Member]    
Employee Service Share-based Compensation, Allocation of Recognized Period Costs [Line Items]    
Total stock-based compensation expense related to employee stock options and employee stock purchases $ 672us-gaap_AllocatedShareBasedCompensationExpense
/ us-gaap_IncomeStatementLocationAxis
= us-gaap_GeneralAndAdministrativeExpenseMember
$ 722us-gaap_AllocatedShareBasedCompensationExpense
/ us-gaap_IncomeStatementLocationAxis
= us-gaap_GeneralAndAdministrativeExpenseMember