XML 39 R40.htm IDEA: XBRL DOCUMENT v2.4.1.9
Financial Statement Components - Selected Financial Statement Components (Details) (USD $)
 3 Months Ended
Mar. 28, 2015
Mar. 29, 2014
Dec. 27, 2014
Inventories:      
Raw materials and sub-assemblies $ 20,455,000us-gaap_InventoryRawMaterialsNetOfReserves   $ 19,463,000us-gaap_InventoryRawMaterialsNetOfReserves
Work in process 11,523,000us-gaap_InventoryWorkInProcessNetOfReserves   7,723,000us-gaap_InventoryWorkInProcessNetOfReserves
Finished goods 5,509,000us-gaap_InventoryFinishedGoodsNetOfReserves   7,919,000us-gaap_InventoryFinishedGoodsNetOfReserves
Inventories 37,487,000us-gaap_InventoryNet   35,105,000us-gaap_InventoryNet
Inventories-delivered systems 749,000nano_InventoriesDeliveredSystems   1,912,000nano_InventoriesDeliveredSystems
Total inventories 38,236,000nano_Inventory   37,017,000nano_Inventory
Property, Plant and Equipment [Line Items]      
Total property, plant and equipment, gross 78,604,000us-gaap_PropertyPlantAndEquipmentGross   78,348,000us-gaap_PropertyPlantAndEquipmentGross
Accumulated depreciation and amortization (30,804,000)us-gaap_AccumulatedDepreciationDepletionAndAmortizationPropertyPlantAndEquipment   (28,715,000)us-gaap_AccumulatedDepreciationDepletionAndAmortizationPropertyPlantAndEquipment
Total property, plant and equipment, net 47,800,000us-gaap_PropertyPlantAndEquipmentNet   49,633,000us-gaap_PropertyPlantAndEquipmentNet
Depreciation and amortization expense 1,700,000us-gaap_Depreciation 1,600,000us-gaap_Depreciation  
Accrued warranty 3,440,000us-gaap_ProductWarrantyAccrualClassifiedCurrent   2,953,000us-gaap_ProductWarrantyAccrualClassifiedCurrent
Accrued restructuring 606,000us-gaap_RestructuringReserveCurrent   997,000us-gaap_RestructuringReserveCurrent
Accrued professional services 875,000us-gaap_AccruedProfessionalFeesCurrent   778,000us-gaap_AccruedProfessionalFeesCurrent
Fair value of current portion of contingent payments to Zygo Corporation related to acquisition 1,128,000us-gaap_BusinessCombinationContingentConsiderationLiability   1,385,000us-gaap_BusinessCombinationContingentConsiderationLiability
Other 2,061,000us-gaap_OtherAccruedLiabilitiesCurrent   2,152,000us-gaap_OtherAccruedLiabilitiesCurrent
Total other current liabilities 8,110,000us-gaap_OtherLiabilitiesCurrent   8,265,000us-gaap_OtherLiabilitiesCurrent
Land [Member]      
Property, Plant and Equipment [Line Items]      
Total property, plant and equipment, gross 15,572,000us-gaap_PropertyPlantAndEquipmentGross
/ us-gaap_PropertyPlantAndEquipmentByTypeAxis
= us-gaap_LandMember		   15,572,000us-gaap_PropertyPlantAndEquipmentGross
/ us-gaap_PropertyPlantAndEquipmentByTypeAxis
= us-gaap_LandMember
Building and improvements [Member]      
Property, Plant and Equipment [Line Items]      
Total property, plant and equipment, gross 19,679,000us-gaap_PropertyPlantAndEquipmentGross
/ us-gaap_PropertyPlantAndEquipmentByTypeAxis
= us-gaap_BuildingAndBuildingImprovementsMember		   19,641,000us-gaap_PropertyPlantAndEquipmentGross
/ us-gaap_PropertyPlantAndEquipmentByTypeAxis
= us-gaap_BuildingAndBuildingImprovementsMember
Machinery and equipment [Member]      
Property, Plant and Equipment [Line Items]      
Total property, plant and equipment, gross 30,400,000us-gaap_PropertyPlantAndEquipmentGross
/ us-gaap_PropertyPlantAndEquipmentByTypeAxis
= us-gaap_MachineryAndEquipmentMember		   29,456,000us-gaap_PropertyPlantAndEquipmentGross
/ us-gaap_PropertyPlantAndEquipmentByTypeAxis
= us-gaap_MachineryAndEquipmentMember
Furniture and fixtures [Member]      
Property, Plant and Equipment [Line Items]      
Total property, plant and equipment, gross 2,241,000us-gaap_PropertyPlantAndEquipmentGross
/ us-gaap_PropertyPlantAndEquipmentByTypeAxis
= us-gaap_FurnitureAndFixturesMember		   2,225,000us-gaap_PropertyPlantAndEquipmentGross
/ us-gaap_PropertyPlantAndEquipmentByTypeAxis
= us-gaap_FurnitureAndFixturesMember
Software [Member]      
Property, Plant and Equipment [Line Items]      
Total property, plant and equipment, gross 7,942,000us-gaap_PropertyPlantAndEquipmentGross
/ us-gaap_PropertyPlantAndEquipmentByTypeAxis
= us-gaap_SoftwareAndSoftwareDevelopmentCostsMember		   7,942,000us-gaap_PropertyPlantAndEquipmentGross
/ us-gaap_PropertyPlantAndEquipmentByTypeAxis
= us-gaap_SoftwareAndSoftwareDevelopmentCostsMember
Capital in progress [Member]      
Property, Plant and Equipment [Line Items]      
Total property, plant and equipment, gross $ 2,770,000us-gaap_PropertyPlantAndEquipmentGross
/ us-gaap_PropertyPlantAndEquipmentByTypeAxis
= us-gaap_ConstructionInProgressMember		   $ 3,512,000us-gaap_PropertyPlantAndEquipmentGross
/ us-gaap_PropertyPlantAndEquipmentByTypeAxis
= us-gaap_ConstructionInProgressMember