<SEC-DOCUMENT>0000704532-15-000010-index.html : 20150324
<SEC-HEADER>0000704532-15-000010.hdr.sgml : 20150324
<ACCEPTANCE-DATETIME>20150324172316
ACCESSION NUMBER:		0000704532-15-000010
CONFORMED SUBMISSION TYPE:	8-K
PUBLIC DOCUMENT COUNT:		2
CONFORMED PERIOD OF REPORT:	20150318
ITEM INFORMATION:		Departure of Directors or Certain Officers; Election of Directors; Appointment of Certain Officers: Compensatory Arrangements of Certain Officers
ITEM INFORMATION:		Financial Statements and Exhibits
FILED AS OF DATE:		20150324
DATE AS OF CHANGE:		20150324

FILER:

	COMPANY DATA:	
		COMPANY CONFORMED NAME:			NANOMETRICS INC
		CENTRAL INDEX KEY:			0000704532
		STANDARD INDUSTRIAL CLASSIFICATION:	MEASURING & CONTROLLING DEVICES, NEC [3829]
		IRS NUMBER:				942276314
		STATE OF INCORPORATION:			DE
		FISCAL YEAR END:			1227

	FILING VALUES:
		FORM TYPE:		8-K
		SEC ACT:		1934 Act
		SEC FILE NUMBER:	000-13470
		FILM NUMBER:		15722616

	BUSINESS ADDRESS:	
		STREET 1:		1550 BUCKEYE DRIVE
		CITY:			MILPITAS
		STATE:			CA
		ZIP:			95035
		BUSINESS PHONE:		408-435-9600

	MAIL ADDRESS:	
		STREET 1:		1550 BUCKEYE DRIVE
		CITY:			MILPITAS
		STATE:			CA
		ZIP:			95035
</SEC-HEADER>
<DOCUMENT>
<TYPE>8-K
<SEQUENCE>1
<FILENAME>a8kexeccomp0318.htm
<DESCRIPTION>8-K
<TEXT>
Document 1 - file: a8kexeccomp0318.htm

</DOCUMENT>
<DOCUMENT>
<TYPE>EX-99.1
<SEQUENCE>2
<FILENAME>formofperformance-basedres.htm
<DESCRIPTION>EXHIBIT 99.1
<TEXT>
Document 2 - file: formofperformance-basedres.htm

</DOCUMENT>
</SEC-DOCUMENT>