Consolidated Statements of Cash Flows (USD $) In Thousands, unless otherwise specified	12 Months Ended
Dec. 27, 2014	Dec. 28, 2013	Dec. 29, 2012
Cash flows from operating activities:
Net income (loss)	$ (31,118)us-gaap_NetIncomeLoss	$ (14,146)us-gaap_NetIncomeLoss	$ 4,465us-gaap_NetIncomeLoss
Reconciliation of net income (loss) to net cash provided by (used in) operating activities:
Depreciation and amortization	9,767	8,787	8,137
Stock-based compensation	6,752us-gaap_ShareBasedCompensation	7,674us-gaap_ShareBasedCompensation	5,890us-gaap_ShareBasedCompensation
Excess tax benefit from equity awards	0	53	(910)
Loss on disposal of fixed assets	249us-gaap_GainLossOnDispositionOfAssets	177us-gaap_GainLossOnDispositionOfAssets	303us-gaap_GainLossOnDispositionOfAssets
Inventory write-down	2,897us-gaap_InventoryWriteDown	7,579us-gaap_InventoryWriteDown	3,519us-gaap_InventoryWriteDown
Deferred income taxes	17,915	(6,889)	2,752
Changes in fair value of contingent payments to Zygo Corporation	201	1,325	129
Changes in assets and liabilities:
Accounts receivable	3,861	(10,376)	7,733
Inventories	(7,173)us-gaap_IncreaseDecreaseInInventories	(7,024)us-gaap_IncreaseDecreaseInInventories	1,383us-gaap_IncreaseDecreaseInInventories
Inventories-delivered systems	4,988	(4,627)	(758)
Prepaid expenses and other	2,303	(1,855)	1,114
Accounts payable, accrued and other liabilities	1,790	4,840	(12,567)
Deferred revenue	(12,855)	12,717	2,472
Income taxes payable	(212)	(666)	346
Net cash provided by (used in) operating activities	(635)	(2,431)	24,008
Cash flows from investing activities:
Escrow payment received related to Nanda acquisition	0	0	508
Sales of marketable securities	0	0	3,000
Maturities of marketable securities	38,839	47,089	8,336
Purchases of marketable securities	(41,100)	(49,182)	(58,647)
Purchases of property, plant and equipment	(5,792)	(5,689)	(4,990)
Net cash used in investing activities	(8,053)	(7,782)	(51,793)
Cash flows from financing activities:
Payments to Zygo Corporation related to acquisition	(587)	(1,004)	(300)
Repayments of debt obligations	0us-gaap_RepaymentsOfLongTermDebt	(5,224)us-gaap_RepaymentsOfLongTermDebt	(2,210)us-gaap_RepaymentsOfLongTermDebt
Proceeds from sale of shares under employee stock option plans and purchase plan	5,958	4,967	3,913
Excess tax benefit from equity awards	0	(53)	910
Taxes paid on net issuance of stock awards	(702)	(1,181)	(618)
Repurchases of common stock	(5,344)	(5,000)	(8,504)
Net cash used in financing activities	(675)	(7,495)	(6,809)
Effect of exchange rate changes on cash and cash equivalents	(726)	(442)	(190)
Net decrease in cash and cash equivalents	(10,089)	(18,150)	(34,784)
Cash and cash equivalents, beginning of period	44,765	62,915	97,699
Cash and cash equivalents, end of period	34,676	44,765	62,915
Supplemental disclosure of cash flow information:
Cash paid for interest	0us-gaap_InterestPaid	232us-gaap_InterestPaid	522us-gaap_InterestPaid
Cash paid for income taxes, net	861us-gaap_IncomeTaxesPaid	313us-gaap_IncomeTaxesPaid	5,113us-gaap_IncomeTaxesPaid
Supplemental disclosure of non-cash investing activities:
Transfer of inventory to property, plant and equipment, net	$ 3,275	$ 3,145	$ 0

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Amount of cash outflow to satisfy an employee's income tax withholding obligation as part of a net-share settlement of a share-based award.

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Cash outflow for purchase of trading, available-for-sale securities and held-to-maturity securities.

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The total cash inflow associated with the amount received from holders to acquire the entity's shares under incentive and share awards, including stock option exercises. This item inherently excludes any excess tax benefit, which the entity may have realized and reported separately.

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The cash inflow associated with maturities (principal being due), prepayments and calls (requests of early payments) on securities not classified as either held-to-maturity securities or trading securities which are classified as available-for-sale securities.

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The cash inflow associated with the sale of debt securities classified as available-for-sale securities.

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The cash outflow for debt initially having maturity due after one year or beyond the normal operating cycle, if longer.

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