Intellectual property indemnification obligations.

No definition available.

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- Definition

Long Term Purchase Commitment, Estimated Future Amount

+ References

No definition available.

+ Details

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Data Type:	xbrli:monetaryItemType
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- Definition

Amount of liabilities assumed at the acquisition date.

+ References

Reference 1: http://www.xbrl.org/2003/role/presentationRef

-Publisher FASB

-Name Accounting Standards Codification

-Topic 805

-SubTopic 20

-Section 50

-Paragraph 1

-Subparagraph (c)

-URI http://asc.fasb.org/extlink&oid=39739317&loc=d3e4845-128472

+ Details

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Balance Type:	credit
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- Definition

Amount of rent expense incurred for leased assets, including but not limited to, furniture and equipment, that is not directly or indirectly associated with the manufacture, sale or creation of a product or product line.

+ References

No definition available.

+ Details

Name:	us-gaap_LeaseAndRentalExpense
Namespace Prefix:	us-gaap_
Data Type:	xbrli:monetaryItemType
Balance Type:	debit
Period Type:	duration

- Definition

Amount of litigation expense, including but not limited to legal, forensic, accounting, and investigative fees.

+ References

No definition available.

+ Details

Name:	us-gaap_LitigationSettlementExpense
Namespace Prefix:	us-gaap_
Data Type:	xbrli:monetaryItemType
Balance Type:	debit
Period Type:	duration

- Definition

The minimum amount the entity agreed to spend under the long-term purchase commitment.

+ References

No definition available.

+ Details

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Namespace Prefix:	us-gaap_
Data Type:	xbrli:monetaryItemType
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- Details

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- Definition

The amount of cash paid for the settlement of litigation or for other legal issues during the period.

+ References

Reference 1: http://www.xbrl.org/2003/role/presentationRef

-Publisher FASB

-Name Accounting Standards Codification

-Topic 230

-SubTopic 10

-Section 45

-Paragraph 25

-Subparagraph (g)

-URI http://asc.fasb.org/extlink&oid=31042434&loc=d3e3536-108585

+ Details

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Data Type:	xbrli:monetaryItemType
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- Details

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- Details

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Commitments and Contingencies - Textual (Details) (USD $)	0 Months Ended	12 Months Ended
	Jan. 13, 2012	Dec. 27, 2014	Dec. 28, 2013	Dec. 29, 2012	Dec. 31, 2011
Long-term Purchase Commitment [Line Items]
Liabilities recorded for obligations		$ 0	$ 0
One time payment to KLA	2,500,000us-gaap_PaymentsForLegalSettlements
Legal settlement in operating expense					2,500,000us-gaap_LitigationSettlementExpense
Rent expense		2,100,000us-gaap_LeaseAndRentalExpense	2,000,000us-gaap_LeaseAndRentalExpense	2,200,000us-gaap_LeaseAndRentalExpense
Inventories [Member]
Long-term Purchase Commitment [Line Items]
Purchase commitment		29,500,000
Inventories [Member] \| Zygo Corporation [Member]
Long-term Purchase Commitment [Line Items]
Purchase commitment, estimated future amount		2,900,000
Fair Value, Measurements, Recurring [Member] \| Zygo Corporation [Member]
Long-term Purchase Commitment [Line Items]
Liabilities resulting from the acquisition of certain assets from acquisitions, measured at fair value		$ 2,400,000	$ 2,800,000