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Financial Statement Components - Selected Balance Sheet Components (Details) (USD $)
 12 Months Ended
Dec. 27, 2014
Dec. 28, 2013
Dec. 29, 2012
Inventories:      
Raw materials and sub-assemblies $ 19,463,000us-gaap_InventoryRawMaterialsNetOfReserves $ 19,655,000us-gaap_InventoryRawMaterialsNetOfReserves  
Work in process 7,723,000us-gaap_InventoryWorkInProcessNetOfReserves 7,597,000us-gaap_InventoryWorkInProcessNetOfReserves  
Finished goods 7,919,000us-gaap_InventoryFinishedGoodsNetOfReserves 7,268,000us-gaap_InventoryFinishedGoodsNetOfReserves  
Inventories 35,105,000us-gaap_InventoryNet 34,520,000us-gaap_InventoryNet  
Inventories-delivered systems 1,912,000nano_InventoriesDeliveredSystems 6,901,000nano_InventoriesDeliveredSystems  
Total inventories 37,017,000nano_Inventory 41,421,000nano_Inventory  
Property, Plant and Equipment [Line Items]      
Total property, plant and equipment, gross 78,348,000us-gaap_PropertyPlantAndEquipmentGross 72,784,000us-gaap_PropertyPlantAndEquipmentGross  
Accumulated depreciation and amortization (28,715,000)us-gaap_AccumulatedDepreciationDepletionAndAmortizationPropertyPlantAndEquipment (25,345,000)us-gaap_AccumulatedDepreciationDepletionAndAmortizationPropertyPlantAndEquipment  
Total property, plant and equipment, net 49,633,000us-gaap_PropertyPlantAndEquipmentNet 47,439,000us-gaap_PropertyPlantAndEquipmentNet  
Depreciation and amortization expense 6,600,000us-gaap_Depreciation 5,400,000us-gaap_Depreciation 4,800,000us-gaap_Depreciation
Accrued warranty 2,953,000us-gaap_ProductWarrantyAccrualClassifiedCurrent 3,426,000us-gaap_ProductWarrantyAccrualClassifiedCurrent  
Accrued restructuring 997,000us-gaap_RestructuringReserveCurrent 0us-gaap_RestructuringReserveCurrent  
Accrued professional services 778,000us-gaap_AccruedProfessionalFeesCurrent 545,000us-gaap_AccruedProfessionalFeesCurrent  
Fair value of current portion of contingent payments to Zygo Corporation related to acquisition 1,385,000us-gaap_BusinessCombinationContingentConsiderationLiability 1,344,000us-gaap_BusinessCombinationContingentConsiderationLiability  
Other 2,152,000us-gaap_OtherAccruedLiabilitiesCurrent 2,678,000us-gaap_OtherAccruedLiabilitiesCurrent  
Total other current liabilities 8,265,000us-gaap_OtherLiabilitiesCurrent 7,993,000us-gaap_OtherLiabilitiesCurrent  
Land [Member]      
Property, Plant and Equipment [Line Items]      
Total property, plant and equipment, gross 15,572,000us-gaap_PropertyPlantAndEquipmentGross
/ us-gaap_PropertyPlantAndEquipmentByTypeAxis
= us-gaap_LandMember		 15,569,000us-gaap_PropertyPlantAndEquipmentGross
/ us-gaap_PropertyPlantAndEquipmentByTypeAxis
= us-gaap_LandMember		  
Building and improvements [Member]      
Property, Plant and Equipment [Line Items]      
Total property, plant and equipment, gross 19,641,000us-gaap_PropertyPlantAndEquipmentGross
/ us-gaap_PropertyPlantAndEquipmentByTypeAxis
= us-gaap_BuildingAndBuildingImprovementsMember		 19,403,000us-gaap_PropertyPlantAndEquipmentGross
/ us-gaap_PropertyPlantAndEquipmentByTypeAxis
= us-gaap_BuildingAndBuildingImprovementsMember		  
Machinery and equipment [Member]      
Property, Plant and Equipment [Line Items]      
Total property, plant and equipment, gross 29,456,000us-gaap_PropertyPlantAndEquipmentGross
/ us-gaap_PropertyPlantAndEquipmentByTypeAxis
= us-gaap_MachineryAndEquipmentMember		 27,820,000us-gaap_PropertyPlantAndEquipmentGross
/ us-gaap_PropertyPlantAndEquipmentByTypeAxis
= us-gaap_MachineryAndEquipmentMember		  
Furniture and fixtures [Member]      
Property, Plant and Equipment [Line Items]      
Total property, plant and equipment, gross 2,225,000us-gaap_PropertyPlantAndEquipmentGross
/ us-gaap_PropertyPlantAndEquipmentByTypeAxis
= us-gaap_FurnitureAndFixturesMember		 2,308,000us-gaap_PropertyPlantAndEquipmentGross
/ us-gaap_PropertyPlantAndEquipmentByTypeAxis
= us-gaap_FurnitureAndFixturesMember		  
Software [Member]      
Property, Plant and Equipment [Line Items]      
Total property, plant and equipment, gross 7,942,000us-gaap_PropertyPlantAndEquipmentGross
/ us-gaap_PropertyPlantAndEquipmentByTypeAxis
= us-gaap_SoftwareAndSoftwareDevelopmentCostsMember		 1,851,000us-gaap_PropertyPlantAndEquipmentGross
/ us-gaap_PropertyPlantAndEquipmentByTypeAxis
= us-gaap_SoftwareAndSoftwareDevelopmentCostsMember		  
Capital in progress [Member]      
Property, Plant and Equipment [Line Items]      
Total property, plant and equipment, gross $ 3,512,000us-gaap_PropertyPlantAndEquipmentGross
/ us-gaap_PropertyPlantAndEquipmentByTypeAxis
= us-gaap_ConstructionInProgressMember		 $ 5,833,000us-gaap_PropertyPlantAndEquipmentGross
/ us-gaap_PropertyPlantAndEquipmentByTypeAxis
= us-gaap_ConstructionInProgressMember