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Fair Value Measurements and Disclosures - Textual (Details) (Fair Value, Measurements, Recurring [Member], Zygo Corporation [Member], USD $)
In Millions, unless otherwise specified
Dec. 27, 2014
Dec. 28, 2013
Fair Value, Measurements, Recurring [Member] | Zygo Corporation [Member]
   
Fair Value Measurements and Disclosures (Textual) [Abstract]    
Liabilities resulting from the acquisition of certain assets from acquisitions, measured at fair value $ 2.4us-gaap_BusinessCombinationRecognizedIdentifiableAssetsAcquiredAndLiabilitiesAssumedLiabilities
/ us-gaap_BusinessAcquisitionAxis
= nano_ZygoCorporationMember
/ us-gaap_FairValueByMeasurementFrequencyAxis
= us-gaap_FairValueMeasurementsRecurringMember
$ 2.8us-gaap_BusinessCombinationRecognizedIdentifiableAssetsAcquiredAndLiabilitiesAssumedLiabilities
/ us-gaap_BusinessAcquisitionAxis
= nano_ZygoCorporationMember
/ us-gaap_FairValueByMeasurementFrequencyAxis
= us-gaap_FairValueMeasurementsRecurringMember
Current liability at fair value 1.4us-gaap_BusinessCombinationRecognizedIdentifiableAssetsAcquiredAndLiabilitiesAssumedCurrentLiabilities
/ us-gaap_BusinessAcquisitionAxis
= nano_ZygoCorporationMember
/ us-gaap_FairValueByMeasurementFrequencyAxis
= us-gaap_FairValueMeasurementsRecurringMember
1.3us-gaap_BusinessCombinationRecognizedIdentifiableAssetsAcquiredAndLiabilitiesAssumedCurrentLiabilities
/ us-gaap_BusinessAcquisitionAxis
= nano_ZygoCorporationMember
/ us-gaap_FairValueByMeasurementFrequencyAxis
= us-gaap_FairValueMeasurementsRecurringMember
Long-term liability at fair value $ 1.0us-gaap_BusinessCombinationRecognizedIdentifiableAssetsAcquiredAndLiabilitiesAssumedNoncurrentLiabilities
/ us-gaap_BusinessAcquisitionAxis
= nano_ZygoCorporationMember
/ us-gaap_FairValueByMeasurementFrequencyAxis
= us-gaap_FairValueMeasurementsRecurringMember
$ 1.5us-gaap_BusinessCombinationRecognizedIdentifiableAssetsAcquiredAndLiabilitiesAssumedNoncurrentLiabilities
/ us-gaap_BusinessAcquisitionAxis
= nano_ZygoCorporationMember
/ us-gaap_FairValueByMeasurementFrequencyAxis
= us-gaap_FairValueMeasurementsRecurringMember