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Fair Value Measurements and Disclosures - Unobservable Input Reconciliation (Details) (Level 3 [Member], USD $)
In Thousands, unless otherwise specified
12 Months Ended
Dec. 27, 2014
Dec. 28, 2013
Fair value measurement on recurring basis, unobservable input reconciliation [Roll Forward]    
Fair value, beginning balance $ 2,783us-gaap_FairValueMeasurementWithUnobservableInputsReconciliationsRecurringBasisLiabilityValue $ 2,462us-gaap_FairValueMeasurementWithUnobservableInputsReconciliationsRecurringBasisLiabilityValue
Change in fair value included in earnings 201us-gaap_FairValueMeasurementWithUnobservableInputsReconciliationRecurringBasisLiabilityGainLossIncludedInEarnings 1,325us-gaap_FairValueMeasurementWithUnobservableInputsReconciliationRecurringBasisLiabilityGainLossIncludedInEarnings
Fair Value, ending balance 2,397us-gaap_FairValueMeasurementWithUnobservableInputsReconciliationsRecurringBasisLiabilityValue 2,783us-gaap_FairValueMeasurementWithUnobservableInputsReconciliationsRecurringBasisLiabilityValue
Zygo Corporation [Member]    
Fair value measurement on recurring basis, unobservable input reconciliation [Roll Forward]    
Payments made to Zygo Corporation $ (587)us-gaap_FairValueMeasurementWithUnobservableInputsReconciliationRecurringBasisLiabilitySettlements
/ us-gaap_BusinessAcquisitionAxis
= nano_ZygoCorporationMember
/ us-gaap_FairValueByFairValueHierarchyLevelAxis
= us-gaap_FairValueInputsLevel3Member
$ (1,004)us-gaap_FairValueMeasurementWithUnobservableInputsReconciliationRecurringBasisLiabilitySettlements
/ us-gaap_BusinessAcquisitionAxis
= nano_ZygoCorporationMember
/ us-gaap_FairValueByFairValueHierarchyLevelAxis
= us-gaap_FairValueInputsLevel3Member