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Stockholders' Equity and Stock-Based Compensation (Tables)
 12 Months Ended
Dec. 27, 2014
Share-based Compensation Arrangement by Share-based Payment Award [Line Items]  
Share repurchases
Shares repurchased and retired for the indicated periods of the applicable repurchase programs with the associated cost of repurchase and amount available for repurchase at the end of the respective periods are as follows (in thousands, except number of shares and weighted average price per share):

 
Fiscal Year
2014
 
Fiscal Year
2013
 
Fiscal Year
2012
Number of shares of common stock repurchased
362,633

 
332,771

 
587,766

Weighted average price per share
$
14.74

 
$
15.03

 
$
14.47

Total cost of repurchase
$
5,344

 
$
5,000

 
$
8,504

Amount available for repurchase at end of period
$
6,118

 
$
11,462

 
$
16,462
Option plans
The Nanometrics option plans are as follows:
 
Plan Name
Participants
Shares
Authorized
2005 Equity Incentive Plan
Employees, consultants and directors
7,292,594

2002 Non-statutory Stock Option Plan
Employees and consultants
1,200,000

2000 Employee Stock Option Plan
Employees and consultants
2,450,000

2000 Director Stock Option Plan
Non-employee directors
250,000

Accent Optical Technologies, Inc. Stock Incentive Plan
Employees and consultants
205,003
Stock options assumptions
The weighted-average fair value calculations are based on the following average assumptions:
 
Fiscal Year
2014
 
Fiscal Year
2013
 
Fiscal Year
2012
Stock Options:
 
 
 
 
 
Expected life
4.6 years
 
4.5 years
 
4.5 years
Volatility
54.9%
 
69.9%
 
77.3%
Risk free interest rate
1.54%
 
1.05%
 
0.80%
Dividends
—
 
—
 
—
Employee Stock Purchase Plan:
 
 
 
 
 
Expected life
0.5 years
 
0.5 years
 
0.5 years
Volatility
31.2%
 
26.8%
 
45.5%
Risk free interest rate
0.54%
 
0.11%
 
0.12%
Dividends
—
 
—
 
—
Ranges of outstanding and exercisable options
The following table summarizes ranges of outstanding and exercisable options as of December 27, 2014.
Exercise Prices
Options Outstanding
 
Options Exercisable
Number
Outstanding
 
Weighted 
Average
Remaining
Contractual Life
(Years)
 
Weighted
Average
Exercise
Price
 
Number
Exercisable
 
Weighted
Average
Exercise
Price
$0.93-$7.50
156,237

 
1.25
 
$
3.67

 
156,237

 
$
3.67

$8.81-$11.37
237,214

 
2.57
 
$
10.79

 
237,214

 
$
10.79

$11.63-$14.80
146,135

 
3.89
 
$
13.68

 
99,128

 
$
13.54

$14.88-$15.74
143,682

 
4.80
 
$
15.45

 
75,875

 
$
15.47

$15.85-$15.98
170,943

 
2.95
 
$
15.92

 
124,931

 
$
15.94

$16.00-$16.59
45,567

 
5.77
 
$
16.40

 
9,214

 
$
16.32

$16.70-$16.70
223,432

 
3.22
 
$
16.70

 
206,048

 
$
16.70

$16.89-$18.27
155,483

 
4.46
 
$
17.54

 
83,466

 
$
17.51

$18.51-$19.77
99,800

 
4.56
 
$
18.94

 
55,686

 
$
19.06

$19.84-$19.84
4,500

 
3.14
 
$
19.84

 
4,311

 
$
19.84

$0.93-$19.84
1,382,993

 
3.41
 
$
13.92

 
1,052,110

 
$
13.15
Stock-based compensation expense for all share-based payment awards
Stock-based compensation expense for all share-based payment awards made to the Company’s employees and directors pursuant to the employee stock option and employee stock purchase plans by function were as follows (in thousands): 
 
Fiscal Year
2014
 
Fiscal Year
2013
 
Fiscal Year
2012
Cost of products
$
268

 
$
207

 
$
164

Cost of service
287

 
278

 
230

Research and development
1,245

 
1,478

 
1,220

Selling
1,642

 
1,894

 
1,791

General and administrative
3,243

 
2,919

 
2,485

Restructuring
67

 
898

 
—

Total stock-based compensation expense related to employee stock options and employee stock purchases
$
6,752

 
$
7,674

 
$
5,890
Stock Options and Restricted Stock Units [Member]  
Share-based Compensation Arrangement by Share-based Payment Award [Line Items]  
Stock option plans activity
A summary of activity under the Company’s stock option plans including options and RSUs during fiscal year 2014, 2013 and 2012 and shares available for grant as of the respective period end dates, is as follows:
 
Fiscal Year
2014
 
Fiscal Year
2013
 
Fiscal Year
2012
Shares available for grant at beginning of fiscal year
2,937,001

 
1,093,565

 
1,391,930

Increase in authorized shares
—

 
2,600,000

 
—

Options - granted
(74,300
)
 
(430,800
)
 
(281,085
)
Options - cancelled
191,061

 
150,459

 
139,376

Options - expired plan shares
(17,491
)
 
(53,607
)
 
(53,102
)
RSUs - granted
(805,120
)
 
(664,902
)
 
(103,554
)
RSUs - cancelled
167,404

 
133,418

 
—

RSUs - shares issued to satisfy tax withholding obligations
65,527

 
108,868

 
—

Shares available for grant at end of fiscal year
2,464,082

 
2,937,001

 
1,093,565
Stock Options [Member]  
Share-based Compensation Arrangement by Share-based Payment Award [Line Items]  
Stock option plans activity
A summary of activity of stock options in 2014 is as follows:
 
 
Number of
Shares
Outstanding
(Options)
 
Weighted
Average
Exercise
Price
 
Weighted
Average
Remaining
Contractual Term (Years)
 
Aggregate Intrinsic Value (in Thousands)
Options
 
 
 
 
 
 
 
Outstanding at December 28, 2013
1,909,039

 
$
13.22

 
4.02

 
$
10,341

Exercised
(409,285
)
 
10.45

 
—

 
—

Granted
74,300

 
17.56

 
—

 
—

Cancelled
(191,061
)
 
15.74

 
—

 
—

Outstanding at December 27, 2014
1,382,993

 
$
13.92

 
3.41

 
$
4,108

Exercisable at December 27, 2014
1,052,110

 
$
13.15

 
2.84

 
$
3,867
Restricted Stock Units (RSUs) [Member]  
Share-based Compensation Arrangement by Share-based Payment Award [Line Items]  
Stock option plans activity
A summary of activity for RSUs is as follows:
 
RSU
Number
of RSUs
 
Weighted
Average Fair
Value
Outstanding RSUs as of December 28, 2013
334,444

 
$
18.61

Granted
473,600

 
17.14

Released
(146,234
)
 
17.60

Cancelled
(98,473
)
 
17.12

Outstanding RSUs as of December 27, 2014
563,337

 
$
17.90