10-K

UNITED STATES

SECURITIES AND EXCHANGE COMMISSION

Washington, D.C. 20549

_____________________________________

FORM 10-K

(Mark One)

ý ANNUAL REPORT PURSUANT TO SECTION 13 OR 15(d) OF THE SECURITIES EXCHANGE ACT OF 1934

For the fiscal year ended December 27, 2014

OR

¨ TRANSITION REPORT PURSUANT TO SECTION 13 OR 15(d) OF THE SECURITIES EXCHANGE ACT OF 1934

For the transition period from to

Commission file number: 0-13470

_____________________________________

NANOMETRICS INCORPORATED

(Exact name of registrant as specified in its charter)

Delaware	94-2276314
(State or other jurisdiction of incorporation or organization)	(I.R.S. Employer Identification Number)
1550 Buckeye Drive Milpitas, California	95035
(Address of principal executive offices)	(Zip Code)

Registrant’s telephone number, including area code: (408) 545-6000

Securities registered pursuant to Section 12(b) of the Act:

Title of each class	Name of each exchange on which registered
Common Stock, $0.001 par value per share	The NASDAQ Stock Market LLC (NASDAQ Global Select Market)

Securities registered pursuant to Section 12(g) of the Act:

None

_____________________________________

Indicate by check mark if the Registrant is a well-known seasoned issuer as defined in Rule 405 of the Securities Act.    Yes  ¨    No  ý.

Indicate by check mark if the Registrant is not required to file reports pursuant to Section 13 or Section 15(d) of the Act.    Yes  ¨    No  ý.

Indicate by check mark whether the Registrant (1) has filed all reports required to be filed by Section 13 or 15(d) of the Securities Exchange Act of 1934 during the preceding 12 months (or for such shorter period that the Registrant was required to file such reports), and (2) has been subject to such filing requirements for the past 90 days.    Yes  ý    No  ¨.

Indicate by check mark whether the registrant has submitted electronically and posted on its corporate Web site, if any, every Interactive Data File required to be submitted and posted pursuant to Rule 405 of Regulation S-T during the preceding 12 months (or for such shorter period that the registrant was required to submit and post such files).    Yes  ý    No  ¨.

Indicate by check mark if disclosure of delinquent filers pursuant to Item 405 of Regulation S-K is not contained herein, and will not be contained, to the best of Registrant’s knowledge, in definitive proxy or information statements incorporated by reference in Part III of this Form 10-K or any amendment to this Form 10-K.  ¨

Indicate by check mark whether the Registrant is a large accelerated filer, an accelerated filer, a non-accelerated filer or a smaller reporting company. See the definitions of “large accelerated filer”, “accelerated filer”, and “smaller reporting company” in Rule 12b-2 of the Exchange Act. (Check one):

Large accelerated filer	¨	Accelerated filer	ý
Non-accelerated filer	¨	Smaller reporting company	¨

Indicate by check mark whether the Registrant is a shell company (as defined by Rule 12b-2 of the Act)    Yes  ¨    No  ý.

As of June 28, 2014, the last business day of the Registrant’s most recently completed second fiscal quarter, the aggregate market value of the common stock of Registrant held by non-affiliates, based upon the closing sales price for the Registrant’s common stock for such date, as quoted on the NASDAQ Global Select Market, was approximately $441.4 million. Shares of common stock held by each officer and director and by each person who owned 5% or more of the outstanding common stock have been excluded because such persons may be deemed to be “affiliates” as that term is defined under the rules and regulations of the Exchange Act. This determination of affiliate status is not necessarily a conclusive determination for any other purpose.

The number of shares of the Registrant’s common stock outstanding as of February 18, 2015 was 23,853,009.

DOCUMENTS INCORPORATED BY REFERENCE

_____________________________________

The Registrant has incorporated by reference into Part III of this Annual Report on Form 10-K portions of its Proxy Statement for its 2015 Annual Meeting of Stockholders to be filed pursuant to Regulation 14A. The Proxy Statement will be filed within 120 days of Registrant’s fiscal year ended December 27, 2014.

NANOMETRICS INCORPORATED

FORM 10-K

FOR THE FISCAL YEAR ENDED DECEMBER 27, 2014

TABLE OF CONTENTS

PART I			1
	ITEM 1.	BUSINESS	1
	ITEM 1A.	RISK FACTORS	8
	ITEM 1B.	UNRESOLVED STAFF COMMENTS	18
	ITEM 2.	PROPERTIES	19
	ITEM 3.	LEGAL PROCEEDINGS	19
	ITEM 4.	MINE SAFETY DISCLOSURES	19
PART II			20
	ITEM 5.	MARKET FOR REGISTRANT’S COMMON EQUITY, RELATED STOCKHOLDER MATTERS AND ISSUER PURCHASES OF EQUITY SECURITIES	20
	ITEM 6.	SELECTED FINANCIAL DATA	22
	ITEM 7.	MANAGEMENT’S DISCUSSION AND ANALYSIS OF FINANCIAL CONDITION AND RESULTS OF OPERATIONS	22
	ITEM 7A.	QUANTITATIVE AND QUALITATIVE DISCLOSURES ABOUT MARKET RISK	34
	ITEM 8.	FINANCIAL STATEMENTS AND SUPPLEMENTARY DATA	36
	ITEM 9.	CHANGES IN AND DISAGREEMENTS WITH ACCOUNTANTS ON ACCOUNTING AND FINANCIAL DISCLOSURE	70
	ITEM 9A.	CONTROLS AND PROCEDURES	70
	ITEM 9B.	OTHER INFORMATION	71
PART III			72
	ITEM 10.	DIRECTORS, EXECUTIVE OFFICERS AND CORPORATE GOVERNANCE	72
	ITEM 11.	EXECUTIVE COMPENSATION	72
	ITEM 12.	SECURITY OWNERSHIP OF CERTAIN BENEFICIAL OWNERS AND MANAGEMENT AND RELATED STOCKHOLDER MATTERS	73
	ITEM 13.	CERTAIN RELATIONSHIPS AND RELATED TRANSACTIONS, AND DIRECTOR INDEPENDENCE	73
	ITEM 14.	PRINCIPAL ACCOUNTING FEES AND SERVICES	73
PART IV			74
	ITEM 15.	EXHIBITS, FINANCIAL STATEMENT SCHEDULES	74
SIGNATURES			75

CAUTIONARY INFORMATION REGARDING FORWARD-LOOKING STATEMENTS

This Annual Report on Form 10-K for the year ended December 27, 2014, or “Form 10-K,” contains forward-looking statements concerning our business, operations, and financial performance and condition as well as our plans, objectives, and expectations for business operations and financial performance and condition. Any statements contained herein that are not of historical facts may be deemed to be forward-looking statements. You can identify these statements by words such as “anticipate,” “assume,” “believe,” “could,” “estimate,” “expect,” “intend,” “may,” “plan,” “should,” “will,” “would,” and other similar expressions that are predictions of or indicate future events and future trends. These forward-looking statements are based on current expectations, estimates, forecasts, and projections about our business and the industry in which we operate and management's beliefs and assumptions and are not guarantees of future performance or development and involve known and unknown risks, uncertainties, and other factors that are in some cases beyond our control. As a result, any or all of our forward-looking statements in this Form 10-K may turn out to be inaccurate. Factors that could materially affect our business operations and financial performance and condition include, but are not limited to, those risks and uncertainties described herein under “Item 1A - Risk Factors.” You are urged to consider these factors carefully in evaluating the forward-looking statements and are cautioned not to place undue reliance on the forward-looking statements. The forward-looking statements are based on information available to us as of the filing date of this Form 10-K. Unless required by law, we do not intend to publicly update or revise any forward-looking statements to reflect new information or future events or otherwise. You should, however, review the factors and risks we describe in the reports we will file from time to time with the Securities and Exchange Commission, or SEC, after the date of this Form 10-K.

PART I

ITEM 1. BUSINESS

Overview

Nanometrics Incorporated and its subsidiaries (“Nanometrics”, the “Company”, or “we”) is a leading provider of advanced, high-performance process control metrology and inspection systems used primarily in the fabrication of integrated circuits, high-brightness LEDs (“HB-LED”), discrete components and data storage devices. Our automated and integrated systems address numerous process control applications, including critical dimension and film thickness measurement, device topography, defect inspection, and analysis of various other film properties such as optical, electrical and material characteristics. Our process control solutions are deployed throughout the fabrication process, from front-end-of-line substrate manufacturing, to high-volume production of semiconductors and other devices, to advanced wafer-scale packaging applications. Our systems enable device manufacturers to improve yields, increase productivity and lower their manufacturing costs.

We were incorporated in California in 1975, and reincorporated in Delaware in 2006. We have been publicly traded since 1984 (NASDAQ: NANO). We have been a pioneer and innovator in the field of optical metrology and have an installed base of approximately 6,500 systems in over 150 production factories worldwide. Our major customers and original equipment manufacturer (“OEM”) partners include Samsung Electronics Co. Ltd., Intel Corporation, SK Hynix Semiconductor, Inc., Micron, Inc., Taiwan Semiconductor Manufacturing Company Limited, GLOBALFOUNDRIES and Toshiba Corporation.

Additional information about us is available on our website at http://www.nanometrics.com. The information that can be accessed through our website, however, is not part of this Annual Report. Our investor relations web page is located at http://www.nanometrics.com/investor.html. Our Annual Reports on Form 10-K, Quarterly Reports on Form 10-Q, Current Reports on Form 8-K and any amendments to those reports are available on our web page as soon as reasonably practicable after we electronically file or furnish such materials to the United States Securities and Exchange Commission (“SEC”). In addition, the reports and materials that we file with the SEC are available at the SEC's website (http://www.sec.gov) and at the SEC's Public Reference Room at 100 F Street, NE, Washington DC 20549. Interested parties may obtain information on the operation of the Public Reference Room by calling the SEC at 1-800-SEC-0330.

Industry Background

We participate in the sale, design, manufacture, marketing and support of process control systems for optical critical dimension metrology, thin film metrology, advanced 3-D packaging process control, and wafer defect inspection used for semiconductor manufacturing. Semiconductors are primarily packaged as integrated circuits within electronic devices, including consumer electronics, server and enterprise systems, mobile computing devices (including smart phones and tablets),

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data storage devices, embedded automotive and control systems, LEDs, and a multitude of other electronic products being proliferated worldwide. Integrated circuits are made up of semiconductor material layers integrating millions or billions of transistors and other electronic components, connected through a complex wiring scheme of small copper or aluminum wires, ultimately packaged into thin form factors to be mounted on circuit boards or other substrates. Our core focus is the measurement and control of the structure, composition, and geometry of the devices from the transistor layer through advanced wafer-scale packaging to improve device performance and manufacturing yields. Our end customers manufacture many types of integrated circuits for a multitude of applications, each having unique manufacturing challenges. This includes integrated circuits to enable information processing and management (logic integrated circuits), memory storage (NAND, 3D-NAND, NOR, and DRAM), analog devices (e.g., Wi-Fi and 4G radio integrated circuits, accelerometers and MEMS sensor devices), thin film head components for hard disk drives and alternative energy devices such as LEDs, power inverters and solar cells.

Demand for our products continues to be driven by our customers' desire for higher overall chip performance, and improvements in power efficiency, logic processing capability, data storage volume and manufacturing yield. To achieve these goals, our customers have increased their use of more complex materials and processing methods in their manufacturing flow. The majority of our chip customers manufacture devices in production runs defined by the smallest printed feature and the associated circuit manufacturing methods, known as a technology node, which are measured in nanometers ("nm"), or one-billionth of a meter. Current volume production is running at the 28nm-20nm nodes across foundry, logic, and memory, with customers migrating toward the 16nm/14nm node and below. In some cases our customers are implementing new materials and methods in high volume manufacturing, including materials and device architectures to reduce power consumption including high dielectric constant (or high-k) materials, FinFET or tri-gate transistors, stacked memory devices, and additional system on chip solutions. To shrink features, new methods including multiple patterning lithography have been deployed. The use of these new materials and methods requires additional process control and we believe has increased demand for our products. Next-generation devices with features smaller than 16nm are in early production, which in turn likely will require new advancements in metrology and inspection capabilities. DRAM memory makers have shifted to 2y node production with development for sub 20nm node devices currently underway (where x, y and z represent successively smaller geometries). Non-volatile memory makers of NAND and NOR devices have ramped 1x node devices into high volume manufacturing with work extending into early 1y node production and 1z node development as well as simultaneously developing stacked or 3D non-volatile memory structures. Current 3D NAND devices are built around a stack of 24-32 layer pairs, and are expected to migrate to 48-64 layer pairs in the next generation of devices. Foundry and logic manufacturers are ramping production of both 28nm and 22nm node devices and beginning pilot production of 16nm/14nm node devices and development of 1y devices. Thin film head components for hard disk drives are also being driven to smaller sizes to support next generation hard disk drives with ever increasing storage capacity requiring continued improvements in read and write head component scaling. We also enable clean energy device manufacturers, such as for LEDs and solar Photo-Voltaics ("PVs"), to achieve higher yields and lower manufacturing costs.

Our Business

We offer a diverse line of process control and inspection products and technologies to address the manufacturing requirements of the semiconductor (and other solid state device) manufacturing industry. Our metrology systems measure and characterize the physical dimensions, material composition, optical and electrical characteristics and other critical parameters of solid state devices, from initial wafer substrate manufacturing through final packaging. For the photolithographic process, thin-film metrology, critical-dimension systems provide control of device dimensions and layer alignment. Advanced packaging techniques require metrology systems to control wafer scale features for through-silicon-via (“TSV”), copper pillar and micro-bump technologies. Our materials characterization systems monitor the physical, optical, and electrical characteristics of materials including those on compound semiconductors, discrete devices, LEDs, solar PVs and unpatterned silicon wafers. Our defect inspection systems locate large area and microscopic defects on patterned and unpatterned wafers throughout the semiconductor production flow.

We are continually working to strengthen our competitive position by developing new technologies and products in our market segment. We have expanded our product offerings to address growing applications within the semiconductor manufacturing and adjacent industries. In continuance of our goals, we have:

•Introduced new products, applications, and upgrades in every core product line and primary market served;

• Diversified our product line and served markets through acquisitions, such as: the 2006 acquisition of Accent Optical Technologies, Inc., a supplier of overlay and thin film metrology and process control systems; the 2008 acquisition of Tevet Process Control Technologies (“Tevet”), an integrated metrology supplier; the 2009

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acquisition of the UniFire™ product line from Zygo Corporation; and the 2011 acquisition of Nanda Technologies GmbH, a supplier of high sensitivity, high throughput defect inspection systems;

•Continued development of new measurement and inspection technologies for advanced fabrication processes; and

• Researched and developed innovative applications of existing technology to new market opportunities within the solar PV, HB-LED, discrete device, and data storage industries.

Nanometrics Products

We offer a diverse line of systems to address the broad range of process control requirements of the semiconductor manufacturing industry. In addition, we believe that our engineering expertise, strategic acquisitions, supplier alliances and short-cycle production strategies enable us to develop and offer advanced process control solutions that, in the future, should address industry advancement and trends.

Automated Systems

Our automated systems primarily consist of fully automated metrology systems that are employed in high-volume semiconductor production environments, as well as in research and development ("R&D") and pilot production. The Atlas^® II, Atlas II+, Atlas XP/Atlas XP⁺and Atlas-M represent our line of high-performance metrology systems providing optical critical dimension (“OCD”^®), thin film metrology and wafer stress for transistor and interconnect metrology applications. The OCD technology is supported by our NanoCD^® suite of solutions including our NanoDiffract^® software and NanoGen^TMscalable computing engine that enables visualization, modeling, and analysis of complex structures. The UniFire^TM system enables users to measure multiple parameters at any given process step in the advanced packaging process flow for critical dimension, overlay, and topography applications. Our SPARK^TMdefect inspection system, offers ultra-fast inspection of patterned and unpatterned semiconductor wafers.

Integrated Systems

Our integrated metrology (“IM”) systems are installed directly onto wafer processing equipment to provide near real-time measurements for improved process control and maximum throughput. Our IM systems are sold directly to end customers and through OEM channels. The IMPULSE^®system is our latest metrology platform for OCD, and thin film metrology, and has been successfully qualified on numerous OEM platforms. Our 90x0 system is qualified for OEM and direct sales supporting thin film and OCD applications. Our NanoCD suite of solutions is sold in conjunction with our IMPULSE^® and legacy 90x0 systems. Our Trajectory® system provides in-line measurement of layers in thin film thickness and composition in semiconductor applications.

System Platform

The Lynx^® platform enables cluster metrology factory automation for improved cost of ownership to our customers by combining our Atlas^® II+ and IMPULSE^®, UniFire metrology and SPARK inspectionsystems in configurations to provide high throughput, reduced footprint systems for leading 300mm wafer metrology applications including OCD and thin film process control.

Materials Characterization

Our materials characterization products include systems that are used to monitor the physical, optical, electrical and material characteristics of discrete electronic industry, HB-LED, solar PV, compound semiconductor, strained silicon and silicon-on-insulator (“SOI”) devices, including composition, crystal structure, layer thickness, dopant concentration, contamination and electron mobility.

Our Imperia™ is a photoluminescence (“PL”) full wafer imaging and mapping system designed for high-volume compound semiconductor metrology applications including power control and photonics applications adding significant inspection and substrate metrology capability to the established PL fleet. The RPMBlue™ is our latest PL mapping system designed specifically for the HB-LED market, and is complemented by the RPMBlue-FS, enabling a breadth of research and development configurability. We sell Fourier-Transform Infrared (“FTIR”) automated and manual systems in the QS2200/3300 and QS1200 respectively. The FTIR systems are spectrometers designed for non-destructive wafer analysis for various applications. The NanoSpec^®line, including the NanoSpec II, supports thin film measurement across all applications in both low volume production and research applications.

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Our process control systems can be categorized as follows:

System	Market	Applications
Automated Systems
Atlas II/Atlas II+/Atlas XP/Atlas XP+/Atlas-M	Semiconductor	Film Thickness, Film Stress, CD
SPARK	Semiconductor	Defect Inspection and Advanced Packaging Applications
UniFire	Semiconductor	Film Thickness, Overlay, CD, and Advanced Packaging Applications
Integrated Systems
IMPULSE	Semiconductor	Film Thickness, CD
9010 Series	Semiconductor	Film Thickness, CD
9000 Series	Semiconductor	Film Thickness
Trajectory	Semiconductor, Solar PV	Film Thickness, Composition
System Platform
Lynx	Semiconductor	Platform
OCD Analysis
NanoDiffract	Semiconductor	OCD
NanoGen	Semiconductor	OCD
Materials Characterization Systems
ECVPro	Compound Semiconductor, Solar PV, HB-LED	Electrical Properties
HL5500	Compound Semiconductor, Solar PV, HB-LED	Electrical Properties
QS1200	Substrate Semiconductor, Solar PV	Substrate Properties, Film Composition and Thickness
QS2200/3300	Substrate Semiconductor	Substrate Properties, Film Composition
NanoSpec® II	Semiconductor	Film Thickness (Tabletop)
RPMBlueTM	HB-LED	Epitaxial Layer Properties
Stratus	Semiconductor	Substrate Properties, Film Composition and Thickness (Tabletop)
Imperia	Compound  Semiconductor, Solar PV, HB-LED	Epitaxial Layer Properties, Defectivity, Bow/Wrap

See Note 16 of our consolidated financial statements in Item 8, "Financial Statements and Supplementary Data," for sales by product type.

Customers

We sell our metrology and inspection systems worldwide to semiconductor manufacturers and equipment suppliers, and producers of HB-LEDs, data storage devices, silicon wafers, solar PVs, and photomasks. The majority of our systems are sold to customers located in Asia and the United States.

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The following customers accounted for 10% or more of our total net revenues:

	2014	2013	2012
Samsung Electronics Co. Ltd.	27%	14%	28%
Intel Corporation	13%	30%	22%
SK Hynix	12%	18%	17%
Micron	10%	***	***

*** The customer accounted for less than 10% of total net revenues during the period.

Sales and Marketing

We believe that the capability for direct sales and support is beneficial for developing and maintaining close customer relationships and for rapidly responding to changing customer requirements. We provide local direct sales, service and application support through our worldwide offices located in the United States, South Korea, Japan, Taiwan, China, Singapore, Israel, the United Kingdom, France and Germany, and work with selected dealers and sales representatives in Asia and in the United States and other countries. Our employees include our technical applications team, which comprises technically experienced sales engineers who are knowledgeable in the use of metrology systems generally and the unique features and advantages of our specific products. Supported by our technical applications team, our sales and support teams work closely with our customers to offer cost-effective solutions to complex measurement and process problems.

Direct exports of our metrology systems to our foreign customers and shipments to our foreign subsidiaries international offices require general export licenses.

Net revenues from customers located in the United States and in foreign countries, as a percentage of total net revenues were as follows:

	2014	2013	2012
United States	22%	33%	25%
South Korea	25%	24%	44%
China	17%	9%	3%
Taiwan	12%	7%	9%
All other countries	24%	27%	19%

See Note 16 of our consolidated financial statements in Item 8, "Financial Statements and Supplementary Data," for segment and geographical financial information.

Customer Service and Support

We believe that customer service and technical support for our systems are important factors that distinguish us from our competitors and are essential to building and maintaining close, long-term relationships with our customers. We provide a standard one-year warranty on parts and labor for most of our products. We provide system support to our customers through factory technical support and globally deployed field service personnel. The factory technical support operations provide both OEM and end-user customers with telephonic technical support access, direct training programs, operating manuals and other technical support information to enable effective use of our metrology and measurement instruments and systems. We coordinate warranty and post-warranty field service and spare parts support from our corporate headquarters in Milpitas, California. We also have field service operations based in various locations throughout the United States, the United Kingdom, Israel, France, Italy and Germany. In Asia, service is provided by direct offices in Japan, South Korea, Taiwan, China and Singapore.

Service revenues, including sales of replacement parts, represented 20%, 26%, and 21% of total net revenues in 2014, 2013 and 2012, respectively.

Backlog

As of December 27, 2014 and December 28, 2013, our backlog was $41.5 million and $38.0 million, respectively. Backlog includes orders, both shipped and not yet recognized in revenue, and not shipped, for products, services and upgrades where written customer requests have been received and we expect to ship and/or recognize revenue within 12 months. During

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2014, we determined that our backlog metric should also include orders for which product has shipped but the associated revenue has not yet been recognized. As such, we have updated the backlog amount as of December 28, 2013 to be comparable with backlog as of December 27, 2014. Orders are subject to cancellation or delay by the customer subject to possible penalties. However, historically, order cancellations have not been significant. Because orders presently in backlog could be cancelled or rescheduled and some orders can be received and shipped within the same quarter, we do not believe that current backlog is an accurate indication of our future revenues or financial performance.

Competition

We offer different products for various semiconductor manufacturing process steps, and several of our products extend across the same process flow. However, for process control of each of these process steps, we have multiple competitors. In every market in which we participate, the global semiconductor equipment industry is intensely competitive, and driven by rapid technological adoption cycles. Our ability to effectively compete depends upon our ability to continually improve our products, applications and services, and our ability to develop new products, applications and services that meet constantly evolving customer requirements.

We believe that our competitive position in each of our markets is based on the ability of our products and services to address customer requirements related to numerous competitive factors. Competitive selections are based on many factors involving technological innovation, productivity, total cost of ownership of the system, including impact on end of line yield, price, product performance and throughput capability, quality, reliability and customer support.

In automated metrology for the semiconductor industry, our principal competitors are KLA-Tencor Corporation (“KLA-Tencor”) and Nova Measuring Instruments Ltd. ("Nova") for thin film and critical dimension metrology. Our primary competitor in integrated metrology is Nova. The HB-LED, discrete device, bare silicon and solar PV markets are served by numerous competitors and no single competitor or group of competitors has established a majority position.

Manufacturing

Our manufacturing operations are in Milpitas, California and at various contract manufacturers around the world. It is our strategy to outsource all assemblies that do not contain elements that we believe lead to a direct competitive advantage. The majority of our automated and integrated products are currently manufactured at our Milpitas facility. We also use contract manufacturers in China, Israel, Japan and other locations in the United States. During the manufacturing process, we combine proprietary measurement technology produced in our facilities with components and sub-assemblies obtained from outside suppliers. We currently do not expect our manufacturing operations to require additional major investments in capital equipment.

We produce key parts and components and make reasonable efforts to ensure that any externally purchased parts or raw materials are available from multiple suppliers, but this is not always possible. Certain components, sub-assemblies and services necessary for the manufacture of our systems are obtained either from a sole supplier or limited group of suppliers. In June 2009, we signed a supply agreement with Zygo Corporation to supply OEM interferometer sensors for incorporation into the UniFire^TM line of products as well as our family of automated metrology systems. We also have an established long-term supply agreement for supply of our spectroscopic ellipsometers for use in our Atlas family of products. Although we seek to reduce our dependence on sole and limited source suppliers, partial or complete loss of these sources could disrupt production, delay scheduled deliveries to customers and have a material adverse effect on our revenues and results of operations.

Our production processes require raw materials that meet specific standards, including some that are customized for, or are unique to, us.  We generally have multiple sources and sufficient availability of supply but only a limited number of suppliers are capable of providing certain raw materials that meet our standards. If our supply of raw materials is interrupted, production and results of operations or financial condition could be adversely affected.

Research and Development

We continue to invest in R&D to provide our customers with products that add value to their manufacturing processes and that provide a better and differentiated solution than our competitors, so that our products stay in the forefront of current and future market demands. Whether it is for an advancement of current technology yield and manufacturing improvement, enabling new end device technology, or the development of a new application in our core or emerging markets, we are committed to product excellence and longevity. We have several facilities located worldwide to support these objectives.

Our R&D efforts resulted in the successful product launch of the Atlas II+ product in the marketplace, our flagship product for OCD. In 2014, our R&D investments were focused on new platforms and product upgrade programs, to improve

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both capability, and cost of ownership. The Atlas II+ product provides enhanced OCD capability with a significantly lower cost of ownership model. In our integrated markets, the IMPULSE IM system has been further developed for inline lithography track configuration to extend our tool of record position for lithography OCD. The UniFire system development continued with new system configurations and applications development targeted at advanced packaging applications, including further extensions for advanced packaging applications. After the acquisition of Nanda Technology GmbH, which was our macro defect inspection initiative, R&D investment continued onour inspection technology for multiple use cases including enhancements for advanced lithography cluster monitoring, CMP and end of line quality, and advanced packaging applications.

Our R&D spending is focused on appropriate products and technologies. The new products and capabilities that we introduced to the market in 2014 were adopted by customers in key applications. Our R&D expenditures for each of the last three fiscal years were as follows:

	2014			2013			2012
Research and Development
R&D Expenditures (in millions)	$	34		$	33		$	30
R&D Expenditures (as percentage of net revenues)	20		%	23		%	16		%

Patents and Intellectual Property

Our success depends in large part on the technical innovation of our products and protecting such innovations through a variety of methods. We actively pursue a program of filing patent applications to seek protection of technologically sensitive features of our metrology and inspection systems. As at December 27, 2014, we had 204 patents, including foreign patents, with expiration dates ranging from 2015 to 2033. We believe that our success will depend to a great degree upon innovation, technological expertise and our ability to adapt our products to new technology. While we attempt to establish our intellectual property rights through patents and trademarks and protect intellectual property rights through non-disclosure agreements, we may not be able to fully protect our technology, and competitors may be able to develop similar technology independently. Others may obtain patents and assert them against us. In addition, the laws of certain foreign countries may not protect our intellectual property to the same extent as do the laws of the United States. From time to time we receive communications from third parties asserting that our metrology systems may contain design features that the third parties claim may infringe upon their proprietary rights.

Employees

At December 27, 2014, we employed 525 persons worldwide with sales, applications and service support in key geographic areas aligned with our customer locations. None of our employees are represented by a union and we have never experienced a work stoppage as a result of union actions. Many of our employees have specialized skills that are of value to us. Our future success will depend in large part upon our ability to attract and retain highly skilled scientific, technical and managerial personnel, who are in great demand in our industry. We consider our employee relations to be good.

Environmental Matters

Our operations are subject to various federal, state and local environmental protection regulations governing the use, storage, handling and disposal of hazardous materials, chemicals, and certain waste products. We believe that compliance with federal, state and local environmental protection regulations will not have a material adverse effect on our capital expenditures, earnings and competitive and financial position.

In the event that we fail to comply with such laws and regulations, we could be liable for damages, penalties and fines. We further discuss the impact of environmental regulation under "Risk Factors-We are subject to various environmental laws and regulations that could impose substantial costs upon us and may harm our business, operating results and financial condition." in Item 1A.

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Executive Officers of the Registrant

The names of our executive officers and their ages, titles and biographies as of February 18, 2015, are set forth below:

Name	Age	Position
Timothy J. Stultz, Ph.D.	67	President, Chief Executive Officer and Director
Jeffrey Andreson	53	Chief Financial Officer

Dr. Timothy J. Stultz has served as President, Chief Executive Officer and director of Nanometrics Incorporated since August 2007. Dr. Stultz has more than 30 years of executive management experience. Prior to joining Nanometrics, Dr. Stultz was President and Chief Executive Officer of Imago Scientific Instruments Corporation, a supplier of proprietary 3-D atom probe microscopes to the research, materials and microelectronics industries; President and Chief Executive Officer for ThauMDx, a developer of diagnostic systems for the healthcare industry; and Vice President and General Manager of Veeco Instruments' Metrology and Instrumentation Business. Dr. Stultz also serves on the Board of Directors of Tessera Technologies, Inc. Dr. Stultz received his B.S., M.S. and Ph.D. in Materials Science and Engineering from Stanford University.

Jeffrey Andreson joined Nanometrics as Chief Financial Officer in September 2014. Prior to Nanometrics, Mr. Andreson served at Intevac Corporation from August 2007 to September 2014 most recently as Executive Vice President, Finance and Administration, Chief Financial Officer, Treasurer and Secretary from August 2007 and in this role was responsible for finance, information services and legal. From June to August 2007, Mr. Andreson served as Executive Vice President, Finance at Intevac. Prior to joining Intevac, Mr. Andreson served 12 years with Applied Materials in various controllership positions within the company most recently as Managing Director and Controller of the $2 billion Applied Materials’ Global Services product group. Mr. Andreson joined Applied Materials in 1995 and held a number of senior financial positions, including: Managing Director, Global Financial Planning and Analysis; Controller, Metron Subsidiary; Controller, North American Sales and Service; and Controller, Volume Manufacturing. From 1989 through 1995, Mr. Andreson held various roles at Measurex Corporation. Mr. Andreson holds an MBA from Santa Clara University and a B.S. degree in finance from San Jose State University.

ITEM 1A. RISK FACTORS

In addition to the other information contained in this Annual Report on Form 10-K, we have identified the following risks and uncertainties that may have a material adverse effect on our business, financial condition or results of operations. Investors should carefully consider the risks described below before making an investment decision. The risks described below are not the only ones we face. Additional risks not currently known to us or that we currently believe are immaterial may also impair our business operations. Our business could be harmed by any of these risks. The trading price of our common stock could decline due to any of these risks and investors may lose all or part of their investment. This section should be read in conjunction with the Consolidated Financial Statements and Notes thereto, and Management’s Discussion and Analysis of Financial Condition and Results of Operations contained in this Annual Report on Form 10-K.

The Global economic conditions and the cyclical nature of the semiconductor industry have reduced demand for our products which in turn caused us to operate unprofitably in the past and caused reductions in available cash, and may, in the future, negatively impact our financial performance.

Global economic conditions, the gradual recovery of the global economy and the cyclical nature of the semiconductor industry have impacted and could impact future customer demand for our products and our financial performance. The degree of this impact will depend on a number of factors, including the timing and extent of recovery of the U.S. and global economy from the recession. Demand for our products is largely dependent on our customers' capital spending on semiconductor equipment, which depends, in large part, on consumer spending, required manufacturing capacity, and customer access to capital. Economic uncertainty, unemployment, higher interest rates, higher tax rates, fluctuations in foreign currency exchange rates, and other economic factors may lead to a decrease in consumer spending and may cause certain customers to cancel existing orders or delay placing orders. If we are unable to timely and appropriately adapt to changes resulting from difficult economic conditions, it may cause volatility in our operating results, business, and financial condition, and results of operations may be adversely affected.

In addition, demand for our products is highly inelastic which means we have little ability to control product revenues created by customer demand for more capacity. The market for our products is characterized by constant and rapid technological change, price erosion, product obsolescence, evolving standards, short product life cycles and significant volatility in supply and demand. Due to the inelastic nature of demand in the semiconductor industry, we may need to take

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actions to reduce costs in the future, which could reduce our ability to significantly invest in research and development at levels we believe are necessary. If we are unable to effectively align our cost structure with prevailing market conditions, our business, financial condition and results of operations may be materially and adversely affected.

We may also experience supplier or customer issues as a result of adverse macroeconomic conditions. If our customers have difficulties in obtaining capital or financing, this could result in lower sales. Customers with liquidity issues could also result in an increase in bad debt expense. These conditions could also affect our key suppliers, which could affect their ability to supply parts and result in delays of our customer shipments.

Our largest customers account for a substantial portion of our net revenues, and our net revenues would materially decline if one or more of these customers were to purchase significantly fewer of our systems.

Historically, a significant portion of our net revenues in each quarter and each year has been derived from sales to relatively few customers, and we expect this trend to continue. In fiscal year 2014, four customers represented 27%, 13%, 12% and 10%, respectively, or collectively 62%, of our total net revenues. There are only a limited number of large companies operating in the semiconductor manufacturing industry and our market is characterized by continued consolidation in the customer base. Accordingly, we expect that we will continue to depend on a small number of large customers for a significant portion of our net revenues for the foreseeable future. If our current relationships with our large customers are impaired, or if we are unable to develop similar collaborative relationships with important customers in the future, our net revenues could decline significantly. In addition, because there are a limited number of customers, customers may seek concessions related to price, terms and conditions and intellectual property. Any of these changes could negatively impact our financial performance and results of operations.

We rely on a limited number of outside suppliers and subcontractors to manufacture certain components and subassemblies, and on single or a limited group of outside suppliers for certain materials for our products, which could result in a potential inability to obtain an adequate supply of required components due to the suppliers' failure or inability to provide such components in a timely manner, or at all, and reduced control over pricing and timely delivery of components and materials, any of which could adversely affect our results of operations.

Our manufacturing activities consist of assembling and testing components and subassemblies, which are then integrated into finished systems. We rely on a limited number of outside suppliers and subcontractors to manufacture certain components and subassemblies. We order one of the most critical components of our technology, the spectroscopic ellipsometer component incorporated into our advanced measurement systems, from external suppliers.

We procure some of our other critical systems' components, subassemblies and services from single outside suppliers or a limited group of outside suppliers in order to ensure overall quality and timeliness of delivery. Many of these components and subassemblies have significant production lead times. To date, we have been able to obtain adequate services and supplies of components and subassemblies for our systems in a timely manner. However, disruption or termination of certain of these sources could have a significant adverse impact on our ability to manufacture our systems. In addition, our failure to timely use components in our manufacturing processes due to delays or cancellation of orders may lead to write-downs of inventory. A disruption in supply or inventory window would, in turn, have a material adverse effect on our business, financial condition and results of operations. Our reliance on a sole supplier or a limited group of suppliers and our reliance on subcontractors involve several risks, including:

• a potential inability to obtain an adequate supply of required components due to the suppliers' failure or inability to provide such components in a timely manner, or at all; and

• reduced control over pricing and timely delivery of components.

Although the timeliness, yield and quality of deliveries to date from our subcontractors have been acceptable, manufacture of certain of these components and subassemblies is an extremely complex process, and long lead times are required. Any inability to obtain adequate deliveries or any other circumstance that would require us to seek alternative sources of supply or to manufacture such components internally could delay our ability to ship our products, which could damage relationships with current and prospective customers and have a material adverse effect on our business, financial condition and results of operations.

Some of our current and potential competitors have significantly greater resources than we do, and increased competition could impair sales of our products.

We operate in the highly competitive semiconductor industry and face competition from a number of companies, many of which have greater financial, engineering, manufacturing, research and development, marketing and customer support

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resources than we do. As a result, our competitors may be able to respond more quickly to new or emerging technologies or market developments by devoting greater resources to the development, promotion and sale of products, which could impair sales of our products. Moreover, there has been merger and acquisition activity among our competitors and potential competitors. These transactions by our competitors and potential competitors may provide them with a competitive advantage over us by enabling them to rapidly expand their product offerings and service capabilities to meet a broader range of customer needs. Many of our customers and potential customers in the semiconductor industry are large companies that require global support and service for their metrology systems. Some of our larger or more geographically diverse competitors might be better equipped to provide this global support and service.

Because of the high cost of switching equipment vendors in our markets, it may be difficult for us to attract customers from our competitors even if our metrology systems are superior to theirs.

We believe that once a semiconductor customer has selected one vendor's metrology system, the customer generally relies upon that system and, to the extent possible, subsequent generations of the same vendor's system, for the life of the application. Once a vendor's metrology system has been installed, a customer must often make substantial technical modifications and may experience downtime to switch to another vendor's metrology system. Accordingly, unless our systems offer performance or cost advantages that outweigh a customer's expense of switching to our systems; it will be difficult for us to achieve significant sales from that customer once it has selected another vendor's system for an application.

We depend on Original Equipment Manufacturers (“OEMs”) for sales of our integrated metrology systems, and the loss of our OEMs as customers could harm our business.

We believe that sales of integrated metrology systems will continue to be an important source of our net revenues. Sales of our integrated metrology systems depend upon the ability of OEMs to sell semiconductor manufacturing equipment products that include or are compatible with our metrology systems as components. If our OEM customers are unable to sell such products, or if they choose to focus their attention on products that do not integrate our systems, our business could suffer. If we were to lose our OEM customers for any reason, our ability to realize sales from integrated metrology systems would be diminished, which would harm our business.

We are subject to order and shipment uncertainties. Our profitability will decline if we fail to accurately forecast customer demand when managing inventory.

We generally sell our products on the basis of purchase orders rather than long-term purchase commitments from our customers. Our customers can typically cancel purchase orders or defer product shipments for some period without incurring liabilities to us. We typically plan production and inventory levels based on internal forecasts of customer demand, which can be highly unpredictable and can fluctuate substantially, which could lead to excess inventory write-downs and resulting negative impacts on gross margin and net income. We have limited visibility into our customers' inventories, future customer demand and the product mix that our customers will require, which could adversely affect our production forecasts and operating margins. In addition, innovation in our industry could render significant portions of our inventory obsolete. If we overestimate our customers' requirements, we may have excess inventory, which could lead to obsolete inventory and unexpected costs. Conversely, if we underestimate our customers' requirements, we may have inadequate inventory, which could lead to foregone revenue opportunities, loss of potential market share and damage to customer relationships as product deliveries may not be made on a timely basis, disrupting our customers' production schedules. In response to anticipated long lead times to obtain inventory and materials from outside suppliers and foundries, we periodically order materials in advance of customer demand. This advance ordering has in the past and may in the future result in excess inventory levels or unanticipated inventory write-downs if expected orders fail to materialize, or other factors make our products less saleable. In addition, any significant future cancellation or deferral of product orders could adversely affect our revenue and margins, increase inventory write-downs due to obsolete inventory, and adversely affect our operating results and stock price.

If we do not manage our supply chain effectively, our operating results may be adversely affected.

We need to continually evaluate our global supply chains and assess opportunities to reduce costs. We must also enhance quality, speed and flexibility to meet changing demand for our products and product mix and uncertain market conditions. Our success also depends in part on refining our cost structure and supply chains so that we have flexibility and are able to protect and improve profitability. To improve our margins on a product, we will need to establish high volume supply agreements with our vendors. We cannot be certain that we will be able to timely negotiate vendor supply agreements on improved terms and conditions, or at all. Failure to achieve the desired level of cost reductions could adversely affect our financial results. Despite our efforts to control costs and increase efficiency in our facilities, changes in demand could still cause us to realize lower operating margins and profitability.

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If we choose to acquire new and complementary businesses, or products or technologies instead of developing them ourselves, we may be unable to complete these acquisitions or may not be able to successfully integrate an acquired business in a cost-effective and non-disruptive manner.

Our success depends on our ability to continually enhance and broaden our product offerings in response to changing technologies, customer demands and competitive pressures. To achieve this, from time to time we have acquired complementary businesses, products, or technologies instead of developing them ourselves and may choose to do so in the future. For example, in November 2011, we acquired Nanda Technologies GmbH, a supplier of high-throughput, high-sensitivity defect inspection technology for semiconductor manufacturing. In June 2009, we entered into a strategic partnership with Zygo under an exclusive OEM supply agreement to provide interferometer sensors to us for incorporation into our UniFire line of products as well as our family of automated metrology systems. However, we may not be able to identify suitable transactions in the future, or if we do identify such transactions, we may not be able to complete them on commercially acceptable terms, or at all. We also face intense competition for acquisitions from other acquirers in our industry. These competing acquirers may have significantly greater financial and other resources than us, which may prevent us from successfully pursuing a transaction.

Potential risks associated with acquisitions could include, among other things:

•our inability to realize the benefits or cost savings that we expect to realize as a result of the acquisition;

• diversion of management's attention;

• our inability to successfully integrate our businesses with the business of the acquired company;

• motivating, recruiting and retaining executives and key employees; conforming standards, controls, procedures and policies, business cultures and compensation structures among our company and the acquired company;

•consolidating and streamlining sales, marketing and corporate operations;

•potential exposure to unknown liabilities of acquired companies;

•loss of key employees and customers of the acquired business; and

• managing tax costs or inefficiencies associated with integrating our operations following completion of the acquisitions.

If an acquisition is not successfully completed or integrated into our existing operations, our business, financial condition and results of operations could be adversely impacted.

In addition, to finance any acquisitions we may be required to raise additional funds through public or private equity or debt financings, however:

•to obtain such financing we may be forced to obtain financing on terms that are not favorable to us and, in the case of equity or convertible debt financing, the financing may result in dilution to our stockholders; or

•such financing may not be available to us at all, which could prevent us from entering into or completing the acquisition.

Our success depends on the performance of key personnel, including our senior management and on our ability to identify, hire and retain key management personnel.

We believe our continued ability to recruit, hire, retain and motivate highly-skilled engineering, operations, sales, administrative and managerial personnel is key to our future success. Competition for these employees is intense, particularly with respect to attracting and retaining qualified technical and senior management personnel. We have experienced turnover in our senior management team. Our business may be harmed if we are unable to recruit, retain and effectively integrate our senior management into our business operations.

We do not have employment agreements with key members of our technical staff and our senior management team, and these individuals or other key employees may leave us. We do not have key person life insurance on any of our executives. In addition, to support our future growth, we will need to attract and retain additional qualified employees. If we fail to attract, motivate and retain qualified senior management personnel, our business could be harmed and our ability to implement our strategy could be compromised.

If we deliver systems with defects, our credibility will be harmed, revenue from, and market acceptance of, our systems will decrease and we could expend significant capital and resources as a result of such defects.

Our products are complex and frequently operate in high-performance, challenging environments. Notwithstanding our internal quality specifications, our systems have sometimes contained errors, defects and bugs when introduced. If we deliver

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systems with errors, defects or bugs, our credibility and the market acceptance and sales of our systems would be harmed. Further, if our systems contain errors, defects or bugs, we may be required to expend significant capital and resources to alleviate such problems and incur significant costs for product recalls and inventory write-offs. Defects could also lead to product liability lawsuits against us or against our customers. We have agreed to indemnify our customers in some circumstances against liability arising from defects in our systems. In the event of a successful product liability claim, we could be obligated to pay damages significantly in excess of our product liability insurance limits.

If we experience significant delays in shipping our products to our customers, our business and reputation may suffer.

Our products are complex and require technical expertise to design and manufacture properly. Various problems occasionally arise during the manufacturing process that may cause delays and/or impair product quality. Any significant delays stemming from the failure of our products to meet or exceed our internal quality specifications, or for any other reasons, would delay our shipments. Shipment delays could harm our business and reputation in the industry.

Net average selling prices of our products may decrease over time, which could have a material adverse effect on our revenues.

It is common in our industry for the average selling price of a given product to decrease over time as production volumes increase, competing products are developed or new technologies featuring higher performance or lower cost emerge. To combat the negative effects that erosion of average selling prices have had in the past and may in the future have on our net revenues, we attempt to actively manage the prices of our existing products and regularly introduce new process technologies and products in the market that exhibit higher performance, that are in demand, or that lower manufacturing cost. Failure to maintain our current prices or to successfully execute on our new product development strategy will cause our net revenues and gross margin to decline, which adversely affect our operating results and stock price.

Third party infringement claims could be costly to defend, and successful infringement claims by third parties could result in substantial damages, lost product sales and the loss of important intellectual property rights by us.

The semiconductor industry is generally subject to frequent litigation regarding patents and other intellectual property rights. Our commercial success depends, in part, on our ability to avoid infringing or misappropriating patents or other proprietary rights owned by third parties. From time to time we may receive communications from third parties asserting that our metrology systems may contain design features which are claimed to infringe on their proprietary rights. Our new or current products may infringe valid intellectual property rights, but even if our products do not infringe, we may be required to expend significant sums of money to defend against infringement claims, or to actively protect our intellectual property rights through litigation. In the event that a claim is made and there is an adverse result of any intellectual property rights litigation, we could be required to pay substantial damages for infringement, expend significant resources to develop non-infringing technology, incur material liability for royalty payments or fees to obtain licenses to the technology covered by the litigation, or be subjected to an injunction, which could prevent us from selling our products and materially and adversely affect our net revenues and results of operations. We cannot be sure that we will be successful in any such non-infringing development or that any such license would be available on commercially reasonable terms, if at all. Any claims relating to the infringement of third-party proprietary rights, even if not meritorious, could result in costly litigation, lost sales or damaged customer relationships, and diversion of management's attention and resources.

Our intellectual property may be infringed by third parties despite our efforts to protect it, which could threaten our future success and competitive position and harm our operating results.

Our future success and competitive position depend in part upon our ability to obtain and maintain proprietary technology for our principal product families, and we rely, in part, on patent, trade secret and trademark law to protect that technology. If we fail to adequately protect our intellectual property, it will be easier for our competitors to sell competing products. We own or may license patents relating to our systems, and have filed applications for additional patents. Any of our pending patent applications may be rejected, and we may not in the future be able to develop additional proprietary technology that is patentable. In addition, the patents we own, have been issued or licensed, may not provide us with competitive advantages and may be challenged by third parties. Third parties may also design around these patents.

In addition to patent protection, we rely upon trade secret protection for our confidential and proprietary information and technology. We routinely enter into confidentiality agreements with our employees. However, in the event that these agreements may be breached, we may not have adequate remedies. Our confidential and proprietary information and technology might also be independently developed by or become otherwise known to third parties.

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We may be required to initiate litigation to enforce patents issued to or licensed by us, or to determine the scope or validity of a third party's patent or to enforce trade secret, confidentiality or other proprietary rights. Any such litigation, regardless of outcome, could be expensive and time consuming, and could subject us to significant liabilities or require us to re-engineer our product or obtain expensive licenses from third parties, any of which would adversely affect our business and operating results.

Despite our efforts to protect our proprietary rights, unauthorized parties may attempt to copy or otherwise obtain or use our products or technology. Our ability to enforce our patents and other intellectual property is limited by our financial resources and is subject to general litigation risks. If we seek to enforce our rights, we may be subject to claims that the intellectual property rights are invalid, are otherwise not enforceable or are licensed to the party against whom we assert a claim. In addition, our assertion of intellectual property rights could result in the other party seeking to assert alleged intellectual property rights of its own against us, which is a frequent occurrence in such litigation.

Our efforts to protect our intellectual property may be less effective in some foreign countries where intellectual property rights are not as well protected as in the United States.

In 2014, 2013, and 2012, 78%, 67% and 76%, respectively, of our total net revenues were derived from sales to customers in foreign countries, including certain countries in Asia, such as Japan, South Korea, China, Singapore and Taiwan. The laws of some foreign countries do not protect our proprietary rights to as great an extent as do the laws of the United States, and many U.S. companies have encountered substantial problems in protecting their proprietary rights against infringement in these countries. If we fail to adequately protect our intellectual property in these countries, it would be easier for our competitors to sell competing products and our business would suffer.

Variations in the amount of time it takes for us to sell our systems may cause volatility in our operating results, which could cause our stock price to decline.

Variations in the length of our sales and product acceptance cycles could cause our revenues to fluctuate widely from period to period. Our customers generally take long periods of time to evaluate our metrology systems. We expend significant resources educating and providing information to our prospective customers regarding the uses and benefits of our systems. The length of time that it takes for us to complete a sale depends upon many factors, including:

• the efforts of our sales force and our independent sales representatives;

• the complexity of the customer’s metrology needs;

• the internal technical capabilities and sophistication of the customer;

• the customer’s budgetary constraints; and

• the quality and sophistication of the customer’s current processing equipment.

Because of the number of factors influencing the sales process, the period between our initial contact with a customer and the time at which we recognize revenue from that customer, if at all, varies widely. Our sales cycles, including the time it takes for us to build a product to customer specifications after receiving an order, typically range from three to nine months. Occasionally our sales cycles can be much longer, particularly with customers in Asia who may require longer evaluation and acceptance periods. During the sales cycles, we commit substantial resources to our sales efforts in advance of receiving any revenue, and we may never receive any revenue from a customer despite our sales efforts.

If we do complete a sale, customers often purchase only one of our systems and then evaluate its performance for a lengthy period of time before purchasing additional systems. The purchases are generally made through purchase orders rather than through long-term contracts. The number of additional products that a customer purchases, if any, depends on many factors, including a customer’s capacity requirements, and/or shifting to more and advanced manufacturing processes that require more or different products to control. If they change their rate of capacity or have technological change, we cannot compensate for this fluctuation in demand by adjusting the price of our products. The period between a customer’s initial purchase and any subsequent purchases and acceptance is unpredictable and can vary from three months to a year or longer. Variations in the length of this period could cause fluctuations in our operating results, which could adversely affect our stock price.

Relatively small fluctuations in our system sales volume may cause our operating results to vary significantly each quarter.

During any quarter, a significant portion of our revenue is derived from the sale of a relatively small number of systems. Our automated metrology systems can be priced up to, or above, $2,100,000 per system, and our integrated metrology systems

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can be priced up to, or above, $500,000 per system. Accordingly, a small change in the number or mix of systems that we sell could cause significant changes in our operating results.

Lack of market acceptance for our products may affect our ability to generate revenue and may harm our business.

In 2014 we introduced our NanoSpec II automated metrology system, our Imperia photoluminescence imaging system and our Atlas II +OCD system, a next-generation tool for high performance process control metrology. In 2012 we introduced our SPARK inspection solution. In 2010, the capability of our NanoCD suite was extended with launches of our new modeling and analysis software, NanoDiffract, and migration to the latest generation of cluster computers for fabrication wide analysis (NanoGen). In 2009, we introduced the AtlasXP+ system as the follow-on to our Atlas metrology system. We have invested substantial time and resources into the development of these products. However, we cannot accurately predict the future level of acceptance of our products by our customers. As a result, we may not be able to generate anticipated revenue from sales of these products or future new products or improvements.

We depend on new products and processes for our success. Consequently, we are subject to risks associated with rapid technological change.

Rapid technological changes in semiconductor manufacturing processes subject us to increased pressure to develop technological advances enabling such processes. We believe that our future success depends in part upon our ability to develop and offer new products with improved capabilities and to continue to enhance our existing products. We cannot make assurances if or when the products and solutions where we have focused our research and development expenditures will become commercially successful. If new products have reliability or quality problems, our performance could be impacted by reduced orders, higher manufacturing costs, and delays in acceptance or payment for new products, and additional service and warranty expenses. We might not be able to develop and manufacture new products successfully, or new products that we introduce may fail in the marketplace. Our failure to complete commercialization of these new products in a timely manner could result in unanticipated costs and inventory obsolescence, which would adversely affect our financial results. Any significant delay in releasing new systems could adversely affect our reputation, give a competitor a first-to-market advantage or allow a competitor to achieve greater market share.

To develop new products and processes, we expect to continue to make significant investments in research and development and to pursue joint development relationships with customers, suppliers or other members of the industry. We must manage product transitions and joint development relationships successfully, as introduction of new products could adversely affect our sale of existing products.

We are subject to risks associated with our competitors’ strategic relationships and their introduction of new products, and we may lack the financial resources or technological capabilities of certain of our competitors needed to capture increased market share.

We expect to face significant competition from multiple current and future competitors. We believe that other companies are developing systems and products that are competitive to our products and are planning to introduce new products, which may affect our ability to sell our existing or future products. We face a greater risk if our competitors enter into strategic relationships with leading semiconductor manufacturers covering products similar to those we sell or may develop, as this could adversely affect our ability to sell products to those manufacturers.

Some of our competitors have substantially greater financial resources and more extensive engineering, manufacturing, marketing and customer service and support resources than we do and therefore have the potential to increasingly dominate the semiconductor equipment industry. These competitors may deeply discount products similar to those that we sell, challenging or even exceeding our ability to make similar accommodations and threatening our ability to sell those products. As a result, we may fail to continue to compete successfully worldwide.

In addition, our competitors may provide innovative technology that may have performance advantages over systems we currently offer or may offer in the future. They may be able to develop products comparable or superior to those that we offer or may adapt more quickly to new technologies or evolving customer requirements. In particular, while we currently are developing additional product enhancements that we believe will address future customer requirements, we may fail in a timely manner to complete the development or introduction of these additional product enhancements successfully, or these product enhancements may not achieve market acceptance or be competitive. Accordingly, we may be unable to continue to compete in our markets and competition may intensify, or future competition, operating results, financial condition, and/or cash flows could suffer.

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If we are unable to adjust the scale of our business in response to rapid changes in demand in the semiconductor equipment industry, our operating results and our ability to compete successfully may be impaired.

The business cycle in the semiconductor equipment industry has historically been characterized by frequent periods of rapid change in demand that challenge our management to adjust spending and resources allocated to operating activities. During periods of growth or decline in demand for our products and services, we face significant challenges in maintaining adequate financial and business controls, management processes, information systems and procedures and in training, managing, and appropriately sizing our supply chain, our work force, and other components of our business on a timely basis. Our success will depend, to a significant extent, on the ability of our executive officers and other members of our senior management to identify and respond to these challenges, our gross margins and earnings may be impaired during periods of demand decline, and we may lack the infrastructure and resources to scale up our business to meet customer expectations and compete successfully during periods of demand growth.

We manufacture all of our systems at a limited number of facilities, and any prolonged disruption in the operations of those facilities could reduce our revenues.

We produce all of our systems in our manufacturing facilities located in Milpitas, California. We use contract manufacturers in China, Israel, Japan and the United States. Our manufacturing processes are highly complex and require sophisticated, costly equipment and specially designed facilities. As a result, any prolonged disruption in the operations of our manufacturing facilities, such as those resulting from acts of war, terrorism, political instability, health epidemics, fire, earthquake, flooding or other natural disaster could seriously harm our ability to satisfy our customer order deadlines.

Our results of operations could vary as a result of the methods, estimates and judgments we use in applying our accounting policies.

The methods, estimates and judgments we use in applying our accounting policies have a significant impact on our results of operations. See “Note 1. Nature of Business, Basis of Presentation and Significant Accounting Policies” in Part II, Item 8, Note 1 of our consolidated financial statements. These methods, estimates and judgments are, by their nature, subject to substantial risks, uncertainties and assumptions, and factors may arise over time that leads us to change our methods, estimates and judgments. Changes in these methods, estimates and judgments could significantly affect our results of operations. In particular, our operating results have been affected by our recording of a valuation allowance against our U.S. deferred tax assets, the calculation of share-based compensation expense and by the testing and potential impairment of long-lived assets such as goodwill and other intangible assets. For example, during the year ended December 27, 2014, we recorded a $21.1 million valuation allowance against our U.S. deferred tax assets as we determined, based on the weight of available evidence, it was more-likely-than-not that some or all of our deferred tax assets would not be realized. The valuation allowance had a significant impact to our operating results. The process of evaluating potential impairments is highly subjective and requires significant judgment, and our results of operations could vary significantly from estimates. To the extent that we believe it is more-likely-than-not that we will realize our U.S. deferred tax assets, our financial statements will reflect another significant change to our tax provision and operating results.

Our operating results have varied in the past and probably will continue to vary significantly in the future, which will cause volatility in our stock price.

Our quarterly and annual operating results have varied significantly in the past and are likely to vary in the future, which volatility could cause our stock price to decline. Some of the factors that may influence our operating results and subject our stock to extreme price and volume fluctuations include:

• general economic growth or decline in the U.S. or foreign markets;

• changes in customer demand for our systems;

• the gain or loss of a key customer or significant changes in the financial condition or one or more key customers;

• economic conditions in the semiconductor industries;

• the timing, cancellation or delay of customer orders and shipments;

• market acceptance of our products and our customers' products;

• our ability to recover the higher costs associated with meeting our customers' increasing service demands;

• competitive pressures on product prices and changes in pricing by our customers or suppliers;

• the timing of new product announcements and product releases by us or our competitors and our ability to design, introduce and manufacture new products on a timely and cost-effective basis;

• fluctuations in foreign currency exchange rates, particularly the Japanese yen, the Korean won and the British pound sterling;

• the occurrence of tax valuation allowances;

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• the occurrence of potential impairments of long-lived assets;

• the timing of acquisitions of businesses, products or technologies;

• the effects of war, natural disasters, acts of terrorism or political unrest;

• the loss of key personnel; and

• the levels of our fixed expenses, relative to our revenue level.

The foregoing factors are difficult to forecast, and these, as well as other factors, could materially and adversely affect our quarterly and annual operating results. If our operating results in any period fall below the expectations of securities analysts and investors, the market price of our common stock would likely decline.

We are highly dependent on international sales and operations, which exposes us to foreign political and economic risks.

A majority of our sales and operations are outside of the United States. As a result, we are subject to regulatory, geopolitical and other risks associated with doing business in foreign countries. We anticipate that international sales will continue to account for a significant portion of our revenues. International sales and operations carry inherent risks such as:

• regulatory limitations imposed by foreign governments;

• obstacles to the protection of our intellectual property, political, military and terrorism risks;

• foreign currency controls and currency exchange rate fluctuations;

• periodic local or international economic downturns;

• political instability, natural disasters, acts of war or terrorism in regions where we have operations;

• repatriation of cash earned in foreign countries;

• longer payment cycles and difficulties in collecting accounts receivable outside of the U.S.;

• disruptions or delays in shipments caused by customs brokers or other government agencies;

• uncertainty regarding liability under foreign laws;

• unexpected changes in regulatory requirements (including import and export requirements), tariffs, customs, duties and other trade barriers;

• difficulties in staffing and managing foreign operations;

• potentially adverse tax consequences resulting from changes in tax laws; and

• other challenges caused by distance, language and cultural differences.

If any of these risks materialize and we are unable to manage them, our international sales and operations would suffer.

Changes in our effective income tax rate could affect our results of operations.

Fluctuations in our effective tax rate may affect operating results. Our effective tax rate is subject to fluctuation based on a variety of factors, such as:

•the jurisdictions in which our profits are determined to be earned and taxed;

•changes to tax laws, regulations and interpretations;

• our ability to obtain approval and the timing of receipt of approval from the Internal Revenue Service of tax elections;

•changes in the valuation of our deferred tax assets and liabilities;

• increases in expenses not deductible for tax purposes, including write-offs of acquired in-process research and development and impairment of goodwill in connection with acquisitionsand

• changes in available tax credits.

Any material increase in our effective tax rate would adversely affect our operating results.

We are exposed to fluctuations in the foreign currency exchange rates.

As a global concern, we face exposure to adverse movements in foreign currency exchange rates. Our exposure to foreign currency exchange rate fluctuations arise in part from current intercompany accounts in which costs are charged between our U.S. headquarters and foreign subsidiaries. These exposures may change over time as business practices evolve and could have a material adverse impact on our financial results and cash flow.

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Anti-takeover provisions in our charter documents and Delaware law could discourage, delay or prevent a change in control of our company and may affect the trading price of our common stock.

The anti-takeover provisions of the Delaware General Corporation Law may discourage, delay or prevent a change in control of our company by limiting our ability to engage in a business combination with an interested stockholder, even if a change of control would be beneficial to our existing stockholders. In addition, our certificate of incorporation and bylaws may discourage, delay or prevent a change in our management or control over us that stockholders may consider favorable. Our certificate of incorporation and bylaws:

• authorize the issuance of “blank check” preferred stock that could be issued by our board of directors to thwart a takeover attempt;

• limit who may call special meetings of stockholders; and

• prohibit stockholder action by written consent, requiring all actions to be taken at a meeting of the stockholders.

We may experience periodic or prolonged disruption of our IT infrastructure, which may adversely affect our operations.

In 2014, we replaced our Enterprise Resource Planning (“ERP”) system used to manage our business and accurately and timely report key data with respect to our results of operations, financial position and cash flows. We may experience periodic or prolonged disruption of our IT infrastructure arising out of the conversion to a new ERP system, general use of such systems, periodic upgrades and updates, or external factors that are outside of our control. Any such disruption could adversely affect our ability to complete essential business processes, including our evaluation of our internal control over financial reporting pursuant to Section 404 of the Sarbanes-Oxley Act of 2002. If we encounter unforeseen problems with regard to our ERP system or other IT systems, our business, operations and financial condition could be adversely affected.

Our cash and cash equivalents and short-term investments are managed through various banks around the world and volatility in the capital and credit market conditions could cause financial institutions to fail which could have an adverse effect on our ability to timely access funds.

World capital and credit markets have been and may continue to experience volatility and disruption. Financial institutions, including banks, have failed or otherwise been largely taken over by governments. We maintain our cash, cash equivalents and short-term investments with a number of financial institutions around the world. Should some or all of these financial institutions fail, we would likely have a limited ability to timely access our cash deposited with such institutions, or, in extreme circumstances, the failure of such institutions could cause us to be unable to access cash for the foreseeable future. If we are unable to quickly access our funds when we need them, we may need to increase the use of our existing credit lines or access more expensive credit, if available, which could have a negative impact on our operations, including our reported net income.

If our network security measures are breached and unauthorized access is obtained to a customer's data, to our data, or to our information technology systems, we may incur significant legal and financial exposure and liabilities.

As part of our business, we store our data and certain data about our customers in our information technology system. While our system is designed with access security, if a third party gain unauthorized access to our data, including any data regarding our customers, the security breach could expose us to a risk of loss of this information, loss of business, litigation and possible liability. These security measures may be breached as a result of third-party action, including intentional misconduct by computer hackers, employee error, malfeasance or otherwise. Additionally, third parties may attempt to fraudulently induce employees or customers into disclosing sensitive information such as user names, passwords or other information to gain access to our customers' data or our data, including our intellectual property and other confidential business information, or our information technology systems. Because the techniques used to obtain unauthorized access, or to sabotage systems, change frequently and generally are not recognized until launched against a target, we may be unable to anticipate these techniques or to implement adequate preventative measures. Any security breach could result in a loss of confidence by our customers, damage our reputation, disrupt our business, lead to legal liability and negatively impact our future sales.

We are subject to various environmental laws and regulations that could impose substantial costs upon us and may harm our business, operating results and financial condition.

Some of our operations use substances regulated under various federal, state, local, and international laws governing the environment, including those relating to the storage, use, discharge, disposal, labeling, and human exposure to hazardous and toxic materials. We could incur costs, fines and civil or criminal sanctions, third-party property damage or personal injury claims, or could be required to incur substantial investigation or remediation costs, if we were to violate or become liable under

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environmental laws. Liability under environmental laws can be joint and several and without regard to comparative fault. Compliance with current or future environmental laws and regulations could restrict our ability to expand our facilities or require us to acquire additional expensive equipment, modify our manufacturing processes, or incur other significant expenses. We may unintentionally violate environmental laws or regulations in the future as a result of human error, equipment failure or other causes.

Compliance with federal securities laws, rules and regulations, as well as NASDAQ requirements, is becoming increasingly complex, and the significant attention and expense we must devote to those areas may have an adverse impact on our business.

Federal securities laws, rules and regulations, as well as NASDAQ rules and regulations, require companies to maintain extensive corporate governance measures, impose comprehensive reporting and disclosure requirements, set strict independence and financial expertise standards for audit and other committee members and impose civil and criminal penalties for companies and their chief executive officers, chief financial officers and directors for securities law violations. These laws, rules and regulations have increased, and in the future are expected to continue to increase, the scope, complexity and cost of our corporate governance, reporting and disclosure practices, which could harm our results of operations and divert management's attention from business operations.

We may be exposed to liabilities under the FCPA and other anti-corruption laws, and any determination that we violated these laws could have a material adverse effect on our business.

We are subject to the Foreign Corrupt Practice Act of 1977 ("FCPA"), and other laws that prohibit improper payments or offers of payments to foreign governments and their officials and political parties by U.S. persons and issuers as defined by the statute, for the purpose of obtaining or retaining business. Also, similar worldwide anti-bribery laws, such as the U.K. Bribery Act and Chinese anti-corruption laws, generally prohibit companies and their intermediaries from making improper payments to non-U.S. officials for the purpose of obtaining or retaining business. Some of our distribution partners are located in parts of the world that have experienced governmental corruption to some degree and, in certain circumstances, strict compliance with anti-bribery laws may conflict with local customs and practices. Although we have implemented policies and procedures to discourage these practices by our employees, our existing safeguards and any future improvements may prove to be less than effective, and our employees, consultants, sales agents or distributors may engage in conduct for which we might be held responsible. Violations of the FCPA or international anti-corruption laws may result in severe criminal or civil sanctions, and we may be subject to other liabilities, which could negatively affect our business, operating results and financial condition. In addition, the U.S. government may seek to hold us liable for successor liability FCPA violations committed by companies in which we invest or that we acquire. We cannot assure you that our internal control policies and procedures will protect us from reckless or negligent acts committed by our employees, distributors, partners, consultants or agents.

Recent regulations related to conflict minerals could adversely impact our business.

The Dodd-Frank Wall Street Reform and Consumer Protection Act contains provisions to improve transparency and accountability concerning the supply of tin, tantalum, tungsten and gold, known as conflict minerals, originating from the Democratic Republic of Congo, or DRC, and adjoining countries. As a result, in August 2012 the United States Securities and Exchange Commission, or SEC, adopted annual disclosure and reporting requirements for public companies that use conflict minerals mined from the DRC and adjoining countries in their products. We have determined that we use at least one of these conflict minerals in the manufacture of our products, although we have not yet determined the source of the minerals that we use. These new disclosure requirements require us to use diligent efforts to determine which conflict minerals we use and the source of those conflict minerals, and disclose the results of our findings. There have been and will continue to be costs associated with complying with these disclosure requirements, including those costs incurred in conducting diligent efforts to determine which conflict minerals we use and the sources of conflict minerals used in our products.  Further, the implementation of these rules could adversely affect the sourcing, supply and pricing of materials used in our products. As there may be only a limited number of suppliers offering conflict free minerals, we cannot be sure that we will be able to obtain necessary conflict free conflict minerals in sufficient quantities or at competitive prices. In addition, we may face reputational challenges if we determine that our products contain minerals not determined to be conflict free or if we are unable to sufficiently verify the origins for all conflict minerals used in our products through the procedures we implement. If we determine it is necessary to redesign our products to not use conflict minerals, we would incur costs associated with doing so.

ITEM 1B. UNRESOLVED STAFF COMMENTS

None.

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ITEM 2. PROPERTIES

At December 27, 2014, our owned or leased facilities included those described below:

Type	Location	Square Footage	Use
Owned	Milpitas, California	135,692	Corporate headquarters, manufacturing and corporate housing
Leased	United Kingdom	20,338	Sales and service
Leased	South Korea	21,341	Sales, service and corporate housing
Leased	Japan	12,286	Sales, service, application, logistics, corporate housing and administrations
Leased	United States	19,551	Engineering, sales and service
Leased	Taiwan	17,965	Sales and service
Leased	China	11,379	Sales and service
Leased	Singapore	4,529	Sales and service
Leased	France	828	Sales and service
Leased	Switzerland	387	Sales and service

We believe that our existing facilities are suitable and adequate for our current needs and anticipated growth.

ITEM 3. LEGAL PROCEEDINGS

Not Applicable.

ITEM 4. MINE SAFETY DISCLOSURES

Not Applicable.

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PART II

ITEM 5. MARKET FOR REGISTRANT’S COMMON EQUITY, RELATED STOCKHOLDER MATTERS AND ISSUER PURCHASES OF EQUITY SECURITIES

Market Information for Common Stock

Our common stock is quoted on the NASDAQ Global Select Market under the symbol “NANO.” The following table sets forth, for the fiscal periods indicated, the high and low closing sales prices per share of our common stock on a quarterly basis as reported on the NASDAQ Global Select Market.

Fiscal Year 2014	High		Low
First quarter	$	19.05	$	16.18
Second quarter	$	18.42	$	15.55
Third quarter	$	18.60	$	15.15
Fourth quarter	$	16.59	$	13.07

Fiscal Year 2013	High		Low
First quarter	$	16.10	$	14.20
Second quarter	$	15.73	$	13.49
Third quarter	$	16.25	$	13.41
Fourth quarter	$	18.88	$	16.10

Stockholders

On February 18, 2015, there were approximately 192 holders of record of our common stock. Because brokers and the institutions on behalf of stockholders hold many of our shares of common stock, we are unable to estimate the total number of stockholders represented by these record holders.

Dividend Policy

We have never declared or paid any cash dividends on our capital stock. We currently expect to retain future earnings, if any, for use in the operation, expansion of our business and repurchase of shares and do not anticipate paying any cash dividends in the foreseeable future. Under our loan and security agreement with Comerica Bank, we are not permitted to pay dividends without the consent of Comerica Bank.

Stock Performance Graph

The following graph presentation compares cumulative five-year stockholder returns on an indexed basis, assuming a $100 initial investment and reinvestment of dividends, of (a) Nanometrics Incorporated, (b) a broad-based equity market index and (c) an industry-specific index. The broad-based equity market index used is the NASDAQ Composite Index and the industry-specific index used is the RDG Technology Composite Index.

This performance graph shall not be deemed “filed” for purposes of Section 18 of the Securities Exchange Act of 1934, as amended or otherwise subject to the liabilities under that Section, and shall not be deemed to be incorporated by reference into any of our filings under the Securities Act of 1933, as amended or the Exchange Act.    

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	12/09	12/10	12/11	12/12	12/13	12/14
Nanometrics Incorporated	100.00	113.24	162.58	127.27	168.14	148.46
NASDAQ Composite	100.00	117.61	118.70	139.00	196.83	223.74
RDG Technology Composite	100.00	111.01	110.85	126.07	167.16	193.22

Recent Sales of Unregistered Securities

None.

Issuer Purchases of Equity Securities

Pursuant to repurchase programs approved by the Board of Directors and described below, we repurchased shares of our common stock in the fourth quarter of fiscal 2014 as follows (in thousands, except shares and per share data):

Plan	Period(a)	Number of shares repurchased	Average price paid per share		Total shares repurchased under the plan	Amount remaining for repurchase
May 2012	Sep. 28, 2014 - Oct. 25, 2014	—	$	—	—	$	11,461
May 2012	Oct. 26, 2014 - Nov. 22, 2014	154,372	$	14.16	154,372	$	9,276
May 2012	Nov. 23, 2014 - Dec. 27, 2014	208,261	$	15.17	208,261	$	6,118

On May 29, 2012, our Board of Directors approved a program to repurchase up to $20.0 million of our common stock, referred to as the 2012 program. Stock repurchases under this program may be made through open market and privately negotiated transactions, at times and in such amounts as management deems appropriate. The timing and actual number of shares repurchased is dependent on a variety of factors including price, corporate and regulatory requirements and other market conditions. During fiscal year 2014, we repurchased and retired 362,633 shares of our common stock under this approved plan at the weighted average price of $14.74 per share.

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ITEM 6. SELECTED FINANCIAL DATA

The selected consolidated financial data set forth below should be read in conjunction with “Management’s Discussion and Analysis of Financial Condition and Results of Operations” and the consolidated financial statements and related notes included elsewhere in this Annual Report on Form 10-K. Over the last five fiscal years, we acquired Nanda Technologies GmbH and that purchase was in fiscal year 2011. Our fiscal years 2014, 2013, 2012, 2011 and 2010, as referred to below, refer to our fiscal years ended December 27, 2014, December 28, 2013, December 29, 2012, December 31, 2011 and January 1, 2011, respectively. The results of this acquisition have been included in our consolidated financial statements since the date of the acquisition.

	Fiscal Year
	2014(1)			2013			2012		2011		2010
	(in thousands, except per share data)
Consolidated Statement of Operations Data:
Total net revenues	$	166,443		$	144,307		$	182,881	$	230,061	$	188,065
Gross profit	$	75,822		$	62,676		$	83,928	$	122,101	$	101,392
Income (loss) from operations	$	(11,653	)	$	(21,709	)	$	5,478	$	45,766	$	41,324
Net income (loss)	$	(31,118	)	$	(14,146	)	$	4,465	$	28,685	$	55,948
Basic net income (loss) per share	$	(1.30	)	$	(0.61	)	$	0.19	$	1.26	$	2.56
Diluted net income (loss) per share	$	(1.30	)	$	(0.61	)	$	0.19	$	1.22	$	2.43

⁽¹⁾ Our net loss included a non-cash valuation allowance of $21.1 million on certain U.S. deferred tax assets.

	Fiscal Year Ended
	2014		2013		2012		2011		2010
	(in thousands)
Consolidated Balance Sheet Data:
Cash, cash equivalents and marketable securities	$	83,962	$	92,862	$	109,908	97,699		$	66,460
Working capital	$	119,644	$	141,797	$	158,587	$	160,629	$	135,770
Total assets	$	223,236	$	262,834	$	259,454	$	267,221	$	220,025
Long-term liabilities including current portion of debt obligation	$	5,497	$	6,504	$	13,884	$	17,213	$	17,142
Total stockholders’ equity	$	179,537	$	207,373	$	215,771	$	209,992	$	170,849

ITEM 7. MANAGEMENT’S DISCUSSION AND ANALYSIS OF FINANCIAL CONDITION AND RESULTS OF OPERATIONS

Overview

You should read the following discussion and analysis of our financial condition and results of operations together with “Selected Financial Data” and our consolidated financial statements and related notes appearing elsewhere in this Annual Report on Form 10-K. This discussion and analysis contains forward-looking statements that involve risks, uncertainties and assumptions. The actual results may differ materially from those anticipated in these forward-looking statements as a result of certain factors, including, but not limited to, those presented under “Risk Factors” in Item 1A and elsewhere in this Annual Report on Form 10-K. Please see “Cautionary Information Regarding Forward-Looking Statements” at the beginning of this Form 10-K for additional information you should consider regarding forward-looking statements.

We are an innovator in the field of metrology and inspection systems for semiconductor manufacturing and other industries. Our systems are designed to precisely monitor film thickness and optical critical dimensions that are necessary to control the manufacturing process and to identify defects that can affect production yields and performance.

Principal factors that impact our revenue growth include capital expenditures by manufacturers of semiconductors to increase capacity and to enable their development of new technologies, and our ability to improve market share. The increasing complexity of the manufacturing processes for semiconductors is an important factor in the demand for our innovative

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metrology systems, as are the adoption of optical critical dimension (“OCD”) metrology across fabrication processes, immersion lithography and multiple patterning, new types of thin film materials, advanced packaging strategies and wafer backside inspection, and the need for improved process control to drive process efficiencies. Our strategy is to continue to innovate organically as well as to evaluate strategic acquisitions to address business challenges and opportunities.

Our revenues are primarily derived from product sales but are also derived from customer service and system upgrades for the installed base of our products. In 2014, we derived 80% of our total net revenues from product sales and 20% of our total net revenues from services.

Important Themes and Significant Trends

The semiconductor equipment industry is characterized by cyclical growth. Changing trends in the semiconductor industry continue to drive the need for metrology as a major component of device manufacturing. These trends include:

• Proliferation of Optical Critical Dimension Metrology across Fabrication Processes. Our customers use photolithographic processes to create patterns on wafers. Critical dimensions must be carefully controlled during this process. In advanced node device definition, additional monitoring of thickness and profile dimensions on these patterned structures at CMP, Etch, and Thin Film processing is driving broader OCD adoption. Our proprietary OCD systems can provide the critical process control of these circuit dimensions that is necessary for successful manufacturing of these state-of-the-art devices. Nanometrics OCD technology is broadly adopted across NAND, DRAM, and logic semiconductor manufacturing processes.

• Development of 3D Transistor Architectures. Our end customers continue to improve device density and performance by scaling front-end-of-line transistor architectures. Many of these designs, including FinFET transistors and 3D-NAND, have buried features and high aspect ratio stacked features that enable improved performance and density. The advanced designs require additional process control to manage the complex shapes and materials properties, driving additional applications for both OCD and our UniFire systems.

• Adoption of Advanced Packaging Processes. Our customers use photolithography, etching, metallization and wafer thinning to enable next generation advanced packaging solutions for semiconductor devices. These new packaging techniques lead to increased functionality in smaller, less expensive form factors.  Advanced packages can be broken down into high density flip chip or bump packages that increase pin density allowing for more complex I/O on advanced CPU parts. Similar or different devices can be stacked at the wafer level using a Through Silicon Via ("TSV") process. The TSV process enables high density small form factor parts, being primarily driven by mobile consumer products (e.g. cellular telephones with integrated CMOS camera sensors). Increasingly advanced packaging technologies are being adopted by our end customers.

• Adoption of New Types of Thin Film Materials. The need for ever increasing device circuit speed coupled with lower power consumption has pushed semiconductor device manufacturers to begin the replacement of traditional aluminum etch back interconnect flows, as well as conventional gate dielectric materials, with new materials and processes that are driving broader adoption of thin film and OCD metrology systems. To achieve greater semiconductor device speed, manufacturers have adopted copper in Logic/IDM and it is now proliferating in next generation DRAM and Flash nodes. Additionally, to achieve improved transistor performance in logic devices and higher cell densities in memory devices, new materials including high dielectric constant (or high-k) gate materials are increasingly being substituted for traditional silicon-oxide gate dielectric materials. High-k materials comprise complex thin films including layers of hafnium oxide and a bi-layer of thin film metals. Our advanced metrology and inspection solutions are required for control of process steps, which are critical to enable the device performance improvements that these new materials allow.

• Need for Improved Process Control to Drive Process Efficiencies. Competitive forces influencing semiconductor device manufacturers, such as price-cutting and shorter product life cycles, place pressure on manufacturers to rapidly achieve production efficiency. Device manufacturers are using our integrated and automated systems throughout the fabrication process to ensure that manufacturing processes scale rapidly, are accurate and can be repeated on a consistent basis.

• Increased Customer Concentration. Our market is characterized by continued consolidation in the customer base. The largest customer accounted for 18% of our total revenue in the fiscal year 2001, and the largest customer accounted for 27% and 30% of our total revenue in the fiscal year 2014 and 2013, respectively.

Critical Accounting Policies

The preparation of our financial statements conforms to accounting principles generally accepted in the United States of America, which requires management to make estimates and judgments in applying our accounting policies that have an important impact on our reported amounts of assets, liabilities, revenue, expenses and related disclosures at the date of our financial statements. On an ongoing basis, management evaluates its estimates including those related to bad debts, inventory

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valuations, warranty obligations, impairment and income taxes. Management bases its estimates and judgments on historical experience and on various other factors that are believed to be reasonable under the circumstances, the results of which form the basis for making judgments about the carrying values of assets and liabilities that are not readily apparent from other sources. Actual results may differ from management’s estimates. We believe that the application of the following accounting policies requires significant judgments and estimates on the part of management. For a summary of all of our accounting policies, including those discussed below, see Note 1 to our consolidated financial statements.

Revenue Recognition - We recognize revenue when persuasive evidence of an arrangement exists, delivery has occurred or services have been rendered, the seller's price is fixed or determinable, and collectability is reasonably assured. We derive revenue from the sale of process control metrology and inspection systems (“product revenue”) as well as spare part sales, billable services, service contracts, and upgrades (together “service revenue”). Upgrades are a group of parts and/or software that change the existing configuration of a product and are included in service revenue. They are distinguished from product revenue, which consists of complete, advanced process control metrology and inspection systems (the “system(s)”). Nanometrics' systems consist of hardware and software components that function together to deliver the essential functionality of the system. Arrangements for sales of systems often include defined customer-specified acceptance criteria.

For product sales to existing customers, revenue recognition occurs at the time title and risk of loss transfer to the customer, which usually occurs upon shipment from our manufacturing location, if it can be reliably demonstrated that the product has successfully met the defined customer specified acceptance criteria and all other recognition criteria have been met. For initial sales where we have not previously met the defined customer specified acceptance criteria, product revenues are recognized upon the earlier of receipt of written customer acceptance or expiration of the contractual acceptance period. In Japan, where contractual terms with the customer specify risk of loss and title transfers upon customer acceptance, revenue is recognized upon receipt of written customer acceptance, provided that all other recognition criteria have been met.

We warrant our products against defects in manufacturing. Upon recognition of product revenue, a liability is recorded for anticipated warranty costs. On occasion, customers request a warranty period longer than our standard warranty. In those instances where extended warranty services are separately quoted to the customer, the associated revenue is deferred and recognized as service revenue ratably over the term of the contract. The portion of service contracts and extended warranty services agreements that are uncompleted at the end of any reporting period are included in deferred revenue.

As part of customer services, we also sell software that is considered to be an upgrade to a customer's existing systems. These standalone software upgrades are not essential to the tangible product's functionality and are accounted for under software revenue recognition rules which require vendor specific objective evidence ("VSOE") of fair value to allocate revenue in a multiple element arrangement. Revenue from upgrades is recognized when the upgrades are delivered to the customer, provided that all other recognition criteria have been met.

Revenue related to spare parts is recognized upon shipment. Revenue related to billable services is recognized as the services are performed. Service contracts may be purchased by the customer during or after the warranty period and revenue is recognized ratably over the service contract period.

Frequently, we deliver products and various services in a single transaction. Our deliverables consist of tools, installation, upgrades, billable services, spare parts, and service contracts. Our typical multi-element arrangements include a sale of one or multiple tools that include installation and standard warranty. Other arrangements may consist of a sale of tools bundled with service elements or delivery of different types of services. Tools, upgrades, and spare parts are generally delivered to customers within a period of up to six months from order date. Installation is usually performed soon after delivery of the tool. The portion of revenue associated with installation is deferred based on estimated fair value and that revenue is recognized upon completion of the installation. Billable services are billed on a time and materials basis and performed as requested by customers. Under service contract arrangements, services are provided as needed over the fixed arrangement term and such terms can be up to 12 months. We do not generally grant customers a general right of return or refund and may impose a penalty on orders cancelled prior to the scheduled shipment date.

We evaluate our revenue arrangements to identify deliverables and to determine whether these deliverables are separable into multiple units of accounting. We allocate the arrangement consideration among the deliverables based on relative selling price. We have established VSOE for some of our products and services when a substantial majority of selling prices falls within a narrow range when sold separately. For deliverables with no established VSOE, we use best estimate of selling price to determine standalone selling price for such deliverable. We do not use third party evidence to determine standalone selling price since this information is not widely available in the market as our products contain a significant element of proprietary technology and the solutions offered differ substantially from our competitors. We have established a process for developing best estimated selling price ("BESP"), which incorporates historical selling prices, the effect of market

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conditions, gross margin objectives, pricing practices, as well as entity-specific factors. We monitor and evaluate BESP on a regular basis to ensure that changes in circumstances are accounted for in a timely manner.

When certain elements in multiple-element arrangements are not delivered or accepted at the end of a reporting period, the relative selling prices of undelivered elements are deferred until these elements are delivered and/or accepted. If deliverables cannot be accounted for as separate units of accounting, the entire arrangement is accounted for as a single unit of accounting and revenue is deferred until all elements are delivered and all revenue recognition requirements are met.

Allowance for Doubtful Accounts – We maintain allowances for estimated losses resulting from the inability of our customers to make their required payments. Credit limits are established through a process of reviewing the financial history and stability of our customers. Where appropriate and available, we obtain credit rating reports and financial statements of customers when determining or modifying their credit limits. We regularly evaluate the collectability of our trade receivable balances based on a combination of factors such as the length of time the receivables are past due, customary payment practices in the respective geographies and our historical collection experience with customers. We believe that our allowance for doubtful accounts adequately reflects our risk associated with our receivables. If the financial condition of a customer were to deteriorate, resulting in their inability to make payments, we would assess the necessity of recording additional allowances. This would result in additional general and administrative expenses being recorded for the period in which such determination was made.

Inventories – Inventories are stated at the lower of cost, which approximates actual cost on a first-in, first-out basis, or market. We are exposed to a number of economic and industry-specific factors that could result in portions of our inventory becoming either obsolete or in excess of anticipated usage, or saleable only for amounts that are less than their carrying amounts. These factors include, but are not limited to, technological changes in our market, our ability to meet changing customer requirements, competitive pressures in products and prices, and the availability of key components from our suppliers. We have established inventory reserves when conditions exist that suggest that our inventory may be in excess of anticipated demand or is obsolete based upon our assumptions about future demand for our products and market conditions. Once a reserve has been established, it is maintained until the part to which it relates is sold or is otherwise disposed of. Therefore, a sale of reserved inventory has a higher gross profit margin. We regularly evaluate our ability to realize the value of our inventory based on a combination of factors including the following: historical usage rates, forecasted sales of usage, product end-of-life dates, estimated current and future market values and new product introductions. Inventory includes evaluation tools placed at customer sites. For demonstration inventory, we also consider the age of the inventory and potential cost to refurbish the inventory prior to sale. Demonstration inventory is amortized over its useful life and the amortization expense is included in total inventory write down on our statements of cash flows. When recorded, our reserves are intended to reduce the carrying value of our inventory to its net realizable value. If actual demand for our products deteriorates, or market conditions are less favorable than those that we project, additional reserves may be required, which would adversely affect gross margin and net income.

Product Warranties – We sell the majority of our products with a standard twelve month repair or replacement warranty from the date of acceptance or shipment date. We provide an accrual for estimated future warranty costs based upon the historical relationship of warranty costs to the cost of products sold. The estimated future warranty obligations related to product sales are reported in the period in which the related revenue is recognized. The estimated future warranty obligations are affected by the warranty periods, sales volumes, product failure rates, material usage and labor and replacement costs incurred in correcting a product failure. If actual product failure rates, material usage, labor or replacement costs differ from our estimates, revisions to the estimated warranty obligations would be required. For new product introductions where limited or no historical information exists, we may use warranty information from other previous product introductions to guide us in estimating our warranty accrual. The warranty accrual represents the best estimate of the amount necessary to settle future and existing claims on products sold as of the balance sheet date. We periodically assess the adequacy of our recorded warranty reserve and adjust the amounts in accordance with changes in these factors.

Goodwill and Intangible Assets - Intangible assets with finite lives are amortized over their useful lives and are subject to an impairment assessment, as well as an evaluation of the appropriateness of their estimated useful lives, whenever events or changes in circumstances indicate that the carrying amount(s) may not be recoverable. Goodwill and indefinite lived assets are not amortized but tested annually for impairment. The goodwill impairment assessment involves three tests, Step 0, Step 1 and Step 2. The Step 0 test involves performing an initial qualitative assessment to determine whether it is more likely than not that the asset is impaired and thus whether it is necessary to proceed to Step 1 and calculate the fair value of the reporting unit. We may proceed directly to the Step 1 test without performing the Step 0 test. The Step 1 test involves measuring the recoverability of goodwill at the reporting unit level by comparing the reporting unit's carrying amount, including goodwill, to the fair value of the reporting unit.

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We perform a Step 0 assessment of the goodwill during the fourth quarter of each fiscal year, or whenever events or circumstances occur which indicate that an impairment may have occurred. As part of this assessment, we consider the trading value of our stock, the industry trends, and our sales forecast and products plans to determine if it is more likely than not that the fair value is higher than the carrying values of our reporting unit. If, after assessing the qualitative factors, we determine that it is not likely that the fair value of a reporting unit is less than its carrying value, then performing the two-step impairment test is unnecessary. However, if we conclude otherwise, then we are required to perform the Step 1 of the two-step goodwill impairment test. The Step 1 test requires a comparison of the fair value of our reporting unit to its net book value. If the fair value of the reporting unit is greater than its net book value, then no impairment is deemed to have occurred. If the fair value is less, then the Step 2 must be performed to determine the amount, if any, of actual impairment.

The process of evaluating the potential impairment of goodwill is highly subjective and requires significant judgment. In estimating the fair value of goodwill at the reporting unit level, we make estimates and judgments about future revenues and cash flows for the reporting unit. To determine the fair value, our review process includes the income method and is based on a discounted future cash flow approach that uses estimates including the following for the reporting unit: estimated revenue, market segment growth rates and market share assumptions; estimated costs; and appropriate discount rates based on the particular reporting unit's weighted average cost of capital. Our estimates of market segment growth, our market segment share and costs are based on historical data, various internal estimates and certain external sources, and are based on assumptions that are consistent with the plans and estimates we are using to manage the underlying businesses. Our business consists of both established and emerging technologies and our forecasts for emerging technologies are based upon internal estimates and external sources rather than historical information. We also consider our market capitalization on the dates of our impairment tests in determining the fair value of the respective businesses. As part of this assessment, we consider the trading value of our stock and our implied value, as compared to our net assets, as well as the valuation of our acquired businesses. If the carrying amount of the reporting unit exceeds its fair value as determined by these assessments, goodwill is considered impaired, and the Step 2 test is performed to measure the amount of impairment loss. As part of the Step 2 test to determine the amount of goodwill impairment, if any, we allocate the fair value of the reporting unit to all of its assets and liabilities as if the reporting unit had been acquired in a business combination and the fair value of the reporting unit was the price paid to acquire the reporting unit. The excess of the fair value of the reporting unit over the amount assigned to its assets and liabilities is the implied fair value of goodwill. When impairment is deemed to have occurred, we will recognize an impairment charge to reduce the carrying amount of our goodwill to its implied fair value.

Income Tax Assets and Liabilities - We account for income taxes such that deferred tax assets and liabilities are recognized using enacted tax rates for the effect of temporary differences between the book and tax accounting for assets and liabilities. Also, deferred tax assets are reduced by a valuation allowance to the extent we cannot conclude that it is more likely than not that a portion of the deferred tax asset will be realized in the future. We evaluate the deferred tax assets on a continuous basis throughout the year to determine whether or not a valuation allowance is appropriate. Factors used in this determination include future expected income and the underlying asset or liability which generated the temporary tax difference. Our income tax provision is primarily impacted by federal statutory rates, state and foreign income taxes and changes in our valuation allowance.

Stock-Based Compensation –We estimate the value of employee stock options on the date of grant using the Black-Scholes model. The determination of fair value of share-based payment awards on the date of grant using an option-pricing model is affected by our stock price as well as assumptions regarding a number of highly complex and subjective variables. These variables include, but are not limited to, the expected stock price volatility over the term of the awards, and actual and projected employee stock option exercise behaviors. The expected term of options granted is calculated based on the simplified method. The expected volatility is based on the historical volatility of our stock price.

Recent Accounting Pronouncements

See Note 2 of our consolidated financial statements for a description of recent accounting pronouncements, including the respective dates of adoption and effects on our results of operations and financial condition.

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Results of Operations

The following table presents our consolidated statements of operations data as a percentage of total net revenues for fiscal years ended December 27, 2014, December 28, 2013 and December 29, 2012, referred to as fiscal years 2014, 2013 and 2012, respectively.

	Fiscal Year
	2014		2013		2012
Net revenues:
Products	80.3	%	74.4	%	78.6	%
Service	19.7		25.6		21.4
Total net revenues	100.0		100.0		100.0
Costs of net revenues:
Cost of products	41.3		41.2		41.5
Cost of service	11.5		13.5		11.2
Amortization of intangible assets	1.6		1.8		1.4
Total costs of net revenues	54.4		56.5		54.1
Products gross margin	46.5		44.6		47.2
Service gross margin	41.9		47.2		47.4
Total gross margin	45.6		43.4		45.9
Operating expenses:
Research and development	20.3		22.7		16.2
Selling	16.2		18.8		14.5
General and administrative	14.4		15.3		11.8
Amortization of intangibles	0.3		0.5		0.4
Restructuring charge	1.4		1.2		—
Total operating expenses	52.6		58.5		42.9
Income (loss) from operations	(7.0	)	(15.0	)	3.0
Other income (expense):
Interest income	—		—		0.1
Interest expense	(0.2	)	(0.5	)	(0.6	)
Other, net	0.2		(0.9	)	—
Total other expense, net	—		(1.4	)	(0.5	)
Income (loss) before income taxes	(7.0	)	(16.4	)	2.5
Provision for (benefit from) income taxes	11.7		(6.5	)	0.1
Net income (loss)	(18.7	)%	(9.9	)%	2.4	%

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Total net revenues.

Our net revenues comprised the following product lines (in thousands, except percentages):

	Fiscal Year
	2014		2013		Change
Automated systems	$	108,768	$	82,924	$	25,844		31.2	%
Integrated systems	15,334		11,412		3,922			34.4	%
Materials characterization systems	9,487		13,066		(3,579		)	(27.4	)%
Total product revenue	133,589		107,402		26,187			24.4	%
Service	32,854		36,905		(4,051		)	(11.0	)%
Total net revenues	$	166,443	$	144,307	$	22,136		15.3	%

	Fiscal Year
	2013		2012		Change
Automated systems	$	82,924	$	119,451	$	(36,527	)	(30.6	)%
Integrated systems	11,412		12,379		(967		)	(7.8	)%
Materials characterization systems	13,066		11,997		1,069			8.9	%
Total product revenue	107,402		143,827		(36,425		)	(25.3	)%
Service	36,905		39,054		(2,149		)	(5.5	)%
Total net revenues	$	144,307	$	182,881	$	(38,574	)	(21.1	)%

In 2014, total netrevenues increased by $22.1 million from 2013, principally due to an industry-wide improvement in memory-related semiconductor capital spending and from an increase in foundry penetration, supported by the adoption of multiple Atlas^®, UniFire™ and IMPULSE^® systems by several customers during the first half of the year. This increase was partially offset by the decline in process metrology spending that occurred in the third quarter of 2014 due to a significant pause in spending at our two largest customers, and a decline in service revenues. Approximately $26.2 million of the increase in product revenues was attributable to sales of our Automated Systems (principally Atlas^® followed by UniFire™). Integrated Systems accounted for $3.9 million of the increase (principally IMPULSE^®) and was partially offset by Materials Characterization sales which decreased by $3.6 million. Service revenue decreased by $4.1 million in 2014 principally due to a decrease in upgrade revenue as a result of lower demand for upgrades of installed tools during the first, third and fourth quarters of 2014. Upgrades tend to fluctuate from quarter to quarter based on availability of new functionality from upgrades and customer production cycles, which determine when customers purchase available upgrades.

In 2013, revenue from products decreased by $36.4 million from 2012, principally due to decreased demand from our customers associated with the industry-wide slowdown in memory-related semiconductor capital spending. Approximately $36.5 million of the decrease was attributable to sales of our Automated Systems (principally Atlas^®). Integrated Systems accounted for $1.0 million of the decrease (principally IMPULSE^®) while Materials Characterization sales increased by $1.1 million. Service revenue decreased by $2.1 million in 2013 principally due to lower upgrade sales.

With a significant portion of the world's semiconductor manufacturing capacity located in Asia, a substantial portion of our revenues continue to be generated in that region. Although sales to customers within individual countries of that region will vary from time to time, we expect that a substantial portion of our revenues will continue to be generated in Asia.

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Gross margin.

Our gross margin breakdown was as follows:

	Fiscal Year
	2014		2013		2012
Products	46.5	%	44.6	%	47.2	%
Service	41.9	%	47.2	%	47.4	%

The calculation of product gross margin includes both cost of products and amortization of intangibles. The gross margin on product revenue increased to 46.5% in 2014 from 44.6% in 2013, reflecting an increase of 1.9 percentage points from 2013. The increase was due primarily to improved factory overhead absorption and a change in product mix to higher margin products, as well as from the 24.4% increase in product revenue during 2014. The gross margin on our services business decreased to 41.9% in 2014 from 47.2% in 2013, reflecting a decrease of 5.3 percentage points, due principally to a decrease in upgrade revenues, which typically have higher margins than core service revenue.

The gross margin on product revenue decreased to 44.6% in 2013 from 47.2% in 2012. The decrease was due to a change in product mix, and from the 25.3% decrease in revenue during 2013, which resulted in increased fixed costs as a percentage of revenue. The gross margin on service revenue remained relatively flat from 2012 to 2013 with lower sales of the higher gross margin upgrades, partially offset by improved margins for services provided under customer contracts.

Operating expenses.

Our operating expenses comprise the following categories (in thousands, except percentages):

	Fiscal Year
	2014		2013		Change
Research and development	$	33,776	$	32,714	$	1,062		3.2	%
Selling	27,033		27,129		(96		)	(0.4	)%
General and administrative	23,980		22,101		1,879			8.5	%
Amortization of intangible assets	420		701		(281		)	(40.1	)%
Restructuring charge	2,266		1,740		526			30.2	%
Total operating expenses	$	87,475	$	84,385	$	3,090		3.7	%

	Fiscal Year
	2013		2012		Change
Research and development	$	32,714	$	29,585	$	3,129		10.6	%
Selling	27,129		26,457		672			2.5	%
General and administrative	22,101		21,632		469			2.2	%
Amortization of intangible assets	701		776		(75		)	(9.7	)%
Restructuring charge	1,740		—		1,740			NM*
Total operating expenses	$	84,385	$	78,450	$	5,935		7.6	%

* NM = not meaningful

Research and development.

Research and development costs increased by $1.1 million or 3.2% in 2014 compared to 2013 related primarily to expense incurred in developing product improvements for our OCD and advance packaging system products.

Research and development costs increased by $3.1 million or 10.6% in 2013 compared to 2012 related primarily to investment in new platforms and product upgrade programs to improve capability and lower cost of ownership. This increase consisted primarily of investments in our OCD products.

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Investments in research and development personnel and associated projects are part of our strategy to ensure our products remain competitive and meet customer's needs.

Selling.

Selling expenses remained relatively flat in fiscal year 2014 compared to fiscal year 2013.

Selling expenses increased by $0.7 million or 2.5% in fiscal year 2013 compared to fiscal year 2012. The increase in expenses related to customer evaluation tools.

General and administrative.

General and administrative expenses increased by $1.9 million or 8.5% in fiscal year 2014 compared to 2013. The increase was primarily due to the depreciation related to our ERP implementation in 2014 and higher variable compensation expenses.

General and administrative expenses increased by $0.5 million or 2.2% in fiscal year 2013 compared to 2012. The increase was a result of higher labor costs, partially offset by lower telecommunication expenses.

Amortization of intangible assets.

Amortization of intangible assets included in operating expenses in fiscal year 2014 decreased slightly compared to 2013, as a result of the reduction in amortization due to intangible assets that became fully amortized in 2013.

Amortization of intangible assets included in operating expenses in fiscal year 2013 decreased slightly, compared to 2012, as a result of the reduction in amortization due to intangible assets that became fully amortized in 2013.

Restructuring charge.

We recorded a restructuring charge of $2.3 million in 2014 related to our efforts to improve operating efficiencies. This amount includes charges primarily related to employee severance, other expenses (primarily vendor contract termination costs) and early termination costs related to a facility lease due to expire in 2017 in the amounts of $1.0 million, $0.4 million and $0.9 million respectively. We have measured and recognized the exit liability associated with the lease at the cease-use date. We expect to complete this restructuring plan by March 2015. Other related costs are expected to be recognized as incurred.

We recorded a restructuring charge of $1.7 million in 2013 as a result of our decision to consolidate a portion of our European operations. This amount includes charges primarily related to employee severance and acceleration of RSUs in the amount of $0.8 million and $0.9 million, respectively. All cash payments related to the restructuring charge were paid in the fourth quarter of fiscal year 2013. We completed this restructuring plan in 2014.

Other income (expense), net.

Our other income (expense), net, consisted of the following items (in thousands, except percentages):

	Fiscal Year
	2014			2013			Change
Interest income	$	47		$	62		$	(15	)	(24.2	)%
Interest expense	(389		)	(651		)	262			(40.2	)%
Other income (expense)	374			(1,267		)	1,641			NM*
Total other income (expense), net	$	32		$	(1,856	)	$	1,888		(101.7	)%

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	Fiscal Year
	2013			2012			Change
Interest income	$	62		$	133		$	(71	)	(53.4	)%
Interest expense	(651		)	(1,040		)	389			(37.4	)%
Other income (expense)	(1,267		)	48			(1,315		)	NM *
Total other expense, net	$	(1,856	)	$	(859	)	$	(997	)	116.1	%

* NM = not meaningful

Interest income declined minimally in 2014 from 2013 as the average balances of cash, cash equivalents, and marketable securities remained relatively flat. Interest expense was lower in 2014 than in the prior year due to the repayment of the entire outstanding balance of the mortgage on our headquarters during 2013. Other income increased by $1.6 million principally due to fluctuations in foreign exchange rates, and to a lesser extent, from a $0.2 million increase in fair value of contingent consideration liability.

Interest income declined minimally in 2013 from 2012 as the total balances of cash, cash equivalents, and marketable securities remained relatively flat. Interest expense decreased by $0.4 million primarily due to a lower principal balance of the mortgage on our headquarters as a result of monthly payments and a prepayment of $1.4 million in July of 2012. On July 18, 2013, the entire outstanding principal balance of the mortgage and all accrued interest was repaid. Consequently, we expect interest expense to be lower in future periods. Other expense increased by $1.3 million principally due to a $0.4 million increase in foreign exchange loss, and from a $0.8 million increase in fair value of contingent consideration liability as a result of fluctuations in unobservable inputs.

Provision for (benefit from) income taxes.

Our provision (benefit) for income taxes was $19.5 million, $(9.4) million, and $0.2 million in 2014, 2013 and 2012, respectively. The increase in the tax provision for 2014 from 2013 was primarily related to the recording of a valuation allowance against our U.S. deferred tax assets. The decrease in the tax provision for 2013 from 2012 was primarily attributable to our lower pre-tax earnings as well as a one-time benefit associated with the reinstatement of the federal R&D credit for both fiscal years 2012 and 2013.

Our provision for income taxes for 2014 of $19.5 million reflects an effective tax rate of (167.8)%. This rate differs from the Federal statutory rate of 35.0% primarily due to the recording of a valuation allowance against our U.S. deferred tax assets which represented a $23.9 million provision as well as equity compensation expenses for which no current tax deduction is available, offset by foreign income being taxed at lower rates. Our benefit from income taxes for 2013 of $(9.4) million reflects an effective tax rate of 40.0%. This rate differs from the Federal statutory rate of 35.0% primarily due to the reinstatement of the Federal R&D tax credit, which represented a $1.4 million benefit for both 2012 and 2013, as well as the benefit from state income taxes, offset by tax on foreign income, and equity compensation expenses for which no current tax deduction is available. Our provision for income taxes for 2012 of $0.2 million reflects an effective tax rate of 3.3%. This rate differs from the Federal statutory rate of 35.0% primarily due to the benefit associated with the Internal Revenue Service approval of tax elections made in 2012 to treat certain foreign subsidiaries as branches for U.S. income tax purposes, as well as foreign income being taxed at lower rates, offset in part by state income taxes and equity compensation expenses for which no current tax deduction is available.

We maintain valuation allowances when it is likely that all or a portion of a deferred tax asset will not be realized. Changes in valuation allowances from period to period are included in our income tax provision in the period of change. In determining whether a valuation allowance is warranted, we take into account such factors as prior earnings history, expected future earnings, unsettled circumstances that, if unfavorably resolved, would adversely affect utilization of a deferred tax asset, carry-back and carry-forward periods, and tax strategies that could potentially enhance the likelihood of realization of a deferred tax asset. As such, in 2014 we recorded a valuation allowance against our U.S. deferred tax assets of $23.9 million.

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Liquidity and Capital Resources

The following table presents selected financial information and statistics as of and for the years ended December 27, 2014, December 28, 2013 and December 29, 2012 (in millions):

	At
	December 27, 2014			December 28, 2013			December 29, 2012
Cash, cash equivalents and marketable securities	$	84.0		$	92.9		$	109.9
Working capital	$	119.6		$	141.8		$	158.6
Cash provided by (used in operating activities)	$	(0.6	)	$	(2.4	)	$	24.0
Cash used in investing activities	$	(8.1	)	$	(7.8	)	$	(51.8	)
Cash used in financing activities	$	(0.7	)	$	(7.5	)	$	(6.8	)

We believe our existing balances of cash, cash equivalents and marketable securities will be sufficient to satisfy our working capital needs, capital asset purchases, outstanding commitments and other liquidity requirements associated with our existing operations over the next twelve months.

During 2014, cash used in operating activities of $0.6 million was a result of $31.1 million of net losses, non-cash adjustments to net income of $37.8 million and a decrease in net change in operating assets and liabilities of $7.3 million. Cash used in investing activities of $8.1 million during 2014 consisted primarily of cash used for purchases of marketable securities, net of maturities, of $2.3 million; and cash used to acquire property, plant and equipment of $5.8 million. Cash used in financing activities of $0.7 million during 2014 consisted primarily of cash used to repurchase common stock of $5.3 million, royalty and other payments to Zygo of $0.6 million, and cash paid for taxes on net issuance of stock awards of $0.7 million, partially offset by $6.0 million in proceeds from issuance of common stock from the employee stock purchase program and the exercise of stock options.

During 2013, cash used in operating activities of $2.4 million was a result of $14.1 million of net losses, non-cash adjustments to net income of $18.7 million and a decrease in net change in operating assets and liabilities of $7.0 million. Cash used in investing activities of $7.8 million during 2013 consisted primarily of cash used for purchases of marketable securities, net of maturities, of $2.1 million; and cash used to acquire property, plant and equipment of $5.7 million. Cash used in financing activities of $7.5 million during 2013 consisted primarily of cash used to repurchase common stock of $5.0 million, mortgage repayments on our corporate headquarters of $5.2 million, royalty and other payments to Zygo of $1.0 million, and cash paid for taxes on net issuance of stock awards of $1.2 million, partially offset by $5.0 million in proceeds from issuance of common stock from the employee stock purchase program and the exercise of stock options.

During 2012, cash generated from operating activities was a result of $24.0 million was a result of $4.5 million of net income, non-cash adjustments to net income of $19.8 million and a decrease in net change in operating assets and liabilities of $0.3 million. Cash used in investing activities of $51.8 million during 2012 consisted primarily of cash used for purchases of marketable securities, net of maturities, of $47.3 million; and cash used to acquire property, plant and equipment of $5.0 million, partially offset by an escrow payment received of $0.5 million related to the acquisition of Nanda Technologies GmbH. Cash used in financing activities of $6.8 million during 2012 consisted primarily of cash used to repurchase common stock of $8.5 million, mortgage repayments on our corporate headquarters of $2.2 million, royalty and other payments to Zygo of $0.3 million, and cash paid for taxes on net issuance of stock awards of $0.6 million, partially offset by $3.9 million in proceeds from issuance of common stock from the employee stock purchase program and the exercise of stock options and a $0.9 million excess tax benefit related to equity awards.

Debt and Repurchases of Common Stock

Line of Credit - On April 23, 2012, we amended our revolving line of credit facility with Comerica Bank to (i) extend the maturity date of such facility by two years to April 30, 2014, (ii) decrease the unused revolving line commitment fee from 0.1875% per annum to 0.10% per annum, and (iii) reduce the minimum interest rate on borrowings from 5.75% to 3.00% per annum. On May 30, 2014, we amended our revolving line of credit facility with Comerica Bank principally (i) to extend the maturity date of such facility by two years to May 30, 2016, and (ii) to increase the minimum amount available to borrow to $12.0 million.

The instrument governing the line of credit facility includes certain financial covenants regarding tangible net worth. The revolving line of credit agreement includes a provision for the issuance of commercial or standby letters of credit by the

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bank on our behalf. The value of all letters of credit outstanding reduces the total line of credit available. The revolving line of credit is collateralized by a blanket lien on all of our domestic assets excluding intellectual property and real estate. The minimum borrowing interest rate is 3.00% per annum. Borrowing is limited to the lesser of (a) $12.0 million plus the borrowing base, or (b) $20.0 million. The total borrowing available as of December 27, 2014 was $18.8 million. As of December 27, 2014, we were not in breach of any restrictive covenants in connection with this line of credit. There were no borrowings against the line of credit during 2014 or 2013 and there were no outstanding amounts drawn on this facility as of December 27, 2014 and December 28, 2013, respectively. Although we have no current plans to request advances under this credit facility, we may use the proceeds of any future borrowing for general corporate purposes, future acquisitions or expansion of our business.

Mortgage Loan - On July 18, 2013, we repaid $4.8 million of a mortgage loan, secured, in part, by a lien on and security interest in the building and land comprising our principal offices in Milpitas, California and representing the entire outstanding principal balance of the loan and all accrued interest. We did not incur any fees associated with the prepayment of the loan. At December 27, 2014 there was no outstanding balance on the loan.

Repurchases of Common Stock - In November 2010, our Board of Directors approved a stock repurchase program to repurchase up to $10.0 million of our common stock. As of December 27, 2014, our Board of Directors had further authorized additional repurchases resulting in an aggregate repurchase authorization of up to $30.0 million of shares of common stock under the approved programs.

Stock repurchases under the programs may be made through open market and privately negotiated transactions, at times and in such amounts as management deems appropriate. The timing and actual number of shares repurchased is dependent on a variety of factors including price, corporate and regulatory requirements and other market conditions.

Shares repurchased and retired for the indicated periods of the applicable repurchase programs with the associated cost of repurchase and amount available for repurchase at the end of the respective periods are as follows (in thousands, except number of shares and weighted average price per share):

	Fiscal Year 2014		Fiscal Year 2013		Fiscal Year 2012
Number of shares of common stock repurchased	362,633		332,771		587,766
Weighted average price per share	$	14.74	$	15.03	$	14.47
Total cost of repurchase	$	5,344	$	5,000	$	8,504
Amount available for repurchase at end of period	$	6,118	$	11,462	$	16,462

Subsequent to December 27, 2014, we repurchased 111,050 shares at an average purchase price of $15.49 per share for a total of $1.7 million. After these purchases, $4.4 million remained available for the future repurchase of our common stock under the 2012 program.

Business Partnership - On June 17, 2009, we announced a strategic business partnership with Zygo Corporation whereby we have purchased inventory and certain other assets from Zygo Corporation, and the two companies entered into a supply agreement. We will make payments to Zygo Corporation (with an estimated present value of $2.4 million as of December 27, 2014) over a period of time as acquired inventory is sold and other aspects of the supply agreement are executed. We made royalty and sustaining engineering payments of $0.6 million and $1.0 million to Zygo in fiscal years 2014 and 2013, respectively.

We have evaluated and will continue to evaluate the acquisitions of products, technologies or businesses that are complementary to our business. These activities may result in product and business investments, which may affect our cash position and working capital balances. Some of these activities might require significant cash outlays.

Our principal sources of liquidity are cash and cash equivalents, and marketable securities, cash flow generated from our operations, and, to a lesser extent, borrowings from a line of credit. Our liquidity is affected by many factors, including those that relate to our specific operations and those that relate to the uncertainties of global and regional economies and the sectors of the semiconductor industry which we operate in. Although our cash requirements will fluctuate based on the timing and extent of these factors, we believe our existing cash, cash equivalents and marketable securities and borrowing availability, combined with cash currently projected to be generated from our operations, will be sufficient to meet our liquidity needs through at least the next twelve months.

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Off-Balance Sheet Arrangements

We had no off-balance sheet arrangements or obligations as of December 27, 2014 and December 28, 2013, respectively.

Contractual Obligations

The following table summarizes our contractual cash obligations as of December 27, 2014, and the effect of such obligations.

		Payments due by period
	Total	Less than 1 year	1-3 years	3-5 years	More than 5 years
Purchase commitments - inventory (1)	$29,457	$29,457	—	—	—
Fair value of deferred payments to Zygo Corporation related to acquisition (2)	2,905	1,454	851	400	200
Restructuring	997	511	486	—	—
Other long-term liabilities	266	—	—	—	266
Operating lease obligations	3,610	1,468	1,653	489	—
Total	$37,235	$32,890	$2,990	$889	$466

(1) We maintain certain open inventory purchase agreements with our suppliers to ensure a smooth and continuous supply availability for key components. Our liability under these purchase commitments is generally restricted to a forecasted time-horizon as mutually agreed upon between the parties. This forecasted time-horizon can vary among different suppliers. We estimate our open inventory purchase commitment as of December 27, 2014 was approximately $29.5 million. Actual expenditures will vary based upon the volume of the transactions and length of contractual service provided. In addition, the amounts paid under these arrangements may be less in the event that the arrangements are renegotiated or cancelled.

(2) On June 17, 2009, we announced a strategic business partnership with Zygo Corporation whereby we have purchased inventory and certain other assets from Zygo Corporation, and the two companies entered into a supply agreement. We will make payments to Zygo Corporation (with an estimated present value of $2.4 million and an estimated future value of $2.9 million million as of December 27, 2014) over a period of time as acquired inventory is sold and other aspects of the supply agreement are executed.

Excluded from the contractual obligation table above are $0.7 million of future payments related to uncertain tax positions because we cannot reliably estimate the timing of the settlements with the respective tax authorities.

ITEM 7A. QUANTITATIVE AND QUALITATIVE DISCLOSURES ABOUT MARKET RISK

We are exposed to financial market risks related to foreign currency exchange rates and interest rates. We do not use derivative financial instruments.

Foreign Currency Risk

A substantial part of our business consists of sales made to customers outside the United States: 78%, 67%, and 76% of sales in 2014, 2013, and 2012, respectively, and 16%, 16%, and 14% of net revenues in 2014, 2013, and 2012, respectively, were denominated in currencies other than the U.S. dollar. Additionally, portions of our costs of net revenues and our operating expenses are incurred by our international operations and denominated in local currencies.

Our exposure to foreign currency exchange rate fluctuations arises in part from intercompany balances in which costs are charged between our U.S. headquarters and our foreign subsidiaries. On our consolidated balance sheet these intercompany balances are eliminated and thus no consolidated balances are associated with these intercompany balances; however, since each foreign entity's functional currency is generally its respective local currency, there is exposure to foreign exchange risk on a consolidated basis. Intercompany balances are denominated primarily in U.S. dollars and, to a lesser extent, other local currencies.  The net intercompany balance, exposed to foreign currency risk, at December 27, 2014 was approximately $4.1 million.  A hypothetical change of 10% in the relative value of the US dollar versus local functional currencies could result in

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an increase or decrease of approximately $0.4 million in transaction gains or losses which would be included in our statement of operations.

For 2014, 2013 and 2012, foreign currency transactions resulted in a gain of $0.1 million, a loss of $0.7 million and a loss of $0.3 million, respectively.

Interest Rate Risk

Our exposure to market risk resulting from changes in interest rates relates primarily to our investment portfolio. At December 27, 2014, and December 28, 2013, we held $49.3 million and $48.1 million, respectively, in marketable securities. The fair value of our marketable securities could be adversely impacted due to a rise in interest rates, but we do not believe such impact would be material. Securities with longer maturities are subject to a greater interest rate risk than those with shorter maturities and as of December 27, 2014 and December 28, 2013, the average duration of our portfolio was less than nine months. We do not hold securities for trading purposes.

As of December 27, 2014 and December 28, 2013, there were no amounts borrowed against the line of credit and, therefore, there exists no significant interest rate risks.

On July 18, 2013, we repaid $4.8 million representing the outstanding balance of a mortgage loan secured, in part, by a lien on and security interest in the building and land composing our principal offices in Milpitas, California and representing the entire outstanding principal balance of the loan and all accrued interest. As of December 28, 2013, there was no outstanding balance on the loan.

35

ITEM 8.     FINANCIAL STATEMENTS AND SUPPLEMENTARY DATA

The information required by Item 8 of Form 10-K is presented here in the following order:

INDEX TO CONSOLIDATED FINANCIAL STATEMENTS

	Page
Financial Statements:
Report of Independent Registered Public Accounting Firm	37
Consolidated Balance Sheets	38
Consolidated Statements of Operations	39
Consolidated Statements of Comprehensive Income (Loss)	42
Consolidated Statements of Stockholders’ Equity	41
Consolidated Statements of Cash Flows	42
Notes to Consolidated Financial Statements	43
Supplementary Data:
Selected Quarterly Financial Results (Unaudited)	69

36

Report of Independent Registered Public Accounting Firm

To the Board of Directors and Stockholders of

Nanometrics Incorporated

In our opinion, the accompanying consolidated balance sheets and the related consolidated statements of operations, comprehensive income (loss), stockholders’ equity, and of cash flows present fairly, in all material respects, the financial position of Nanometrics Incorporated and its subsidiaries at December 27, 2014 and December 28, 2013, and the results of their operations and their cash flows for each of the three years in the period ended December 27, 2014, in conformity with accounting principles generally accepted in the United States of America. In addition, in our opinion, the financial statement schedule listed in the accompanying index appearing under Item 15(a)(2) presents fairly, in all material respects, the information set forth therein when read in conjunction with the related consolidated financial statements. Also in our opinion, the Company maintained, in all material respects, effective internal control over financial reporting as of December 27, 2014, based on criteria established in Internal Control - Integrated Framework 2013 issued by the Committee of Sponsoring Organizations of the Treadway Commission (COSO). The Company's management is responsible for these financial statements and financial statement schedule, for maintaining effective internal control over financial reporting and for its assessment of the effectiveness of internal control over financial reporting, included in the accompanying Management's Report on Internal Control over Financial Reporting. Our responsibility is to express opinions on these financial statements and financial statement schedule and on the Company's internal control over financial reporting based on our integrated audits. We conducted our audits in accordance with the standards of the Public Company Accounting Oversight Board (United States). Those standards require that we plan and perform the audits to obtain reasonable assurance about whether the financial statements are free of material misstatement and whether effective internal control over financial reporting was maintained in all material respects. Our audits of the financial statements included examining, on a test basis, evidence supporting the amounts and disclosures in the financial statements, assessing the accounting principles used and significant estimates made by management, and evaluating the overall financial statement presentation. Our audit of internal control over financial reporting included obtaining an understanding of internal control over financial reporting, assessing the risk that a material weakness exists, and testing and evaluating the design and operating effectiveness of internal control based on the assessed risk. Our audits also included performing such other procedures as we considered necessary in the circumstances. We believe that our audits provide a reasonable basis for our opinions.

A company’s internal control over financial reporting is a process designed to provide reasonable assurance regarding the reliability of financial reporting and the preparation of financial statements for external purposes in accordance with generally accepted accounting principles. A company’s internal control over financial reporting includes those policies and procedures that (i) pertain to the maintenance of records that, in reasonable detail, accurately and fairly reflect the transactions and dispositions of the assets of the company; (ii) provide reasonable assurance that transactions are recorded as necessary to permit preparation of financial statements in accordance with generally accepted accounting principles, and that receipts and expenditures of the company are being made only in accordance with authorizations of management and directors of the company; and (iii) provide reasonable assurance regarding prevention or timely detection of unauthorized acquisition, use, or disposition of the company’s assets that could have a material effect on the financial statements.

Because of its inherent limitations, internal control over financial reporting may not prevent or detect misstatements. Also, projections of any evaluation of effectiveness to future periods are subject to the risk that controls may become inadequate because of changes in conditions, or that the degree of compliance with the policies or procedures may deteriorate.

/s/PricewaterhouseCoopers LLP

San Jose, California

February 24, 2015

37

NANOMETRICS INCORPORATED

CONSOLIDATED BALANCE SHEETS

(In thousands except share and per share amounts)

	December 27, 2014			December 28, 2013
ASSETS
Current assets:
Cash and cash equivalents	$	34,676		$	44,765
Marketable securities	49,286			48,097
Accounts receivable, net of allowances of $253 and $293, respectively	26,121			31,436
Inventories	35,105			34,520
Inventories-delivered systems	1,912			6,901
Prepaid expenses and other	9,289			10,519
Deferred income tax assets	1,457			14,516
Total current assets	157,846			190,754
Property, plant and equipment, net	49,633			47,439
Goodwill	10,494			11,743
Intangible assets, net	4,294			7,864
Deferred income tax assets	410			4,338
Other assets	559			696
Total assets	$	223,236		$	262,834
LIABILITIES AND STOCKHOLDERS’ EQUITY
Current liabilities:
Accounts payable	$	10,199		$	10,604
Accrued payroll and related expenses	8,700			7,853
Deferred revenue	10,021			21,749
Other current liabilities	8,265			7,993
Income taxes payable	1,017			758
Total current liabilities	38,202			48,957
Deferred revenue	2,591			3,718
Income taxes payable	701			1,171
Deferred tax liability	926			—
Other long-term liabilities	1,279			1,615
Total liabilities	43,699			55,461
Commitments and contingencies (Note 11)
Stockholders’ equity:
Preferred stock, $0.001 par value; 3,000,000 shares authorized; no shares issued or outstanding	—			—
Common stock, $0.001 par value, 47,000,000 shares authorized: 23,813,729 and 23,537,275, respectively, issued and outstanding	24			24
Additional paid-in capital	251,396			244,733
Accumulated deficit	(69,114		)	(37,996		)
Accumulated other comprehensive income	(2,769		)	612
Total stockholders’ equity	179,537			207,373
Total liabilities and stockholders’ equity	$	223,236		$	262,834

See Notes to Consolidated Financial Statements

38

NANOMETRICS INCORPORATED

CONSOLIDATED STATEMENTS OF OPERATIONS

(In thousands except per share amounts)

	Years Ended
	December 27, 2014			December 28, 2013			December 29, 2012
Net revenues:
Products	$	133,589		$	107,402		$	143,827
Service	32,854			36,905			39,054
Total net revenues	166,443			144,307			182,881
Costs of net revenues:
Cost of products	68,812			59,509			75,878
Cost of service	19,086			19,489			20,526
Amortization of intangible assets	2,723			2,633			2,549
Total costs of net revenues	90,621			81,631			98,953
Gross profit	75,822			62,676			83,928
Operating expenses:
Research and development	33,776			32,714			29,585
Selling	27,033			27,129			26,457
General and administrative	23,980			22,101			21,632
Amortization of intangible assets	420			701			776
Restructuring charge	2,266			1,740			—
Total operating expenses	87,475			84,385			78,450
Income (loss) from operations	(11,653		)	(21,709		)	5,478
Other (income) expense:
Interest income	47			62			133
Interest expense	(389		)	(651		)	(1,040		)
Other income (expense), net	374			(1,267		)	48
Total other income (expense), net	32			(1,856		)	(859		)
Income (loss) before income taxes	(11,621		)	(23,565		)	4,619
Provision for (benefit from) income taxes	19,497			(9,419		)	154
Net income (loss)	$	(31,118	)	$	(14,146	)	$	4,465
Net income (loss) per share:
Basic	$	(1.30	)	$	(0.61	)	$	0.19
Diluted	$	(1.30	)	$	(0.61	)	$	0.19
Weighted average shares used in per share calculation:
Basic	23,958			23,290			23,358
Diluted	23,958			23,290			23,845

See Notes to Consolidated Financial Statements

39

NANOMETRICS INCORPORATED

CONSOLIDATED STATEMENTS OF COMPREHENSIVE INCOME (LOSS)

(In thousands)

(Unaudited)

	Years Ended
	December 27, 2014			December 28, 2013			December 29, 2012
Net income (loss)	$	(31,118	)	$	(14,146	)	$	4,465
Other comprehensive income (loss):
Change in foreign currency translation adjustment	(3,239		)	(818		)	(264		)
Employee benefit plan adjustment	(106		)	151			(11		)
Net change on unrealized gains (losses) on available-for-sale investments	(36		)	7			(2		)
Other comprehensive loss	(3,381		)	(660		)	(277		)
Comprehensive income (loss)	$	(34,499	)	$	(14,806	)	$	4,188

See Notes to Consolidated Financial Statements

40

NANOMETRICS INCORPORATED

CONSOLIDATED STATEMENTS OF STOCKHOLDERS’ EQUITY

(In thousands, except share amounts)

	Common Stock				Additional Paid-In Capital			Accumulated Deficit			Accumulated Other Comprehensive Income			Total Stockholders’ Equity
	Shares		Amount
Balance as of December 31, 2011	23,182,771		$	23	$	236,735		$	(28,315	)	$	1,549		$	209,992
Net income								4,465			—			4,465
Employee benefit plan adjustment								—			(11		)	(11		)
Foreign currency translation adjustments								—			(264		)	(264		)
Unrealized loss on investments, net of tax											(2		)	(2		)
Issuance of common stock under stock-based compensation plans	655,424		—		4,205			—			—			4,205
Stock-based compensation expense	—		—		5,890			—			—			5,890
Repurchases and retirement of common stock	(587,766	)	—		(8,504		)							(8,504		)
Balance as of December 29, 2012	23,250,429		23		238,326			(23,850		)	1,272			215,771
Net loss								(14,146		)	—			(14,146		)
Employee benefit plan adjustment								—			151			151
Foreign currency translation adjustments								—			(818		)	(818		)
Unrealized gain on investments, net of tax											7			7
Issuance of common stock under stock-based compensation plans	619,617		1		3,733			—			—			3,734
Stock-based compensation expense	—		—		7,674			—			—			7,674
Repurchases and retirement of common stock	(332,771	)	—		(5,000		)							(5,000		)
Balance as of December 28, 2013	23,537,275		24		244,733			(37,996		)	612			207,373
Net loss								(31,118		)	—			(31,118		)
Employee benefit plan adjustment								—			(106		)	(106		)
Foreign currency translation adjustments								—			(3,239		)	(3,239		)
Unrealized gain on investments, net of tax											(36		)	(36		)
Issuance of common stock under stock-based compensation plans	639,087		—		5,255			—			—			5,255
Stock-based compensation expense	—		—		6,752			—			—			6,752
Repurchases and retirement of common stock	(362,633	)	—		(5,344		)				—			(5,344		)
Balance as of December 27, 2014	23,813,729		$	24	$	251,396		$	(69,114	)	$	(2,769	)	$	179,537

See Notes to Consolidated Financial Statements

41

NANOMETRICS INCORPORATED

CONSOLIDATED STATEMENTS OF CASH FLOWS

(In thousands)

	Years Ended
	December 27, 2014			December 28, 2013			December 29, 2012
Cash flows from operating activities:
Net income (loss)	$	(31,118	)	$	(14,146	)	$	4,465
Reconciliation of net income (loss) to net cash provided by (used in) operating activities:
Depreciation and amortization	9,767			8,787			8,137
Stock-based compensation	6,752			7,674			5,890
Excess tax benefit from equity awards	—			53			(910		)
Loss on disposal of fixed assets	249			177			303
Inventory write-down	2,897			7,579			3,519
Deferred income taxes	17,915			(6,889		)	2,752
Changes in fair value of contingent payments to Zygo Corporation	201			1,325			129
Changes in assets and liabilities:
Accounts receivable	3,861			(10,376		)	7,733
Inventories	(7,173		)	(7,024		)	1,383
Inventories-delivered systems	4,988			(4,627		)	(758		)
Prepaid expenses and other	2,303			(1,855		)	1,114
Accounts payable, accrued and other liabilities	1,790			4,840			(12,567		)
Deferred revenue	(12,855		)	12,717			2,472
Income taxes payable	(212		)	(666		)	346
Net cash provided by (used in) operating activities	(635		)	(2,431		)	24,008
Cash flows from investing activities:
Escrow payment received related to Nanda acquisition	—			—			508
Sales of marketable securities	—			—			3,000
Maturities of marketable securities	38,839			47,089			8,336
Purchases of marketable securities	(41,100		)	(49,182		)	(58,647		)
Purchases of property, plant and equipment	(5,792		)	(5,689		)	(4,990		)
Net cash used in investing activities	(8,053		)	(7,782		)	(51,793		)
Cash flows from financing activities:
Payments to Zygo Corporation related to acquisition	(587		)	(1,004		)	(300		)
Repayments of debt obligations	—			(5,224		)	(2,210		)
Proceeds from sale of shares under employee stock option plans and purchase plan	5,958			4,967			3,913
Excess tax benefit from equity awards	—			(53		)	910
Taxes paid on net issuance of stock awards	(702		)	(1,181		)	(618		)
Repurchases of common stock	(5,344		)	(5,000		)	(8,504		)
Net cash used in financing activities	(675		)	(7,495		)	(6,809		)
Effect of exchange rate changes on cash and cash equivalents	(726		)	(442		)	(190		)
Net decrease in cash and cash equivalents	(10,089		)	(18,150		)	(34,784		)
Cash and cash equivalents, beginning of period	44,765			62,915			97,699
Cash and cash equivalents, end of period	$	34,676		$	44,765		$	62,915
Supplemental disclosure of cash flow information:
Cash paid for interest	$	—		$	232		$	522
Cash paid for income taxes, net	$	861		$	313		$	5,113
Supplemental disclosure of non-cash investing activities:
Transfer of inventory to property, plant and equipment, net	$	3,275		$	3,145		$	—

See Notes to Consolidated Financial Statements

42

NANOMETRICS INCORPORATED

NOTES TO CONSOLIDATED FINANCIAL STATEMENTS

Note 1. Nature of Business, Basis of Presentation and Significant Accounting Policies

Description of Business – Nanometrics Incorporated (“Nanometrics” or the “Company”) and its wholly-owned subsidiaries design, manufacture, market, sell and support optical critical dimension ("OCD"), thin film and overlay dimension metrology and inspection systems used primarily in the manufacturing of semiconductors, solar photovoltaics (“solar PV”) and high-brightness LEDs (“HB-LED”), as well as by customers in the silicon wafer and data storage industries. Nanometrics' metrology systems precisely measure a wide range of film types deposited on substrates during manufacturing to control manufacturing processes and increase production yields in the fabrication of integrated circuits. The Company’s OCD technology is a patented critical dimension measurement technology that is used to precisely determine the dimensions on the semiconductor wafer that directly control the resulting performance of the integrated circuit devices. The thin film metrology systems use a broad spectrum of wavelengths, high-sensitivity optics, proprietary software, and patented technology to measure the thickness and uniformity of films deposited on silicon and other substrates as well as their chemical composition. The overlay metrology systems are used to measure the overlay accuracy of successive layers of semiconductor patterns on wafers in the photolithography process. Nanometrics' inspection systems are used to find defects on patterned and unpatterned wafers at nearly every stage of the semiconductor production flow. The corporate headquarters of Nanometrics is located in Milpitas, California.

Basis of Presentation – The consolidated financial statements include Nanometrics Incorporated and its wholly-owned subsidiaries. All significant intercompany accounts and transactions have been eliminated in consolidation.

Fiscal Year – On October 17, 2014, the Board of Directors of the Company approved a change in the Company's fiscal year from a fiscal year ending on the Saturday closest to December 31 to a 52/53 week fiscal year ending on the last Saturday of the calendar year. All periods presented consisted of a 52-week year.

Reclassifications – Certain prior year amounts have been reclassified to conform to the current year presentation.

Use of Estimates – The preparation of financial statements in conformity with accounting principles generally accepted in the United States of America ("U.S. GAAP") requires management to make estimates and assumptions that affect the reported amounts of assets and liabilities and disclosure of contingent assets and liabilities at the date of the financial statements and the reported amounts of revenues and expenses during the reported period. Actual results could differ materially from those estimates. Estimates are used for, but not limited to, revenue recognition, the provision for doubtful accounts, the provision for excess, obsolete, or slow moving inventories, valuation of intangible and long-lived assets, warranty accruals, income taxes, valuation of stock-based compensation, and contingencies.

Foreign Currency Translation – The assets and liabilities of foreign subsidiaries are translated from their respective local functional currencies at exchange rates in effect at the balance sheet date and income and expense accounts are translated at average exchange rates during the reporting period. Resulting translation adjustments are reflected in “Accumulated other

comprehensive income,” a component of stockholders’ equity. Foreign currency transaction gains and losses are reflected in

“Other income (expense)” in the consolidated statements of operations in the period incurred, and consists of a $0.1 million gain, a $0.7 million loss and a $0.3 million loss for the years ended December 27, 2014, December 28, 2013, and December 29, 2012, respectively.

Revenue Recognition – The Company derives revenue from the sale of process control metrology systems (“product revenue”) as well as spare part sales, billable service, service contracts, and upgrades (together “service revenue”). Upgrades are a group of parts and/or software that change the existing configuration of a product and are included in service revenue. They are distinguished from product revenue, which consists of complete, advanced process control metrology and inspection systems (the “system(s)”). Nanometrics' systems consist of hardware and software components that function together to deliver the essential functionality of the system. Arrangements for sales of systems often include defined customer-specified acceptance criteria.

In summary, the Company recognizes revenue when persuasive evidence of an arrangement exists, delivery has occurred or services have been rendered, the seller's price is fixed or determinable, and collectability is reasonably assured.

43

NANOMETRICS INCORPORATED

NOTES TO CONSOLIDATED FINANCIAL STATEMENTS—(Continued)

For product sales to existing customers, revenue recognition occurs at the time title and risk of loss transfer to the customer, which usually occurs upon shipment from the Company's manufacturing location, if it can be reliably demonstrated that the product has successfully met the defined customer specified acceptance criteria and all other recognition criteria have been met. For initial sales where the product has not previously met the defined customer specified acceptance criteria, product revenues are recognized upon the earlier of receipt of written customer acceptance or expiration of the contractual acceptance period. In Japan, where contractual terms with the customer specify risk of loss and title transfers upon customer acceptance, revenue is recognized upon receipt of written customer acceptance, provided that all other recognition criteria have been met.

The Company warrants its products against defects in manufacturing. Upon recognition of product revenue, a liability is recorded for anticipated warranty costs. On occasion, customers request a warranty period longer than the Company's standard warranty. In those instances where extended warranty services are separately quoted to the customer, the associated revenue is deferred and recognized as service revenue ratably over the term of the contract. The portion of service contracts and extended warranty services agreements that are uncompleted at the end of any reporting period are included in deferred revenue.

As part of its customer services, the Company sells software that is considered to be an upgrade to a customer's existing systems. These standalone software upgrades are not essential to the tangible product's functionality and are accounted for under software revenue recognition rules which require vendor specific objective evidence ("VSOE") of fair value to allocate revenue in a multiple element arrangement. Revenue from upgrades is recognized when the upgrades are delivered to the customer, provided that all other recognition criteria have been met.

Revenue related to spare parts is recognized upon shipment. Revenue related to billable services is recognized as the services are performed. Service contracts may be purchased by the customer during or after the warranty period and revenue is recognized ratably over the service contract period.

Frequently, the Company delivers products and various services in a single transaction. The Company's deliverables consist of tools, installation, upgrades, billable services, spare parts, and service contracts. The Company's typical multi-element arrangements include a sale of one or multiple tools that include installation and standard warranty. Other arrangements consist of a sale of tools bundled with service elements or delivery of different types of services. The Company's tools, upgrades, and spare parts are generally delivered to customers within a period of up to six months from order date. Installation is usually performed soon after delivery of the tool. The portion of revenue associated with installation is deferred based on relative selling price and that revenue is recognized upon completion of the installation. Billable services are billed on a time and materials basis and performed as requested by customers. Under service contract arrangements, services are provided as needed over the fixed arrangement term, which terms can be up to twelve months. The Company does not grant its customers a general right of return or any refund terms and imposes a penalty on orders cancelled prior to the scheduled shipment date.

The Company regularly evaluates its revenue arrangements to identify deliverables and to determine whether these deliverables are separable into multiple units of accounting. In accordance with revenue recognition guidance, the Company allocates the arrangement consideration among the deliverables based on relative selling prices. The Company has established VSOE for some of its products and services when a substantial majority of selling prices falls within a narrow range when sold separately. For deliverables with no established VSOE, the Company uses best estimate of selling price to determine standalone selling price for such deliverable. The Company does not use third party evidence to determine standalone selling price since this information is not widely available in the market as the Company's products contain a significant element of proprietary technology and the solutions offered differ substantially from competitors. The Company has established a process for developing estimated selling prices, which incorporates historical selling prices, the effect of market conditions, gross margin objectives, pricing practices, as well as entity-specific factors. The Company monitors and evaluates estimated selling price on a regular basis to ensure that changes in circumstances are accounted for in a timely manner.

When certain elements in multiple-element arrangements are not delivered or accepted at the end of a reporting period, the relative selling prices of undelivered elements are deferred until these elements are delivered and/or accepted. If deliverables cannot be accounted for as separate units of accounting, the entire arrangement is accounted for as a single unit of accounting and revenue is deferred until all elements are delivered and all revenue recognition requirements are met.

BusinessCombinations - The Company allocates the purchase price of acquired companies to the tangible and intangible assets acquired and liabilities assumed based upon their estimated fair values at the acquisition date. The purchase

44

NANOMETRICS INCORPORATED

NOTES TO CONSOLIDATED FINANCIAL STATEMENTS—(Continued)

price allocation process requires management to make significant estimates and assumptions, especially at the acquisition date with respect to intangible assets and inventory acquired. While best estimates and assumptions as a part of the purchase price allocation process are used to accurately value assets acquired and liabilities assumed at the acquisition date, estimates are inherently uncertain and subject to refinement. As a result, during the measurement period, which may be up to one year from the acquisition date, the Company may record adjustments to the assets acquired and liabilities assumed, with the corresponding offset to goodwill. Upon the conclusion of the measurement period or final determination of the values of assets acquired or liabilities assumed, whichever comes first, any subsequent adjustments are recorded in the consolidated statements of operations.

The Company estimates the fair value of inventory acquired by utilizing the net realizable value method which is based on the estimated sales price of the product less appropriate costs to complete and selling costs. Examples of critical estimates in valuing certain intangible assets that were acquired or may be acquired in the future include but are not limited to:

• future expected cash flows from sales of products, services and acquired developed technologies and patents;

• expected costs to develop the in-process research and development into commercially viable products and estimated cash flows from the projects when completed;

• the acquired company's customer relationships, as well as assumptions about the estimated useful lives of the relationships; and

• discount rates.

Unanticipated events and circumstances may occur that may affect the accuracy or validity of assumptions, estimates or actual results associated with business combinations.

Cash, Cash Equivalents and Marketable Securities – The Company considers all highly liquid investments with original maturities of three months or less, when purchased, to be cash equivalents. Marketable securities are classified as “available-for-sale” and are reported at fair value with unrealized gains and losses reported in stockholders' equity as a component of other comprehensive income. The cost of securities sold is based on the specific identification method. The Company classifies its investments as current based on the nature of the investment and their availability for use in current operations. The Company reviews its investment portfolio quarterly to determine if any securities may be other-than-temporarily impaired due to increased credit risk, changes in industry or sector of a certain instrument or ratings downgrades.

Fair Value of Financial Instruments – Financial instruments include cash and cash equivalents, accounts receivable and accounts payable. Cash equivalents are stated at fair market value based on quoted market prices. The carrying values of accounts receivable and accounts payable approximate their fair values because of the short-term maturity of these financial instruments.

Allowance for Doubtful Accounts – The Company maintains allowances for estimated losses resulting from the inability of its customers to make required payments. Credit limits are established through a process of reviewing the financial history and stability of its customers. Where appropriate and available, the Company obtains credit rating reports and financial statements of customers when determining or modifying their credit limits. The Company regularly evaluates the collectability of its trade receivable balances based on a combination of factors such as the length of time the receivables are past due, customary payment practices in the respective geographies and historical collection experience with customers. The Company believes that its allowance for doubtful accounts adequately reflects the risk associated with its receivables. If the financial conditions of a customer were to deteriorate, resulting in their inability to make payments, the Company may need to record additional allowances, which would result in additional general and administrative expenses being recorded for the period in which such determination was made.

Inventories – Inventories are stated at the lower of cost, which approximates actual cost on a first-in, first-out basis, or market. The Company is exposed to a number of economic and industry factors that could result in portions of inventory becoming either obsolete or in excess of anticipated usage, or saleable only for amounts that are less than their carrying amounts. These factors include, but are not limited to, technological changes in the market, the Company’s ability to meet changing customer requirements, competitive pressures in products and prices, and the availability of key components from suppliers. The Company has established inventory reserves when conditions exist that suggest that inventory may be in excess of anticipated demand or is obsolete based upon assumptions about future demand for the Company’s products and market conditions. Once a reserve has been established, it is maintained until the part to which it relates is sold or is otherwise disposed of. The Company regularly evaluates its ability to realize the value of inventory based on a combination of factors including the following: historical usage rates, forecasted sales of usage, product end-of-life dates, estimated current and future market values and new product introductions. For demonstration inventory, the Company also considers the age of the inventory and potential

45

NANOMETRICS INCORPORATED

NOTES TO CONSOLIDATED FINANCIAL STATEMENTS—(Continued)

cost to refurbish the inventory prior to sale. Demonstration inventory is amortized over its useful life and the amortization expense is included in total inventory write down on the statements of cash flows. When recorded, reserves are intended to reduce the carrying value of the Company’s inventory to its net realizable value. If actual demand for the Company’s products deteriorates, or market conditions are less favorable than those that the Company projects, additional reserves may be required.

Inventories – delivered systems – The Company reflects the cost of systems that were invoiced upon shipment but deferred for revenue recognition purposes separate from its inventory held for sale as “Inventories – delivered systems.”

Property, Plant and Equipment – Property, plant and equipment are stated at cost. Depreciation and amortization is computed using the straight–line method over the following estimated useful lives of the assets:

Building and Improvements        5-40 years

Machinery and equipment            3-10 years

Furniture and fixtures            3-10 years

Software                3-7 years

Goodwill and Intangible Assets – Goodwill is initially recorded when the purchase price paid for an acquisition exceeds the estimated fair value of the net identified tangible and intangible assets acquired. Intangible assets with finite lives are amortized over their respective useful lives on a straight-line basis and are also evaluated annually for impairment or whenever events or circumstances occur which indicate that those assets might be impaired. Goodwill and indefinite lived assets are not amortized but tested annually for impairment. The Company’s impairment review process is completed during the fourth quarter of each year or whenever events, or circumstances occur which indicate that an impairment may have occurred. The Company assesses qualitative factors to determine whether it is more likely than not that the fair value of a reporting unit is less than its carrying value. If, after assessing the qualitative factors, the Company determines that it is not likely that the fair value of a reporting unit is less than its carrying value, then performing the two-step impairment test is unnecessary. However, if the Company concludes otherwise, then it is required to perform the first step of the two-step goodwill impairment test. The first step requires a comparison of the fair value of Nanometrics’ reporting unit to its net book value. If the fair value of the reporting unit is greater than its carrying value, then no impairment is deemed to have occurred. If the fair value is less, then the second step must be performed to determine the amount, if any, of actual impairment. Amortization of intangible assets with finite lives is computed using the straight-line method over the following estimated useful lives of the assets:

Developed technology            5-10 years

Customer relationships            2-10 years

Brand name                5-10 years

Patented technology            7-10 years

Trademark                5 years

Long-Lived Assets – The Company evaluates its long-lived assets for impairment whenever events or changes in circumstances indicate that the carrying amount of an asset may not be recoverable. When the sum of the undiscounted future net cash flows expected to result from the use of the asset and its eventual disposition is less than its carrying amount, impairment may exist. To determine the amount of impairment, the Company compares the fair value of the asset to its carrying value. If the carrying value of the asset exceeds its fair value, an impairment loss equal to the difference is recognized. See Note 7, "Goodwill and Intangible Assets" for further details.

Income Tax Assets and Liabilities – The Company accounts for income taxes such that deferred tax assets and liabilities must be recognized using enacted tax rates for the effect of temporary differences between the book and tax accounting for assets and liabilities. Also, deferred tax assets are reduced by a valuation allowance to the extent that management cannot conclude that it is more likely than not that a portion of the deferred tax asset will be realized in the future. The Company evaluates the deferred tax assets on a continuous basis throughout the year to determine whether or not a valuation allowance is appropriate. Factors used in this determination include future expected income and the underlying asset or liability which generated the temporary tax difference. The income tax provision is primarily impacted by federal statutory rates, state and foreign income taxes and changes in the valuation allowance.

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Product Warranties – The Company sells the majority of its products with a twelve months repair or replacement warranty from the date of acceptance, which generally represents the date of shipment. The Company provides an accrual for estimated future warranty costs based upon the historical relationship of warranty costs to the cost of products sold. The estimated future warranty obligations related to product sales are reported in the period in which the related revenue is recognized. The estimated future warranty obligations are affected by the warranty periods, sales volumes, product failure rates, material usage and labor and replacement costs incurred in correcting a product failure. If actual product failure rates, material usage, labor or replacement costs differ from the Company’s estimates, revisions to the estimated warranty obligations would be required. For new product introductions where limited or no historical information exists, the Company may use warranty information from other previous product introductions to guide it in estimating the warranty accrual. The warranty accrual represents the best estimate of the amount necessary to settle future and existing claims on products sold as of the balance sheet date. The Company periodically assesses the adequacy of its recorded warranty reserve and adjusts the amounts in accordance with changes in these factors.

Shipping and Handling Costs – Shipping and handling costs are included as a component of cost of net revenues.

Advertising Costs – The Company expenses advertising costs as incurred. Advertising costs were $0.2 million in 2014, $0.2 million in 2013, and $0.1 million in 2012.

Stock-Based Compensation – The Company estimates the value of employee stock options on the date of grant using the Black-Scholes model. The determination of fair value of share-based payment awards on the date of grant using an option-pricing model is affected by the Company’s stock price as well as assumptions regarding a number of highly complex and subjective variables. These variables include, but are not limited to, the expected stock price volatility over the term of the awards, and actual and projected employee stock option exercise behaviors. The expected term of options granted is calculated based on the simplified method allowed under SEC Staff Accounting Bulletin 107 (“SAB 107”). The expected volatility is based on the historical volatility of the Company’s stock price.

Defined Employee Benefit Plans– The Company maintains a defined benefit pension plan in Taiwan for which current service costs are charged to operations as they accrue based on services rendered by employees during the year. Pension benefit obligations are determined by using management’s actuarial assumptions, including discount rates, assumed asset rates of return, compensation increases and employee turnover rates.

Net Income (Loss) Per Share - Basic net income (loss) per share excludes dilution and is computed by dividing net income (loss) by the number of weighted average common shares outstanding for the period. Diluted net income (loss) per share reflects the potential dilution from outstanding dilutive stock options (using the treasury stock method) and shares issuable under the employee stock purchase plan. The Company had net income in fiscal year 2012, therefore, the potential dilutive effect of stock options was considered to calculate the diluted income per share. In applying the treasury stock method, 0.9 million of stock option shares for fiscal year 2012 were excluded because their effect was anti-dilutive.

Certain Significant Risks and Uncertainties – Financial instruments that potentially subject us to a concentration of credit risk consist of cash, cash equivalents, marketable securities, and accounts receivable. The Company's cash and cash equivalents are primarily invested in deposit accounts and money market accounts with large financial institutions. At times, these deposits and securities may exceed federally insured limits; however, the Company has not experienced any losses on such accounts. The Company invests its cash not required for use in operations in high credit quality securities based on the Company's investment policy. The Company's investment policy provides guidelines and limits regarding credit quality, investment concentration, investment type, and maturity that the Company believes will provide liquidity while reducing risk of loss of capital. Investments are of a short-term nature and include investments in commercial paper, corporate debt securities, U.S. Treasury, U.S. Government, and U.S. Agency debt.

The Company sells its products primarily to end users in the United States, Asia and Europe and, generally, does not require its customers to provide collateral or other security to support accounts receivable. Management performs ongoing credit evaluations of its customers’ financial condition and maintains an allowance for estimated potential bad debt losses. The Company’s customer base is highly concentrated and historically, a relatively small number of customers have accounted for a significant portion of its revenues. Aggregate revenue from the Company's top five largest customers in 2014, 2013 and 2012 consisted of 72%, 71% and 74%, respectively, of its total net revenues. The Company participates in a dynamic high technology industry and believes that changes in any of the following areas could have a material adverse effect on its future financial position, results of operations or cash flows: advances and trends in new technologies and industry standards; competitive pressures in the form of new products or price reductions on current products; changes in product mix; changes in the overall demand for products offered; changes in third-party manufacturers; changes in key suppliers; changes in certain

47

NANOMETRICS INCORPORATED

NOTES TO CONSOLIDATED FINANCIAL STATEMENTS—(Continued)

strategic relationships or customer relationships; litigation or claims against the Company based on intellectual property, patent, product, regulatory or other factors; fluctuations in foreign currency exchange rates; risk associated with changes in domestic and international economic and/or political regulations; availability of necessary components or sub-assemblies; disruption of manufacturing facilities; and its ability to attract and retain employees necessary to support its growth.

Certain components and sub-assemblies used in the Company’s products are purchased from a sole supplier or a limited group of suppliers. In particular, the Company currently purchases its spectroscopic ellipsometer and robotics used in its advanced measurement systems from a sole supplier or a limited group of suppliers located in the United States. Any shortage or interruption in the supply of any of the components or sub-assemblies used in its products or its inability to procure these components or sub-assemblies from alternate sources on acceptable terms could have a material adverse effect on its business, financial condition and results of operations.

Note 2. Recent Accounting Pronouncements

Recently Issued Accounting Pronouncements

In January 2015, the Financial Accounting Standards Board ("FASB") issued an accounting standard update which simplifies income statement classification by removing the concept of extraordinary items from the U.S. GAAP. As a result, items that are both unusual and infrequent will no longer be separately reported net of tax after continuing operations. The new standard is effective for the fiscal years, and interim periods within those fiscal years, beginning after December 15, 2015. Early adoption is permitted. The Company does not expect any impact on the adoption of this standard on its consolidated financial statements.

In August 2014, the FASB issued an accounting standard update related to the disclosures around going concern. The new standard provides guidance around management’s responsibility to evaluate whether there are conditions or events that raise substantial doubt about the entity’s ability to continue as a going concern within one year after the date that the financial statements are issued. The new standard is effective for the annual periods and interim periods within those annual periods beginning after December 15, 2016. Early application is permitted. The Company does not expect any impact on the adoption of this standard on its consolidated financial statements.

In May 2014, the FASB issued an accounting standards update which requires an entity to recognize the amount of revenue to which it expects to be entitled for the transfer of promised goods or services to customers. The standard will replace most existing revenue recognition guidance in U.S. GAAP when it becomes effective. The new standard is effective for the Company on January 1, 2017. Early application is not permitted. The standard permits the use of either the retrospective or cumulative effect transition method. The Company is evaluating the effect that the standard will have on its consolidated financial statements and related disclosures. The Company has not yet selected a transition method nor has it determined the effect of the standard on its ongoing financial reporting.

In July 2013, the FASB issued an accounting standards update which provides that a liability related to an unrecognized tax benefit would be offset against a deferred tax asset for a net operating loss carryforward, a similar tax loss or a tax credit carryforward if such settlement is required or expected in the event the uncertain tax position is disallowed. In situations in which a net operating loss carryforward, a similar tax loss or a tax credit carryforward is not available at the reporting date under the tax law of the jurisdiction or the tax law of the jurisdiction does not require, and the entity does not intend to use, the deferred tax asset for such purpose, the unrecognized tax benefit will be presented in the financial statements as a liability and will not be combined with deferred tax assets. The amendments should be applied prospectively to all unrecognized tax benefits that exist at the effective date. Retrospective application is permitted. The new standard is effective for fiscal years and interim periods beginning after December 15, 2013. The Company adopted this standard during the three months ended March 29, 2014, resulting in a one-time tax benefit of $0.3 million, a reduction in deferred tax assets of $0.3 million, and a reduction in long-term income taxes payable of $0.6 million.

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NOTES TO CONSOLIDATED FINANCIAL STATEMENTS—(Continued)

Note 3. Fair Value Measurements and Disclosures

Fair value is defined as the price that would be received upon the sale of an asset or paid to transfer a liability in an orderly transaction between market participants at the measurement date. The standard assumes that the transaction to sell the asset or transfer the liability occurs in the principal or most advantageous market for the asset or liability and establishes that the fair value of an asset or liability shall be determined based on the assumptions that market participants would use in pricing the asset or liability.

The Company determines the fair values of its financial instruments based on the fair value hierarchy established in FASB Accounting Standards Codification ("ASC") 820, Fair Value Measurement, which requires an entity to maximize the use of observable inputs and minimize the use of unobservable inputs when measuring fair value. The classification of a financial asset or liability within the hierarchy is based upon the lowest level input that is significant to the fair value measurement. The fair value hierarchy prioritizes the inputs into the following three levels that may be used to measure fair value:

Level 1 — Quoted prices in active markets for identical assets or liabilities.

Level 2 — Inputs other than Level 1 that are observable, either directly or indirectly, such as quoted prices for similar assets and liabilities in active markets or inputs that are observable for the asset or liability, either directly or indirectly through market corroboration, for substantially the full term of the financial instrument.

Level 3 — Unobservable inputs that are supported by little or no market activity and are significant to the fair value of the assets or liabilities. Such unobservable inputs include an estimated discount rate used in the Company's discounted present value analysis of future cash flows, which reflects the Company's estimate of debt with similar terms in the current credit markets. As there is currently minimal activity in such markets, the actual rate could be materially different.

The following tables present the Company’s assets and liabilities measured at estimated fair value on a recurring basis, excluding accrued interest components, categorized in accordance with the fair value hierarchy (in thousands), as of the following dates:

	December 27, 2014								December 28, 2013
	Fair Value Measurements Using Input Types								Fair Value Measurements Using Input Types
	Level 1		Level 2		Level 3		Total		Level 1		Level 2		Level 3		Total
Assets:
Cash equivalents:
Money market funds	$	610	$	—	$	—	$	610	$	876	$	—	$	—	$	876
Commercial paper and corporate debt securities	—		—		—		—		—		750		—		$	750
Total cash equivalents	610		—		—		610		876		750		—		1,626
Marketable securities:
U.S. Treasury, U.S. Government and U.S. Government agency debt securities	2,497		20,537		—		23,034		5,036		11,980		—		17,016
Commercial paper, municipal securities and corporate debt securities	—		26,252		—		26,252		—		31,081		—		31,081
Total marketable securities	2,497		46,789		—		49,286		5,036		43,061		—		48,097
Total(1)	$	3,107	$	46,789	$	—	$	49,896	$	5,912	$	43,811	$	—	$	49,723
Liabilities:
Contingent consideration payable	$	—	$	—	$	2,397	$	2,397	$	—	$	—	$	2,783	$	2,783

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NOTES TO CONSOLIDATED FINANCIAL STATEMENTS—(Continued)

(1) Excludes $34.1 million and $43.1 million held in operating accounts as of December 27, 2014 and December 28, 2013, respectively.

The fair values of the marketable securities that are classified as Level 1 in the table above were derived from quoted market prices for identical assets or liabilities in active markets that the Company has the ability to access. The fair value of marketable securities that are classified as Level 2 in the table above were derived from non-binding market consensus prices that were corroborated by observable market data, quoted market prices for similar instruments, or pricing models, such as discounted cash flow techniques with all significant inputs derived from or corroborated by observable market data. There were no transfers of instruments between Level 1, Level 2 and Level 3 during the financial periods presented.

Changes in Level 3 liabilities (in thousands)
Fair value at December 29, 2012	$	2,462
Payments made to Zygo Corporation	(1,004		)
Change in fair value included in earnings	1,325
Fair value at December 28, 2013	2,783
Payments made to Zygo Corporation	(587		)
Change in fair value included in earnings	201
Fair value at December 27, 2014	$	2,397

As of December 27, 2014, the Company had liabilities of $2.4 million resulting from the acquisition of certain assets from Zygo Corporation (“Zygo”), which are measured at fair value on a recurring basis, and changes in fair value recorded in Other income (expense), net. Of the $2.4 million of Zygo liabilities at December 27, 2014, $1.4 million was a current liability and $1.0 million was a long-term liability. As of December 28, 2013, the Company had liabilities of $2.8 million resulting from the acquisition of certain assets from Zygo which are measured at fair value on a recurring basis. Of the $2.8 million of Zygo liability at December 28, 2013, $1.3 million was a current liability and $1.5 million was a long-term liability. The fair values of these liabilities were determined using Level 3 inputs using a discounted cash flow model incorporating assumptions that market participants would use in their estimates of fair value. Some of these assumptions included estimates for discount rate, and timing and the amount of cash flows.

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NOTES TO CONSOLIDATED FINANCIAL STATEMENTS—(Continued)

Note 4. Cash and Investments

The following table presents cash, cash equivalents, and available-for-sale investments as of the following dates (in thousands):

	December 27, 2014
	Amortized Cost		Gross Unrealized Gains		Gross Unrealized Losses			Estimated Fair Market Value
Cash	$	34,066	—		$	—		$	34,066
Cash equivalents:
Money market funds	610		—		—			610
Marketable securities:
Commercial paper	805		—		—			805
U.S. Treasury securities	2,498				(1		)	2,497
U.S. Government agency securities	20,556		1		(19		)	20,538
Municipal securities	3,755		1		(7		)	3,749
Corporate debt securities	21,722		1		(26		)	21,697
Total cash, cash equivalents, and marketable securities	$	84,012	$	3	$	(53	)	$	83,962
	December 28, 2013
	Amortized Cost		Gross Unrealized Gains		Gross Unrealized Losses			Estimated Fair Market Value
Cash	$	43,139	$	—	$	—		$	43,139
Cash equivalents:
Money market funds	876		—		—			876
Commercial paper	750		—		—			750
Marketable securities:
U.S. Treasury Securities	5,036		—		—			5,036
U.S. Government agency securities	11,980		4		(4		)	11,980
Municipal securities	9,756		11		(4		)	9,763
Corporate debt securities	21,316		7		(5		)	21,318
Total cash, cash equivalents, and marketable securities	$	92,853	$	22	$	(13	)	$	92,862

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NANOMETRICS INCORPORATED

NOTES TO CONSOLIDATED FINANCIAL STATEMENTS—(Continued)

Available-for-sale marketable securities, readily convertible to cash, with maturity dates of 90 days or less are classified as cash equivalents, while those with maturity dates greater than 90 days are classified as marketable securities within short-term assets. All marketable securities as of December 27, 2014 and December 28, 2013, were available-for-sale and reported at fair value based on the estimated or quoted market prices as of the balance sheet date. Unrealized gains or losses, net of tax effect, are recorded in accumulated other comprehensive income (loss) within stockholders' equity. Both the gross unrealized gains and gross unrealized losses for the fiscal years ended December 27, 2014, December 28, 2013 and December 29, 2012 were insignificant and no marketable securities had other than temporary impairment. All marketable securities as of December 27, 2014 and December 28, 2013, had maturity dates of less than two years and were not invested in foreign entities.

Note 5. Accounts Receivable

The Company maintains arrangements under which eligible accounts receivable in Japan are sold without recourse to unrelated third-party financial institutions. These receivables were not included in the consolidated balance sheets as the criteria for sale treatment had been met. After a transfer of financial assets, an entity stops recognizing the financial assets when control has been surrendered. The agreement met the criteria of a true sale of these assets since the acquiring party retained the title to these receivables and had assumed the risk that the receivables will be collectible. The Company pays administrative fees as well as interest ranging from 1.17% to 1.68% based on the anticipated length of time between the date the sale is consummated and the expected collection date of the receivables sold. The Company sold $7.7 million and $6.3 million of receivables during fiscal years ended December 27, 2014 and December 28, 2013, respectively. There were no material gains or losses on the sale of such receivables. There were no amounts due from such third party financial institutions at December 27, 2014 and December 28, 2013.

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NANOMETRICS INCORPORATED

NOTES TO CONSOLIDATED FINANCIAL STATEMENTS—(Continued)

Note 6. Financial Statement Components

The following tables provide details of selected financial statement components as of the following dates (in thousands):

Consolidated Balance Sheets
	At
	December 27, 2014			December 28, 2013
Inventories:
Raw materials and sub-assemblies	$	19,463		$	19,655
Work in process	7,723			7,597
Finished goods	7,919			7,268
Inventories	35,105			34,520
Inventories-delivered systems	1,912			6,901
Total inventories	$	37,017		$	41,421
Property, plant and equipment, net(1):
Land	$	15,572		$	15,569
Building and improvements	19,641			19,403
Machinery and equipment	29,456			27,820
Furniture and fixtures	2,225			2,308
Software	7,942			1,851
Capital in progress	3,512			5,833
Total property, plant and equipment, gross	78,348			72,784
Accumulated depreciation and amortization	(28,715		)	(25,345		)
Total property, plant and equipment, net	$	49,633		$	47,439
(1)Total depreciation and amortization expense for the years ended December 27, 2014, December 28, 2013, and December 29, 2012 was $6.6 million, $5.4 million, and $4.8 million, respectively.
Other current liabilities:
Accrued warranty	$	2,953		$	3,426
Accrued restructuring	997			—
Accrued professional services	778			545
Fair value of current portion of contingent payments to Zygo Corporation related to acquisition	1,385			1,344
Other	2,152			2,678
Total other current liabilities	$	8,265		$	7,993

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NANOMETRICS INCORPORATED

NOTES TO CONSOLIDATED FINANCIAL STATEMENTS—(Continued)

Components of Accumulated Other Comprehensive Income (Loss)

	Years Ended
	Foreign Currency Translations			Defined Benefit Pension Plans			Unrealized Income (Loss) on Investment			Accumulated Other Comprehensive Income
Balance as of December 29, 2012	$	1,453		$	(179	)	$	(2	)	$	1,272
Current period change	(818		)	151			7			(660		)
Balance as of December 28, 2013	635			(28		)	5			612
Current period change	(3,239		)	(106		)	(36		)	(3,381		)
Balance as of December 27, 2014	$	(2,604	)	$	(134	)	$	(31	)	$	(2,769	)

The items above, except for unrealized income (loss) on investment, did not impact the Company’s income tax provision. The amounts reclassified from each component of accumulated other comprehensive income into income statement line items were insignificant.

Note 7. Goodwill and Intangible Assets

The following table summarizes the activity in the Company’s goodwill during the years ended December 27, 2014 and December 28, 2013, respectively (in thousands):

Balance as of December 29, 2012	$	11,352
Foreign currency movements	391
Balance as of December 28, 2013	11,743
Foreign currency movements	(1,249		)
Balance as of December 27, 2014	$	10,494

There were no business acquisitions made by the Company during fiscal years 2014 and 2013.

Goodwill Impairment and Long-lived Asset Impairment

The Company’s impairment review process is completed during the fourth quarter of each year, or whenever events or circumstances occur that indicate that an impairment may have occurred. The goodwill impairment assessment involves three tests, Step 0, Step 1 and Step 2. The Company performs a Step 0 test, which involves an initial qualitative assessment to

determine whether it is more likely than not that the fair value of a reporting unit is less than its carrying value. If, after assessing the qualitative factors, the Company determines that it is more likely than not that the fair value of a reporting unit is less than its carrying value, then performing the two-step impairment test is necessary. Otherwise, no further testing is necessary.

The Company completed its annual goodwill impairment assessment during the fourth quarter of 2014 by first performing a Step 0 qualitative assessment. As part of this assessment, the Company considered the trading value of the Company's stock, the industry trends, and the Company's sales forecast and products plans. The Company concluded that it was more likely than not that the fair value was more than the carrying values of the Company's reporting unit and therefore did not proceed to the Step 1 goodwill impairment test.

The process of evaluating the potential impairment of long-lived assets is highly subjective and requires significant judgment. In estimating the fair value of these assets, the Company made estimates and judgments about future revenues and cash flows. The Company’s forecasts were based on assumptions that are consistent with the plans and estimates the Company is using to manage its business. Changes in these estimates could change the Company’s conclusion regarding impairment of the long-lived assets and potentially result in future impairment charges for all or a portion of their balance at December 27,2014. The Company did not record any impairment charges related to goodwill in fiscal year 2014.

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The Company assesses if there have been triggers that may require it to evaluate the reasonableness of the remaining estimated useful lives of its intangible assets. No such triggers were identified during fiscal year 2014.

Finite-lived intangible assets are recorded at cost, less accumulated amortization. Finite-lived intangible assets as of December 27, 2014 and December 28, 2013 consisted of the following (in thousands):

	December 27, 2014
	Adjusted cost		Accumulated amortization			Net carrying amount
Developed technology	$	16,950	$	(12,991	)	$	3,959
Customer relationships	9,461		(9,449		)	12
Brand names	1,927		(1,802		)	125
Patented technology	2,252		(2,054		)	198
Trademark	80		(80		)	—
Total	$	30,670	$	(26,376	)	$	4,294

	December 28, 2013
	Adjusted cost		Accumulated amortization			Net carrying amount
Developed technology	$	18,095	$	(11,032	)	$	7,063
Customer relationships	9,573		(9,263		)	310
Brand names	1,927		(1,700		)	227
Patented technology	2,252		(1,988		)	264
Trademark	80		(80		)	—
Total	$	31,927	$	(24,063	)	$	7,864

The amortization of finite-lived intangibles is computed using the straight-line method. Estimated lives of finite-lived intangibles range from two to ten years. Total amortization expense for the fiscal years ended December 27, 2014, December 28, 2013 and December 29, 2012 was $3.1 million, $3.3 million and $3.3 million, respectively.

There were no impairment charges related to intangible assets recorded during the year ended December 27, 2014.

The estimated future amortization expense of finite intangible assets as of December 27, 2014 is as follows (in thousands):

Fiscal Years	Amounts
2015	$	2,199
2016	1,683
2017	206
2018	140
2019	66
Total future amortization expense	$	4,294

Note 8. Warranties

Product Warranty – The Company sells the majority of its products with a 12 months repair or replacement warranty from the date of acceptance or shipment date. The Company provides an accrual for estimated future warranty costs based upon the historical relationship of warranty costs to the cost of products sold. The estimated future warranty obligations related to product sales are recorded in the period in which the related revenue is recognized. The estimated future warranty obligations are affected by the warranty periods, sales volumes, product failure rates, material usage, and labor and replacement costs incurred in correcting a product failure. If actual product failure rates, material usage, labor or replacement costs were to differ from the Company’s estimates, revisions to the estimated warranty obligations would be required. For new product introductions where limited or no historical information exists, the Company may use warranty information from other previous product introductions to guide it in estimating its warranty accrual. The warranty accrual represents the best estimate

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of the amount necessary to settle future and existing claims on products sold as of the balance sheet date. The Company periodically assesses the adequacy of its reported warranty reserve and adjusts such amounts in accordance with changes in these factors.

Components of the warranty accrual, which were included in the accompanying consolidated balance sheets with other current liabilities, were as follows (in thousands):

	Years Ended
	December 27, 2014			December 28, 2013
Balance as of beginning of period	$	3,426		$	4,203
Accruals for warranties issued during period	5,987			4,176
Settlements during the period	(6,460		)	(4,953		)
Balance as of end of period	$	2,953		$	3,426

Note. 9. Restructuring

The Company recorded a restructuring charge of approximately $2.3 million in 2014 as a result of its decision to consolidate and reorganize certain of its operations, primarily in the U.K. This amount includes charges primarily related to employee severance, other expenses (primarily vendor contract termination costs) and early termination costs of a facility lease due to expire in 2017 in the amounts of $1.0 million, $0.4 million and $0.9 million, respectively. The Company expects to complete this restructuring plan by March 2015. Other related costs will be recognized as incurred.

The Company recorded a restructuring charge of $1.7 million in 2013 as a result of its decision to consolidate a portion of its European operations. This amount includes charges primarily related to employee severance and non-cash acceleration of vesting of RSUs in the amount of $0.8 million and $0.9 million, respectively. As of December 28, 2013, the Company had completed and settled in full all cash payments related to employee severance and non-cash acceleration of vesting of RSUs.

As of December 27, 2014 and December 28, 2013, respectively, the components of the Company's restructuring reserves were included in other current liabilities and were as follows (in thousands):

	Employee severance and benefits			Facility termination costs			Other			Total
Balance as of December 28, 2013	$	—		$	—		$	—		$	—
Charges	1,016			899			351			2,266
Cash Payments	(780		)	(201		)	(288		)	(1,269		)
Balance as of December 27, 2014	$	236		$	698		$	63		$	997

	Employee severance and benefits			Facility termination costs		Other		Total
Balance as of December 29, 2012	$	—		$	—	$	—	$	—
Charges	1,740			—		—		1,740
Cash Payments	(844		)	—		—		(844		)
Non-cash items	(896		)	—		—		(896		)
Balance as of December 28, 2013	$	—		$	—	$	—	$	—

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NOTES TO CONSOLIDATED FINANCIAL STATEMENTS—(Continued)

Note 10. Line of Credit and Debt Obligations

Line of Credit - On May 30, 2014, the Company amended its revolving line of credit facility to (i) extend the maturity date of such facility by two years to May 30, 2016, and (ii) to increase the minimum amount available to borrow to $12.0 million.

The instrument governing the line of credit facility includes certain financial covenants regarding tangible net worth. The revolving line of credit agreement includes a provision for the issuance of commercial or standby letters of credit by the bank on behalf of the Company. The value of all letters of credit outstanding reduces the total line of credit available. The revolving line of credit is collateralized by a blanket lien on all of the Company’s domestic assets excluding intellectual property and real estate. The minimum borrowing interest rate is 3.00% per annum. Borrowing is limited to the lesser of (a) $12.0 million plus the borrowing base, or (b) $20.0 million. The total borrowing base available as of December 27, 2014 was $18.8 million. As of December 27, 2014, the Company was not in breach of any restrictive covenants in connection with this line of credit. There were no outstanding amounts drawn on this facility as of December 27, 2014. Although management has no current plans to request advances under this credit facility, the Company may use the proceeds of any future borrowing for general corporate purposes, future acquisitions or expansion of the Company's business.

Mortgage Loan - On July 18, 2013, the Company repaid $4.8 million of the balance of a mortgage loan, secured, in part, by a lien on and security interest in the building and land comprising the Company’s principal offices in Milpitas, California and representing the entire outstanding principal balance of the loan as well as all accrued interest. The Company did not incur any fees associated with the prepayment of the loan. At December 28, 2013, there was no outstanding balance on the loan.

Note 11. Commitments and Contingencies

Intellectual Property Indemnification Obligations – The Company will, from time to time, in the normal course of business, agree to indemnify certain customers, vendors or others against third party claims that Nanometrics’ products, when used for their intended purpose(s), or the Company's intellectual property, infringe the intellectual property rights of such third parties or other claims made against parties with whom it enters into contractual relationships. It is not possible to determine the maximum potential amount of liability under these indemnification obligations due to the limited history of prior indemnification claims and the unique facts and circumstances that are likely to be involved in each particular claim. Historically, the Company has not made payments under these obligations and believes that the estimated fair value of these agreements is immaterial. Accordingly, no liabilities have been recorded for these obligations in the accompanying consolidated balance sheets as of December 27, 2014 and December 28, 2013.

On January 13, 2012, the Company entered into a settlement and limited patent cross license agreement with KLA-Tencor ("KLA-Tencor") to resolve all existing patent litigation between the parties. Pursuant to the settlement agreement, the Company agreed to make a one-time payment of $2.5 million to KLA-Tencor. The settlement included other features such as limited cross-licenses of the patents that were subject to the litigation. The Company determined the principal benefit of the settlement was the economic benefit of avoiding litigation expenses and that the value attributable to the other settlement features was de minimus. As a result, the Company recorded a $2.5 million charge to legal settlement in operating expense in 2011. The payment was made in 2012.

The Company maintains certain open inventory purchase agreements with its suppliers to ensure a smooth and continuous supply availability for key components. The Company's liability under these purchase commitments is generally restricted to a forecasted time-horizon as mutually agreed upon between the parties. This forecasted time-horizon can vary among different suppliers. The Company estimates its open inventory purchase commitment as of December 27, 2014 was approximately $29.5 million. Actual expenditures will vary based upon the volume of the transactions and length of contractual service provided. In addition, the amounts paid under these arrangements may be less in the event that the arrangements are renegotiated or cancelled.

The Company leases facilities and certain equipment under non-cancelable operating leases. Rent expense, which is recorded on a straight-line basis over the term of the respective lease, for 2014, 2013 and 2012, was approximately $2.1 million, $2.0 million and $2.2 million, respectively. Future minimum lease payments under its operating leases are as follows (in thousands):

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	Operating Leases
2015	$	1,468
2016	1,083
2017	570
2018	294
2019	195
Total	$	3,610

On June 17, 2009, the Company announced a strategic business partnership with Zygo Corporation whereby it has purchased inventory and certain other assets from Zygo Corporation, and the two companies entered into a supply agreement. The Company will make payments to Zygo Corporation (with an estimated present value of $2.4 million and an estimated future value of $2.9 million as of December 27, 2014) over a period of time as acquired inventory is sold and other aspects of the supply agreement are executed.

Note 12. Net Income (Loss) Per Share

The Company presents both basic and diluted net income (loss) per share on the face of its consolidated statements of operations. Basic net income (loss) per share excludes the effect of potentially dilutive shares and is computed by dividing net income (loss) by the weighted-average number of shares of common stock outstanding for the period. Diluted net income (loss) per share is computed using the weighted-average number of shares of common stock outstanding for the period plus the effect to all potentially dilutive common shares outstanding during the period, including contingently issuable shares and certain stock options, calculated using the treasury stock method. A reconciliation of the share denominator of the basic and diluted net income (loss) per share computations is as follows (in thousands):

	Years Ended
	December 27, 2014	December 28, 2013	December 29, 2012
Weighted average common shares outstanding used in basic net income (loss) per share calculation	23,958	23,290	23,358
Potential dilutive common stock equivalents, using treasury stock method	—	—	487
Weighted average shares used in diluted net income (loss) per share calculation	23,958	23,290	23,845

For the years ended December 27, 2014 and December 28, 2013 potential dilutive common stock equivalents of 0.4 million shares and 0.4 million shares, respectively, were anti-dilutive and therefore were excluded from the calculation due to the net loss positions. For the year ended December 29, 2012, the Company had securities outstanding which could potentially dilute basic earnings per share in the future and weighted average common share equivalents consisting of stock options included in the calculation of diluted net income per share were 0.5 million shares.

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Note 13. Stockholders' Equity and Stock-Based Compensation

Stockholders' Equity

Preferred and Common Stock

The authorized capital stock of Nanometrics consists of 47,000,000 shares of common stock, par value $0.001 per share, and 3,000,000 shares of preferred stock, par value $0.001 per share.

Stock Repurchase

On November 29, 2010, the Company's Board of Directors approved a program to repurchase up to $10.0 million of the Company's common stock, referred to as the 2010 program. Stock repurchases under this program occurred as follows: fiscal year 2010, $0.8 million; fiscal year 2011, $4.3 million; and fiscal year 2012, $4.9 million. As of June 30, 2012, the Company repurchased and retired an aggregate of 667,406 shares of its common stock at a weighted average price of $14.97 per share under the 2010 program utilizing the entire $10.0 million approved by the Board on November 29, 2010, for the repurchase of shares of its common stock.

On May 29, 2012, the Company's Board of Directors approved a program to repurchase up to $20.0 million of its common stock, referred to as the 2012 program. Stock repurchases under this program may be made through open market and privately negotiated transactions, at times and in such amounts as management deems appropriate. The timing and actual number of shares repurchased is dependent on a variety of factors including price, corporate and regulatory requirements and other market conditions. During fiscal year 2012, the Company repurchased and retired 250,400 shares of its common stock under this approved program at the weighted average price of $14.15 per share. Shares repurchased and retired for the indicated periods of the applicable repurchase programs with the associated cost of repurchase and amount available for repurchase at the end of the respective periods are as follows (in thousands, except number of shares and weighted average price per share):

	Fiscal Year 2014		Fiscal Year 2013		Fiscal Year 2012
Number of shares of common stock repurchased	362,633		332,771		587,766
Weighted average price per share	$	14.74	$	15.03	$	14.47
Total cost of repurchase	$	5,344	$	5,000	$	8,504
Amount available for repurchase at end of period	$	6,118	$	11,462	$	16,462

Subsequent to December 27, 2014, the Company repurchased 111,050 shares at an average purchase price of $15.49 per share for a total of $1.7 million. After these purchases, $4.4 million remained available for the future repurchase of the Company's common stock under the 2012 program.

Stock Option Plans

The Nanometrics option plans are as follows:

Plan Name	Participants	Shares Authorized
2005 Equity Incentive Plan	Employees, consultants and directors	7,292,594
2002 Non-statutory Stock Option Plan	Employees and consultants	1,200,000
2000 Employee Stock Option Plan	Employees and consultants	2,450,000
2000 Director Stock Option Plan	Non-employee directors	250,000
Accent Optical Technologies, Inc. Stock Incentive Plan	Employees and consultants	205,003

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Employee Stock Purchase Plan

Under the 2003 Employee Stock Purchase Plan (“ESPP”), eligible employees are allowed to have salary withholdings of up to 10% of their base compensation to purchase shares of common stock at a price equal to 85% of the lower of the market value of the stock at the beginning or end of each six-month offering period, subject to an annual statutory limitation. At the end of the fiscal year ended December 27, 2014, the Company had 0.4 million shares remaining for issuance under the ESPP. Shares purchased under the ESPP were 122,112 shares, 126,068 shares and 113,512 shares in 2014, 2013 and 2012 at a weighted average price of $13.76, $12.36 and $14.16, respectively.

Stock-based Compensation

The Company measures and recognizes compensation expense for all share-based payment awards made to employees and directors including employee stock options, restricted stock units and employee stock purchases related to the Employee Stock Purchase Plan (collectively “Employee Stock Purchases”) based on estimated fair values. The fair value of share-based payment awards is estimated on the date of grant using an option-pricing model. The value of the portion of the award that is ultimately expected to vest is recognized as expense over the requisite service periods in the Company's consolidated statement of operations.

Stock-based compensation expense recognized during the period is based on the value of the portion of share-based payment awards that is ultimately expected to vest during the period. As stock-based compensation expense recognized in the consolidated statement of operations for the years ended December 27, 2014, December 28, 2013 and December 29, 2012 is based on awards expected to vest, it has been reduced for estimated forfeitures. ASC 740 requires forfeitures to be estimated at the time of grant and revised, if necessary, in subsequent periods if actual forfeitures differ from those estimates. The Company's estimated forfeiture rates in 2014, 2013 and 2012 of 10.7%, 11.9%, and 7.6%, respectively, were based on historical forfeiture experience, which the Company believes is the best available information to estimate the future forfeiture rate. Tax benefits resulting from tax deductions in excess of the compensation cost recognized for those options are required to be separately classified in the consolidated statements of cash flows. The Company recognized zero, $0.1 million and $0.9 million of excess tax benefit in fiscal years 2014, 2013 and 2012, respectively.

Valuation and Expense Information

The fair value of stock-based awards to employees is calculated using the Black-Scholes option pricing model, which requires subjective assumptions, including future stock price volatility and expected time to exercise. The expected life of options granted were calculated using the simplified method allowed by the SAB 107. The risk-free rates were based on the U.S Treasury rates in effect during the corresponding period of grant. The expected volatility were based on the historical volatility of the Company's stock price. These factors could change in the future, which would affect the stock-based compensation expense in future periods.

The weighted-average fair value of stock-based compensation to employees is based on the single option valuation approach. Forfeitures are estimated and it is assumed no dividends will be declared. The estimated fair value of stock-based compensation awards to employees is amortized over the vesting period of the options. The weighted-average fair value calculations are based on the following average assumptions:

	Fiscal Year 2014	Fiscal Year 2013	Fiscal Year 2012
Stock Options:
Expected life	4.6 years	4.5 years	4.5 years
Volatility	54.9%	69.9%	77.3%
Risk free interest rate	1.54%	1.05%	0.80%
Dividends	—	—	—
Employee Stock Purchase Plan:
Expected life	0.5 years	0.5 years	0.5 years
Volatility	31.2%	26.8%	45.5%
Risk free interest rate	0.54%	0.11%	0.12%
Dividends	—	—	—

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Stock Options and Restricted Stock Units ("RSUs")

Prior to December 2008, the majority of options granted by the Compensation Committee vested at a rate of 33 ¹/3 percent over the first three years of the seven-year option term on each of the first, second and third anniversary of such grants. Starting in December 2008, the majority of the options granted to employees employed for less than one year vest one-third (  ¹/3^rd ) of the shares subject to the option on the first anniversary of the grant date, and vest one thirty sixth ( ¹/36^th ) each month for the following two years, for a total three year vesting period with a seven-year option term. Starting in November 2008, the majority of the options granted for employees employed for more than one year vest one thirty-sixth ( ¹/36^th ) of the shares subject to the options in equal monthly installments starting on the monthly anniversary of the date of grant with a seven-year option term. On February 22, 2010, the Compensation Committee reviewed best practice with regard to stock option vesting and made the following changes: existing employees generally receive vesting terms of monthly ratable vesting for a total period of four years. New employees, in general, receive vesting terms that are equivalent to 25% vesting on the one year anniversary of the grant with monthly vesting thereafter for a total of four years. All other terms remained the same. Grant of each Restricted Stock Unit (“RSU”) counts against the Company's available for grant pool at a ratio of 2:1 against the 2005 Equity Incentive Plan as depicted below under “RSUs granted.” On May 24, 2013, the Company approved further amendments to the 2005 Equity Incentive Plan including: increasing the number of shares of common stock authorized by 2.6 million shares, changing the multiplier ratio from 2:1 to 1.7:1 against the plan for each award, other than a stock option or stock appreciation right, and providing the maximum term of stock options to be seven years. All other terms remained the same.

The number of RSUs granted during fiscal year 2014 was 473,600, which counted as 805,120 shares against the 2005 Equity Incentive Plan. The number of RSUs cancelled during fiscal year 2014 was 98,473, which counted as 167,404 shares against the 2005 Equity Incentive Plan. Each RSU represents an amount equal to the fair value of one share of the Company's common stock.

A summary of activity under the Company’s stock option plans including options and RSUs during fiscal year 2014, 2013 and 2012 and shares available for grant as of the respective period end dates, is as follows:

	Fiscal Year 2014		Fiscal Year 2013		Fiscal Year 2012
Shares available for grant at beginning of fiscal year	2,937,001		1,093,565		1,391,930
Increase in authorized shares	—		2,600,000		—
Options - granted	(74,300	)	(430,800	)	(281,085	)
Options - cancelled	191,061		150,459		139,376
Options - expired plan shares	(17,491	)	(53,607	)	(53,102	)
RSUs - granted	(805,120	)	(664,902	)	(103,554	)
RSUs - cancelled	167,404		133,418		—
RSUs - shares issued to satisfy tax withholding obligations	65,527		108,868		—
Shares available for grant at end of fiscal year	2,464,082		2,937,001		1,093,565

Options

The weighted average fair value per share of the stock options awarded in fiscal years 2014, 2013, and 2012 was $8.13, $8.58 and $10.00, respectively. A summary of activity of stock options in 2014 is as follows:

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	Number of Shares Outstanding (Options)		Weighted Average Exercise Price		Weighted Average Remaining Contractual Term (Years)	Aggregate Intrinsic Value (in Thousands)
Options
Outstanding at December 28, 2013	1,909,039		$	13.22	4.02	$	10,341
Exercised	(409,285	)	10.45		—	—
Granted	74,300		17.56		—	—
Cancelled	(191,061	)	15.74		—	—
Outstanding at December 27, 2014	1,382,993		$	13.92	3.41	$	4,108
Exercisable at December 27, 2014	1,052,110		$	13.15	2.84	$	3,867

The aggregate intrinsic value in the above table represents the total pretax intrinsic value, based on the Company’s closing stock price of $16.59 as of December 27, 2014, which would have been received by the option holders had all option holders exercised their options as of that date. The total intrinsic value of options exercised during 2014, 2013 and 2012 was $3.0 million, $2.9 million and $4.9 million, respectively. The fair value of options vested during 2014, 2013 and 2012 was $3.2 million, $3.7 million and $3.6 million, respectively.

The following table summarizes ranges of outstanding and exercisable options as of December 27, 2014.

Exercise Prices	Options Outstanding				Options Exercisable
	Number Outstanding	Weighted  Average Remaining Contractual Life (Years)	Weighted Average Exercise Price		Number Exercisable	Weighted Average Exercise Price
$0.93-$7.50	156,237	1.25	$	3.67	156,237	$	3.67
$8.81-$11.37	237,214	2.57	$	10.79	237,214	$	10.79
$11.63-$14.80	146,135	3.89	$	13.68	99,128	$	13.54
$14.88-$15.74	143,682	4.80	$	15.45	75,875	$	15.47
$15.85-$15.98	170,943	2.95	$	15.92	124,931	$	15.94
$16.00-$16.59	45,567	5.77	$	16.40	9,214	$	16.32
$16.70-$16.70	223,432	3.22	$	16.70	206,048	$	16.70
$16.89-$18.27	155,483	4.46	$	17.54	83,466	$	17.51
$18.51-$19.77	99,800	4.56	$	18.94	55,686	$	19.06
$19.84-$19.84	4,500	3.14	$	19.84	4,311	$	19.84
$0.93-$19.84	1,382,993	3.41	$	13.92	1,052,110	$	13.15

As of December 27, 2014, the total unrecognized compensation costs related to unvested stock options was $2.5 million and is expected to be recognized as an expense over a weighted average remaining amortization period of 2.21 years.

Restricted Stock Units ("RSUs")

Each RSU counts against the Company's “2005 Equity Incentive Plan” at a ratio of one and seven tenths shares for each unit granted but represents an amount equal to the fair value of one share of the Company's common stock. The Company granted 473,600 and 348,328 RSUs during the years ended December 27, 2014 and December 28, 2013, respectively, to key employees with vesting periods spanning from one to three years.

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A summary of activity for RSUs is as follows:

RSU	Number of RSUs		Weighted Average Fair Value
Outstanding RSUs as of December 28, 2013	334,444		$	18.61
Granted	473,600		17.14
Released	(146,234	)	17.60
Cancelled	(98,473	)	17.12
Outstanding RSUs as of December 27, 2014	563,337		$	17.90

As of December 27, 2014, the total unrecognized compensation costs related to RSU's was $5.7 million and is expected to be recognized as an expense over a weighted average remaining amortization period of 1.88 years.

Stock-based Compensation Expense

Stock-based compensation expense for all share-based payment awards made to the Company’s employees and directors pursuant to the employee stock option and employee stock purchase plans by function were as follows (in thousands):

	Fiscal Year 2014		Fiscal Year 2013		Fiscal Year 2012
Cost of products	$	268	$	207	$	164
Cost of service	287		278		230
Research and development	1,245		1,478		1,220
Selling	1,642		1,894		1,791
General and administrative	3,243		2,919		2,485
Restructuring	67		898		—
Total stock-based compensation expense related to employee stock options and employee stock purchases	$	6,752	$	7,674	$	5,890

Note 14. Defined Benefit Pension Plan

Nanometrics sponsors a statutory government mandated defined benefit pension plan (the “Benefit Plan”) in Taiwan for its local employees. The fair value of plan assets was $0.2 million, $0.2 million and $0.2 million for the fiscal years ended 2014, 2013 and 2012, respectively; and the net funding deficiency of the Benefit Plan was $0.3 million, $0.2 million, and $0.3 million for the fiscal years ended December 27, 2014, December 28, 2013, and December 29, 2012, respectively. Based on the nature and limited extent of the pension plan, we determined this pension plan was not material for separate disclosure.

Note 15. Income Taxes

Income Tax Assets and Liabilities - The Company accounts for income taxes whereby deferred tax assets and liabilities are recognized using enacted tax rates for the effect of temporary differences between the book and tax accounting for assets and liabilities. Also, deferred tax assets are reduced by a valuation allowance to the extent that management cannot conclude that it is more likely than not that a portion of the deferred tax asset will be realized in the future. The Company evaluates the deferred tax assets on a continuous basis throughout the year to determine whether or not a valuation allowance is appropriate. Factors used in this determination include future expected income and the underlying asset or liability which generated the temporary tax difference. The income tax provision is primarily impacted by federal statutory rates, state and foreign income taxes, and changes in the valuation allowance.

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Income (loss) before provision for income taxes consists of the following (in thousands):

	Years Ended
	December 27, 2014			December 28, 2013			December 29, 2012
Domestic	$	(15,691	)	$	(26,447	)	$	1,887
Foreign	4,070			2,882			2,732
Income (loss) before income taxes	$	(11,621	)	$	(23,565	)	$	4,619

The provision (benefit) for income taxes consists of the following (in thousands):

	Years Ended
	December 27, 2014			December 28, 2013			December 29, 2012
Current:
Federal	$	358		$	119		$	(2,403	)
State	(151		)	5			(492		)
Foreign	1,327			933			270
Total current	1,534			1,057			(2,625		)
Deferred:
Federal	17,368			(10,686		)	1,753
State	550			(325		)	379
Foreign	45			535			647
Total deferred	17,963			(10,476		)	2,779
Provision (benefit) for income taxes	$	19,497		$	(9,419	)	$	154

Significant components of the Company's deferred tax assets and liabilities are as follows (in thousands):

	At
	December 27, 2014			December 28, 2013
Deferred tax assets:
Reserves and accruals	$	10,744		$	10,592
Deferred revenue	1,370			1,614
Shared based compensation	4,030			3,789
Tax credit carry-forwards	8,122			6,591
Net operating losses	14,695			10,220
Depreciation & amortization	2,750			3,241
Other	372			966
Total deferred tax assets	42,083			37,013
Less: Valuation allowance	(35,835		)	(11,665		)
Total deferred tax assets net of valuation allowance	6,248			25,348
Deferred tax liabilities:
Depreciation & amortization	(4,020		)	(5,567		)
Other	(1,485		)	(926		)
Total deferred tax liabilities	(5,505		)	(6,493		)
Net deferred tax assets	$	743		$	18,855

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As of December 27, 2014, the Company had net operating loss carryforwards of $13.4 million for federal, $45.0 million in California and $36.3 million in foreign countries, which begin to expire in 2015. A total of $0.2 million of the federal net operating loss, $3.0 million of the California net operating loss carryforward and $1.7 million of the foreign net operating loss carryforwards are related to excess tax benefits as a result of stock option exercises, and therefore will be recorded in additional paid-in capital in the period that they become realized. During the year ended December 27, 2014, the Company did not realize any excess tax benefits as a result of stock option exercises, therefore, there were no amounts recorded to additional paid-in capital.

As of December 27, 2014, the Company had available carryforward Federal and California R&D tax credits of $6.2 million and $5.7 million, respectively. Federal R&D tax credit carryforwards begin to expire in 2024. State R&D tax credits carryforward indefinitely. A total of $0.2 million of the state R&D tax credits are related to excess tax benefits as a result of stock option exercises, and therefore will be recorded to additional paid-in-capital in the period that they become realized.

During the years ended December 27, 2014 and December 28, 2013, the valuation allowances increased by $23.9 million and $1.4 million, respectively. The valuation allowance increase in 2014 was primarily related to a full valuation allowance recorded against the Company's U.S. deferred tax assets. The realization of deferred tax assets is primarily dependent on the Company generating sufficient U.S. and foreign taxable income in future fiscal years. The Company regularly assesses the need for a valuation allowance against its deferred tax assets. In making that assessment, the Company considers both positive and negative evidence related to the likelihood of realization of the deferred tax assets to determine, based on the weight of available evidence, whether it is more-likely-than-not that some or all of the deferred tax assets will not be realized. In evaluating the need for a valuation allowance, the Company considers its cumulative loss in the U.S. as a significant piece of negative evidence. During the year ended December 27, 2014, the Company recorded a $21.1 million valuation allowance against its U.S. deferred tax assets as it determined, within the period, it would not meet the more likely than not threshold. The Company continues to maintain valuation allowances against certain foreign deferred tax assets as a result of uncertainties regarding the realization of the asset due to cumulative losses and uncertainty of future taxable income. The Company will continue to assess the realizability of the deferred tax assets in each of the applicable jurisdictions and maintain the valuation allowances until sufficient positive evidence exists to support a reversal. In the event the Company determines that the deferred tax assets are realizable, an adjustment to the valuation allowances will be reflected in the tax provision for the period such determination is made.

Changes in tax laws and tax rates could affect the Company's recorded deferred tax assets and liabilities in the future. The Company's tax liabilities involve dealing with uncertainties in the application of complex tax laws and regulations in a multitude of jurisdictions across its global operations. Management will account for any such changes or factors in the period in which such law changes are enacted.

Differences between income taxes computed by applying the statutory federal income tax rate to income (loss) before income taxes and the provision (benefit) for income taxes consist of the following (in thousands):

	Years Ended
	December 27, 2014			December 28, 2013			December 29, 2012
Income taxes computed at U.S. statutory rate	$	(4,067	)	$	(8,247	)	$	1,616
State income taxes	254			(324		)	(116		)
Foreign tax rate differential	(172		)	9			(275		)
Change in valuation allowance	23,126			—			—
Domestic production activities deduction	—			—			(17		)
Tax credits	(561		)	(1,377		)	—
Benefit of tax elections	—			—			(1,309		)
Liabilities for uncertain tax positions	118			111			66
Other, net	799			409			189
Provision (benefit) for income taxes	$	19,497		$	(9,419	)	$	154

As of December 27, 2014, approximately $1.0 million of undistributed earnings from non-U.S. operations held by the Company's foreign subsidiaries are designated as indefinitely reinvested outside the U.S. Accordingly, no additional U.S.

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income taxes or additional foreign withholding taxes have been provided thereon. The amount of unrecognized deferred tax liability related to these earnings would be immaterial.

The Company recognizes tax liabilities for uncertain tax positions and adjust these liabilities when its judgment changes as a result of the evaluation of new information not previously available. Due to the complexity of some of these uncertainties, the ultimate resolution may result in a payment that is materially different from the Company's current estimate of the tax liabilities. These differences will be reflected as increases or decreases to income tax expense in the period in which they are determined.

The accounting for uncertainty in income taxes recognized in an enterprise's financial statements prescribes a recognition threshold and measurement attribute for the financial statement recognition and measurement of a tax position taken or expected to be taken on a tax return, and the derecognition of tax benefits, classification on the balance sheet, interest and penalties, accounting in interim periods, disclosure, and transition.

A reconciliation of the beginning and ending amount of unrecognized tax benefits is as follows (in thousands):

	Years Ended
	December 27, 2014			December 28, 2013			December 29, 2012
Unrecognized tax benefits - beginning of the period	$	4,436		$	3,464		$	3,599
Foreign currency movements	—			—			—
Gross increases-tax positions in prior period	655			305			—
Gross decreases-tax positions in prior period	(123		)	—			(183		)
Gross increases-current-period tax positions	1,541			688			265
Lapse of statute of limitations	(67		)	(21		)	(217		)
Unrecognized tax benefits - end of the period	$	6,442		$	4,436		$	3,464

The unrecognized tax benefit at December 27, 2014 was $6.4 million, of which $0.7 million would impact the effective tax rate if recognized. The Company accrues interest and penalties related to unrecognized tax benefits in its provision for income taxes. The total amount of penalties and interest were not material as of December 27, 2014, December 28, 2013 and December 29, 2012. The Company does not expect a material change in its unrecognized tax benefits within the next 12 months.

The Company is subject to taxation in the U.S. and various states including California, and foreign jurisdictions including Korea, Japan, Taiwan, and China. Due to tax attribute carry-forwards, the Company is subject to examination for tax years 2003 forward for U.S. tax purposes. The Company was also subject to examination in various states for tax years 2002 forward. The Company is subject to examination for tax years 2007 forward for various foreign jurisdictions.

Note 16. Segment, Geographic, Product and Significant Customer Information

The Company has one operating segment, which is the sale, design, manufacture, marketing and support of thin film and optical critical dimension systems. The Chief Executive Officer has been identified as the Chief Operating Decision Maker (“CODM”) because he has the final authority over resource allocation decisions and performance assessment. The CODM does not receive discrete financial information about individual components of the Company's business. For the years ended December 27, 2014, December 28, 2013, and December 29, 2012, the Company recorded revenue from customers primarily in the United States, Asia and Europe. The following tables summarize total net revenues and long-lived assets (excluding intangible assets) attributed to significant countries (in thousands):

66

NANOMETRICS INCORPORATED

NOTES TO CONSOLIDATED FINANCIAL STATEMENTS—(Continued)

	Years Ended
	December 27, 2014		December 28, 2013		December 29, 2012
Total net revenues (1):
United States	$	36,123	47,019		44,811
South Korea	41,381		34,873		79,555
China	28,702		13,063		5,323
Taiwan	19,790		9,645		16,757
Other	40,447		39,707		36,435
Total net revenues	$	166,443	$	144,307	$	182,881

 ⁽¹⁾Net revenues are attributed to countries based on the customer's deployment and service locations of systems.

Long-lived tangible assets:	December 27, 2014		December 28, 2013
United States	$	47,729	$	44,775
Japan	71		125
South Korea	284		445
All Other	1,549		2,094
Total long-lived tangible assets	$	49,633	$	47,439

The Company’s product lines differ primarily based on the environment in which the systems will be used. Automated systems are used primarily in high-volume production environments. Materials characterization products are primarily used to measure the composition, band gap, structure, and other physical and electrical properties of semiconducting materials for discrete electronic industry, high brightness LED and solar/photovoltaic structures in both development and high volume environments. Integrated systems are installed inside wafer processing equipment to provide near real-time measurements for improving process control and increasing throughput. Revenues by product type were as follows (in thousands):

	Years Ended
	December 27, 2014		December 28, 2013		December 29, 2012
Automated Systems	$	108,768	$	82,924	$	119,451
Integrated Systems	15,334		11,412		12,379
Materials Characterization Systems	9,487		13,066		11,997
Total product revenues	$	133,589	$	107,402	$	143,827

The following customers accounted for 10% or more of total accounts receivable, net:

	At
	December 27, 2014		December 28, 2013		December 29, 2012
Samsung Electronics Co. Ltd.	10.0	%	27.4	%	***
Intel Corporation	***		14.4	%	12.3	%
Taiwan Semiconductor Manufacturing Company Limited	20.2	%	12.1	%	17.3	%
SK Hynix	***		21.8	%	***
Micron	23.7	%	***		***
GLOBALFOUNDRIES	10.2	%	***		***

*** The customer accounted for less than 10% of total accounts receivable, net, as of that period end.

67

NANOMETRICS INCORPORATED

NOTES TO CONSOLIDATED FINANCIAL STATEMENTS—(Continued)

The following customers accounted for 10% or more of total net revenue:

	Years Ended
	December 27, 2014		December 28, 2013		December 29, 2012
Samsung Electronics Co. Ltd.	26.9	%	14.4	%	27.8	%
Intel Corporation	12.6	%	30.0	%	22.3	%
SK Hynix	12.2	%	18.4	%	16.5	%
Micron	10.4	%	***		***

*** The customer accounted for less than 10% of total net revenue during the period.

68

SUPPLEMENTAL FINANCIAL INFORMATION

Selected Quarterly Financial Results (Unaudited)

The following table sets forth selected consolidated quarterly results of operations for the years ended December 27, 2014 and December 28, 2013 (in thousands, except per share amounts):

	Quarters Ended
	December 27, 2014			September 27, 2014(1)			June 28, 2014		March 29, 2014
Total net revenues	$	39,705		$	27,133		$	48,029	$	51,576
Gross profit	17,349			11,416			22,908		24,149
Income (loss) from operations	(3,806		)	(10,609		)	746		2,016
Net income (loss)	(4,639		)	(28,662		)	588		1,595
Net income (loss) per share:
Basic	$	(0.19	)	$	(1.19	)	$	0.02	$	0.07
Diluted	$	(0.19	)	$	(1.19	)	$	0.02	$	0.07
Shares used in per share computations:
Basic	24,048			24,132			23,939		23,711
Diluted	24,048			24,132			24,220		24,159

	Quarters Ended
	December 28, 2013		September 28, 2013			June 29, 2013			March 30, 2013
Total net revenues	$	46,159	$	39,044		$	34,552		$	24,552
Gross profit	21,909		15,801			14,480			10,486
Income (loss) from operations	1,292		(7,242		)	(6,156		)	(9,603		)
Net income (loss)	556		(4,554		)	(4,566		)	(5,582		)
Net income (loss) per share:
Basic	$	0.02	$	(0.20	)	$	(0.20	)	$	(0.24	)
Diluted	$	0.02	$	(0.20	)	$	(0.20	)	$	(0.24	)
Shares used in per share computations:
Basic	23,420		23,261			23,138			23,273
Diluted	23,913		23,261			23,138			23,273

⁽¹⁾ Net loss included a non-cash valuation allowance of $21.1 million on certain U.S. deferred tax assets.

69

ITEM 9. CHANGES IN AND DISAGREEMENTS WITH ACCOUNTANTS ON ACCOUNTING AND FINANCIAL DISCLOSURE

None.

ITEM 9A. CONTROLS AND PROCEDURES

Evaluation of Disclosure Controls and Procedures

We maintain disclosure controls and procedures that are designed to ensure that information required to be disclosed in our reports under the Exchange Act is recorded, processed, summarized and reported within the time periods specified in the SEC's rules and forms, and that such information is accumulated and communicated to management, including our Chief Executive Officer (“CEO”) and Chief Financial Officer (“CFO”), as appropriate, to allow timely decisions regarding required disclosure. Our management, with participation of our CEO and CFO, has evaluated the effectiveness of our disclosure controls and procedures as of the end of the fiscal year covered by this Annual Report on Form 10-K.

Based upon that evaluation, our CEO and CFO have concluded that, as of the end of the period covered in this report, our disclosure controls and procedures were effective to ensure that information required to be disclosed by us in reports that we file or submit under the Exchange Act is recorded, processed, summarized, and reported within the time periods specified in SEC rules and forms and is accumulated and communicated to our management, including our principal executive officer and principal financial officer, as appropriate, to allow timely decisions regarding required disclosure.

Report of Management on Internal Control over Financial Reporting

Our management is responsible for establishing and maintaining adequate internal control over financial reporting as defined in Rules 13a-15(f) and 15d-15(f) under the Exchange Act. Our internal control over financial reporting was designed to provide reasonable, not absolute, assurance regarding the integrity, reliability and fair presentation of our financial reporting and the preparation of financial statements for external purposes in accordance with generally accepted accounting principles.

Internal control over financial reporting includes those policies and procedures that (i) pertain to the maintenance of records that in reasonable detail accurately and fairly reflect the transactions and dispositions of the assets of the Company; (ii) provide reasonable assurance that transactions are recorded as necessary to permit preparation of financial statements in accordance with generally accepted accounting principles, and that receipts and expenditures of the Company are being made only in accordance with authorizations of management and directors of the Company; and (iii) provide reasonable assurance regarding prevention or timely detection of unauthorized acquisition, use or disposition of the Company’s assets that could have a material effect on the financial statements.

A control system, no matter how well designed and operated, can provide only reasonable, not absolute, assurance that the control system’s objectives will be met. Further, the design of a control system must reflect the fact that there are resource constraints. Because of the inherent limitations in all control systems, no evaluation of controls can provide absolute assurance that all control issues and instances of fraud, if any, within our company have been detected. Under the supervision and with the participation of our management, including our CEO and CFO, we assessed the effectiveness of our internal control over financial reporting as of December 27, 2014. In making this assessment, we used the criteria established in the framework on Internal Control – Integrated Framework 2013 issued by the Committee of Sponsoring Organizations (“COSO”) of the Treadway Commission.

Based on our assessment, which was conducted according to the COSO criteria, we have concluded that our internal control over financial reporting was effective in achieving its objectives as of December 27, 2014.

The effectiveness of our internal control over financial reporting as of December 27, 2014 has been audited by PricewaterhouseCoopers LLP, an independent registered public accounting firm, as stated in their report which appears herein.

Changes in Internal Control over Financial Reporting

No change in our internal controls over financial reporting (as defined in Rules 13a-15(f) and 15d-15(f) under the Exchange Act) occurred during the fourth quarter ended December 27, 2014, that has materially affected, or is reasonably likely to materially affect, our internal control over financial reporting.

70

ITEM 9B. OTHER INFORMATION

None.

71

PART III

ITEM 10. DIRECTORS, EXECUTIVE OFFICERS AND CORPORATE GOVERNANCE

The information required by this Item is incorporated by reference to our Proxy Statement for our 2015 Annual Meeting of Stockholders (the “Proxy Statement”) to be filed with the SEC not later than 120 days after the end of our fiscal year ended December 27, 2014, specifically:

• Information regarding our directors and any persons nominated to become a director, as well as with respect to some other required board matters, is set forth under Proposal 1 entitled “Election of Directors” and under “Corporate Governance.”

• Information regarding our audit committee and our designated “audit committee financial expert” is set forth under the caption “Corporate Governance.”

• Information on our code of business conduct and ethics for directors, officers and employees is set forth under the caption “Code of Ethics” under “Corporate Governance.”

• Information regarding Section 16(a) beneficial ownership reporting compliance is set forth under the caption “Section 16(a) Beneficial Ownership Reporting Compliance.”

• Information regarding procedures by which stockholders may recommend nominees to our board of directors is set forth under the caption “Nominating and Governance Committee” under “Corporate Governance.”

Information regarding our executive officers is set forth at the end of Item 1, Part 1 of this Annual Report on Form 10-K under the caption “Executive Officers of the Registrant."

ITEM 11. EXECUTIVE COMPENSATION

Information regarding compensation of our named executive officers is set forth under the caption “Executive Compensation” in the Proxy Statement, which information is incorporated herein by reference.

Information regarding compensation of our directors is set forth under the caption "Compensation of Directors" in the Proxy Statement, which information is incorporated herein by reference.

Information relating to compensation policies and practices as they relate to risk management is set forth in the section titled “The Board's Role in Risk Oversight” under the caption “Corporate Governance” in the Proxy Statement,

Information regarding compensation committee interlocks is set forth under the caption "Compensation Committee Interlocks and Insider Participation" in the Proxy Statement, which information is incorporated herein by reference.

The Compensation Committee Report is set forth under the caption "Compensation Committee Report" in the Proxy Statement, which report is incorporated herein by reference.

72

ITEM 12. SECURITY OWNERSHIP OF CERTAIN BENEFICIAL OWNERS AND MANAGEMENT AND RELATED STOCKHOLDER MATTERS

Information regarding security ownership of certain beneficial owners, directors and executive officers is set forth under the caption "Security Ownership of Certain Beneficial Owners and Management" in the Proxy Statement, which information is incorporated herein by reference.

Equity Compensation Plan Information

The following table gives information about the common stock that may be issued under all of our existing equity compensation plans as of December 27, 2014.

Plan category	Number of securities to be issued upon exercise of outstanding options, warrants and rights	Weighted-average exercise price of outstanding options		Number of securities  remaining available for future issuance under equity compensation plans (excluding securities reflected in first column)
Equity compensation plans approved by security holders	1,234,104	$	13.60	2,464,082
Equity compensation plans not approved by security holders (1)	148,889	$	16.60	—
Total	1,382,993	$	13.92	2,464,082

⁽¹⁾  Represents the 2002 Non-Statutory Stock Plan, which was adopted without the approval of security holders. This Plan provides for the grant of non-statutory stock options to employees and service providers at grant prices equal to the fair market value on the date of grant, with an expiration date not to exceed 10 years from the grant date. 

ITEM 13. CERTAIN RELATIONSHIPS AND RELATED TRANSACTIONS AND DIRECTOR INDEPENDENCE

Information regarding certain relationships and related transactions is set forth under the caption "Related Person Transaction Policy" under the caption "Corporate Governance" in the Proxy Statement, which information is incorporated herein by reference.

Information regarding director independence is set forth under the caption “Board of Directors Meetings and Committees” under “Corporate Governance” in the Proxy Statement, which information is incorporated herein by reference.

ITEM 14. PRINCIPAL ACCOUNTING FEES AND SERVICES

Information regarding principal auditor fees and services is set forth under the proposal entitled “Ratification of Appointment of Independent Registered Public Accounting Firm” in the Proxy Statement, which information is incorporated herein by reference.

73

PART IV

ITEM 15. EXHIBITS, FINANCIAL STATEMENT SCHEDULES

(a) The following documents are filed as part of this report on Form 10-K:

(1) Consolidated Financial Statements.

See Index to Consolidated Financial Statements in Item 8 on page 36 of this Annual Report on Form 10-K.

(2) Consolidated Financial Statement Schedule.

The following consolidated financial statement schedule of Nanometrics Incorporated is filed as part of this Annual Report on Form 10-K and should be read in conjunction with the Consolidated Financial Statements:

Schedule	Page
II - Valuation and Qualifying Accounts as of and for the years ended December 27, 2014, December 28, 2013 and December 29, 2012	80

Schedules not listed above have been omitted because they are not applicable or are not required or the information required to be set forth therein is included in the Consolidated Financial Statements or notes thereto.

(3) Exhibits.

See Exhibit Index beginning on page 76 of this Annual Report on Form 10-K which is incorporated by reference here.

74

SIGNATURES

Pursuant to the requirements of Section 13 or 15(d) of the Securities Exchange Act of 1934, the registrant has duly caused this report to be signed on its behalf by the undersigned, thereunto duly authorized.

Dated: February 24, 2015

NANOMETRICS INCORPORATED
By:	/S/ TIMOTHY J. STULTZ
	Timothy J. Stultz President and Chief Executive Officer (Duly Authorized Officer and Principal Executive Officer)

Pursuant to the requirements of the Securities Exchange Act of 1934, this Report on Form 10-K has been signed below by the following persons on behalf of the registrant and in the capacities and on the dates indicated.

Signature	Title	Date
/S/ TIMOTHY J. STULTZ	President, Chief Executive Officer and Director	February 24, 2015
Timothy J. Stultz	(Principal Executive Officer)
/S/ JEFFREY ANDRESON	Chief Financial Officer	February 24, 2015
Jeffrey Andreson	(Principal Financial Officer and Principal Accounting Officer)
/S/ BRUCE C. RHINE	Chairman of the Board of Directors	February 24, 2015
Bruce C. Rhine
/S/ J. THOMAS BENTLEY	Director	February 24, 2015
J. Thomas Bentley
/S/ EDWARD J. BROWN JR.	Director	February 24, 2015
Edward J. Brown Jr.
/S/ STEPHEN G. NEWBERRY	Director	February 24, 2015
Stephen G. Newberry
/S/ CHRISTINE TSINGOS	Director	February 24, 2015
Christine Tsingos

75

EXHIBIT INDEX

EXHIBIT INDEX

Exhibit No.	Description
3.(i)	Certificate of Incorporation
3.1(1)	Certificate of Incorporation of the Registrant
3.(ii)	Bylaws
3.2 (2)	Bylaws of the Registrant
4	Instruments Defining the Rights of Security Holders, Including Indentures
4.1 (3)	Form of Common Stock Certificate
10	Material Contracts
	Management Contracts, Compensatory Plans, Contracts or Arrangements
10.1 (4)	Form of Indemnification Agreement between the Registrant and each of its directors and executive officers
10.2 (5)	Registrant’s 2000 Employee Stock Option Plan and form of Stock Option Agreement
10.3 (6)	Registrant’s 2000 Director Stock Option Plan and form of Stock Option Agreement
10.4 (7)	Registrant’s 2002 Non-statutory Stock Option Plan and form of Stock Option Agreement
10.5 (8)	Registrant’s Amended and Restated 2003 Employee Stock Purchase Plan
10.6 (9)	Form of Subscription Agreement Under the Registrant’s Amended and Restated 2003 Employee Stock Purchase Plan
10.7 (21)	Registrant’s Amended and Restated 2005 Equity Incentive Plan
10.8 (6)	Registrant’s Amended and Restated 2005 Equity Incentive Plan forms of Stock Option and Restricted Stock Unit Agreements
10.9 (10)	Executive Performance Bonus Plan
10.10 (11)	Form of Offer Letter to Timothy J. Stultz
10.11 (12)	Amended and Restated Executive Severance Agreement between the Registrant and Timothy J. Stultz, dated February 23, 2010
10.12 (12)	Amended and Restated Executive Severance Agreement between the Registrant and Bruce A. Crawford, dated February 23, 2010

76

10.13 (13)	Employment Agreement between Registrant and Ronald W. Kisling, dated February 28, 2011
10.14 (14)	Employment Agreement between Registrant and Nancy E. Egan, dated October 31, 2011
10.15 (22)	Employment Agreement between Registrant and Jeffrey Andreson, dated September 22, 2014
10.16 *	Separation Agreement between Registrant and Bruce A. Crawford, dated October 28, 2014
	All Other Material Contracts
10.17 (7)	Loan and Security Agreement effective as of February 14, 2007 by and between Comerica Bank, the Registrant, Accent Optical Technologies, Nanometrics, Inc. and Nanometrics IVS Division, Inc.
10.18 (15)	First Amendment to the Loan and Security Agreement dated September 14, 2007
10.19 (15)	Second Amendment to the Loan and Security Agreement dated May 11, 2009, with an effective date of April 29, 2009
10.20 (16)	Third Amendment to the Loan and Security Agreement dated June 15, 2009
10.21 (17)	Fourth Amendment to the Loan and Security Agreement dated April 13, 2010
10.22 (18)	Security Agreement, Balloon Promissory Note, and Deed of Trust by and between GE Commercial Finance Business Property Corporation and the Registrant, each dated July 25, 2008
10.23 (16)	Asset Transfer Agreement by and between Zygo Corporation and the Registrant, dated June 17, 2009
10.24 (16)	Supply Agreement by and between Zygo Corporation and the Registrant dated June 17, 2009
10.25 (20)	Fifth Amendment to the Loan and Security Agreement dated April 23, 2012
10.26 (23)	Compensation of Non-Employee Directors
10.27 (24)	Extension to the Loan and Security Agreement dated April 30, 2014
10.28 (25)	Sixth Amendment to the Loan and Security Agreement by and between the Registrant and Comerica Bank dated May 30, 2014
14	Code of Ethics
14.1 (19)	Registrant’s Code of Business Conduct and Ethics
21	Subsidiaries
21.1*	Subsidiaries of the Registrant

77

23	Consents of Experts and Counsel
23.1*	Consent of PricewaterhouseCoopers LLP Independent Registered Public Accounting Firm
31	Rule 13a-14(a)/15d-14(a) Certifications
31.1*	Certification of Timothy J. Stultz, principal executive officer of the Registrant, pursuant to Section 302 of the Sarbanes-Oxley Act of 2002
31.2*	Certification of Jeffrey Andreson, principal financial officer and principal accounting officer of the Registrant, pursuant to Section 302 of the Sarbanes-Oxley Act of 2002
32	Section 1350 Certifications
32.1*	Certification of Timothy J. Stultz, principal executive officer of the Registrant, and Jeffrey Andreson, principal financial officer and principal accounting officer of the Registrant pursuant to Section 906 of the Sarbanes-Oxley Act of 2002
101.INS**	XBRL Instance Document
101.SCH**	XBRL Taxonomy Extension Schema Document
101.CAL**	XBRL Taxonomy Extension Calculation Linkbase Document
101.DEF**	XBRL Taxonomy Extension Definition Linkbase Document
101.LAB**	XBRL Taxonomy Extension Label Linkbase Document
101.PRE**	XBRL Taxonomy Extension Presentation Linkbase Document

(1) Incorporated by reference to Exhibit 3.1 filed with the Registrant's Current Report on Form 8-K (File

No. 000-13470) filed on October 5, 2006.

(2) Incorporated by reference to Exhibit 3.1 filed with the Registrant's Current Report on Form 8-K (File

No. 000-13470) filed on April 12, 2012.

(3) Incorporated by reference to Exhibit 4.1 filed with the Registrant's Quarterly Report on Form 10-Q (File

No. 000-13470) filed on November 9, 2006.

(4) Incorporated by reference to Exhibit 10.1 filed with the Registrant's Current Report on Form 8-K (File

No. 000-13470) filed on March 28, 2013.

(5) Incorporated by reference to Exhibit 4.2 filed with the Registrant's Registration Statement on Form S-8 (File No. 333-40866) filed on July 6, 2000.

(6) Incorporated by reference to the like-described exhibit filed with the Registrant's Annual Report on Form 10-K (File

No. 000-13470) filed on March 13, 2008.

(7) Incorporated by reference to the like-described exhibit filed with the Registrant's Quarterly Report on Form 10-Q (File

No. 000-13470) filed on May 10, 2007.

(8) Incorporated by reference to Appendix 1 filed with the Registrant's definitive proxy statement on Schedule 14A (File No. 000-13470) filed on April 21, 2009.

(9) Incorporated by reference to Exhibit 4.1 filed with the Registrant's Registration Statement on Form S-8 (File No.333-108474) filed on September 3, 2003.

78

(10) Incorporated by reference to the like-described exhibit filed with the Registrant's Quarterly Report on Form 10-Q (File No. 000-13470) filed on May 11, 2011.

(11) Incorporated by reference to Exhibit 10.1 filed with the Registrant's Current Report on Form 8-K (File No. 000-13470) filed on August 8, 2007.

(12) Incorporated by reference to the like-described exhibit filed with the Registrant's Annual Report on Form 10-K (File No. 000-13470) filed on March 26, 2010.

(13) Incorporated by reference to Exhibit 10.21 filed with the Registrant's Annual Report on Form 10-K (File No. 000-13470) filed on March 14, 2011.

(14) Incorporated by reference to Exhibit 10.14 filed with the Registrant's Annual Report on Form 10-K (File No. 000-13470) filed on March 14, 2012.

(15) Incorporated by reference to the like-described exhibit filed with the Registrant's Quarterly Report on Form 10-Q (File No. 000-13470) filed on May 12, 2009.

(16) Incorporated by reference to the like-described exhibit filed with the Registrant's Quarterly Report on Form 10-Q (File No. 000-13470) filed on August 11, 2009.

(17) Incorporated by reference to Exhibit 99.1 filed with the Registrant's Current Report on Form 8-K (File No. 000-13470) filed on April 19, 2010.

(18) Incorporated by reference to Exhibit 10.2 filed with the Registrant's Quarterly Report on Form 10-Q (File No. 000-13470) filed on November 6, 2008.

(19) Incorporated by reference to Exhibit 14 filed with the Registrant's Annual Report on Form 10-K (File No. 000-13470) filed on April 1, 2004.

(20) Incorporated by reference to Exhibit 10.1 filed with the Registrant's Quarterly Report on Form 10-Q (File No. 000-13470) filed on May 9, 2012.

(21) Incorporated by reference to Appendix A filed with the Registrant's definitive proxy statement on Schedule 14A (File No. 000-13470) filed on April 10, 2013.

(22) Incorporated by reference to Exhibit 10.1 filed with the Registrant's Quarterly Report on Form 10-Q (File No. 000-13470) filed on October 31, 2014.

(23) Incorporated by reference to Exhibit 10.26 filed with the Registrant's Annual Report on Form 10-K (File No. 000-13470) filed on March 7, 2014.

(24) Incorporated by reference to Exhibit 10.1 filed with the Registrant's Quarterly Report on Form 10-Q (File No. 000-13470) filed on August 1, 2014.

(25) Incorporated by reference to Exhibit 99.1 filed with the Registrant's Current Report on Form 8-K (File No. 000-13470) filed on June 4, 2014.

*    Filed herewith.

**    Furnished herewith.

79

SCHEDULE II

NANOMETRICS INCORPORATED

VALUATION AND QUALIFYING ACCOUNTS

Our allowance for doubtful accounts receivable consists of the following (in thousands):

Year Ended	Balance at beginning of period		Charged to costs and expenses			Deductions – write-offs of accounts			Balance at end of period
December 27, 2014	$	293	$	(40	)	$	—		$	253
December 28, 2013	$	82	$	255		$	(44	)	$	293
December 29, 2012	$	117	$	(3	)	$	(32	)	$	82

Our valuation allowance for deferred tax assets consists of the following (in thousands):

Year Ended	Balance at beginning of period		Charged to costs and expenses		Deductions – write-offs of accounts		Balance at end of period
December 27, 2014	$	11,665	$	24,170	$	—	$	35,835
December 28, 2013	$	10,229	$	1,436	$	—	$	11,665
December 29, 2012	$	8,142	$	2,087	$	—	$	10,229

80

EX-10.16

	Nanometrics Incorporated	Tel: 408.545.6000
	1550 Buckeye Drive	Fax: 408.232.5910
	Milpitas, CA 95035	www.nanometrics.com

October 23, 2014

Mr. Bruce Crawford

Nanometrics, Inc.

1550 Buckeye Drive

Milpitas, CA 95035

Dear Bruce:

This letter sets forth the substance of the separation agreement (the “Agreement”) that Nanometrics, Inc. (the “Company”) is offering to you.

1. SEPARATION DATE. Unless your employment is terminated by either you or the Company pursuant to Section 2(c) below, your employment termination date will be December 26, 2014 (the “Separation Date.”)

2.     TRANSITION PERIOD.

a.    Duties. Between now and the Separation Date (the “Transition Period”), you will remain in your current role, on a regular full-time schedule, and will continue to perform your regular duties. The Company may change your duties prior to the Separation Date. Specifically, you may be assigned special projects by the Chief Executive Officer (“CEO”) and continue to report to the CEO. During the Transition Period, you must continue to comply with all of the Company’s policies and procedures and with all of your statutory and contractual obligations to the Company (including, without limitation, your obligations under the Nanometrics Employee Patent and Confidentiality Agreement).

b.    Compensation/Benefits.

(i)    Salary. During the Transition Period, your base salary will remain the same, and you will continue to be eligible for the Company’s standard benefits, subject to the terms and conditions applicable to such plans and programs. In the event that the Company hires a replacement prior to the Separation Date, your compensation will be reduced commensurate with the time and responsibilities required to complete the special projects assigned by the CEO.

(ii)    Equity. Your equity awards will continue to vest under the existing terms and conditions set forth in the governing plan documents and equity agreements.

(iii)    Bonus. You agree that you will not be eligible to earn a 2014 Executive Performance Bonus, in full or part. Instead, your eligibility for a bonus for 2014 will governed solely by Section 3.b. below.

(iv)    Health Coverage. You will remain eligible to participate in the Company’s health care plan and Executive Health Care Reimbursement plan until the Separation Date.

c.    Termination. During the Transition Period, you are entitled to resign your employment for any reason. Additionally, during the Transition Period, the Company is entitled to terminate your employment with or without Cause subject to the terms of the Amended and Restated Executive

	Nanometrics Incorporated	Tel: 408.545.6000
	1550 Buckeye Drive	Fax: 408.232.5910
	Milpitas, CA 95035	www.nanometrics.com

Severance Agreement between you and the company dated February 23, 2010 (the “Severance Agreement”).

d.    Acknowledgement. You agree that nothing in this Agreement, including but not limited to the Severance Payment (as defined herein), Transition Bonus (as defined herein) and any contemplated changes in your duties and/or compensation, shall constitute “Good Reason” as that term is used and defined in the Severance Agreement.

e.    Consulting. On or before December 26, 2014, you and the Company agree to enter into a post-employment consulting agreement, attached hereto as Exhibit A, which will extend from December 26, 2015 through March 31, 2015.

3.SEPARATION BENEFITS. Subject to the terms and conditions set forth in Section 2, and if you sign the Separation Date Release attached hereto as Exhibit B on the Separation Date, and allow that release to become effective, then the Company will provide you with the following Severance Benefits:

a.    Severance Payment. A lump-sum severance payment to you in an amount equal to One Hundred Fifty-six Thousand Dollars ($156,000), less applicable withholdings (the “Severance Payment”), to be paid on or before the thirtieth (30th) day following the Separation Date.

b.    Transition Bonus. In lieu of a 2014 Executive Performance Bonus, you will be eligible to receive a discretionary transition bonus of up to One Hundred Thousand Dollars ($100,000), less applicable withholdings (the “Transition Bonus”) based upon your achievement and progress towards the goals and objectives related to achieving certain Annual Operating Plan targets and providing operational and organizational transition support, as recommended by the CEO and approved by the Compensation Committee of the Board of Directors of the Company (the “Compensation Committee”). Your achievement and progress towards these goals and objectives will be measured and determined by based upon the recommendation of the CEO and determined by the Compensation Committee in their sole discretion. In the event your duties change during the Transition Period, achievement of the goals will be measured based on progress made up to the time of change. You will remain eligible to receive 100% of the Transition Bonus. Whether you receive the Transition Bonus, and the actual amount of the Transition Bonus (if any), shall be determined by the Compensation Committee, based upon the recommendation of the CEO. Any such Transition Bonus will be paid to you on or before the thirtieth (30th) day following the Separation Date.

4.No Other Compensation or Benefits. You acknowledge that on the Separation Date, the Severance Agreement shall be extinguished.

5.EXPENSE REIMBURSEMENTS. You agree that, within ten (10) days after the Separation Date, you will submit your final documented expense reimbursement statement reflecting all business expenses you incurred through the Separation Date, if any, for which you seek reimbursement. The Company will reimburse you for these expenses pursuant to its regular business practice.

6.    RETURN OF COMPANY PROPERTY. By the Separation Date, you agree to return to the Company all Company documents (and all copies thereof) and other Company property within your possession, custody or control, including, but not limited to, Company files, notes, drawings, records,

	Nanometrics Incorporated	Tel: 408.545.6000
	1550 Buckeye Drive	Fax: 408.232.5910
	Milpitas, CA 95035	www.nanometrics.com

business plans and forecasts, financial information, specifications, computer-recorded information, tangible property (including, but not limited to), credit cards, entry cards, identification badges, and keys; and, any materials of any kind that contain or embody any proprietary or confidential information of the Company (and all reproductions thereof). Your timely return of all such Company documents and other property is a condition precedent to your receipt of the benefits provided under this Agreement.

7.PROPRIETARY INFORMATION OBLIGATIONS. You acknowledge and agree to abide by your continuing obligations under your Nanometrics Employee Patent and Confidentiality Agreement.

8.    NONDISPARAGEMENT. You agree not to disparage the Company, its officers, directors, employees, shareholders, and agents, in any manner likely to be harmful to its or their business, business reputation or personal reputation; provided that you will respond accurately and fully to any question, inquiry or request for information when required by legal process.

9.    COMPLIANCE WITH SECTION 409A. This Agreement shall be interpreted to the greatest extent possible in a manner to be exempt from Section 409A of the Internal Revenue Code, and, to the extent not so exempt, in compliance with Section 409A of the Code. Notwithstanding anything to the contrary in this Agreement, if any benefit provided hereunder constitutes “deferred compensation” under Section 409A of the Code, or if you are a “specified employee” for purposes of Section 409A of the Code, no distribution or payment of any amount that is due because of a “separation from service” (as defined in Section 409A of the Code without regard to alternative definitions thereunder) will be issued or paid before the date that is six (6) months following the date of your “separation from service” or, if earlier, the date of your death, unless such distribution or payment can be made in a manner that complies with Section 409A of the Code, and any amounts so deferred will be paid in a lump sum on the day after such six (6) month period elapses, with the balance paid thereafter on the original schedule.

10.    NO ADMISSIONS. You understand and agree that the promises and payments in consideration of this Agreement shall not be construed to be an admission of any liability or obligation by the Company to you or to any other person, and that the Company makes no such admission.

11.    MISCELLANEOUS. This Agreement, including all Exhibits, and the Severance Agreement constitutes the complete, final and exclusive embodiment of the entire agreement between you and the Company with regard to its subject matter. It is entered into without reliance on any promise or representation, written or oral, other than those expressly contained herein, and it supersedes any other such promises, warranties or representations. This Agreement may not be modified or amended except in a writing signed by both you and a duly authorized officer of the Company. This Agreement will bind the heirs, personal representatives, successors and assigns of both you and the Company, and inure to the benefit of both you and the Company, their heirs, successors and assigns. If any provision of this Agreement is determined to be invalid or unenforceable, in whole or in part,

	Nanometrics Incorporated	Tel: 408.545.6000
	1550 Buckeye Drive	Fax: 408.232.5910
	Milpitas, CA 95035	www.nanometrics.com

this determination will not affect any other provision of this Agreement and the provision in question will be modified so as to be rendered enforceable. This Agreement will be deemed to have been entered into and will be construed and enforced in accordance with the laws of the State of California as applied to contracts made and to be performed entirely within California. Any ambiguity in this Agreement shall not be construed against either party as the drafter. Any waiver of a breach of this Agreement shall be in writing and shall not be deemed to be a waiver of any successive breach. This Agreement may be executed in counterparts and facsimile signatures will suffice as original signatures.

If this Agreement is acceptable to you, please sign below and return the original to me.

We wish you the best in your future endeavors.

Sincerely,

By:    

Dr. Timothy J. Stultz, Ph.D.

I HAVE READ, UNDERSTAND AND AGREE FULLY TO THE FOREGOING AGREEMENT:

Bruce Crawford            Date

	Nanometrics Incorporated	Tel: 408.545.6000
	1550 Buckeye Drive	Fax: 408.232.5910
	Milpitas, CA 95035	www.nanometrics.com

EXHIBIT A

CONSULTING AGREEMENT

THIS CONSULTING AGREEMENT (the “Consulting Agreement”) is made by and between NANOMETRICS, INC. (“Client”) and BRUCE CRAWFORD (“Consultant”) (together, the “Parties”), and is effective as of the date signed below by the Parties (the “Effective Date”).

1.        Engagement of Services. Consultant shall serve as an independent contractor for Client and will perform the following services: (a) transition executive level duties; and (b) provide a response within twenty-four (24) hours to business-related questions or inquiries from the Client (the “Services”). The Parties anticipate that such Services will take up to, but will not exceed, twenty (20) hours per week.

2.        Compensation. Client will compensate Consultant at the rate of $75 per hour for the Services. Any business expenses must be approved in advance in writing by Client. Consultant shall invoice Client monthly for services and expenses and shall provide reasonable receipts or other documentation of expenses as Client might request, including copies of time records. Payment shall be due thirty (30) days from receipt of invoice. Client will be invoiced on the first day of the each month for services rendered and expenses incurred during the previous month.

3.        Ownership of Work Product. Consultant hereby assigns to Client all right, title and interest in and to any work product created by Consultant, or to which Consultant contributes, pursuant to this Consulting Agreement (the “Work Product”), including all copyrights, trademarks and other intellectual property rights contained therein. Consultant agrees to execute, at Client’s request and expense, all documents and other instruments necessary or desirable to confirm such assignment. In the event that Consultant does not, for any reason, execute such documents within a reasonable time of Client’s request, Consultant hereby irrevocably designates and appoints Client and its duly authorized officers and agents as Consultant’s agent attorney-in-fact for the purpose of executing and filing such documents on Consultant’s behalf, and to do all other lawfully permitted acts to further such purposes with the same legal force and effect as if executed by Consultant, which appointment is coupled with an interest.

4.        Artist’s and Moral Rights. If Consultant has any rights, including without limitation “artist’s rights” or “moral rights,” in the Work Product that cannot be assigned, Consultant agrees to waive enforcement worldwide of such rights against Client. In the event that Consultant has any such rights that cannot be assigned or waived, Consultant hereby grants to Client an exclusive, worldwide, irrevocable, perpetual license to use, reproduce, distribute, create derivative works of, publicly perform and publicly display the Work Product in any medium or format, whether now known or later developed.

5.        Representations and Warranties. Consultant represents and warrants that: (a) Consultant has the right and unrestricted ability to assign the Work Product to Client as set forth in Section 3, and (b) the Work Product will not infringe upon any copyright, patent, trademark, right of publicity or privacy, or any other proprietary right of any person, whether contractual, statutory or common law. Consultant agrees to indemnify Client from any and all damages, costs, claims,

	Nanometrics Incorporated	Tel: 408.545.6000
	1550 Buckeye Drive	Fax: 408.232.5910
	Milpitas, CA 95035	www.nanometrics.com

expenses or other liability (including reasonable attorneys’ fees) arising from or relating to the breach or alleged breach by Consultant of the representations and warranties set forth in this Section 5.

6.        Independent Contractor Relationship. Consultant’s relationship with Client is that of an independent contractor, and nothing in this Consulting Agreement is intended to, or should be construed to, create a partnership, agency, joint venture or employment relationship. Consultant will not be entitled to any of the benefits that Client may make available to its employees, including, but not limited to, group health or life insurance, profit-sharing or retirement benefits. Consultant is not authorized to make any representation, contract or commitment on behalf of Client unless specifically requested or authorized in writing to do so by a Client officer. Consultant is solely responsible for, and will file, on a timely basis, all tax returns and payments required to be filed with, or made to, any federal, state or local tax authority with respect to the performance of services and receipt of fees under this Consulting Agreement. Consultant is solely responsible for, and must maintain adequate records of, expenses incurred in the course of performing services under this Consulting Agreement. No part of Consultant’s compensation will be subject to withholding by Client for the payment of any social security, federal, state or any other employee payroll taxes. Client will regularly report amounts paid to Consultant by filing Form 1099-MISC with the Internal Revenue Service as required by law.

7.        Confidential Information. Consultant agrees to hold Client’s Confidential Information in strict confidence and not to disclose such Confidential Information to any third parties. “Confidential Information” as used in this Consulting Agreement shall mean all information disclosed by Client to Consultant that is not generally known in the Client’s trade or industry and shall include, without limitation: (a) concepts and ideas relating to the current, future and proposed products or services of Client or its subsidiaries or affiliates; (b) trade secrets, drawings, inventions, or know-how; (c) information regarding plans for research, development, new offerings or products, marketing and selling, business plans, business forecasts, budgets and unpublished financial statements, suppliers and customers; (d) existence of any business discussions, negotiations or agreements between the Parties; and (e) any information regarding the skills and compensation of employees, contractors or other agents of the Client or its subsidiaries or affiliates. Confidential Information also includes proprietary or confidential information of any third party who may disclose such information to Client or Consultant in the course of Client’s business. Consultant’s obligations set forth in this Section 7 shall not apply with respect to any portion of the Confidential Information that Consultant can document by competent proof that such portion: (a) was in the public domain at the time it was communicated to Consultant by Client; (b) entered the public domain through no fault of Consultant, subsequent to the time it was communicated to Consultant by Client; (c) was in Consultant’s possession free of any obligation of confidence at the time it was communicated to Consultant by Client; (d) was rightfully communicated to Consultant free of any obligation of confidence subsequent to the time it was communicated to Consultant by the Client; (e) was developed by employees or agents of Consultant independently of and without reference to any information communicated to Consultant by Client; or (f) was communicated by Client to an unaffiliated third party free of any obligation of confidence. In addition, Consultant may disclose Client’s Confidential Information in response to a valid order by a court or other governmental body, as otherwise required by law. All Confidential Information furnished to Consultant by Client are the sole and exclusive property of Client or its suppliers or customers. Upon request by Client,

	Nanometrics Incorporated	Tel: 408.545.6000
	1550 Buckeye Drive	Fax: 408.232.5910
	Milpitas, CA 95035	www.nanometrics.com

Consultant agrees to promptly deliver to Client the original and any copies of such Confidential Information.

8.        No Conflict of Interest. During the term of this Consulting Agreement, Consultant will not accept work, enter into a contract, or accept an obligation from any third party, inconsistent or incompatible with Consultant’s obligations, or the scope of services rendered for Client, under this Consulting Agreement. Consultant warrants that there is no other contract or duty on its part inconsistent with this Consulting Agreement. Consultant agrees to indemnify Client from any and all loss or liability incurred by reason of the alleged breach by Consultant of any services agreement with any third party.

9.        Continued Stock Vesting. Client and Consultant agree that the performance of Services under this Consulting Agreement constitute continued service to the Client as contemplated by Consultant’s equity agreements and plan documents. For avoidance of any doubt, Client and Consultant acknowledge and agree that the vesting of any stock options or Restricted Stock Units previously granted to Consultant during the term of his employment with Client will continue through and until the termination of this Consulting Agreement under the existing terms and conditions set forth in the governing stock option agreements and plan documents.

10.        Term and Termination.

10.1        Term. The initial term of this Consulting Agreement is from the Effective Date through March 31, 2015, unless extended by mutual agreement of authorized representatives of the Parties in writing, or unless earlier terminated as provided in this Consulting Agreement.

10.2        Termination by Client. Client may terminate this Consulting Agreement immediately upon Consultant’s material breach of this Consulting Agreement. After March 31, 2015, if the parties agree to extend the Consulting Agreement, Client may terminate this Consulting Agreement, with or without Cause, at any time upon fifteen (15) days prior written notice to Consultant.

10.3        Termination by Consultant. Consultant may terminate this Consulting Agreement, with or without cause, at any time upon fifteen (15) days prior written notice to Client.

10.4        Survival. The rights and obligations contained in Sections 3 (“Ownership of Work Product”), 4 (“Artist’s and Moral Rights”), 5 (“Representations and Warranties”), 7 (“Confidential Information”) and 11 (“Nonsolicitation”) will survive any termination or expiration of this Consulting Agreement.

11.        Nonsolicitation. During this Consulting Agreement, and for a period of one year immediately following its termination, Consultant agrees not to solicit or induce any employee or independent contractor to terminate or breach an employment, contractual or other relationship with Client.

12.        Successors and Assigns. Consultant may not subcontract or otherwise delegate its obligations under this Consulting Agreement without Client’s prior written consent. Subject to the foregoing, this Consulting Agreement will be for the benefit of Client’s successors and assigns, and will be binding on Consultant’s assignees.

13.        Notices. Any notice required or permitted by this Consulting Agreement shall be in writing and shall be delivered as follows with notice deemed given as indicated: (i) by personal delivery when delivered personally; (ii) by overnight courier upon written verification of receipt; (iii) by telecopy or facsimile transmission upon acknowledgment of receipt of electronic transmission; or (iv) by certified or registered mail, return receipt requested, upon verification of receipt. Notice to

	Nanometrics Incorporated	Tel: 408.545.6000
	1550 Buckeye Drive	Fax: 408.232.5910
	Milpitas, CA 95035	www.nanometrics.com

Consultant shall be sent to the addresses set forth below or such other address as Consultant shall specify in writing.

14.        Governing Law. This Consulting Agreement shall be governed in all respects by the laws of the State of California, as such laws are applied to agreements entered into and to be performed entirely within California between California residents.

15.        Severability. Should any provisions of this Consulting Agreement be held by a court of law to be illegal, invalid or unenforceable, the legality, validity and enforceability of the remaining provisions of this Consulting Agreement shall not be affected or impaired thereby.

16.        Waiver. The waiver by Client of a breach of any provision of this Consulting Agreement by Consultant shall not operate or be construed as a waiver of any other or subsequent breach by Consultant.

17.        Injunctive Relief for Breach. Consultant’s obligations under this Consulting Agreement are of a unique character that gives them particular value; breach of any of such obligations will result in irreparable and continuing damage to Client for which there will be no adequate remedy at law; and, in the event of such breach, Client will be entitled to injunctive relief and/or a decree for specific performance, and such other and further relief as may be proper (including monetary damages if appropriate).

18.        Entire Agreement. This Consulting Agreement constitutes the entire agreement between the Parties relating to this subject matter and supersedes all prior or contemporaneous oral or written agreements concerning such subject matter. The terms of this Consulting Agreement will govern all services undertaken by Consultant for Client. This Consulting Agreement may only be changed by mutual agreement of authorized representatives of the Parties in writing.

IN WITNESS WHEREOF, the Parties have executed this Consulting Agreement as of the last date below.

NANOMETRICS, INC. (CLIENT)         

/s/ Timothy J. Stultz	Date: 10/28/2014
Dr. Timothy J. Stultz
Chief Executive Officer

BRUCE CRAWFORD (CONSULTANT)

/s/ Bruce Crawford	Date: 10/28/2014
Bruce Crawford
Consultant

Address: ____________________________

	Nanometrics Incorporated	Tel: 408.545.6000
	1550 Buckeye Drive	Fax: 408.232.5910
	Milpitas, CA 95035	www.nanometrics.com

EXHIBIT B

SEPARATION DATE RELEASE

(TO BE SIGNED ON THE SEPARATION DATE)

In exchange for the severance benefits to be provided to me by Nanometrics, Inc. (the “Company”) pursuant to the separation agreement between the Company and me (the “Separation Agreement”), I hereby provide the following Separation Date Release.

In exchange for the consideration to which I would not otherwise be entitled, I hereby generally and completely release the Company and its directors, officers, employees, shareholders, partners, agents, attorneys, predecessors, successors, parent or subsidiary entities, insurers, affiliates and assigns from any and all claims, liabilities and obligations, both known and unknown, that arise out of or are in any way related to events, acts, conduct, or omissions prior to or on the date I sign this Separation Date Release.

This general release includes, but is not limited to: (1) all claims arising out of or in any way related to my employment with the Company or the termination of that employment; (2) all claims related to my compensation or benefits from the Company, including salary, bonuses, commissions, vacation pay, expense reimbursements, severance pay, fringe benefits, stock, stock options or any other ownership interests in the Company; (3) all claims for breach of contract, wrongful termination or breach of the implied covenant of good faith and fair dealing; (4) all tort claims, including claims for fraud, defamation, emotional distress and discharge in violation of public policy; and (5) all federal, state, and local statutory claims, including claims for discrimination, harassment, retaliation, attorneys’ fees, or other claims arising under the federal Civil Rights Act of 1964 (as amended), the federal Americans with Disabilities Act of 1990, the federal Age Discrimination in Employment Act (the “ADEA”) (as amended), or the California Fair Employment and Housing Act (as amended).

Notwithstanding the foregoing, I am not hereby releasing the Company from any of the following claims: (a) any rights or claims for indemnification I may have pursuant to any written indemnification agreement with the Company to which I am a party, the charter, bylaws, or operating agreements of the Company, or under applicable law; (b) any rights that cannot be waived as a matter of law; or (c) any claims arising from the breach of this Separation Date Release. In addition, nothing in this Separation Date Release prevents me from filing, cooperating with, or participating in any proceeding before the Equal Employment Opportunity Commission, the Department of Labor, or the California Department of Fair Employment and Housing, except that I hereby waive my right to any monetary benefits in connection with any such claim, charge or proceeding.

I acknowledge that I am knowingly and voluntarily waiving and releasing any rights I may have under the ADEA. I also acknowledge that the consideration given for this waiver is in addition to anything of value to which I was already entitled. I further acknowledge that I have been advised by this writing, as required by the ADEA, that: (a) this waiver does not apply to any rights or claims that arise after the date I sign this Separation Date Release; (b) I should consult with an attorney prior to signing this Separation Date Release; (c) I have had twenty-one (21) days to consider this Separation Date Release; (d) I have seven (7) days following the date I sign this Separation Date Release to revoke (in a written revocation sent to the Company’s Chief Executive Officer); and (e)

	Nanometrics Incorporated	Tel: 408.545.6000
	1550 Buckeye Drive	Fax: 408.232.5910
	Milpitas, CA 95035	www.nanometrics.com

this Separation Date Release will not be effective until the date upon which the revocation period has expired, which will be the eighth day after I sign this Separation Date Release.

In granting the release herein, which includes claims which may be unknown to me at present, I acknowledge that I have read and understand Section 1542 of the California Civil Code: “A general release does not extend to claims which the creditor does not know or suspect to exist in his or her favor at the time of executing the release, which if known by him or her must have materially affected his or her settlement with the debtor.” I hereby expressly waive and relinquish all rights and benefits under that section and any law or legal principle of similar effect in any jurisdiction with respect to the releases granted herein, including but not limited to the release of unknown and unsuspected claims granted in this Separation Date Release.

I hereby represent that to date: (i) I have been paid all compensation owed and have been paid for all hours worked; (ii) I have received all the leave and leave benefits and protections for which I am eligible pursuant to the federal Family and Medical Leave Act, the California Family Rights Act, or otherwise; and (iii) I have not suffered any on-the-job injury for which I have not already filed a workers’ compensation claim.

By:    

Bruce Crawford

Date:    

EX-21.1

Exhibit 21.1

List of Subsidiaries

Name	Jurisdiction
Nanometrics France S.A.S	France
Accent Optical Technologies (Germany) GmbH	Germany
Nanometrics (Switzerland) GmbH	Switzerland
Nanometrics U.K. Ltd.	United Kingdom
Nanometrics China Company Ltd.	China
Nanometrics Israel, Ltd.	Israel
Nanometrics Japan K.K.	Japan
Nanometrics Korea Limited	South Korea
Nanometrics Southeast Asia Pte. Limited	Singapore
Nanda Technologies GmbH	Germany

EX-23.1

Exhibit 23.1

CONSENT OF INDEPENDENT REGISTERED PUBLIC ACCOUNTING FIRM

We hereby consent to the incorporation by reference in the Registration Statements on Form S-8 (Nos. 333-33583, 333-40866, 333-91714, 333-101137, 333-108474, 333-136557, 333-149339, 333-164088, 333-176502 and 333-192183) and on Form S-3 (No. 333-163168) of Nanometrics, Inc. of our report dated February 24, 2015 relating to the financial statements, financial statement schedule and the effectiveness of internal control over financial reporting, which appears in this Form 10-K.

/s/ PricewaterhouseCoopers LLP

San Jose, CA

February 24, 2015

EX-31.1

Exhibit 31.1

Certification of the Principal Executive Officer Pursuant to

Act of Rules 13a-14(a) or 15d-14(a) of the Securities Exchange 1934,

As Adopted Pursuant to

Section 302 of the Sarbanes-Oxley Act of 2002

I, Timothy J. Stultz, the Chief Executive Officer of Nanometrics Incorporated, certify that:

1. I have reviewed this annual report on Form 10-K of Nanometrics Incorporated;

2. Based on my knowledge, this report does not contain any untrue statement of a material fact or omit to state a material fact necessary to make the statements made, in light of the circumstances under which such statements were made, not misleading with respect to the period covered by this report;

3. Based on my knowledge, the financial statements, and other financial information included in this report, fairly present in all material respects the financial condition, results of operations and cash flows of the registrant as of, and for, the periods presented in this annual report;

4. The registrant’s other certifying officer and I are responsible for establishing and maintaining disclosure controls and procedures (as defined in Exchange Act Rules 13a-15(e) and 15d-15(e)) and internal control over financial reporting (as defined in Exchange Act Rules 13a-15(f) and 15d-15(f)) for the registrant and have:

(a) Designed such disclosure controls and procedures, or caused such disclosure controls and procedures to be designed under our supervision, to ensure that material information relating to the registrant, including its consolidated subsidiaries, is made known to us by others within those entities, particularly during the period in which this annual report is being prepared;

(b) Designed such internal control over financial reporting, or caused such internal control over financial reporting to be designed under our supervision, to provide reasonable assurance regarding the reliability of financial reporting and the preparation of financial statements for external purposes in accordance with generally accepted accounting principles;

(c) Evaluated the effectiveness of the registrant’s disclosure controls and procedures and presented in this report our conclusions about the effectiveness of the disclosure controls and procedures, as of the end of the period covered by this report based on such evaluation; and

(d) Disclosed in this report any change in the registrant’s internal control over financial reporting that occurred during the registrant’s most recent fiscal quarter (the registrant’s fourth quarter in the case of an annual report) that has materially affected or is reasonably likely to materially affect, the registrant’s internal control over financial reporting; and

5. The registrant’s other certifying officer and I have disclosed, based on our most recent evaluation of internal control over financial reporting, to the registrant’s auditors and the audit committee of the registrant’s board of directors (or persons performing the equivalent functions):

(a) All significant deficiencies and material weaknesses in the design or operation of internal control over financial reporting which are reasonably likely to adversely affect the registrant’s ability to record, process, summarize and report financial information; and

(b) Any fraud, whether or not material, that involves management or other employees who have a significant role in the registrant’s internal control over financial reporting.

Date:	February 24, 2015
By:	/s/ Timothy J. Stultz
	Timothy J. Stultz
	Chief Executive Officer

EX-31.2

Exhibit 31.2

Certification of the Principal Financial Officer Pursuant to

Rules 13a-14(a) or 15d-14(a) of the Securities Exchange Act of 1934,

As Adopted Pursuant to

Section 302 of the Sarbanes-Oxley Act of 2002

I, Jeffrey Andreson, the Chief Financial Officer of Nanometrics Incorporated, certify that:

1. I have reviewed this annual report on Form 10-K of Nanometrics Incorporated;

2. Based on my knowledge, this report does not contain any untrue statement of a material fact or omit to state a material fact necessary to make the statements made, in light of the circumstances under which such statements were made, not misleading with respect to the period covered by this report;

3. Based on my knowledge, the financial statements, and other financial information included in this report, fairly present in all material respects the financial condition, results of operations and cash flows of the registrant as of, and for, the periods presented in this annual report;

4. The registrant’s other certifying officer and I are responsible for establishing and maintaining disclosure controls and procedures (as defined in Exchange Act Rules 13a-15(e) and 15d-15(e)) and internal control over financial reporting (as defined in Exchange Act Rules 13a-15(f) and 15d-15(f)) for the registrant and have:

(a) Designed such disclosure controls and procedures, or caused such disclosure controls and procedures to be designed under our supervision, to ensure that material information relating to the registrant, including its consolidated subsidiaries, is made known to us by others within those entities, particularly during the period in which this annual report is being prepared;

(b) Designed such internal control over financial reporting, or caused such internal control over financial reporting to be designed under our supervision, to provide reasonable assurance regarding the reliability of financial reporting and the preparation of financial statements for external purposes in accordance with generally accepted accounting principles;

(c) Evaluated the effectiveness of the registrant’s disclosure controls and procedures and presented in this report our conclusions about the effectiveness of the disclosure controls and procedures, as of the end of the period covered by this report based on such evaluation; and

(d) Disclosed in this report any change in the registrant’s internal control over financial reporting that occurred during the registrant’s most recent fiscal quarter (the registrant’s fourth quarter in the case of an annual report) that has materially affected or is reasonably likely to materially affect, the registrant’s internal control over financial reporting; and

5. The registrant’s other certifying officer and I have disclosed, based on our most recent evaluation of internal control over financial reporting, to the registrant’s auditors and the audit committee of the registrant’s board of directors (or persons performing the equivalent functions):

(a) All significant deficiencies and material weaknesses in the design or operation of internal control over financial reporting which are reasonably likely to adversely affect the registrant’s ability to record, process, summarize and report financial information; and

(b) Any fraud, whether or not material, that involves management or other employees who have a significant role in the registrant’s internal control over financial reporting.

Date:	February 24, 2015
By:	/s/ Jeffrey Andreson
	Jeffrey Andreson
	Chief Financial Officer

EX-32.1

Exhibit 32.1

CERTIFICATION OF CHIEF EXECUTIVE OFFICER AND CHIEF FINANCIAL OFFICER

PURSUANT TO 18 U.S.C. SECTION 1350, AS ADOPTED

PURSUANT TO SECTION 906 OF THE SARBANES-OXLEY ACT OF 2002

Each of the undersigned hereby certifies, pursuant to 18 U.S.C. Section 1350, as adopted pursuant to Section 906 of the Sarbanes-Oxley Act of 2002, in his capacity as an officer of Nanometrics Incorporated (the “Company”) that based on his knowledge:

1. The Annual Report on Form 10-K of the Company for the fiscal year ended December 27, 2014 (the “Report”) fully complies with the requirements of Section 13(a) or 15(d), as applicable, of the Securities Exchange Act of 1934, as amended, and

2. The information contained in the Report fairly presents, in all material respects, the financial condition and results of operations of the Company.

Date:	February 24, 2015	By:	/S/ TIMOTHY J. STULTZ
		Name: Title:	Timothy J. Stultz Chief Financial Officer
Date:	February 24, 2015	By:	/S/ JEFFREY ANDRESON
		Name: Title:	Jeffrey Andreson Chief Financial Officer

XML

Fair Value Measurements and Disclosures - Measured at Fair Value on Recurring Basis (Details) (USD $) In Thousands, unless otherwise specified	Dec. 27, 2014	Dec. 28, 2013
Assets:
Total marketable securities	$ 83,962	$ 92,862
Fair Value, Measurements, Recurring [Member]
Assets:
Total cash equivalents	610	1,626
Total marketable securities	49,286	48,097
Total	49,896	49,723
Liabilities:
Contingent consideration payable	2,397	2,783
Fair Value, Measurements, Recurring [Member] | Money market funds [Member]
Assets:
Total cash equivalents	610	876
Fair Value, Measurements, Recurring [Member] | U.S. Treasury, U.S. Government and U.S. Government agency debt securities [Member]
Assets:
Total marketable securities	23,034	17,016
Fair Value, Measurements, Recurring [Member] | Commercial paper and corporate debt securities [Member]
Assets:
Total cash equivalents	0	750
Total marketable securities	26,252	31,081
Fair Value, Measurements, Recurring [Member] | Cash [Member]
Assets:
Total cash equivalents	34,100	43,100
Fair Value, Measurements, Recurring [Member] | Level 1 [Member]
Assets:
Total cash equivalents	610	876
Total marketable securities	2,497	5,036
Total	3,107	5,912
Liabilities:
Contingent consideration payable	0	0
Fair Value, Measurements, Recurring [Member] | Level 1 [Member] | Money market funds [Member]
Assets:
Total cash equivalents	610	876
Fair Value, Measurements, Recurring [Member] | Level 1 [Member] | U.S. Treasury, U.S. Government and U.S. Government agency debt securities [Member]
Assets:
Total marketable securities	2,497	5,036
Fair Value, Measurements, Recurring [Member] | Level 1 [Member] | Commercial paper and corporate debt securities [Member]
Assets:
Total cash equivalents	0	0
Total marketable securities	0	0
Fair Value, Measurements, Recurring [Member] | Level 2 [Member]
Assets:
Total cash equivalents	0	750
Total marketable securities	46,789	43,061
Total	46,789	43,811
Liabilities:
Contingent consideration payable	0	0
Fair Value, Measurements, Recurring [Member] | Level 2 [Member] | Money market funds [Member]
Assets:
Total cash equivalents	0	0
Fair Value, Measurements, Recurring [Member] | Level 2 [Member] | U.S. Treasury, U.S. Government and U.S. Government agency debt securities [Member]
Assets:
Total marketable securities	20,537	11,980
Fair Value, Measurements, Recurring [Member] | Level 2 [Member] | Commercial paper and corporate debt securities [Member]
Assets:
Total cash equivalents	0	750
Total marketable securities	26,252	31,081
Fair Value, Measurements, Recurring [Member] | Level 3 [Member]
Assets:
Total cash equivalents	0	0
Total marketable securities	0	0
Total	0	0
Liabilities:
Contingent consideration payable	2,397	2,783
Fair Value, Measurements, Recurring [Member] | Level 3 [Member] | Money market funds [Member]
Assets:
Total cash equivalents	0	0
Fair Value, Measurements, Recurring [Member] | Level 3 [Member] | U.S. Treasury, U.S. Government and U.S. Government agency debt securities [Member]
Assets:
Total marketable securities	0	0
Fair Value, Measurements, Recurring [Member] | Level 3 [Member] | Commercial paper and corporate debt securities [Member]
Assets:
Total cash equivalents	0	0
Total marketable securities	$ 0	$ 0

XML

Line of Credit and Debt Obligations - Textual (Details) (USD $)	0 Months Ended		12 Months Ended
	May 30, 2014	Jul. 18, 2013	Dec. 27, 2014	Dec. 28, 2013	Dec. 29, 2012	May 30, 2014
Line of Credit and Debt Obligations (Textual) [Abstract]
Maturity date	May 30, 2016
Line of Credit Facility, Maximum Borrowing Capacity	$ 12,000,000					$ 12,000,000
Borrowing interest rate	3.00%					3.00%
Limited borrowing amount	12,000,000					12,000,000
Borrowing base	20,000,000					20,000,000
Total borrowing available			18,800,000
Repayments of Long-term Debt		4,800,000	0	5,224,000	2,210,000
Revolving line of credit facility [Member]
Line of Credit and Debt Obligations (Textual) [Abstract]
Extension of maturity period on amendment of existing credit facility	2 years
Revolving line of credit facility [Member] | Line of Credit [Member]
Line of Credit and Debt Obligations (Textual) [Abstract]
Amount outstanding			0
Mortgage Loan [Member] | Mortgages [Member]
Line of Credit and Debt Obligations (Textual) [Abstract]
Amount outstanding				$ 0

XML

Goodwill and Intangible Assets - Future Amortization (Details) (USD $) In Thousands, unless otherwise specified	Dec. 27, 2014
Estimated future amortization expense
2015	$ 2,199
2016	1,683
2017	206
2018	140
2019	66
Total future amortization expense	$ 4,294

XML

Income Taxes - Deferred Tax Assets and Liabilities (Details) (USD $) In Thousands, unless otherwise specified	Dec. 27, 2014	Dec. 28, 2013
Deferred tax assets:
Reserves and accruals	$ 10,744	$ 10,592
Deferred revenue	1,370	1,614
Shared based compensation	4,030	3,789
Tax credit carry-forwards	8,122	6,591
Net operating losses	14,695	10,220
Depreciation & amortization	2,750	3,241
Other	372	966
Total deferred tax assets	42,083	37,013
Less: Valuation allowance	(35,835)	(11,665)
Total deferred tax assets net of valuation allowance	6,248	25,348
Deferred tax liabilities:
Depreciation & amortization	(4,020)	(5,567)
Other	(1,485)	(926)
Total deferred tax liabilities	(5,505)	(6,493)
Net deferred tax assets	$ 743	$ 18,855

XML

Commitments and Contingencies - Textual (Details) (USD $)	0 Months Ended	12 Months Ended
	Jan. 13, 2012	Dec. 27, 2014	Dec. 28, 2013	Dec. 29, 2012	Dec. 31, 2011
Long-term Purchase Commitment [Line Items]
Liabilities recorded for obligations		$ 0	$ 0
One time payment to KLA	2,500,000
Legal settlement in operating expense					2,500,000
Rent expense		2,100,000	2,000,000	2,200,000
Inventories [Member]
Long-term Purchase Commitment [Line Items]
Purchase commitment		29,500,000
Inventories [Member] | Zygo Corporation [Member]
Long-term Purchase Commitment [Line Items]
Purchase commitment, estimated future amount		2,900,000
Fair Value, Measurements, Recurring [Member] | Zygo Corporation [Member]
Long-term Purchase Commitment [Line Items]
Liabilities resulting from the acquisition of certain assets from acquisitions, measured at fair value		$ 2,400,000	$ 2,800,000

XML

Segment, Geographic, Product and Significant Customer Information - Customers More Than 10% of Revenues (Details)	12 Months Ended
	Dec. 27, 2014	Dec. 28, 2013	Dec. 29, 2012
Samsung Electronics Co. Ltd. [Member]
Net revenues:
Customers accounted for 10% or more of total revenue	26.90%	14.40%	27.80%
SK Hynix [Member]
Net revenues:
Customers accounted for 10% or more of total revenue	12.20%	18.40%	16.50%
Intel Corporation [Member]
Net revenues:
Customers accounted for 10% or more of total revenue	12.60%	30.00%	22.30%
Micron [Member]
Net revenues:
Customers accounted for 10% or more of total revenue	10.40%

XML

Goodwill and Intangible Assets - Goodwill (Details) (USD $) In Thousands, unless otherwise specified	12 Months Ended
	Dec. 27, 2014	Dec. 28, 2013
Goodwill [Roll Forward]
Beginning balance	$ 11,743	$ 11,352
Foreign currency movements	(1,249)	391
Ending balance	$ 10,494	$ 11,743

XML

Net Income (Loss) Per Share (Tables)

12 Months Ended

Dec. 27, 2014

Earnings Per Share [Abstract]

Reconciliation of the basic and diluted net income per share computations

A reconciliation of the share denominator of the basic and diluted net income (loss) per share computations is as follows (in thousands):

	Years Ended
	December 27, 2014	December 28, 2013	December 29, 2012
Weighted average common shares outstanding used in basic net income (loss) per share calculation	23,958	23,290	23,358
Potential dilutive common stock equivalents, using treasury stock method	—	—	487
Weighted average shares used in diluted net income (loss) per share calculation	23,958	23,290	23,845

XML

Schedule II - VALUATION AND QUALIFYING ACCOUNTS (Details) (USD $) In Thousands, unless otherwise specified	12 Months Ended
	Dec. 27, 2014	Dec. 28, 2013	Dec. 29, 2012
Allowance for Doubtful Accounts [Member]
Movement in Valuation Allowances and Reserves [Roll Forward]
Balance at beginning of period	$ 293	$ 82	$ 117
Charged to costs and expenses	(40)	255	(3)
Deductions – write-offs of accounts	0	(44)	(32)
Balance at end of period	253	293	82
Valuation Allowance for Deferred Tax Assets [Member]
Movement in Valuation Allowances and Reserves [Roll Forward]
Balance at beginning of period	11,665	10,229	8,142
Charged to costs and expenses	24,170	1,436	2,087
Deductions – write-offs of accounts	0	0	0
Balance at end of period	$ 35,835	$ 11,665	$ 10,229

XML

Income Taxes - Textual (Details) (USD $)	12 Months Ended
	Dec. 27, 2014	Dec. 28, 2013	Dec. 29, 2012	Dec. 31, 2011
Income Taxes (Textual) [Abstract]
Excess benefits due to stock option exercise		$ 0
Change in amount of operating loss carryforwards valuation allowance	23,900,000	1,400,000
Undistributed earnings from non-U.S. operations	1,000,000
Maximum amount company recognize from unrecognized tax benefit	6,442,000	4,436,000	3,464,000	3,599,000
Unrecognized tax benefits that would impact effective tax rate if recognized	700,000
Valuation Allowance, Deferred Tax Asset, Increase (Decrease), Amount	21,100,000
Federal [Member]
Income Taxes (Textual) [Abstract]
Operating loss carryforwards	13,400,000
State research and experimental tax credit carryforward	6,200,000
Federal [Member] | Excess Tax Benefit Related to Exercise of Stock Option [Member]
Income Taxes (Textual) [Abstract]
Operating loss carryforwards	200,000
California [Member]
Income Taxes (Textual) [Abstract]
Operating loss carryforwards	45,000,000
State research and experimental tax credit carryforward	5,700,000
California [Member] | Excess Tax Benefit Related to Exercise of Stock Option [Member]
Income Taxes (Textual) [Abstract]
Operating loss carryforwards	3,000,000
State research and experimental tax credit carryforward	200,000
Foreign Tax Authority [Member]
Income Taxes (Textual) [Abstract]
Operating loss carryforwards	36,300,000
Foreign Tax Authority [Member] | Excess Tax Benefit Related to Exercise of Stock Option [Member]
Income Taxes (Textual) [Abstract]
Operating loss carryforwards	$ 1,700,000

XML

Net Income (Loss) Per Share (Details)	12 Months Ended
	Dec. 27, 2014	Dec. 28, 2013	Dec. 29, 2012
Reconciliation of the basic and diluted net income per share computations
Weighted average common shares outstanding used in basic net income (loss) per share calculation	23,958,000	23,290,000	23,358,000
Potential dilutive common stock equivalents, using treasury stock method	0	0	487,000
Weighted average shares used in diluted net income (loss) per share calculation	23,958,000	23,290,000	23,845,000
Net Income Per Share (Textual) [Abstract]
Potential common stock equivalents, anti-dilutive, excluded from calculation of earnings per share	400,000	400,000
Weighted average common share equivalents consisting of stock options included in the calculation of diluted net income per share	0	0	487,000

XML

Segment, Geographic, Product and Significant Customer Information - Product Revenues (Details) (USD $) In Thousands, unless otherwise specified	12 Months Ended
	Dec. 27, 2014	Dec. 28, 2013	Dec. 29, 2012
Segment Reporting Information [Line Items]
Total product revenues	$ 133,589	$ 107,402	$ 143,827
Automated Systems [Member]
Segment Reporting Information [Line Items]
Total product revenues	108,768	82,924	119,451
Integrated Systems [Member]
Segment Reporting Information [Line Items]
Total product revenues	15,334	11,412	12,379
Materials Characterization Systems [Member]
Segment Reporting Information [Line Items]
Total product revenues	$ 9,487	$ 13,066	$ 11,997

XML

Segment, Geographic, Product and Significant Customer Information - Customers More Than 10% of Accounts Receivable (Details)	Dec. 27, 2014	Dec. 28, 2013	Dec. 29, 2012
Samsung Electronics Co. Ltd. [Member]
Customers accounted for 10% or more of total accounts receivable
Customers accounted for 10% or more of total accounts receivable	10.00%	27.40%
Intel Corporation [Member]
Customers accounted for 10% or more of total accounts receivable
Customers accounted for 10% or more of total accounts receivable		14.40%	12.30%
Taiwan Semiconductor Manufacturing Company Limited [Member]
Customers accounted for 10% or more of total accounts receivable
Customers accounted for 10% or more of total accounts receivable	20.20%	12.10%	17.30%
SK Hynix [Member]
Customers accounted for 10% or more of total accounts receivable
Customers accounted for 10% or more of total accounts receivable		21.80%
Micron [Member]
Customers accounted for 10% or more of total accounts receivable
Customers accounted for 10% or more of total accounts receivable	23.70%
GLOBAL FOUNDRIES [Member]
Customers accounted for 10% or more of total accounts receivable
Customers accounted for 10% or more of total accounts receivable	10.20%

XML

Income Taxes - Income Tax Rate Reconciliation (Details) (USD $) In Thousands, unless otherwise specified	12 Months Ended
	Dec. 27, 2014	Dec. 28, 2013	Dec. 29, 2012
Income Tax Reconciliation:
Income taxes computed at U.S. statutory rate	$ (4,067)	$ (8,247)	$ 1,616
State income taxes	254	(324)	(116)
Foreign tax rate differential	(172)	9	(275)
Change in valuation allowance	23,126	0	0
Domestic production activities deduction	0	0	(17)
Tax credits	(561)	(1,377)	0
Benefit of tax elections	0	0	(1,309)
Liabilities for uncertain tax positions	118	111	66
Other, net	799	409	189
Provision (benefit) for income taxes	$ 19,497	$ (9,419)	$ 154

XML

Nature of Business, Basis of Presentation and Significant Accounting Policies (Policies)

12 Months Ended

Dec. 27, 2014

Nature of Business and Basis of Presentation [Abstract]

Description of Business

Description of Business – Nanometrics Incorporated (“Nanometrics” or the “Company”) and its wholly-owned subsidiaries design, manufacture, market, sell and support optical critical dimension ("OCD"), thin film and overlay dimension metrology and inspection systems used primarily in the manufacturing of semiconductors, solar photovoltaics (“solar PV”) and high-brightness LEDs (“HB-LED”), as well as by customers in the silicon wafer and data storage industries. Nanometrics' metrology systems precisely measure a wide range of film types deposited on substrates during manufacturing to control manufacturing processes and increase production yields in the fabrication of integrated circuits. The Company’s OCD technology is a patented critical dimension measurement technology that is used to precisely determine the dimensions on the semiconductor wafer that directly control the resulting performance of the integrated circuit devices. The thin film metrology systems use a broad spectrum of wavelengths, high-sensitivity optics, proprietary software, and patented technology to measure the thickness and uniformity of films deposited on silicon and other substrates as well as their chemical composition. The overlay metrology systems are used to measure the overlay accuracy of successive layers of semiconductor patterns on wafers in the photolithography process. Nanometrics' inspection systems are used to find defects on patterned and unpatterned wafers at nearly every stage of the semiconductor production flow. The corporate headquarters of Nanometrics is located in Milpitas, California.

Basis of Presentation

Basis of Presentation – The consolidated financial statements include Nanometrics Incorporated and its wholly-owned subsidiaries. All significant intercompany accounts and transactions have been eliminated in consolidation.

Fiscal Year

Fiscal Year – On October 17, 2014, the Board of Directors of the Company approved a change in the Company's fiscal year from a fiscal year ending on the Saturday closest to December 31 to a 52/53 week fiscal year ending on the last Saturday of the calendar year. All periods presented consisted of a 52-week year.

Reclassifications

Reclassifications – Certain prior year amounts have been reclassified to conform to the current year presentation.

Use of Estimates

Use of Estimates – The preparation of financial statements in conformity with accounting principles generally accepted in the United States of America ("U.S. GAAP") requires management to make estimates and assumptions that affect the reported amounts of assets and liabilities and disclosure of contingent assets and liabilities at the date of the financial statements and the reported amounts of revenues and expenses during the reported period. Actual results could differ materially from those estimates. Estimates are used for, but not limited to, revenue recognition, the provision for doubtful accounts, the provision for excess, obsolete, or slow moving inventories, valuation of intangible and long-lived assets, warranty accruals, income taxes, valuation of stock-based compensation, and contingencies.

Foreign Currency Translation

Foreign Currency Translation – The assets and liabilities of foreign subsidiaries are translated from their respective local functional currencies at exchange rates in effect at the balance sheet date and income and expense accounts are translated at average exchange rates during the reporting period. Resulting translation adjustments are reflected in “Accumulated other

comprehensive income,” a component of stockholders’ equity. Foreign currency transaction gains and losses are reflected in

“Other income (expense)” in the consolidated statements of operations in the period incurred

Revenue Recognition

Revenue Recognition – The Company derives revenue from the sale of process control metrology systems (“product revenue”) as well as spare part sales, billable service, service contracts, and upgrades (together “service revenue”). Upgrades are a group of parts and/or software that change the existing configuration of a product and are included in service revenue. They are distinguished from product revenue, which consists of complete, advanced process control metrology and inspection systems (the “system(s)”). Nanometrics' systems consist of hardware and software components that function together to deliver the essential functionality of the system. Arrangements for sales of systems often include defined customer-specified acceptance criteria.

In summary, the Company recognizes revenue when persuasive evidence of an arrangement exists, delivery has occurred or services have been rendered, the seller's price is fixed or determinable, and collectability is reasonably assured.

For product sales to existing customers, revenue recognition occurs at the time title and risk of loss transfer to the customer, which usually occurs upon shipment from the Company's manufacturing location, if it can be reliably demonstrated that the product has successfully met the defined customer specified acceptance criteria and all other recognition criteria have been met. For initial sales where the product has not previously met the defined customer specified acceptance criteria, product revenues are recognized upon the earlier of receipt of written customer acceptance or expiration of the contractual acceptance period. In Japan, where contractual terms with the customer specify risk of loss and title transfers upon customer acceptance, revenue is recognized upon receipt of written customer acceptance, provided that all other recognition criteria have been met.

The Company warrants its products against defects in manufacturing. Upon recognition of product revenue, a liability is recorded for anticipated warranty costs. On occasion, customers request a warranty period longer than the Company's standard warranty. In those instances where extended warranty services are separately quoted to the customer, the associated revenue is deferred and recognized as service revenue ratably over the term of the contract. The portion of service contracts and extended warranty services agreements that are uncompleted at the end of any reporting period are included in deferred revenue.

As part of its customer services, the Company sells software that is considered to be an upgrade to a customer's existing systems. These standalone software upgrades are not essential to the tangible product's functionality and are accounted for under software revenue recognition rules which require vendor specific objective evidence ("VSOE") of fair value to allocate revenue in a multiple element arrangement. Revenue from upgrades is recognized when the upgrades are delivered to the customer, provided that all other recognition criteria have been met.

Revenue related to spare parts is recognized upon shipment. Revenue related to billable services is recognized as the services are performed. Service contracts may be purchased by the customer during or after the warranty period and revenue is recognized ratably over the service contract period.

Frequently, the Company delivers products and various services in a single transaction. The Company's deliverables consist of tools, installation, upgrades, billable services, spare parts, and service contracts. The Company's typical multi-element arrangements include a sale of one or multiple tools that include installation and standard warranty. Other arrangements consist of a sale of tools bundled with service elements or delivery of different types of services. The Company's tools, upgrades, and spare parts are generally delivered to customers within a period of up to six months from order date. Installation is usually performed soon after delivery of the tool. The portion of revenue associated with installation is deferred based on relative selling price and that revenue is recognized upon completion of the installation. Billable services are billed on a time and materials basis and performed as requested by customers. Under service contract arrangements, services are provided as needed over the fixed arrangement term, which terms can be up to twelve months. The Company does not grant its customers a general right of return or any refund terms and imposes a penalty on orders cancelled prior to the scheduled shipment date.

The Company regularly evaluates its revenue arrangements to identify deliverables and to determine whether these deliverables are separable into multiple units of accounting. In accordance with revenue recognition guidance, the Company allocates the arrangement consideration among the deliverables based on relative selling prices. The Company has established VSOE for some of its products and services when a substantial majority of selling prices falls within a narrow range when sold separately. For deliverables with no established VSOE, the Company uses best estimate of selling price to determine standalone selling price for such deliverable. The Company does not use third party evidence to determine standalone selling price since this information is not widely available in the market as the Company's products contain a significant element of proprietary technology and the solutions offered differ substantially from competitors. The Company has established a process for developing estimated selling prices, which incorporates historical selling prices, the effect of market conditions, gross margin objectives, pricing practices, as well as entity-specific factors. The Company monitors and evaluates estimated selling price on a regular basis to ensure that changes in circumstances are accounted for in a timely manner.

When certain elements in multiple-element arrangements are not delivered or accepted at the end of a reporting period, the relative selling prices of undelivered elements are deferred until these elements are delivered and/or accepted. If deliverables cannot be accounted for as separate units of accounting, the entire arrangement is accounted for as a single unit of accounting and revenue is deferred until all elements are delivered and all revenue recognition requirements are met.

Business Combinations

BusinessCombinations - The Company allocates the purchase price of acquired companies to the tangible and intangible assets acquired and liabilities assumed based upon their estimated fair values at the acquisition date. The purchase price allocation process requires management to make significant estimates and assumptions, especially at the acquisition date with respect to intangible assets and inventory acquired. While best estimates and assumptions as a part of the purchase price allocation process are used to accurately value assets acquired and liabilities assumed at the acquisition date, estimates are inherently uncertain and subject to refinement. As a result, during the measurement period, which may be up to one year from the acquisition date, the Company may record adjustments to the assets acquired and liabilities assumed, with the corresponding offset to goodwill. Upon the conclusion of the measurement period or final determination of the values of assets acquired or liabilities assumed, whichever comes first, any subsequent adjustments are recorded in the consolidated statements of operations.

The Company estimates the fair value of inventory acquired by utilizing the net realizable value method which is based on the estimated sales price of the product less appropriate costs to complete and selling costs. Examples of critical estimates in valuing certain intangible assets that were acquired or may be acquired in the future include but are not limited to:

• future expected cash flows from sales of products, services and acquired developed technologies and patents;

• expected costs to develop the in-process research and development into commercially viable products and estimated cash flows from the projects when completed;

• the acquired company's customer relationships, as well as assumptions about the estimated useful lives of the relationships; and

• discount rates.

Unanticipated events and circumstances may occur that may affect the accuracy or validity of assumptions, estimates or actual results associated with business combinations.

Cash and Cash Equivalents

Cash, Cash Equivalents and Marketable Securities – The Company considers all highly liquid investments with original maturities of three months or less, when purchased, to be cash equivalents.

Marketable Securities

Marketable securities are classified as “available-for-sale” and are reported at fair value with unrealized gains and losses reported in stockholders' equity as a component of other comprehensive income. The cost of securities sold is based on the specific identification method. The Company classifies its investments as current based on the nature of the investment and their availability for use in current operations. The Company reviews its investment portfolio quarterly to determine if any securities may be other-than-temporarily impaired due to increased credit risk, changes in industry or sector of a certain instrument or ratings downgrades.

Fair Value of Financial Instruments

Fair Value of Financial Instruments – Financial instruments include cash and cash equivalents, accounts receivable and accounts payable. Cash equivalents are stated at fair market value based on quoted market prices. The carrying values of accounts receivable and accounts payable approximate their fair values because of the short-term maturity of these financial instruments.

Allowance for Doubtful Accounts

Allowance for Doubtful Accounts – The Company maintains allowances for estimated losses resulting from the inability of its customers to make required payments. Credit limits are established through a process of reviewing the financial history and stability of its customers. Where appropriate and available, the Company obtains credit rating reports and financial statements of customers when determining or modifying their credit limits. The Company regularly evaluates the collectability of its trade receivable balances based on a combination of factors such as the length of time the receivables are past due, customary payment practices in the respective geographies and historical collection experience with customers. The Company believes that its allowance for doubtful accounts adequately reflects the risk associated with its receivables. If the financial conditions of a customer were to deteriorate, resulting in their inability to make payments, the Company may need to record additional allowances, which would result in additional general and administrative expenses being recorded for the period in which such determination was made.

Inventories

Inventories – Inventories are stated at the lower of cost, which approximates actual cost on a first-in, first-out basis, or market. The Company is exposed to a number of economic and industry factors that could result in portions of inventory becoming either obsolete or in excess of anticipated usage, or saleable only for amounts that are less than their carrying amounts. These factors include, but are not limited to, technological changes in the market, the Company’s ability to meet changing customer requirements, competitive pressures in products and prices, and the availability of key components from suppliers. The Company has established inventory reserves when conditions exist that suggest that inventory may be in excess of anticipated demand or is obsolete based upon assumptions about future demand for the Company’s products and market conditions. Once a reserve has been established, it is maintained until the part to which it relates is sold or is otherwise disposed of. The Company regularly evaluates its ability to realize the value of inventory based on a combination of factors including the following: historical usage rates, forecasted sales of usage, product end-of-life dates, estimated current and future market values and new product introductions. For demonstration inventory, the Company also considers the age of the inventory and potential cost to refurbish the inventory prior to sale. Demonstration inventory is amortized over its useful life and the amortization expense is included in total inventory write down on the statements of cash flows. When recorded, reserves are intended to reduce the carrying value of the Company’s inventory to its net realizable value. If actual demand for the Company’s products deteriorates, or market conditions are less favorable than those that the Company projects, additional reserves may be required.

Inventories – delivered systems – The Company reflects the cost of systems that were invoiced upon shipment but deferred for revenue recognition purposes separate from its inventory held for sale as “Inventories – delivered systems.”

Property, Plant and Equipment

Property, Plant and Equipment – Property, plant and equipment are stated at cost. Depreciation and amortization is computed using the straight–line method over the following estimated useful lives of the assets:

Building and Improvements        5-40 years

Machinery and equipment            3-10 years

Furniture and fixtures            3-10 years

Software                3-

Goodwill and Intangible Assets

Goodwill and Intangible Assets – Goodwill is initially recorded when the purchase price paid for an acquisition exceeds the estimated fair value of the net identified tangible and intangible assets acquired. Intangible assets with finite lives are amortized over their respective useful lives on a straight-line basis and are also evaluated annually for impairment or whenever events or circumstances occur which indicate that those assets might be impaired. Goodwill and indefinite lived assets are not amortized but tested annually for impairment. The Company’s impairment review process is completed during the fourth quarter of each year or whenever events, or circumstances occur which indicate that an impairment may have occurred. The Company assesses qualitative factors to determine whether it is more likely than not that the fair value of a reporting unit is less than its carrying value. If, after assessing the qualitative factors, the Company determines that it is not likely that the fair value of a reporting unit is less than its carrying value, then performing the two-step impairment test is unnecessary. However, if the Company concludes otherwise, then it is required to perform the first step of the two-step goodwill impairment test. The first step requires a comparison of the fair value of Nanometrics’ reporting unit to its net book value. If the fair value of the reporting unit is greater than its carrying value, then no impairment is deemed to have occurred. If the fair value is less, then the second step must be performed to determine the amount, if any, of actual impairment. Amortization of intangible assets with finite lives is computed using the straight-line method over the following estimated useful lives of the assets:

Developed technology            5-10 years

Customer relationships            2-10 years

Brand name                5-10 years

Patented technology            7-10 years

Trademark                5 years

Long-Lived Assets

Long-Lived Assets – The Company evaluates its long-lived assets for impairment whenever events or changes in circumstances indicate that the carrying amount of an asset may not be recoverable. When the sum of the undiscounted future net cash flows expected to result from the use of the asset and its eventual disposition is less than its carrying amount, impairment may exist. To determine the amount of impairment, the Company compares the fair value of the asset to its carrying value. If the carrying value of the asset exceeds its fair value, an impairment loss equal to the difference is recognized. See Note 7, "Goodwill and Intangible Assets" for further details.

Income Tax Assets and Liabilities

Income Tax Assets and Liabilities – The Company accounts for income taxes such that deferred tax assets and liabilities must be recognized using enacted tax rates for the effect of temporary differences between the book and tax accounting for assets and liabilities. Also, deferred tax assets are reduced by a valuation allowance to the extent that management cannot conclude that it is more likely than not that a portion of the deferred tax asset will be realized in the future. The Company evaluates the deferred tax assets on a continuous basis throughout the year to determine whether or not a valuation allowance is appropriate. Factors used in this determination include future expected income and the underlying asset or liability which generated the temporary tax difference. The income tax provision is primarily impacted by federal statutory rates, state and foreign income taxes and changes in the valuation allowance.

Product Warranties and Guarantees

Product Warranties – The Company sells the majority of its products with a twelve months repair or replacement warranty from the date of acceptance, which generally represents the date of shipment. The Company provides an accrual for estimated future warranty costs based upon the historical relationship of warranty costs to the cost of products sold. The estimated future warranty obligations related to product sales are reported in the period in which the related revenue is recognized. The estimated future warranty obligations are affected by the warranty periods, sales volumes, product failure rates, material usage and labor and replacement costs incurred in correcting a product failure. If actual product failure rates, material usage, labor or replacement costs differ from the Company’s estimates, revisions to the estimated warranty obligations would be required. For new product introductions where limited or no historical information exists, the Company may use warranty information from other previous product introductions to guide it in estimating the warranty accrual. The warranty accrual represents the best estimate of the amount necessary to settle future and existing claims on products sold as of the balance sheet date. The Company periodically assesses the adequacy of its recorded warranty reserve and adjusts the amounts in accordance with changes in these factors.

Shipping and Handling Costs

Shipping and Handling Costs – Shipping and handling costs are included as a component of cost of net revenues.

Advertising Costs

Advertising Costs – The Company expenses advertising costs as incurred.

Stock-Based Compensation

Stock-Based Compensation – The Company estimates the value of employee stock options on the date of grant using the Black-Scholes model. The determination of fair value of share-based payment awards on the date of grant using an option-pricing model is affected by the Company’s stock price as well as assumptions regarding a number of highly complex and subjective variables. These variables include, but are not limited to, the expected stock price volatility over the term of the awards, and actual and projected employee stock option exercise behaviors. The expected term of options granted is calculated based on the simplified method allowed under SEC Staff Accounting Bulletin 107 (“SAB 107”). The expected volatility is based on the historical volatility of the Company’s stock price.

Defined Employee Benefit Plans

Defined Employee Benefit Plans– The Company maintains a defined benefit pension plan in Taiwan for which current service costs are charged to operations as they accrue based on services rendered by employees during the year. Pension benefit obligations are determined by using management’s actuarial assumptions, including discount rates, assumed asset rates of return, compensation increases and employee turnover rates.

Net Income (Loss) Per Share

Net Income (Loss) Per Share - Basic net income (loss) per share excludes dilution and is computed by dividing net income (loss) by the number of weighted average common shares outstanding for the period. Diluted net income (loss) per share reflects the potential dilution from outstanding dilutive stock options (using the treasury stock method) and shares issuable under the employee stock purchase plan.

Certain Significant Risks and Uncertainties

Certain Significant Risks and Uncertainties – Financial instruments that potentially subject us to a concentration of credit risk consist of cash, cash equivalents, marketable securities, and accounts receivable. The Company's cash and cash equivalents are primarily invested in deposit accounts and money market accounts with large financial institutions. At times, these deposits and securities may exceed federally insured limits; however, the Company has not experienced any losses on such accounts. The Company invests its cash not required for use in operations in high credit quality securities based on the Company's investment policy. The Company's investment policy provides guidelines and limits regarding credit quality, investment concentration, investment type, and maturity that the Company believes will provide liquidity while reducing risk of loss of capital. Investments are of a short-term nature and include investments in commercial paper, corporate debt securities, U.S. Treasury, U.S. Government, and U.S. Agency debt.

The Company sells its products primarily to end users in the United States, Asia and Europe and, generally, does not require its customers to provide collateral or other security to support accounts receivable. Management performs ongoing credit evaluations of its customers’ financial condition and maintains an allowance for estimated potential bad debt losses. The Company’s customer base is highly concentrated and historically, a relatively small number of customers have accounted for a significant portion of its revenues. Aggregate revenue from the Company's top five largest customers in 2014, 2013 and 2012 consisted of 72%, 71% and 74%, respectively, of its total net revenues. The Company participates in a dynamic high technology industry and believes that changes in any of the following areas could have a material adverse effect on its future financial position, results of operations or cash flows: advances and trends in new technologies and industry standards; competitive pressures in the form of new products or price reductions on current products; changes in product mix; changes in the overall demand for products offered; changes in third-party manufacturers; changes in key suppliers; changes in certain strategic relationships or customer relationships; litigation or claims against the Company based on intellectual property, patent, product, regulatory or other factors; fluctuations in foreign currency exchange rates; risk associated with changes in domestic and international economic and/or political regulations; availability of necessary components or sub-assemblies; disruption of manufacturing facilities; and its ability to attract and retain employees necessary to support its growth.

Certain components and sub-assemblies used in the Company’s products are purchased from a sole supplier or a limited group of suppliers. In particular, the Company currently purchases its spectroscopic ellipsometer and robotics used in its advanced measurement systems from a sole supplier or a limited group of suppliers located in the United States. Any shortage or interruption in the supply of any of the components or sub-assemblies used in its products or its inability to procure these components or sub-assemblies from alternate sources on acceptable terms could have a material adverse effect on its business, financial condition and results of operations.

Recently Issued Accounting Pronouncements

Recently Issued Accounting Pronouncements

In January 2015, the Financial Accounting Standards Board ("FASB") issued an accounting standard update which simplifies income statement classification by removing the concept of extraordinary items from the U.S. GAAP. As a result, items that are both unusual and infrequent will no longer be separately reported net of tax after continuing operations. The new standard is effective for the fiscal years, and interim periods within those fiscal years, beginning after December 15, 2015. Early adoption is permitted. The Company does not expect any impact on the adoption of this standard on its consolidated financial statements.

In August 2014, the FASB issued an accounting standard update related to the disclosures around going concern. The new standard provides guidance around management’s responsibility to evaluate whether there are conditions or events that raise substantial doubt about the entity’s ability to continue as a going concern within one year after the date that the financial statements are issued. The new standard is effective for the annual periods and interim periods within those annual periods beginning after December 15, 2016. Early application is permitted. The Company does not expect any impact on the adoption of this standard on its consolidated financial statements.

In May 2014, the FASB issued an accounting standards update which requires an entity to recognize the amount of revenue to which it expects to be entitled for the transfer of promised goods or services to customers. The standard will replace most existing revenue recognition guidance in U.S. GAAP when it becomes effective. The new standard is effective for the Company on January 1, 2017. Early application is not permitted. The standard permits the use of either the retrospective or cumulative effect transition method. The Company is evaluating the effect that the standard will have on its consolidated financial statements and related disclosures. The Company has not yet selected a transition method nor has it determined the effect of the standard on its ongoing financial reporting.

In July 2013, the FASB issued an accounting standards update which provides that a liability related to an unrecognized tax benefit would be offset against a deferred tax asset for a net operating loss carryforward, a similar tax loss or a tax credit carryforward if such settlement is required or expected in the event the uncertain tax position is disallowed. In situations in which a net operating loss carryforward, a similar tax loss or a tax credit carryforward is not available at the reporting date under the tax law of the jurisdiction or the tax law of the jurisdiction does not require, and the entity does not intend to use, the deferred tax asset for such purpose, the unrecognized tax benefit will be presented in the financial statements as a liability and will not be combined with deferred tax assets. The amendments should be applied prospectively to all unrecognized tax benefits that exist at the effective date. Retrospective application is permitted. The new standard is effective for fiscal years and interim periods beginning after December 15, 2013. The Company adopted this standard during the three months ended March 29, 2014, resulting in a one-time tax benefit of $0.3 million, a reduction in deferred tax assets of $0.3 million, and a reduction in long-term income taxes payable of $0.6 million.

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Warranties (Details) (USD $) In Thousands, unless otherwise specified	12 Months Ended
	Dec. 27, 2014	Dec. 28, 2013
Components of the warranty accrual [Roll Forward]
Balance as of beginning of period	$ 3,426	$ 4,203
Accruals for warranties issued during period	5,987	4,176
Settlements during the period	(6,460)	(4,953)
Balance as of end of period	$ 2,953	$ 3,426

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Cash and Investments (Details) (USD $) In Thousands, unless otherwise specified	12 Months Ended
	Dec. 27, 2014	Dec. 28, 2013
Schedule of Available-for-sale Securities [Line Items]
Amortized Cost	$ 84,012	$ 92,853
Gross Unrealized Gains	3	22
Gross Unrealized Losses	(53)	(13)
Estimated Fair Market Value	83,962	92,862
Investment maturity period, less than	2 years	2 years
Cash [Member]
Schedule of Available-for-sale Securities [Line Items]
Amortized Cost	34,066	43,139
Gross Unrealized Gains	0	0
Gross Unrealized Losses	0	0
Estimated Fair Market Value	34,066	43,139
Money market funds [Member]
Schedule of Available-for-sale Securities [Line Items]
Amortized Cost	610	876
Gross Unrealized Gains	0	0
Gross Unrealized Losses	0	0
Estimated Fair Market Value	610	876
Commercial paper [Member]
Schedule of Available-for-sale Securities [Line Items]
Amortized Cost	805	750
Gross Unrealized Gains	0	0
Gross Unrealized Losses	0	0
Estimated Fair Market Value	805	750
U.S. Treasury securities [Member]
Schedule of Available-for-sale Securities [Line Items]
Amortized Cost	2,498	5,036
Gross Unrealized Gains		0
Gross Unrealized Losses	(1)	0
Estimated Fair Market Value	2,497	5,036
U.S. Government agency securities [Member]
Schedule of Available-for-sale Securities [Line Items]
Amortized Cost	20,556	11,980
Gross Unrealized Gains	1	4
Gross Unrealized Losses	(19)	(4)
Estimated Fair Market Value	20,538	11,980
Municipal securities [Member]
Schedule of Available-for-sale Securities [Line Items]
Amortized Cost	3,755	9,756
Gross Unrealized Gains	1	11
Gross Unrealized Losses	(7)	(4)
Estimated Fair Market Value	3,749	9,763
Corporate debt securities [Member]
Schedule of Available-for-sale Securities [Line Items]
Amortized Cost	21,722	21,316
Gross Unrealized Gains	1	7
Gross Unrealized Losses	(26)	(5)
Estimated Fair Market Value	$ 21,697	$ 21,318

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Segment, Geographic, Product and Significant Customer Information - Long-lived Tangible Assets (Details) (USD $) In Thousands, unless otherwise specified	Dec. 27, 2014	Dec. 28, 2013
Long-lived tangible assets:
Total long-lived tangible assets	$ 49,633	$ 47,439
United States [Member]
Long-lived tangible assets:
Total long-lived tangible assets	47,729	44,775
Japan [Member]
Long-lived tangible assets:
Total long-lived tangible assets	71	125
South Korea [Member]
Long-lived tangible assets:
Total long-lived tangible assets	284	445
All other [Member]
Long-lived tangible assets:
Total long-lived tangible assets	$ 1,549	$ 2,094

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Nature of Business, Basis of Presentation and Significant Accounting Policies (Details Textual) (USD $) In Millions, unless otherwise specified	12 Months Ended
	Dec. 27, 2014	Dec. 28, 2013	Dec. 29, 2012
Nature of Business and Basis of Presentation (Textual) [Abstract]
Fiscal year duration	364 days	364 days	364 days
Foreign currency transaction gains (losses)	$ 0.1	$ (0.7)	$ (0.3)
Maximum period of delivery to customers	6 months
Maximum period services are provided over the fixed arrangement term	12 months
Maximum measurement period	1 year
Product warranty period	12 months
Advertising costs	$ 0.2	$ 0.2	$ 0.1
Anti-dilutive shares	0.4	0.4
Sales Revenue, Goods, Net [Member] | Customer Concentration Risk [Member]
Nature of Business and Basis of Presentation (Textual) [Abstract]
Top five largest customers	72.00%	71.00%	74.00%
Stock Options [Member]
Nature of Business and Basis of Presentation (Textual) [Abstract]
Anti-dilutive shares			0.9
Minimum [Member]
Nature of Business and Basis of Presentation (Textual) [Abstract]
Fiscal year duration	364 days
Finite-lived intangibles estimated lives	2 years
Maximum [Member]
Nature of Business and Basis of Presentation (Textual) [Abstract]
Fiscal year duration	371 days
Finite-lived intangibles estimated lives	10 years
Developed technology [Member] | Minimum [Member]
Nature of Business and Basis of Presentation (Textual) [Abstract]
Finite-lived intangibles estimated lives	5 years
Developed technology [Member] | Maximum [Member]
Nature of Business and Basis of Presentation (Textual) [Abstract]
Finite-lived intangibles estimated lives	10 years
Customer relationships [Member] | Minimum [Member]
Nature of Business and Basis of Presentation (Textual) [Abstract]
Finite-lived intangibles estimated lives	2 years
Customer relationships [Member] | Maximum [Member]
Nature of Business and Basis of Presentation (Textual) [Abstract]
Finite-lived intangibles estimated lives	10 years
Brand name [Member] | Minimum [Member]
Nature of Business and Basis of Presentation (Textual) [Abstract]
Finite-lived intangibles estimated lives	5 years
Brand name [Member] | Maximum [Member]
Nature of Business and Basis of Presentation (Textual) [Abstract]
Finite-lived intangibles estimated lives	10 years
Patented technology [Member] | Minimum [Member]
Nature of Business and Basis of Presentation (Textual) [Abstract]
Finite-lived intangibles estimated lives	7 years
Patented technology [Member] | Maximum [Member]
Nature of Business and Basis of Presentation (Textual) [Abstract]
Finite-lived intangibles estimated lives	10 years
Trademark [Member]
Nature of Business and Basis of Presentation (Textual) [Abstract]
Finite-lived intangibles estimated lives	5 years
Building and Improvements [Member] | Minimum [Member]
Nature of Business and Basis of Presentation (Textual) [Abstract]
Estimated useful lives of depreciable assets	5 years
Building and Improvements [Member] | Maximum [Member]
Nature of Business and Basis of Presentation (Textual) [Abstract]
Estimated useful lives of depreciable assets	40 years
Machinery and equipment [Member] | Minimum [Member]
Nature of Business and Basis of Presentation (Textual) [Abstract]
Estimated useful lives of depreciable assets	3 years
Machinery and equipment [Member] | Maximum [Member]
Nature of Business and Basis of Presentation (Textual) [Abstract]
Estimated useful lives of depreciable assets	10 years
Furniture and fixtures [Member] | Minimum [Member]
Nature of Business and Basis of Presentation (Textual) [Abstract]
Estimated useful lives of depreciable assets	3 years
Furniture and fixtures [Member] | Maximum [Member]
Nature of Business and Basis of Presentation (Textual) [Abstract]
Estimated useful lives of depreciable assets	10 years
Software [Member] | Minimum [Member]
Nature of Business and Basis of Presentation (Textual) [Abstract]
Estimated useful lives of depreciable assets	3 years
Software [Member] | Maximum [Member]
Nature of Business and Basis of Presentation (Textual) [Abstract]
Estimated useful lives of depreciable assets	7 years

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Restructuring - Textual (Details) (USD $) In Thousands, unless otherwise specified	12 Months Ended
	Dec. 27, 2014	Dec. 28, 2013	Dec. 29, 2012
Restructuring (Textual) [Abstract]
Restructuring charge	$ 2,266	$ 1,740	$ 0
Payments for restructuring charges	1,269	844
Non-cash acceleration of vesting of RSUs		896
Employee severance and benefits [Member]
Restructuring (Textual) [Abstract]
Restructuring charge	1,016
Payments for restructuring charges	780	844
Non-cash acceleration of vesting of RSUs		896
Other [Member]
Restructuring (Textual) [Abstract]
Restructuring charge	351	0
Payments for restructuring charges	288	0
Non-cash acceleration of vesting of RSUs		0
Facility termination costs [Member]
Restructuring (Textual) [Abstract]
Restructuring charge	899	0
Payments for restructuring charges	201	0
Non-cash acceleration of vesting of RSUs		$ 0

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Defined Benefit Pension Plan (Details) (Pension Plans, Defined Benefit [Member], USD $) In Millions, unless otherwise specified	Dec. 27, 2014	Dec. 28, 2013	Dec. 29, 2012
Pension Plans, Defined Benefit [Member]
Defined Benefit Plan Disclosure [Line Items]
Fair value of plan assets	$ 0.2	$ 0.2	$ 0.2
Net funding deficiency of the Benefit Plan	$ 0.3	$ 0.2	$ 0.3

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Stockholders' Equity and Stock-Based Compensation - Stock Options Assumptions (Details)	12 Months Ended
	Dec. 27, 2014	Dec. 28, 2013	Dec. 29, 2012
Stock Options [Member]
Assumption of stock option's fair value
Expected life	4 years 7 months 6 days	4 years 6 months	4 years 6 months
Volatility	54.90%	69.90%	77.30%
Risk free interest rate	1.54%	1.05%	0.80%
Dividends	0.00%	0.00%	0.00%
Employee Stock Purchase Plan [Member]
Assumption of stock option's fair value
Expected life	6 months 1 day	6 months	6 months
Volatility	31.20%	26.80%	45.50%
Risk free interest rate	0.54%	0.11%	0.12%
Dividends	0.00%	0.00%	0.00%

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Goodwill and Intangible Assets - Intangible Assets (Details) (USD $) In Thousands, unless otherwise specified	Dec. 27, 2014	Dec. 28, 2013
Summary of Finite-lived intangible assets
Adjusted cost	$ 30,670	$ 31,927
Accumulated amortization	(26,376)	(24,063)
Net carrying amount	4,294	7,864
Developed technology [Member]
Summary of Finite-lived intangible assets
Adjusted cost	16,950	18,095
Accumulated amortization	(12,991)	(11,032)
Net carrying amount	3,959	7,063
Customer relationships [Member]
Summary of Finite-lived intangible assets
Adjusted cost	9,461	9,573
Accumulated amortization	(9,449)	(9,263)
Net carrying amount	12	310
Brand names [Member]
Summary of Finite-lived intangible assets
Adjusted cost	1,927	1,927
Accumulated amortization	(1,802)	(1,700)
Net carrying amount	125	227
Patented technology [Member]
Summary of Finite-lived intangible assets
Adjusted cost	2,252	2,252
Accumulated amortization	(2,054)	(1,988)
Net carrying amount	198	264
Trademark [Member]
Summary of Finite-lived intangible assets
Adjusted cost	80	80
Accumulated amortization	(80)	(80)
Net carrying amount	$ 0	$ 0

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Recent Accounting Pronouncements

12 Months Ended

Dec. 27, 2014

Accounting Changes and Error Corrections [Abstract]

Recent Accounting Pronouncements

Recent Accounting Pronouncements

Recently Issued Accounting Pronouncements

In January 2015, the Financial Accounting Standards Board ("FASB") issued an accounting standard update which simplifies income statement classification by removing the concept of extraordinary items from the U.S. GAAP. As a result, items that are both unusual and infrequent will no longer be separately reported net of tax after continuing operations. The new standard is effective for the fiscal years, and interim periods within those fiscal years, beginning after December 15, 2015. Early adoption is permitted. The Company does not expect any impact on the adoption of this standard on its consolidated financial statements.

In August 2014, the FASB issued an accounting standard update related to the disclosures around going concern. The new standard provides guidance around management’s responsibility to evaluate whether there are conditions or events that raise substantial doubt about the entity’s ability to continue as a going concern within one year after the date that the financial statements are issued. The new standard is effective for the annual periods and interim periods within those annual periods beginning after December 15, 2016. Early application is permitted. The Company does not expect any impact on the adoption of this standard on its consolidated financial statements.

In May 2014, the FASB issued an accounting standards update which requires an entity to recognize the amount of revenue to which it expects to be entitled for the transfer of promised goods or services to customers. The standard will replace most existing revenue recognition guidance in U.S. GAAP when it becomes effective. The new standard is effective for the Company on January 1, 2017. Early application is not permitted. The standard permits the use of either the retrospective or cumulative effect transition method. The Company is evaluating the effect that the standard will have on its consolidated financial statements and related disclosures. The Company has not yet selected a transition method nor has it determined the effect of the standard on its ongoing financial reporting.

In July 2013, the FASB issued an accounting standards update which provides that a liability related to an unrecognized tax benefit would be offset against a deferred tax asset for a net operating loss carryforward, a similar tax loss or a tax credit carryforward if such settlement is required or expected in the event the uncertain tax position is disallowed. In situations in which a net operating loss carryforward, a similar tax loss or a tax credit carryforward is not available at the reporting date under the tax law of the jurisdiction or the tax law of the jurisdiction does not require, and the entity does not intend to use, the deferred tax asset for such purpose, the unrecognized tax benefit will be presented in the financial statements as a liability and will not be combined with deferred tax assets. The amendments should be applied prospectively to all unrecognized tax benefits that exist at the effective date. Retrospective application is permitted. The new standard is effective for fiscal years and interim periods beginning after December 15, 2013. The Company adopted this standard during the three months ended March 29, 2014, resulting in a one-time tax benefit of $0.3 million, a reduction in deferred tax assets of $0.3 million, and a reduction in long-term income taxes payable of $0.6 million.

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Stockholders' Equity and Stock-Based Compensation - Options Activity (Details)	12 Months Ended
	Dec. 27, 2014	Dec. 28, 2013	Dec. 29, 2012
Activity of stock option plans including options and RSUs [Roll Forward]
Number of Shares Outstanding (Options), Beginning Balance (in shares)	1,909,039
Options granted (in shares)	(74,300)
Number of Shares Outstanding (Options), Ending Balance (in shares)	1,382,993
Stock Options and Restricted Stock Units [Member]
Activity of stock option plans including options and RSUs [Roll Forward]
Number of Shares Outstanding (Options), Beginning Balance (in shares)	2,937,001	1,093,565	1,391,930
Increase in authorized shares (in shares)	0	2,600,000	0
Options granted (in shares)	(74,300)	(430,800)	(281,085)
Options cancelled (in shares)	191,061	150,459	139,376
Options - expired plan shares (in shares)	(17,491)	(53,607)	(53,102)
RSUs granted (in shares)	(805,120)	(664,902)	(103,554)
RSUs cancelled (in shares)	167,404	133,418	0
RSUs - shares issued to satisfy tax withholding obligations (in shares)	65,527	108,868	0
Number of Shares Outstanding (Options), Ending Balance (in shares)	2,464,082	2,937,001	1,093,565

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Accounts Receivable - Textual (Details) (USD $)	12 Months Ended
	Dec. 27, 2014	Dec. 28, 2013
Accounts Receivable (Additional Textual) [Abstract]
Sold receivables amount	$ 7,700,000	$ 6,300,000
Gains or losses on sale of accounts receivables		0
Due from unrelated third parties	$ 0	$ 0
Minimum [Member]
Accounts Receivable (Textual) [Abstract]
Administrative fees as well as interest percent	1.17%
Maximum [Member]
Accounts Receivable (Textual) [Abstract]
Administrative fees as well as interest percent	1.68%

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Goodwill and Intangible Assets (Tables)

12 Months Ended

Dec. 27, 2014

Goodwill and Intangible Assets Disclosure [Abstract]

Schedule of goodwill

The following table summarizes the activity in the Company’s goodwill during the years ended December 27, 2014 and December 28, 2013, respectively (in thousands):

Balance as of December 29, 2012	$	11,352
Foreign currency movements	391
Balance as of December 28, 2013	11,743
Foreign currency movements	(1,249		)
Balance as of December 27, 2014	$	10,494

Summary of finite-lived intangible assets

Finite-lived intangible assets as of December 27, 2014 and December 28, 2013 consisted of the following (in thousands):

	December 27, 2014
	Adjusted cost		Accumulated amortization			Net carrying amount
Developed technology	$	16,950	$	(12,991	)	$	3,959
Customer relationships	9,461		(9,449		)	12
Brand names	1,927		(1,802		)	125
Patented technology	2,252		(2,054		)	198
Trademark	80		(80		)	—
Total	$	30,670	$	(26,376	)	$	4,294

	December 28, 2013
	Adjusted cost		Accumulated amortization			Net carrying amount
Developed technology	$	18,095	$	(11,032	)	$	7,063
Customer relationships	9,573		(9,263		)	310
Brand names	1,927		(1,700		)	227
Patented technology	2,252		(1,988		)	264
Trademark	80		(80		)	—
Total	$	31,927	$	(24,063	)	$	7,864

Estimated future amortization expense

The estimated future amortization expense of finite intangible assets as of December 27, 2014 is as follows (in thousands):

Fiscal Years	Amounts
2015	$	2,199
2016	1,683
2017	206
2018	140
2019	66
Total future amortization expense	$	4,294

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Financial Statement Components (Tables)

12 Months Ended

Dec. 27, 2014

Organization, Consolidation and Presentation of Financial Statements [Abstract]

Selected balance sheet components

Consolidated Balance Sheets
	At
	December 27, 2014			December 28, 2013
Inventories:
Raw materials and sub-assemblies	$	19,463		$	19,655
Work in process	7,723			7,597
Finished goods	7,919			7,268
Inventories	35,105			34,520
Inventories-delivered systems	1,912			6,901
Total inventories	$	37,017		$	41,421
Property, plant and equipment, net(1):
Land	$	15,572		$	15,569
Building and improvements	19,641			19,403
Machinery and equipment	29,456			27,820
Furniture and fixtures	2,225			2,308
Software	7,942			1,851
Capital in progress	3,512			5,833
Total property, plant and equipment, gross	78,348			72,784
Accumulated depreciation and amortization	(28,715		)	(25,345		)
Total property, plant and equipment, net	$	49,633		$	47,439
(1)Total depreciation and amortization expense for the years ended December 27, 2014, December 28, 2013, and December 29, 2012 was $6.6 million, $5.4 million, and $4.8 million, respectively.
Other current liabilities:
Accrued warranty	$	2,953		$	3,426
Accrued restructuring	997			—
Accrued professional services	778			545
Fair value of current portion of contingent payments to Zygo Corporation related to acquisition	1,385			1,344
Other	2,152			2,678
Total other current liabilities	$	8,265		$	7,993

Components of accumulated other comprehensive income (loss)

Components of Accumulated Other Comprehensive Income (Loss)

	Years Ended
	Foreign Currency Translations			Defined Benefit Pension Plans			Unrealized Income (Loss) on Investment			Accumulated Other Comprehensive Income
Balance as of December 29, 2012	$	1,453		$	(179	)	$	(2	)	$	1,272
Current period change	(818		)	151			7			(660		)
Balance as of December 28, 2013	635			(28		)	5			612
Current period change	(3,239		)	(106		)	(36		)	(3,381		)
Balance as of December 27, 2014	$	(2,604	)	$	(134	)	$	(31	)	$	(2,769	)

The items above, except for unrealized income (loss) on investment, did not impact the Company’s income tax provision.

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Commitments and Contingencies - Future minimum lease payments (Details) (USD $) In Thousands, unless otherwise specified	Dec. 27, 2014
Future minimum lease payments under operating leases
2015	$ 1,468
2016	1,083
2017	570
2018	294
2019	195
Total	$ 3,610

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Financial Statement Components - Selected Balance Sheet Components (Details) (USD $)	12 Months Ended
	Dec. 27, 2014	Dec. 28, 2013	Dec. 29, 2012
Inventories:
Raw materials and sub-assemblies	$ 19,463,000	$ 19,655,000
Work in process	7,723,000	7,597,000
Finished goods	7,919,000	7,268,000
Inventories	35,105,000	34,520,000
Inventories-delivered systems	1,912,000	6,901,000
Total inventories	37,017,000	41,421,000
Property, Plant and Equipment [Line Items]
Total property, plant and equipment, gross	78,348,000	72,784,000
Accumulated depreciation and amortization	(28,715,000)	(25,345,000)
Total property, plant and equipment, net	49,633,000	47,439,000
Depreciation and amortization expense	6,600,000	5,400,000	4,800,000
Accrued warranty	2,953,000	3,426,000
Accrued restructuring	997,000	0
Accrued professional services	778,000	545,000
Fair value of current portion of contingent payments to Zygo Corporation related to acquisition	1,385,000	1,344,000
Other	2,152,000	2,678,000
Total other current liabilities	8,265,000	7,993,000
Land [Member]
Property, Plant and Equipment [Line Items]
Total property, plant and equipment, gross	15,572,000	15,569,000
Building and improvements [Member]
Property, Plant and Equipment [Line Items]
Total property, plant and equipment, gross	19,641,000	19,403,000
Machinery and equipment [Member]
Property, Plant and Equipment [Line Items]
Total property, plant and equipment, gross	29,456,000	27,820,000
Furniture and fixtures [Member]
Property, Plant and Equipment [Line Items]
Total property, plant and equipment, gross	2,225,000	2,308,000
Software [Member]
Property, Plant and Equipment [Line Items]
Total property, plant and equipment, gross	7,942,000	1,851,000
Capital in progress [Member]
Property, Plant and Equipment [Line Items]
Total property, plant and equipment, gross	$ 3,512,000	$ 5,833,000

XML

Warranties (Tables)

12 Months Ended

Dec. 27, 2014

Product Warranties Disclosures [Abstract]

Components of the warranty accrual

Components of the warranty accrual, which were included in the accompanying consolidated balance sheets with other current liabilities, were as follows (in thousands):

	Years Ended
	December 27, 2014			December 28, 2013
Balance as of beginning of period	$	3,426		$	4,203
Accruals for warranties issued during period	5,987			4,176
Settlements during the period	(6,460		)	(4,953		)
Balance as of end of period	$	2,953		$	3,426

XML

Restructuring (Tables)

12 Months Ended

Dec. 27, 2014

Restructuring and Related Activities [Abstract]

Components of the restructuring reserve

As of December 27, 2014 and December 28, 2013, respectively, the components of the Company's restructuring reserves were included in other current liabilities and were as follows (in thousands):

	Employee severance and benefits			Facility termination costs			Other			Total
Balance as of December 28, 2013	$	—		$	—		$	—		$	—
Charges	1,016			899			351			2,266
Cash Payments	(780		)	(201		)	(288		)	(1,269		)
Balance as of December 27, 2014	$	236		$	698		$	63		$	997

	Employee severance and benefits			Facility termination costs		Other		Total
Balance as of December 29, 2012	$	—		$	—	$	—	$	—
Charges	1,740			—		—		1,740
Cash Payments	(844		)	—		—		(844		)
Non-cash items	(896		)	—		—		(896		)
Balance as of December 28, 2013	$	—		$	—	$	—	$	—

XML

Nature of Business, Basis of Presentation and Significant Accounting Policies

12 Months Ended

Dec. 27, 2014

Nature of Business and Basis of Presentation [Abstract]

Nature of Business, Basis of Presentation and Significant Accounting Policies

Nature of Business, Basis of Presentation and Significant Accounting Policies

Description of Business – Nanometrics Incorporated (“Nanometrics” or the “Company”) and its wholly-owned subsidiaries design, manufacture, market, sell and support optical critical dimension ("OCD"), thin film and overlay dimension metrology and inspection systems used primarily in the manufacturing of semiconductors, solar photovoltaics (“solar PV”) and high-brightness LEDs (“HB-LED”), as well as by customers in the silicon wafer and data storage industries. Nanometrics' metrology systems precisely measure a wide range of film types deposited on substrates during manufacturing to control manufacturing processes and increase production yields in the fabrication of integrated circuits. The Company’s OCD technology is a patented critical dimension measurement technology that is used to precisely determine the dimensions on the semiconductor wafer that directly control the resulting performance of the integrated circuit devices. The thin film metrology systems use a broad spectrum of wavelengths, high-sensitivity optics, proprietary software, and patented technology to measure the thickness and uniformity of films deposited on silicon and other substrates as well as their chemical composition. The overlay metrology systems are used to measure the overlay accuracy of successive layers of semiconductor patterns on wafers in the photolithography process. Nanometrics' inspection systems are used to find defects on patterned and unpatterned wafers at nearly every stage of the semiconductor production flow. The corporate headquarters of Nanometrics is located in Milpitas, California.

Basis of Presentation – The consolidated financial statements include Nanometrics Incorporated and its wholly-owned subsidiaries. All significant intercompany accounts and transactions have been eliminated in consolidation.

Fiscal Year – On October 17, 2014, the Board of Directors of the Company approved a change in the Company's fiscal year from a fiscal year ending on the Saturday closest to December 31 to a 52/53 week fiscal year ending on the last Saturday of the calendar year. All periods presented consisted of a 52-week year.

Reclassifications – Certain prior year amounts have been reclassified to conform to the current year presentation.

Use of Estimates – The preparation of financial statements in conformity with accounting principles generally accepted in the United States of America ("U.S. GAAP") requires management to make estimates and assumptions that affect the reported amounts of assets and liabilities and disclosure of contingent assets and liabilities at the date of the financial statements and the reported amounts of revenues and expenses during the reported period. Actual results could differ materially from those estimates. Estimates are used for, but not limited to, revenue recognition, the provision for doubtful accounts, the provision for excess, obsolete, or slow moving inventories, valuation of intangible and long-lived assets, warranty accruals, income taxes, valuation of stock-based compensation, and contingencies.

Foreign Currency Translation – The assets and liabilities of foreign subsidiaries are translated from their respective local functional currencies at exchange rates in effect at the balance sheet date and income and expense accounts are translated at average exchange rates during the reporting period. Resulting translation adjustments are reflected in “Accumulated other

comprehensive income,” a component of stockholders’ equity. Foreign currency transaction gains and losses are reflected in

“Other income (expense)” in the consolidated statements of operations in the period incurred, and consists of a $0.1 million gain, a $0.7 million loss and a $0.3 million loss for the years ended December 27, 2014, December 28, 2013, and December 29, 2012, respectively.

Revenue Recognition – The Company derives revenue from the sale of process control metrology systems (“product revenue”) as well as spare part sales, billable service, service contracts, and upgrades (together “service revenue”). Upgrades are a group of parts and/or software that change the existing configuration of a product and are included in service revenue. They are distinguished from product revenue, which consists of complete, advanced process control metrology and inspection systems (the “system(s)”). Nanometrics' systems consist of hardware and software components that function together to deliver the essential functionality of the system. Arrangements for sales of systems often include defined customer-specified acceptance criteria.

In summary, the Company recognizes revenue when persuasive evidence of an arrangement exists, delivery has occurred or services have been rendered, the seller's price is fixed or determinable, and collectability is reasonably assured.

For product sales to existing customers, revenue recognition occurs at the time title and risk of loss transfer to the customer, which usually occurs upon shipment from the Company's manufacturing location, if it can be reliably demonstrated that the product has successfully met the defined customer specified acceptance criteria and all other recognition criteria have been met. For initial sales where the product has not previously met the defined customer specified acceptance criteria, product revenues are recognized upon the earlier of receipt of written customer acceptance or expiration of the contractual acceptance period. In Japan, where contractual terms with the customer specify risk of loss and title transfers upon customer acceptance, revenue is recognized upon receipt of written customer acceptance, provided that all other recognition criteria have been met.

The Company warrants its products against defects in manufacturing. Upon recognition of product revenue, a liability is recorded for anticipated warranty costs. On occasion, customers request a warranty period longer than the Company's standard warranty. In those instances where extended warranty services are separately quoted to the customer, the associated revenue is deferred and recognized as service revenue ratably over the term of the contract. The portion of service contracts and extended warranty services agreements that are uncompleted at the end of any reporting period are included in deferred revenue.

As part of its customer services, the Company sells software that is considered to be an upgrade to a customer's existing systems. These standalone software upgrades are not essential to the tangible product's functionality and are accounted for under software revenue recognition rules which require vendor specific objective evidence ("VSOE") of fair value to allocate revenue in a multiple element arrangement. Revenue from upgrades is recognized when the upgrades are delivered to the customer, provided that all other recognition criteria have been met.

Revenue related to spare parts is recognized upon shipment. Revenue related to billable services is recognized as the services are performed. Service contracts may be purchased by the customer during or after the warranty period and revenue is recognized ratably over the service contract period.

Frequently, the Company delivers products and various services in a single transaction. The Company's deliverables consist of tools, installation, upgrades, billable services, spare parts, and service contracts. The Company's typical multi-element arrangements include a sale of one or multiple tools that include installation and standard warranty. Other arrangements consist of a sale of tools bundled with service elements or delivery of different types of services. The Company's tools, upgrades, and spare parts are generally delivered to customers within a period of up to six months from order date. Installation is usually performed soon after delivery of the tool. The portion of revenue associated with installation is deferred based on relative selling price and that revenue is recognized upon completion of the installation. Billable services are billed on a time and materials basis and performed as requested by customers. Under service contract arrangements, services are provided as needed over the fixed arrangement term, which terms can be up to twelve months. The Company does not grant its customers a general right of return or any refund terms and imposes a penalty on orders cancelled prior to the scheduled shipment date.

The Company regularly evaluates its revenue arrangements to identify deliverables and to determine whether these deliverables are separable into multiple units of accounting. In accordance with revenue recognition guidance, the Company allocates the arrangement consideration among the deliverables based on relative selling prices. The Company has established VSOE for some of its products and services when a substantial majority of selling prices falls within a narrow range when sold separately. For deliverables with no established VSOE, the Company uses best estimate of selling price to determine standalone selling price for such deliverable. The Company does not use third party evidence to determine standalone selling price since this information is not widely available in the market as the Company's products contain a significant element of proprietary technology and the solutions offered differ substantially from competitors. The Company has established a process for developing estimated selling prices, which incorporates historical selling prices, the effect of market conditions, gross margin objectives, pricing practices, as well as entity-specific factors. The Company monitors and evaluates estimated selling price on a regular basis to ensure that changes in circumstances are accounted for in a timely manner.

When certain elements in multiple-element arrangements are not delivered or accepted at the end of a reporting period, the relative selling prices of undelivered elements are deferred until these elements are delivered and/or accepted. If deliverables cannot be accounted for as separate units of accounting, the entire arrangement is accounted for as a single unit of accounting and revenue is deferred until all elements are delivered and all revenue recognition requirements are met.

BusinessCombinations - The Company allocates the purchase price of acquired companies to the tangible and intangible assets acquired and liabilities assumed based upon their estimated fair values at the acquisition date. The purchase price allocation process requires management to make significant estimates and assumptions, especially at the acquisition date with respect to intangible assets and inventory acquired. While best estimates and assumptions as a part of the purchase price allocation process are used to accurately value assets acquired and liabilities assumed at the acquisition date, estimates are inherently uncertain and subject to refinement. As a result, during the measurement period, which may be up to one year from the acquisition date, the Company may record adjustments to the assets acquired and liabilities assumed, with the corresponding offset to goodwill. Upon the conclusion of the measurement period or final determination of the values of assets acquired or liabilities assumed, whichever comes first, any subsequent adjustments are recorded in the consolidated statements of operations.

The Company estimates the fair value of inventory acquired by utilizing the net realizable value method which is based on the estimated sales price of the product less appropriate costs to complete and selling costs. Examples of critical estimates in valuing certain intangible assets that were acquired or may be acquired in the future include but are not limited to:

• future expected cash flows from sales of products, services and acquired developed technologies and patents;

• expected costs to develop the in-process research and development into commercially viable products and estimated cash flows from the projects when completed;

• the acquired company's customer relationships, as well as assumptions about the estimated useful lives of the relationships; and

• discount rates.

Unanticipated events and circumstances may occur that may affect the accuracy or validity of assumptions, estimates or actual results associated with business combinations.

Cash, Cash Equivalents and Marketable Securities – The Company considers all highly liquid investments with original maturities of three months or less, when purchased, to be cash equivalents. Marketable securities are classified as “available-for-sale” and are reported at fair value with unrealized gains and losses reported in stockholders' equity as a component of other comprehensive income. The cost of securities sold is based on the specific identification method. The Company classifies its investments as current based on the nature of the investment and their availability for use in current operations. The Company reviews its investment portfolio quarterly to determine if any securities may be other-than-temporarily impaired due to increased credit risk, changes in industry or sector of a certain instrument or ratings downgrades.

Fair Value of Financial Instruments – Financial instruments include cash and cash equivalents, accounts receivable and accounts payable. Cash equivalents are stated at fair market value based on quoted market prices. The carrying values of accounts receivable and accounts payable approximate their fair values because of the short-term maturity of these financial instruments.

Allowance for Doubtful Accounts – The Company maintains allowances for estimated losses resulting from the inability of its customers to make required payments. Credit limits are established through a process of reviewing the financial history and stability of its customers. Where appropriate and available, the Company obtains credit rating reports and financial statements of customers when determining or modifying their credit limits. The Company regularly evaluates the collectability of its trade receivable balances based on a combination of factors such as the length of time the receivables are past due, customary payment practices in the respective geographies and historical collection experience with customers. The Company believes that its allowance for doubtful accounts adequately reflects the risk associated with its receivables. If the financial conditions of a customer were to deteriorate, resulting in their inability to make payments, the Company may need to record additional allowances, which would result in additional general and administrative expenses being recorded for the period in which such determination was made.

Inventories – Inventories are stated at the lower of cost, which approximates actual cost on a first-in, first-out basis, or market. The Company is exposed to a number of economic and industry factors that could result in portions of inventory becoming either obsolete or in excess of anticipated usage, or saleable only for amounts that are less than their carrying amounts. These factors include, but are not limited to, technological changes in the market, the Company’s ability to meet changing customer requirements, competitive pressures in products and prices, and the availability of key components from suppliers. The Company has established inventory reserves when conditions exist that suggest that inventory may be in excess of anticipated demand or is obsolete based upon assumptions about future demand for the Company’s products and market conditions. Once a reserve has been established, it is maintained until the part to which it relates is sold or is otherwise disposed of. The Company regularly evaluates its ability to realize the value of inventory based on a combination of factors including the following: historical usage rates, forecasted sales of usage, product end-of-life dates, estimated current and future market values and new product introductions. For demonstration inventory, the Company also considers the age of the inventory and potential cost to refurbish the inventory prior to sale. Demonstration inventory is amortized over its useful life and the amortization expense is included in total inventory write down on the statements of cash flows. When recorded, reserves are intended to reduce the carrying value of the Company’s inventory to its net realizable value. If actual demand for the Company’s products deteriorates, or market conditions are less favorable than those that the Company projects, additional reserves may be required.

Inventories – delivered systems – The Company reflects the cost of systems that were invoiced upon shipment but deferred for revenue recognition purposes separate from its inventory held for sale as “Inventories – delivered systems.”

Property, Plant and Equipment – Property, plant and equipment are stated at cost. Depreciation and amortization is computed using the straight–line method over the following estimated useful lives of the assets:

Building and Improvements        5-40 years

Machinery and equipment            3-10 years

Furniture and fixtures            3-10 years

Software                3-7 years

Goodwill and Intangible Assets – Goodwill is initially recorded when the purchase price paid for an acquisition exceeds the estimated fair value of the net identified tangible and intangible assets acquired. Intangible assets with finite lives are amortized over their respective useful lives on a straight-line basis and are also evaluated annually for impairment or whenever events or circumstances occur which indicate that those assets might be impaired. Goodwill and indefinite lived assets are not amortized but tested annually for impairment. The Company’s impairment review process is completed during the fourth quarter of each year or whenever events, or circumstances occur which indicate that an impairment may have occurred. The Company assesses qualitative factors to determine whether it is more likely than not that the fair value of a reporting unit is less than its carrying value. If, after assessing the qualitative factors, the Company determines that it is not likely that the fair value of a reporting unit is less than its carrying value, then performing the two-step impairment test is unnecessary. However, if the Company concludes otherwise, then it is required to perform the first step of the two-step goodwill impairment test. The first step requires a comparison of the fair value of Nanometrics’ reporting unit to its net book value. If the fair value of the reporting unit is greater than its carrying value, then no impairment is deemed to have occurred. If the fair value is less, then the second step must be performed to determine the amount, if any, of actual impairment. Amortization of intangible assets with finite lives is computed using the straight-line method over the following estimated useful lives of the assets:

Developed technology            5-10 years

Customer relationships            2-10 years

Brand name                5-10 years

Patented technology            7-10 years

Trademark                5 years

Long-Lived Assets – The Company evaluates its long-lived assets for impairment whenever events or changes in circumstances indicate that the carrying amount of an asset may not be recoverable. When the sum of the undiscounted future net cash flows expected to result from the use of the asset and its eventual disposition is less than its carrying amount, impairment may exist. To determine the amount of impairment, the Company compares the fair value of the asset to its carrying value. If the carrying value of the asset exceeds its fair value, an impairment loss equal to the difference is recognized. See Note 7, "Goodwill and Intangible Assets" for further details.

Income Tax Assets and Liabilities – The Company accounts for income taxes such that deferred tax assets and liabilities must be recognized using enacted tax rates for the effect of temporary differences between the book and tax accounting for assets and liabilities. Also, deferred tax assets are reduced by a valuation allowance to the extent that management cannot conclude that it is more likely than not that a portion of the deferred tax asset will be realized in the future. The Company evaluates the deferred tax assets on a continuous basis throughout the year to determine whether or not a valuation allowance is appropriate. Factors used in this determination include future expected income and the underlying asset or liability which generated the temporary tax difference. The income tax provision is primarily impacted by federal statutory rates, state and foreign income taxes and changes in the valuation allowance.

Product Warranties – The Company sells the majority of its products with a twelve months repair or replacement warranty from the date of acceptance, which generally represents the date of shipment. The Company provides an accrual for estimated future warranty costs based upon the historical relationship of warranty costs to the cost of products sold. The estimated future warranty obligations related to product sales are reported in the period in which the related revenue is recognized. The estimated future warranty obligations are affected by the warranty periods, sales volumes, product failure rates, material usage and labor and replacement costs incurred in correcting a product failure. If actual product failure rates, material usage, labor or replacement costs differ from the Company’s estimates, revisions to the estimated warranty obligations would be required. For new product introductions where limited or no historical information exists, the Company may use warranty information from other previous product introductions to guide it in estimating the warranty accrual. The warranty accrual represents the best estimate of the amount necessary to settle future and existing claims on products sold as of the balance sheet date. The Company periodically assesses the adequacy of its recorded warranty reserve and adjusts the amounts in accordance with changes in these factors.

Shipping and Handling Costs – Shipping and handling costs are included as a component of cost of net revenues.

Advertising Costs – The Company expenses advertising costs as incurred. Advertising costs were $0.2 million in 2014, $0.2 million in 2013, and $0.1 million in 2012.

Stock-Based Compensation – The Company estimates the value of employee stock options on the date of grant using the Black-Scholes model. The determination of fair value of share-based payment awards on the date of grant using an option-pricing model is affected by the Company’s stock price as well as assumptions regarding a number of highly complex and subjective variables. These variables include, but are not limited to, the expected stock price volatility over the term of the awards, and actual and projected employee stock option exercise behaviors. The expected term of options granted is calculated based on the simplified method allowed under SEC Staff Accounting Bulletin 107 (“SAB 107”). The expected volatility is based on the historical volatility of the Company’s stock price.

Defined Employee Benefit Plans– The Company maintains a defined benefit pension plan in Taiwan for which current service costs are charged to operations as they accrue based on services rendered by employees during the year. Pension benefit obligations are determined by using management’s actuarial assumptions, including discount rates, assumed asset rates of return, compensation increases and employee turnover rates.

Net Income (Loss) Per Share - Basic net income (loss) per share excludes dilution and is computed by dividing net income (loss) by the number of weighted average common shares outstanding for the period. Diluted net income (loss) per share reflects the potential dilution from outstanding dilutive stock options (using the treasury stock method) and shares issuable under the employee stock purchase plan. The Company had net income in fiscal year 2012, therefore, the potential dilutive effect of stock options was considered to calculate the diluted income per share. In applying the treasury stock method, 0.9 million of stock option shares for fiscal year 2012 were excluded because their effect was anti-dilutive.

Certain Significant Risks and Uncertainties – Financial instruments that potentially subject us to a concentration of credit risk consist of cash, cash equivalents, marketable securities, and accounts receivable. The Company's cash and cash equivalents are primarily invested in deposit accounts and money market accounts with large financial institutions. At times, these deposits and securities may exceed federally insured limits; however, the Company has not experienced any losses on such accounts. The Company invests its cash not required for use in operations in high credit quality securities based on the Company's investment policy. The Company's investment policy provides guidelines and limits regarding credit quality, investment concentration, investment type, and maturity that the Company believes will provide liquidity while reducing risk of loss of capital. Investments are of a short-term nature and include investments in commercial paper, corporate debt securities, U.S. Treasury, U.S. Government, and U.S. Agency debt.

The Company sells its products primarily to end users in the United States, Asia and Europe and, generally, does not require its customers to provide collateral or other security to support accounts receivable. Management performs ongoing credit evaluations of its customers’ financial condition and maintains an allowance for estimated potential bad debt losses. The Company’s customer base is highly concentrated and historically, a relatively small number of customers have accounted for a significant portion of its revenues. Aggregate revenue from the Company's top five largest customers in 2014, 2013 and 2012 consisted of 72%, 71% and 74%, respectively, of its total net revenues. The Company participates in a dynamic high technology industry and believes that changes in any of the following areas could have a material adverse effect on its future financial position, results of operations or cash flows: advances and trends in new technologies and industry standards; competitive pressures in the form of new products or price reductions on current products; changes in product mix; changes in the overall demand for products offered; changes in third-party manufacturers; changes in key suppliers; changes in certain strategic relationships or customer relationships; litigation or claims against the Company based on intellectual property, patent, product, regulatory or other factors; fluctuations in foreign currency exchange rates; risk associated with changes in domestic and international economic and/or political regulations; availability of necessary components or sub-assemblies; disruption of manufacturing facilities; and its ability to attract and retain employees necessary to support its growth.

Certain components and sub-assemblies used in the Company’s products are purchased from a sole supplier or a limited group of suppliers. In particular, the Company currently purchases its spectroscopic ellipsometer and robotics used in its advanced measurement systems from a sole supplier or a limited group of suppliers located in the United States. Any shortage or interruption in the supply of any of the components or sub-assemblies used in its products or its inability to procure these components or sub-assemblies from alternate sources on acceptable terms could have a material adverse effect on its business, financial condition and results of operations.

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Commitments and Contingencies (Tables)

12 Months Ended

Dec. 27, 2014

Commitments and Contingencies Disclosure [Abstract]

Future minimum lease payments under operating leases

Future minimum lease payments under its operating leases are as follows (in thousands):

	Operating Leases
2015	$	1,468
2016	1,083
2017	570
2018	294
2019	195
Total	$	3,610

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Fair Value Measurements and Disclosures - Unobservable Input Reconciliation (Details) (Level 3 [Member], USD $) In Thousands, unless otherwise specified	12 Months Ended
	Dec. 27, 2014	Dec. 28, 2013
Fair value measurement on recurring basis, unobservable input reconciliation [Roll Forward]
Fair value, beginning balance	$ 2,783	$ 2,462
Change in fair value included in earnings	201	1,325
Fair Value, ending balance	2,397	2,783
Zygo Corporation [Member]
Fair value measurement on recurring basis, unobservable input reconciliation [Roll Forward]
Payments made to Zygo Corporation	$ (587)	$ (1,004)

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Restructuring (Details) (USD $) In Thousands, unless otherwise specified	12 Months Ended
	Dec. 27, 2014	Dec. 28, 2013	Dec. 29, 2012
Restructuring Reserve [Roll Forward]
Beginning Balance	$ 0	$ 0
Charges	2,266	1,740	0
Cash Payments	(1,269)	(844)
Non-cash items		(896)
Ending Balance	997	0	0
Employee severance and benefits [Member]
Restructuring Reserve [Roll Forward]
Beginning Balance	0	0
Charges	1,016
Cash Payments	(780)	(844)
Non-cash items		(896)
Ending Balance	236	0
Facility termination costs [Member]
Restructuring Reserve [Roll Forward]
Beginning Balance	0	0
Charges	899	0
Cash Payments	(201)	0
Non-cash items		0
Ending Balance	698	0
Other [Member]
Restructuring Reserve [Roll Forward]
Beginning Balance	0	0
Charges	351	0
Cash Payments	(288)	0
Non-cash items		0
Ending Balance	$ 63	$ 0

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Income Taxes - Reconciliation of Unrecognized Tax Benefits (Details) (USD $) In Thousands, unless otherwise specified	12 Months Ended
	Dec. 27, 2014	Dec. 28, 2013	Dec. 29, 2012
Reconciliation of Unrecognized Tax Benefits, Excluding Amounts Pertaining to Examined Tax Returns [Roll Forward]
Unrecognized tax benefits - beginning of the period	$ 4,436	$ 3,464	$ 3,599
Foreign currency movements	0	0	0
Gross increases-tax positions in prior period	655	305	0
Gross decreases-tax positions in prior period	(123)	0	(183)
Gross increases-current-period tax positions	1,541	688	265
Lapse of statute of limitations	(67)	(21)	(217)
Unrecognized tax benefits - end of the period	$ 6,442	$ 4,436	$ 3,464

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Consolidated Balance Sheets (USD $) In Thousands, unless otherwise specified	Dec. 27, 2014	Dec. 28, 2013
Current assets:
Cash and cash equivalents	$ 34,676	$ 44,765
Marketable securities	49,286	48,097
Accounts receivable, net of allowances of $253 and $293, respectively	26,121	31,436
Inventories	35,105	34,520
Inventories-delivered systems	1,912	6,901
Prepaid expenses and other	9,289	10,519
Deferred income tax assets	1,457	14,516
Total current assets	157,846	190,754
Property, plant and equipment, net	49,633	47,439
Goodwill	10,494	11,743
Intangible assets, net	4,294	7,864
Deferred income tax assets	410	4,338
Other assets	559	696
Total assets	223,236	262,834
Current liabilities:
Accounts payable	10,199	10,604
Accrued payroll and related expenses	8,700	7,853
Deferred revenue	10,021	21,749
Other current liabilities	8,265	7,993
Income taxes payable	1,017	758
Total current liabilities	38,202	48,957
Deferred revenue	2,591	3,718
Income taxes payable	701	1,171
Deferred tax liability	926	0
Other long-term liabilities	1,279	1,615
Total liabilities	43,699	55,461
Commitments and contingencies (Note 11)
Stockholders’ equity:
Preferred stock, $0.001 par value; 3,000,000 shares authorized; no shares issued or outstanding	0	0
Common stock, $0.001 par value, 47,000,000 shares authorized: 23,813,729 and 23,537,275, respectively, issued and outstanding	24	24
Additional paid-in capital	251,396	244,733
Accumulated deficit	(69,114)	(37,996)
Accumulated other comprehensive income	(2,769)	612
Total stockholders’ equity	179,537	207,373
Total liabilities and stockholders’ equity	$ 223,236	$ 262,834

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Financial Statement Components - Components of Accumulated Other Comprehensive Income (Details) (USD $) In Thousands, unless otherwise specified	12 Months Ended
	Dec. 27, 2014	Dec. 28, 2013	Dec. 29, 2012
Accumulated Other Comprehensive Income (Loss) [Line Items]
Foreign currency translation adjustments	$ (3,239)	$ (818)	$ (264)
Accumulated Other Comprehensive Income (Loss), Net of Tax [Roll Forward]
Beginning of year	612	1,272
Current period change	(3,381)	(660)
End of year	(2,769)	612	1,272
Foreign Currency Translations [Member]
Accumulated Other Comprehensive Income (Loss), Net of Tax [Roll Forward]
Beginning of year	635	1,453
Current period change	(3,239)	(818)
End of year	(2,604)	635
Defined Benefit Pension Plans [Member]
Accumulated Other Comprehensive Income (Loss), Net of Tax [Roll Forward]
Beginning of year	(28)	(179)
Current period change	(106)	151
End of year	(134)	(28)
Unrealized Income (Loss) on Investment [Member]
Accumulated Other Comprehensive Income (Loss), Net of Tax [Roll Forward]
Beginning of year	5	(2)
Current period change	(36)	7
End of year	$ (31)	$ 5

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Consolidated Statements of Stockholders' Equity (USD $) In Thousands, except Share data, unless otherwise specified	Total	Common Stock	Additional Paid-In Capital	Accumulated Deficit	Accumulated Other Comprehensive Income
Beginning Balance Value at Dec. 31, 2011	$ 209,992	$ 23	$ 236,735	$ (28,315)	$ 1,549
Beginning Balance Shares at Dec. 31, 2011		23,182,771
Increase (Decrease) in Stockholders' Equity [Roll Forward]
Net income (loss)	4,465			4,465
Employee benefit plan adjustment	(11)				(11)
Foreign currency translation adjustments	(264)				(264)
Unrealized gain (loss) on investments, net of tax	(2)				(2)
Issuance of common stock under stock-based compensation plans	4,205	0	4,205
Issuance of common stock under stock-based compensation plans, Shares		655,424
Stock-based compensation expense	5,890		5,890
Repurchases and retirement of common stock	(8,504)		(8,504)
Repurchases and retirement of common stock, Shares	(587,766)	(587,766)
Ending Balance Value at Dec. 29, 2012	215,771	23	238,326	(23,850)	1,272
Ending Balance Shares at Dec. 29, 2012		23,250,429
Increase (Decrease) in Stockholders' Equity [Roll Forward]
Net income (loss)	(14,146)			(14,146)
Employee benefit plan adjustment	151				151
Foreign currency translation adjustments	(818)				(818)
Unrealized gain (loss) on investments, net of tax	7				7
Issuance of common stock under stock-based compensation plans	3,734	1	3,733
Issuance of common stock under stock-based compensation plans, Shares		619,617
Stock-based compensation expense	7,674		7,674
Repurchases and retirement of common stock	(5,000)		(5,000)
Repurchases and retirement of common stock, Shares	(332,771)	(332,771)
Ending Balance Value at Dec. 28, 2013	207,373	24	244,733	(37,996)	612
Ending Balance Shares at Dec. 28, 2013	23,537,275	23,537,275
Increase (Decrease) in Stockholders' Equity [Roll Forward]
Net income (loss)	(31,118)			(31,118)
Employee benefit plan adjustment	(106)				(106)
Foreign currency translation adjustments	(3,239)				(3,239)
Unrealized gain (loss) on investments, net of tax	(36)				(36)
Issuance of common stock under stock-based compensation plans	5,255	0	5,255
Issuance of common stock under stock-based compensation plans, Shares		639,087
Stock-based compensation expense	6,752		6,752
Repurchases and retirement of common stock	(5,344)		(5,344)
Repurchases and retirement of common stock, Shares	(362,633)	(362,633)
Ending Balance Value at Dec. 27, 2014	$ 179,537	$ 24	$ 251,396	$ (69,114)	$ (2,769)
Ending Balance Shares at Dec. 27, 2014	23,813,729	23,813,729

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Stockholders' Equity and Stock-Based Compensation - Share Repurchases (Details) (USD $) In Thousands, except Share data, unless otherwise specified	12 Months Ended
	Dec. 27, 2014	Dec. 28, 2013	Dec. 29, 2012
Disclosure of Compensation Related Costs, Share-based Payments [Abstract]
Common stock repurchased and retired, shares	362,633	332,771	587,766
Weighted average price (in dollars per share)	$ 14.74	$ 15.03	$ 14.47
Total cost of repurchase	$ 5,344	$ 5,000	$ 8,504
Amount available for repurchase at end of period	$ 6,118	$ 11,462	$ 16,462

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Income Taxes (Tables)

12 Months Ended

Dec. 27, 2014

Income Tax Disclosure [Abstract]

Income before provision for income taxes

Income (loss) before provision for income taxes consists of the following (in thousands):

	Years Ended
	December 27, 2014			December 28, 2013			December 29, 2012
Domestic	$	(15,691	)	$	(26,447	)	$	1,887
Foreign	4,070			2,882			2,732
Income (loss) before income taxes	$	(11,621	)	$	(23,565	)	$	4,619

Provision (benefit) for income taxes

The provision (benefit) for income taxes consists of the following (in thousands):

	Years Ended
	December 27, 2014			December 28, 2013			December 29, 2012
Current:
Federal	$	358		$	119		$	(2,403	)
State	(151		)	5			(492		)
Foreign	1,327			933			270
Total current	1,534			1,057			(2,625		)
Deferred:
Federal	17,368			(10,686		)	1,753
State	550			(325		)	379
Foreign	45			535			647
Total deferred	17,963			(10,476		)	2,779
Provision (benefit) for income taxes	$	19,497		$	(9,419	)	$	154

Components of deferred tax assets and liabilities

Significant components of the Company's deferred tax assets and liabilities are as follows (in thousands):

	At
	December 27, 2014			December 28, 2013
Deferred tax assets:
Reserves and accruals	$	10,744		$	10,592
Deferred revenue	1,370			1,614
Shared based compensation	4,030			3,789
Tax credit carry-forwards	8,122			6,591
Net operating losses	14,695			10,220
Depreciation & amortization	2,750			3,241
Other	372			966
Total deferred tax assets	42,083			37,013
Less: Valuation allowance	(35,835		)	(11,665		)
Total deferred tax assets net of valuation allowance	6,248			25,348
Deferred tax liabilities:
Depreciation & amortization	(4,020		)	(5,567		)
Other	(1,485		)	(926		)
Total deferred tax liabilities	(5,505		)	(6,493		)
Net deferred tax assets	$	743		$	18,855

Statutory federal income tax rate reconciliation

Differences between income taxes computed by applying the statutory federal income tax rate to income (loss) before income taxes and the provision (benefit) for income taxes consist of the following (in thousands):

	Years Ended
	December 27, 2014			December 28, 2013			December 29, 2012
Income taxes computed at U.S. statutory rate	$	(4,067	)	$	(8,247	)	$	1,616
State income taxes	254			(324		)	(116		)
Foreign tax rate differential	(172		)	9			(275		)
Change in valuation allowance	23,126			—			—
Domestic production activities deduction	—			—			(17		)
Tax credits	(561		)	(1,377		)	—
Benefit of tax elections	—			—			(1,309		)
Liabilities for uncertain tax positions	118			111			66
Other, net	799			409			189
Provision (benefit) for income taxes	$	19,497		$	(9,419	)	$	154

Unrecognized tax benefits

A reconciliation of the beginning and ending amount of unrecognized tax benefits is as follows (in thousands):

	Years Ended
	December 27, 2014			December 28, 2013			December 29, 2012
Unrecognized tax benefits - beginning of the period	$	4,436		$	3,464		$	3,599
Foreign currency movements	—			—			—
Gross increases-tax positions in prior period	655			305			—
Gross decreases-tax positions in prior period	(123		)	—			(183		)
Gross increases-current-period tax positions	1,541			688			265
Lapse of statute of limitations	(67		)	(21		)	(217		)
Unrecognized tax benefits - end of the period	$	6,442		$	4,436		$	3,464

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Stockholders' Equity and Stock-Based Compensation - RSU Activity (Details) (Restricted Stock Units (RSUs) [Member], USD $)	12 Months Ended
	Dec. 27, 2014	Dec. 28, 2013
Restricted Stock Units (RSUs) [Member]
Activity for RSUs [Roll Forward]
Number of RSU, Beginng balance (in shares)	334,444
Number of RSU, Granted (in shares)	473,600	348,328
Number of RSU, Released (in shares)	(146,234)
Number of RSU, Cancelled (in shares)	(98,473)
Number of RSU, Ending balance (in shares)	563,337	334,444
Weighted Average Fair Value for RSUs [Roll Forward]
Weighted Average Fair Value, Beginng balance (in dollars per share)	$ 18.61
Weighted Average Fair Value, Granted (in dollars per share)	$ 17.14
Weighted Average Fair Value, Released (in dollars per share)	$ 17.60
Weighted Average Fair Value, Cancelled (in dollars per share)	$ 17.12
Weighted Average Fair Value, Ending balance (in dollars per share)	$ 17.90	$ 18.61

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Income Taxes

12 Months Ended

Dec. 27, 2014

Income Tax Disclosure [Abstract]

Income Taxes

Income Taxes

Income Tax Assets and Liabilities - The Company accounts for income taxes whereby deferred tax assets and liabilities are recognized using enacted tax rates for the effect of temporary differences between the book and tax accounting for assets and liabilities. Also, deferred tax assets are reduced by a valuation allowance to the extent that management cannot conclude that it is more likely than not that a portion of the deferred tax asset will be realized in the future. The Company evaluates the deferred tax assets on a continuous basis throughout the year to determine whether or not a valuation allowance is appropriate. Factors used in this determination include future expected income and the underlying asset or liability which generated the temporary tax difference. The income tax provision is primarily impacted by federal statutory rates, state and foreign income taxes, and changes in the valuation allowance.

Income (loss) before provision for income taxes consists of the following (in thousands):

	Years Ended
	December 27, 2014			December 28, 2013			December 29, 2012
Domestic	$	(15,691	)	$	(26,447	)	$	1,887
Foreign	4,070			2,882			2,732
Income (loss) before income taxes	$	(11,621	)	$	(23,565	)	$	4,619

The provision (benefit) for income taxes consists of the following (in thousands):

	Years Ended
	December 27, 2014			December 28, 2013			December 29, 2012
Current:
Federal	$	358		$	119		$	(2,403	)
State	(151		)	5			(492		)
Foreign	1,327			933			270
Total current	1,534			1,057			(2,625		)
Deferred:
Federal	17,368			(10,686		)	1,753
State	550			(325		)	379
Foreign	45			535			647
Total deferred	17,963			(10,476		)	2,779
Provision (benefit) for income taxes	$	19,497		$	(9,419	)	$	154

Significant components of the Company's deferred tax assets and liabilities are as follows (in thousands):

	At
	December 27, 2014			December 28, 2013
Deferred tax assets:
Reserves and accruals	$	10,744		$	10,592
Deferred revenue	1,370			1,614
Shared based compensation	4,030			3,789
Tax credit carry-forwards	8,122			6,591
Net operating losses	14,695			10,220
Depreciation & amortization	2,750			3,241
Other	372			966
Total deferred tax assets	42,083			37,013
Less: Valuation allowance	(35,835		)	(11,665		)
Total deferred tax assets net of valuation allowance	6,248			25,348
Deferred tax liabilities:
Depreciation & amortization	(4,020		)	(5,567		)
Other	(1,485		)	(926		)
Total deferred tax liabilities	(5,505		)	(6,493		)
Net deferred tax assets	$	743		$	18,855

As of December 27, 2014, the Company had net operating loss carryforwards of $13.4 million for federal, $45.0 million in California and $36.3 million in foreign countries, which begin to expire in 2015. A total of $0.2 million of the federal net operating loss, $3.0 million of the California net operating loss carryforward and $1.7 million of the foreign net operating loss carryforwards are related to excess tax benefits as a result of stock option exercises, and therefore will be recorded in additional paid-in capital in the period that they become realized. During the year ended December 27, 2014, the Company did not realize any excess tax benefits as a result of stock option exercises, therefore, there were no amounts recorded to additional paid-in capital.

As of December 27, 2014, the Company had available carryforward Federal and California R&D tax credits of $6.2 million and $5.7 million, respectively. Federal R&D tax credit carryforwards begin to expire in 2024. State R&D tax credits carryforward indefinitely. A total of $0.2 million of the state R&D tax credits are related to excess tax benefits as a result of stock option exercises, and therefore will be recorded to additional paid-in-capital in the period that they become realized.

During the years ended December 27, 2014 and December 28, 2013, the valuation allowances increased by $23.9 million and $1.4 million, respectively. The valuation allowance increase in 2014 was primarily related to a full valuation allowance recorded against the Company's U.S. deferred tax assets. The realization of deferred tax assets is primarily dependent on the Company generating sufficient U.S. and foreign taxable income in future fiscal years. The Company regularly assesses the need for a valuation allowance against its deferred tax assets. In making that assessment, the Company considers both positive and negative evidence related to the likelihood of realization of the deferred tax assets to determine, based on the weight of available evidence, whether it is more-likely-than-not that some or all of the deferred tax assets will not be realized. In evaluating the need for a valuation allowance, the Company considers its cumulative loss in the U.S. as a significant piece of negative evidence. During the year ended December 27, 2014, the Company recorded a $21.1 million valuation allowance against its U.S. deferred tax assets as it determined, within the period, it would not meet the more likely than not threshold. The Company continues to maintain valuation allowances against certain foreign deferred tax assets as a result of uncertainties regarding the realization of the asset due to cumulative losses and uncertainty of future taxable income. The Company will continue to assess the realizability of the deferred tax assets in each of the applicable jurisdictions and maintain the valuation allowances until sufficient positive evidence exists to support a reversal. In the event the Company determines that the deferred tax assets are realizable, an adjustment to the valuation allowances will be reflected in the tax provision for the period such determination is made.

Changes in tax laws and tax rates could affect the Company's recorded deferred tax assets and liabilities in the future. The Company's tax liabilities involve dealing with uncertainties in the application of complex tax laws and regulations in a multitude of jurisdictions across its global operations. Management will account for any such changes or factors in the period in which such law changes are enacted.

Differences between income taxes computed by applying the statutory federal income tax rate to income (loss) before income taxes and the provision (benefit) for income taxes consist of the following (in thousands):

	Years Ended
	December 27, 2014			December 28, 2013			December 29, 2012
Income taxes computed at U.S. statutory rate	$	(4,067	)	$	(8,247	)	$	1,616
State income taxes	254			(324		)	(116		)
Foreign tax rate differential	(172		)	9			(275		)
Change in valuation allowance	23,126			—			—
Domestic production activities deduction	—			—			(17		)
Tax credits	(561		)	(1,377		)	—
Benefit of tax elections	—			—			(1,309		)
Liabilities for uncertain tax positions	118			111			66
Other, net	799			409			189
Provision (benefit) for income taxes	$	19,497		$	(9,419	)	$	154

As of December 27, 2014, approximately $1.0 million of undistributed earnings from non-U.S. operations held by the Company's foreign subsidiaries are designated as indefinitely reinvested outside the U.S. Accordingly, no additional U.S. income taxes or additional foreign withholding taxes have been provided thereon. The amount of unrecognized deferred tax liability related to these earnings would be immaterial.

The Company recognizes tax liabilities for uncertain tax positions and adjust these liabilities when its judgment changes as a result of the evaluation of new information not previously available. Due to the complexity of some of these uncertainties, the ultimate resolution may result in a payment that is materially different from the Company's current estimate of the tax liabilities. These differences will be reflected as increases or decreases to income tax expense in the period in which they are determined.

The accounting for uncertainty in income taxes recognized in an enterprise's financial statements prescribes a recognition threshold and measurement attribute for the financial statement recognition and measurement of a tax position taken or expected to be taken on a tax return, and the derecognition of tax benefits, classification on the balance sheet, interest and penalties, accounting in interim periods, disclosure, and transition.

A reconciliation of the beginning and ending amount of unrecognized tax benefits is as follows (in thousands):

	Years Ended
	December 27, 2014			December 28, 2013			December 29, 2012
Unrecognized tax benefits - beginning of the period	$	4,436		$	3,464		$	3,599
Foreign currency movements	—			—			—
Gross increases-tax positions in prior period	655			305			—
Gross decreases-tax positions in prior period	(123		)	—			(183		)
Gross increases-current-period tax positions	1,541			688			265
Lapse of statute of limitations	(67		)	(21		)	(217		)
Unrecognized tax benefits - end of the period	$	6,442		$	4,436		$	3,464

The unrecognized tax benefit at December 27, 2014 was $6.4 million, of which $0.7 million would impact the effective tax rate if recognized. The Company accrues interest and penalties related to unrecognized tax benefits in its provision for income taxes. The total amount of penalties and interest were not material as of December 27, 2014, December 28, 2013 and December 29, 2012. The Company does not expect a material change in its unrecognized tax benefits within the next 12 months.

The Company is subject to taxation in the U.S. and various states including California, and foreign jurisdictions including Korea, Japan, Taiwan, and China. Due to tax attribute carry-forwards, the Company is subject to examination for tax years 2003 forward for U.S. tax purposes. The Company was also subject to examination in various states for tax years 2002 forward. The Company is subject to examination for tax years 2007 forward for various foreign jurisdictions.

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Segment, Geographic, Product and Significant Customer Information (Tables)

12 Months Ended

Dec. 27, 2014

Segment Reporting [Abstract]

Total net revenue

The following tables summarize total net revenues and long-lived assets (excluding intangible assets) attributed to significant countries (in thousands):

	Years Ended
	December 27, 2014		December 28, 2013		December 29, 2012
Total net revenues (1):
United States	$	36,123	47,019		44,811
South Korea	41,381		34,873		79,555
China	28,702		13,063		5,323
Taiwan	19,790		9,645		16,757
Other	40,447		39,707		36,435
Total net revenues	$	166,443	$	144,307	$	182,881

 ⁽¹⁾Net revenues are attributed to countries based on the customer's deployment and service locations of systems.

Long-lived tangible assets

Long-lived tangible assets:	December 27, 2014		December 28, 2013
United States	$	47,729	$	44,775
Japan	71		125
South Korea	284		445
All Other	1,549		2,094
Total long-lived tangible assets	$	49,633	$	47,439

Revenues by product type

Revenues by product type were as follows (in thousands):

	Years Ended
	December 27, 2014		December 28, 2013		December 29, 2012
Automated Systems	$	108,768	$	82,924	$	119,451
Integrated Systems	15,334		11,412		12,379
Materials Characterization Systems	9,487		13,066		11,997
Total product revenues	$	133,589	$	107,402	$	143,827

Customers accounted for 10% or more of total accounts receivable

The following customers accounted for 10% or more of total accounts receivable, net:

	At
	December 27, 2014		December 28, 2013		December 29, 2012
Samsung Electronics Co. Ltd.	10.0	%	27.4	%	***
Intel Corporation	***		14.4	%	12.3	%
Taiwan Semiconductor Manufacturing Company Limited	20.2	%	12.1	%	17.3	%
SK Hynix	***		21.8	%	***
Micron	23.7	%	***		***
GLOBALFOUNDRIES	10.2	%	***		***

*** The customer accounted for less than 10% of total accounts receivable, net, as of that period end.

Customers accounted for 10% or more of total revenue

The following customers accounted for 10% or more of total net revenue:

	Years Ended
	December 27, 2014		December 28, 2013		December 29, 2012
Samsung Electronics Co. Ltd.	26.9	%	14.4	%	27.8	%
Intel Corporation	12.6	%	30.0	%	22.3	%
SK Hynix	12.2	%	18.4	%	16.5	%
Micron	10.4	%	***		***

*** The customer accounted for less than 10% of total net revenue during the period.

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Schedule II - VALUATION AND QUALIFYING ACCOUNTS

12 Months Ended

Dec. 27, 2014

Valuation and Qualifying Accounts [Abstract]

Schedule II - VALUATION AND QUALIFYING ACCOUNTS

VALUATION AND QUALIFYING ACCOUNTS

Our allowance for doubtful accounts receivable consists of the following (in thousands):

Year Ended	Balance at beginning of period		Charged to costs and expenses			Deductions – write-offs of accounts			Balance at end of period
December 27, 2014	$	293	$	(40	)	$	—		$	253
December 28, 2013	$	82	$	255		$	(44	)	$	293
December 29, 2012	$	117	$	(3	)	$	(32	)	$	82

Our valuation allowance for deferred tax assets consists of the following (in thousands):

Year Ended	Balance at beginning of period		Charged to costs and expenses		Deductions – write-offs of accounts		Balance at end of period
December 27, 2014	$	11,665	$	24,170	$	—	$	35,835
December 28, 2013	$	10,229	$	1,436	$	—	$	11,665
December 29, 2012	$	8,142	$	2,087	$	—	$	10,229

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Income Taxes - Income (Loss) Before Provision for Income Taxes (Details) (USD $) In Thousands, unless otherwise specified	12 Months Ended
	Dec. 27, 2014	Dec. 28, 2013	Dec. 29, 2012
Income Tax Disclosure [Abstract]
Domestic	$ (15,691)	$ (26,447)	$ 1,887
Foreign	4,070	2,882	2,732
Income (loss) before income taxes	$ (11,621)	$ (23,565)	$ 4,619

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Consolidated Statements of Cash Flows (USD $) In Thousands, unless otherwise specified	12 Months Ended
	Dec. 27, 2014	Dec. 28, 2013	Dec. 29, 2012
Cash flows from operating activities:
Net income (loss)	$ (31,118)	$ (14,146)	$ 4,465
Reconciliation of net income (loss) to net cash provided by (used in) operating activities:
Depreciation and amortization	9,767	8,787	8,137
Stock-based compensation	6,752	7,674	5,890
Excess tax benefit from equity awards	0	53	(910)
Loss on disposal of fixed assets	249	177	303
Inventory write-down	2,897	7,579	3,519
Deferred income taxes	17,915	(6,889)	2,752
Changes in fair value of contingent payments to Zygo Corporation	201	1,325	129
Changes in assets and liabilities:
Accounts receivable	3,861	(10,376)	7,733
Inventories	(7,173)	(7,024)	1,383
Inventories-delivered systems	4,988	(4,627)	(758)
Prepaid expenses and other	2,303	(1,855)	1,114
Accounts payable, accrued and other liabilities	1,790	4,840	(12,567)
Deferred revenue	(12,855)	12,717	2,472
Income taxes payable	(212)	(666)	346
Net cash provided by (used in) operating activities	(635)	(2,431)	24,008
Cash flows from investing activities:
Escrow payment received related to Nanda acquisition	0	0	508
Sales of marketable securities	0	0	3,000
Maturities of marketable securities	38,839	47,089	8,336
Purchases of marketable securities	(41,100)	(49,182)	(58,647)
Purchases of property, plant and equipment	(5,792)	(5,689)	(4,990)
Net cash used in investing activities	(8,053)	(7,782)	(51,793)
Cash flows from financing activities:
Payments to Zygo Corporation related to acquisition	(587)	(1,004)	(300)
Repayments of debt obligations	0	(5,224)	(2,210)
Proceeds from sale of shares under employee stock option plans and purchase plan	5,958	4,967	3,913
Excess tax benefit from equity awards	0	(53)	910
Taxes paid on net issuance of stock awards	(702)	(1,181)	(618)
Repurchases of common stock	(5,344)	(5,000)	(8,504)
Net cash used in financing activities	(675)	(7,495)	(6,809)
Effect of exchange rate changes on cash and cash equivalents	(726)	(442)	(190)
Net decrease in cash and cash equivalents	(10,089)	(18,150)	(34,784)
Cash and cash equivalents, beginning of period	44,765	62,915	97,699
Cash and cash equivalents, end of period	34,676	44,765	62,915
Supplemental disclosure of cash flow information:
Cash paid for interest	0	232	522
Cash paid for income taxes, net	861	313	5,113
Supplemental disclosure of non-cash investing activities:
Transfer of inventory to property, plant and equipment, net	$ 3,275	$ 3,145	$ 0

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Consolidated Balance Sheets (Parenthetical) (USD $) In Thousands, except Share data, unless otherwise specified	Dec. 27, 2014	Dec. 28, 2013
Statement of Financial Position [Abstract]
Allowances for doubtful accounts	$ 253	$ 293
Preferred stock, par value (in dollars per share)	$ 0.001	$ 0.001
Preferred stock, shares authorized	3,000,000	3,000,000
Preferred stock, shares issued	0	0
Preferred stock, shares outstanding	0	0
Common stock, par value (in dollars per share)	$ 0.001	$ 0.001
Common stock, shares authorized	47,000,000	47,000,000
Common stock, shares issued	23,813,729	23,537,275
Common stock, shares outstanding	23,813,729	23,537,275

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Line of Credit and Debt Obligations

12 Months Ended

Dec. 27, 2014

Debt Disclosure [Abstract]

Line of Credit and Debt Obligations

Line of Credit and Debt Obligations

Line of Credit - On May 30, 2014, the Company amended its revolving line of credit facility to (i) extend the maturity date of such facility by two years to May 30, 2016, and (ii) to increase the minimum amount available to borrow to $12.0 million.

The instrument governing the line of credit facility includes certain financial covenants regarding tangible net worth. The revolving line of credit agreement includes a provision for the issuance of commercial or standby letters of credit by the bank on behalf of the Company. The value of all letters of credit outstanding reduces the total line of credit available. The revolving line of credit is collateralized by a blanket lien on all of the Company’s domestic assets excluding intellectual property and real estate. The minimum borrowing interest rate is 3.00% per annum. Borrowing is limited to the lesser of (a) $12.0 million plus the borrowing base, or (b) $20.0 million. The total borrowing base available as of December 27, 2014 was $18.8 million. As of December 27, 2014, the Company was not in breach of any restrictive covenants in connection with this line of credit. There were no outstanding amounts drawn on this facility as of December 27, 2014. Although management has no current plans to request advances under this credit facility, the Company may use the proceeds of any future borrowing for general corporate purposes, future acquisitions or expansion of the Company's business.

Mortgage Loan - On July 18, 2013, the Company repaid $4.8 million of the balance of a mortgage loan, secured, in part, by a lien on and security interest in the building and land comprising the Company’s principal offices in Milpitas, California and representing the entire outstanding principal balance of the loan as well as all accrued interest. The Company did not incur any fees associated with the prepayment of the loan. At December 28, 2013, there was no outstanding balance on the loan.

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Document and Entity Information (USD $) In Millions, except Share data, unless otherwise specified	12 Months Ended
	Dec. 27, 2014	Feb. 18, 2015	Jun. 28, 2014
Document and Entity Information [Abstract]
Entity Registrant Name	NANOMETRICS INC
Entity Central Index Key	0000704532
Document Type	10-K
Document Period End Date	Dec. 27, 2014
Amendment Flag	false
Document Fiscal Year Focus	2014
Document Fiscal Period Focus	FY
Current Fiscal Year End Date	--12-27
Entity Filer Category	Accelerated Filer
Entity Common Stock, Shares Outstanding		23,853,009
Entity Well-known Seasoned Issuer	No
Entity Voluntary Filers	No
Entity Current Reporting Status	Yes
Entity Public Float			$ 441.4

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Commitments and Contingencies

12 Months Ended

Dec. 27, 2014

Commitments and Contingencies Disclosure [Abstract]

Commitments and Contingencies

Commitments and Contingencies

Intellectual Property Indemnification Obligations – The Company will, from time to time, in the normal course of business, agree to indemnify certain customers, vendors or others against third party claims that Nanometrics’ products, when used for their intended purpose(s), or the Company's intellectual property, infringe the intellectual property rights of such third parties or other claims made against parties with whom it enters into contractual relationships. It is not possible to determine the maximum potential amount of liability under these indemnification obligations due to the limited history of prior indemnification claims and the unique facts and circumstances that are likely to be involved in each particular claim. Historically, the Company has not made payments under these obligations and believes that the estimated fair value of these agreements is immaterial. Accordingly, no liabilities have been recorded for these obligations in the accompanying consolidated balance sheets as of December 27, 2014 and December 28, 2013.

On January 13, 2012, the Company entered into a settlement and limited patent cross license agreement with KLA-Tencor ("KLA-Tencor") to resolve all existing patent litigation between the parties. Pursuant to the settlement agreement, the Company agreed to make a one-time payment of $2.5 million to KLA-Tencor. The settlement included other features such as limited cross-licenses of the patents that were subject to the litigation. The Company determined the principal benefit of the settlement was the economic benefit of avoiding litigation expenses and that the value attributable to the other settlement features was de minimus. As a result, the Company recorded a $2.5 million charge to legal settlement in operating expense in 2011. The payment was made in 2012.

The Company maintains certain open inventory purchase agreements with its suppliers to ensure a smooth and continuous supply availability for key components. The Company's liability under these purchase commitments is generally restricted to a forecasted time-horizon as mutually agreed upon between the parties. This forecasted time-horizon can vary among different suppliers. The Company estimates its open inventory purchase commitment as of December 27, 2014 was approximately $29.5 million. Actual expenditures will vary based upon the volume of the transactions and length of contractual service provided. In addition, the amounts paid under these arrangements may be less in the event that the arrangements are renegotiated or cancelled.

The Company leases facilities and certain equipment under non-cancelable operating leases. Rent expense, which is recorded on a straight-line basis over the term of the respective lease, for 2014, 2013 and 2012, was approximately $2.1 million, $2.0 million and $2.2 million, respectively. Future minimum lease payments under its operating leases are as follows (in thousands):

	Operating Leases
2015	$	1,468
2016	1,083
2017	570
2018	294
2019	195
Total	$	3,610

On June 17, 2009, the Company announced a strategic business partnership with Zygo Corporation whereby it has purchased inventory and certain other assets from Zygo Corporation, and the two companies entered into a supply agreement. The Company will make payments to Zygo Corporation (with an estimated present value of $2.4 million and an estimated future value of $2.9 million as of December 27, 2014) over a period of time as acquired inventory is sold and other aspects of the supply agreement are executed.

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Consolidated Statements of Operations (USD $) In Thousands, except Per Share data, unless otherwise specified	12 Months Ended
	Dec. 27, 2014	Dec. 28, 2013	Dec. 29, 2012
Net revenues:
Products	$ 133,589	$ 107,402	$ 143,827
Service	32,854	36,905	39,054
Total net revenues	166,443	144,307	182,881
Costs of net revenues:
Cost of products	68,812	59,509	75,878
Cost of service	19,086	19,489	20,526
Amortization of intangible assets	2,723	2,633	2,549
Total costs of net revenues	90,621	81,631	98,953
Gross profit	75,822	62,676	83,928
Operating expenses:
Research and development	33,776	32,714	29,585
Selling	27,033	27,129	26,457
General and administrative	23,980	22,101	21,632
Amortization of intangible assets	420	701	776
Restructuring charge	2,266	1,740	0
Total operating expenses	87,475	84,385	78,450
Income (loss) from operations	(11,653)	(21,709)	5,478
Other (income) expense:
Interest income	47	62	133
Interest expense	(389)	(651)	(1,040)
Other income (expense), net	374	(1,267)	48
Total other income (expense), net	32	(1,856)	(859)
Income (loss) before income taxes	(11,621)	(23,565)	4,619
Provision for (benefit from) income taxes	19,497	(9,419)	154
Net income (loss)	$ (31,118)	$ (14,146)	$ 4,465
Net income (loss) per share:
Basic (in dollars per share)	$ (1.30)	$ (0.61)	$ 0.19
Diluted (in dollars per share)	$ (1.30)	$ (0.61)	$ 0.19
Weighted average shares used in per share calculation:
Basic (in shares)	23,958	23,290	23,358
Diluted (in shares)	23,958	23,290	23,845

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Accounts Receivable

12 Months Ended

Dec. 27, 2014

Receivables [Abstract]

Accounts Receivable

Accounts Receivable

The Company maintains arrangements under which eligible accounts receivable in Japan are sold without recourse to unrelated third-party financial institutions. These receivables were not included in the consolidated balance sheets as the criteria for sale treatment had been met. After a transfer of financial assets, an entity stops recognizing the financial assets when control has been surrendered. The agreement met the criteria of a true sale of these assets since the acquiring party retained the title to these receivables and had assumed the risk that the receivables will be collectible. The Company pays administrative fees as well as interest ranging from 1.17% to 1.68% based on the anticipated length of time between the date the sale is consummated and the expected collection date of the receivables sold. The Company sold $7.7 million and $6.3 million of receivables during fiscal years ended December 27, 2014 and December 28, 2013, respectively. There were no material gains or losses on the sale of such receivables. There were no amounts due from such third party financial institutions at December 27, 2014 and December 28, 2013.

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Cash and Investments

12 Months Ended

Dec. 27, 2014

Investments, Debt and Equity Securities [Abstract]

Cash and Investments

Cash and Investments

The following table presents cash, cash equivalents, and available-for-sale investments as of the following dates (in thousands):

	December 27, 2014
	Amortized Cost		Gross Unrealized Gains		Gross Unrealized Losses			Estimated Fair Market Value
Cash	$	34,066	—		$	—		$	34,066
Cash equivalents:
Money market funds	610		—		—			610
Marketable securities:
Commercial paper	805		—		—			805
U.S. Treasury securities	2,498				(1		)	2,497
U.S. Government agency securities	20,556		1		(19		)	20,538
Municipal securities	3,755		1		(7		)	3,749
Corporate debt securities	21,722		1		(26		)	21,697
Total cash, cash equivalents, and marketable securities	$	84,012	$	3	$	(53	)	$	83,962
	December 28, 2013
	Amortized Cost		Gross Unrealized Gains		Gross Unrealized Losses			Estimated Fair Market Value
Cash	$	43,139	$	—	$	—		$	43,139
Cash equivalents:
Money market funds	876		—		—			876
Commercial paper	750		—		—			750
Marketable securities:
U.S. Treasury Securities	5,036		—		—			5,036
U.S. Government agency securities	11,980		4		(4		)	11,980
Municipal securities	9,756		11		(4		)	9,763
Corporate debt securities	21,316		7		(5		)	21,318
Total cash, cash equivalents, and marketable securities	$	92,853	$	22	$	(13	)	$	92,862

Available-for-sale marketable securities, readily convertible to cash, with maturity dates of 90 days or less are classified as cash equivalents, while those with maturity dates greater than 90 days are classified as marketable securities within short-term assets. All marketable securities as of December 27, 2014 and December 28, 2013, were available-for-sale and reported at fair value based on the estimated or quoted market prices as of the balance sheet date. Unrealized gains or losses, net of tax effect, are recorded in accumulated other comprehensive income (loss) within stockholders' equity. Both the gross unrealized gains and gross unrealized losses for the fiscal years ended December 27, 2014, December 28, 2013 and December 29, 2012 were insignificant and no marketable securities had other than temporary impairment. All marketable securities as of December 27, 2014 and December 28, 2013, had maturity dates of less than two years and were not invested in foreign entities.

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Segment, Geographic, Product and Significant Customer Information

12 Months Ended

Dec. 27, 2014

Segment Reporting [Abstract]

Segment, Geographic, Product and Significant Customer Information

Segment, Geographic, Product and Significant Customer Information

The Company has one operating segment, which is the sale, design, manufacture, marketing and support of thin film and optical critical dimension systems. The Chief Executive Officer has been identified as the Chief Operating Decision Maker (“CODM”) because he has the final authority over resource allocation decisions and performance assessment. The CODM does not receive discrete financial information about individual components of the Company's business. For the years ended December 27, 2014, December 28, 2013, and December 29, 2012, the Company recorded revenue from customers primarily in the United States, Asia and Europe. The following tables summarize total net revenues and long-lived assets (excluding intangible assets) attributed to significant countries (in thousands):

	Years Ended
	December 27, 2014		December 28, 2013		December 29, 2012
Total net revenues (1):
United States	$	36,123	47,019		44,811
South Korea	41,381		34,873		79,555
China	28,702		13,063		5,323
Taiwan	19,790		9,645		16,757
Other	40,447		39,707		36,435
Total net revenues	$	166,443	$	144,307	$	182,881

 ⁽¹⁾Net revenues are attributed to countries based on the customer's deployment and service locations of systems.

Long-lived tangible assets:	December 27, 2014		December 28, 2013
United States	$	47,729	$	44,775
Japan	71		125
South Korea	284		445
All Other	1,549		2,094
Total long-lived tangible assets	$	49,633	$	47,439

The Company’s product lines differ primarily based on the environment in which the systems will be used. Automated systems are used primarily in high-volume production environments. Materials characterization products are primarily used to measure the composition, band gap, structure, and other physical and electrical properties of semiconducting materials for discrete electronic industry, high brightness LED and solar/photovoltaic structures in both development and high volume environments. Integrated systems are installed inside wafer processing equipment to provide near real-time measurements for improving process control and increasing throughput. Revenues by product type were as follows (in thousands):

	Years Ended
	December 27, 2014		December 28, 2013		December 29, 2012
Automated Systems	$	108,768	$	82,924	$	119,451
Integrated Systems	15,334		11,412		12,379
Materials Characterization Systems	9,487		13,066		11,997
Total product revenues	$	133,589	$	107,402	$	143,827

The following customers accounted for 10% or more of total accounts receivable, net:

	At
	December 27, 2014		December 28, 2013		December 29, 2012
Samsung Electronics Co. Ltd.	10.0	%	27.4	%	***
Intel Corporation	***		14.4	%	12.3	%
Taiwan Semiconductor Manufacturing Company Limited	20.2	%	12.1	%	17.3	%
SK Hynix	***		21.8	%	***
Micron	23.7	%	***		***
GLOBALFOUNDRIES	10.2	%	***		***

*** The customer accounted for less than 10% of total accounts receivable, net, as of that period end.

The following customers accounted for 10% or more of total net revenue:

	Years Ended
	December 27, 2014		December 28, 2013		December 29, 2012
Samsung Electronics Co. Ltd.	26.9	%	14.4	%	27.8	%
Intel Corporation	12.6	%	30.0	%	22.3	%
SK Hynix	12.2	%	18.4	%	16.5	%
Micron	10.4	%	***		***

*** The customer accounted for less than 10% of total net revenue during the period.

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Net Income (Loss) Per Share

12 Months Ended

Dec. 27, 2014

Earnings Per Share [Abstract]

Net Income (Loss) Per Share

Net Income (Loss) Per Share

The Company presents both basic and diluted net income (loss) per share on the face of its consolidated statements of operations. Basic net income (loss) per share excludes the effect of potentially dilutive shares and is computed by dividing net income (loss) by the weighted-average number of shares of common stock outstanding for the period. Diluted net income (loss) per share is computed using the weighted-average number of shares of common stock outstanding for the period plus the effect to all potentially dilutive common shares outstanding during the period, including contingently issuable shares and certain stock options, calculated using the treasury stock method. A reconciliation of the share denominator of the basic and diluted net income (loss) per share computations is as follows (in thousands):

	Years Ended
	December 27, 2014	December 28, 2013	December 29, 2012
Weighted average common shares outstanding used in basic net income (loss) per share calculation	23,958	23,290	23,358
Potential dilutive common stock equivalents, using treasury stock method	—	—	487
Weighted average shares used in diluted net income (loss) per share calculation	23,958	23,290	23,845

For the years ended December 27, 2014 and December 28, 2013 potential dilutive common stock equivalents of 0.4 million shares and 0.4 million shares, respectively, were anti-dilutive and therefore were excluded from the calculation due to the net loss positions. For the year ended December 29, 2012, the Company had securities outstanding which could potentially dilute basic earnings per share in the future and weighted average common share equivalents consisting of stock options included in the calculation of diluted net income per share were 0.5 million shares.

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Warranties

12 Months Ended

Dec. 27, 2014

Product Warranties Disclosures [Abstract]

Warranties

Warranties

Product Warranty – The Company sells the majority of its products with a 12 months repair or replacement warranty from the date of acceptance or shipment date. The Company provides an accrual for estimated future warranty costs based upon the historical relationship of warranty costs to the cost of products sold. The estimated future warranty obligations related to product sales are recorded in the period in which the related revenue is recognized. The estimated future warranty obligations are affected by the warranty periods, sales volumes, product failure rates, material usage, and labor and replacement costs incurred in correcting a product failure. If actual product failure rates, material usage, labor or replacement costs were to differ from the Company’s estimates, revisions to the estimated warranty obligations would be required. For new product introductions where limited or no historical information exists, the Company may use warranty information from other previous product introductions to guide it in estimating its warranty accrual. The warranty accrual represents the best estimate of the amount necessary to settle future and existing claims on products sold as of the balance sheet date. The Company periodically assesses the adequacy of its reported warranty reserve and adjusts such amounts in accordance with changes in these factors.

Components of the warranty accrual, which were included in the accompanying consolidated balance sheets with other current liabilities, were as follows (in thousands):

	Years Ended
	December 27, 2014			December 28, 2013
Balance as of beginning of period	$	3,426		$	4,203
Accruals for warranties issued during period	5,987			4,176
Settlements during the period	(6,460		)	(4,953		)
Balance as of end of period	$	2,953		$	3,426

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Stockholders' Equity and Stock-Based Compensation - Option Plans (Details)	Dec. 27, 2014	May 24, 2013
2005 Equity Incentive Plan [Member]
Share-based Compensation Arrangement by Share-based Payment Award [Line Items]
Shares Authorized	7,292,594	2,600,000
2002 Non-statutory Stock Option Plan [Member]
Share-based Compensation Arrangement by Share-based Payment Award [Line Items]
Shares Authorized	1,200,000
2000 Employee Stock Option Plan [Member]
Share-based Compensation Arrangement by Share-based Payment Award [Line Items]
Shares Authorized	2,450,000
2000 Director Stock Option Plan [Member]
Share-based Compensation Arrangement by Share-based Payment Award [Line Items]
Shares Authorized	250,000
Accent Optical Technologies, Inc. Stock Incentive Plan [Member]
Share-based Compensation Arrangement by Share-based Payment Award [Line Items]
Shares Authorized	205,003

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Financial Statement Components

12 Months Ended

Dec. 27, 2014

Organization, Consolidation and Presentation of Financial Statements [Abstract]

Financial Statement Components

Financial Statement Components

The following tables provide details of selected financial statement components as of the following dates (in thousands):

Consolidated Balance Sheets
	At
	December 27, 2014			December 28, 2013
Inventories:
Raw materials and sub-assemblies	$	19,463		$	19,655
Work in process	7,723			7,597
Finished goods	7,919			7,268
Inventories	35,105			34,520
Inventories-delivered systems	1,912			6,901
Total inventories	$	37,017		$	41,421
Property, plant and equipment, net(1):
Land	$	15,572		$	15,569
Building and improvements	19,641			19,403
Machinery and equipment	29,456			27,820
Furniture and fixtures	2,225			2,308
Software	7,942			1,851
Capital in progress	3,512			5,833
Total property, plant and equipment, gross	78,348			72,784
Accumulated depreciation and amortization	(28,715		)	(25,345		)
Total property, plant and equipment, net	$	49,633		$	47,439
(1)Total depreciation and amortization expense for the years ended December 27, 2014, December 28, 2013, and December 29, 2012 was $6.6 million, $5.4 million, and $4.8 million, respectively.
Other current liabilities:
Accrued warranty	$	2,953		$	3,426
Accrued restructuring	997			—
Accrued professional services	778			545
Fair value of current portion of contingent payments to Zygo Corporation related to acquisition	1,385			1,344
Other	2,152			2,678
Total other current liabilities	$	8,265		$	7,993

Components of Accumulated Other Comprehensive Income (Loss)

	Years Ended
	Foreign Currency Translations			Defined Benefit Pension Plans			Unrealized Income (Loss) on Investment			Accumulated Other Comprehensive Income
Balance as of December 29, 2012	$	1,453		$	(179	)	$	(2	)	$	1,272
Current period change	(818		)	151			7			(660		)
Balance as of December 28, 2013	635			(28		)	5			612
Current period change	(3,239		)	(106		)	(36		)	(3,381		)
Balance as of December 27, 2014	$	(2,604	)	$	(134	)	$	(31	)	$	(2,769	)

The items above, except for unrealized income (loss) on investment, did not impact the Company’s income tax provision. The amounts reclassified from each component of accumulated other comprehensive income into income statement line items were insignificant.

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Goodwill and Intangible Assets

12 Months Ended

Dec. 27, 2014

Goodwill and Intangible Assets Disclosure [Abstract]

Goodwill and Intangible Assets

Goodwill and Intangible Assets

The following table summarizes the activity in the Company’s goodwill during the years ended December 27, 2014 and December 28, 2013, respectively (in thousands):

Balance as of December 29, 2012	$	11,352
Foreign currency movements	391
Balance as of December 28, 2013	11,743
Foreign currency movements	(1,249		)
Balance as of December 27, 2014	$	10,494

There were no business acquisitions made by the Company during fiscal years 2014 and 2013.

Goodwill Impairment and Long-lived Asset Impairment

The Company’s impairment review process is completed during the fourth quarter of each year, or whenever events or circumstances occur that indicate that an impairment may have occurred. The goodwill impairment assessment involves three tests, Step 0, Step 1 and Step 2. The Company performs a Step 0 test, which involves an initial qualitative assessment to

determine whether it is more likely than not that the fair value of a reporting unit is less than its carrying value. If, after assessing the qualitative factors, the Company determines that it is more likely than not that the fair value of a reporting unit is less than its carrying value, then performing the two-step impairment test is necessary. Otherwise, no further testing is necessary.

The Company completed its annual goodwill impairment assessment during the fourth quarter of 2014 by first performing a Step 0 qualitative assessment. As part of this assessment, the Company considered the trading value of the Company's stock, the industry trends, and the Company's sales forecast and products plans. The Company concluded that it was more likely than not that the fair value was more than the carrying values of the Company's reporting unit and therefore did not proceed to the Step 1 goodwill impairment test.

The process of evaluating the potential impairment of long-lived assets is highly subjective and requires significant judgment. In estimating the fair value of these assets, the Company made estimates and judgments about future revenues and cash flows. The Company’s forecasts were based on assumptions that are consistent with the plans and estimates the Company is using to manage its business. Changes in these estimates could change the Company’s conclusion regarding impairment of the long-lived assets and potentially result in future impairment charges for all or a portion of their balance at December 27,2014. The Company did not record any impairment charges related to goodwill in fiscal year 2014.

The Company assesses if there have been triggers that may require it to evaluate the reasonableness of the remaining estimated useful lives of its intangible assets. No such triggers were identified during fiscal year 2014.

Finite-lived intangible assets are recorded at cost, less accumulated amortization. Finite-lived intangible assets as of December 27, 2014 and December 28, 2013 consisted of the following (in thousands):

	December 27, 2014
	Adjusted cost		Accumulated amortization			Net carrying amount
Developed technology	$	16,950	$	(12,991	)	$	3,959
Customer relationships	9,461		(9,449		)	12
Brand names	1,927		(1,802		)	125
Patented technology	2,252		(2,054		)	198
Trademark	80		(80		)	—
Total	$	30,670	$	(26,376	)	$	4,294

	December 28, 2013
	Adjusted cost		Accumulated amortization			Net carrying amount
Developed technology	$	18,095	$	(11,032	)	$	7,063
Customer relationships	9,573		(9,263		)	310
Brand names	1,927		(1,700		)	227
Patented technology	2,252		(1,988		)	264
Trademark	80		(80		)	—
Total	$	31,927	$	(24,063	)	$	7,864

The amortization of finite-lived intangibles is computed using the straight-line method. Estimated lives of finite-lived intangibles range from two to ten years. Total amortization expense for the fiscal years ended December 27, 2014, December 28, 2013 and December 29, 2012 was $3.1 million, $3.3 million and $3.3 million, respectively.

There were no impairment charges related to intangible assets recorded during the year ended December 27, 2014.

The estimated future amortization expense of finite intangible assets as of December 27, 2014 is as follows (in thousands):

Fiscal Years	Amounts
2015	$	2,199
2016	1,683
2017	206
2018	140
2019	66
Total future amortization expense	$	4,294

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Restructuring

12 Months Ended

Dec. 27, 2014

Restructuring and Related Activities [Abstract]

Restructuring

Restructuring

The Company recorded a restructuring charge of approximately $2.3 million in 2014 as a result of its decision to consolidate and reorganize certain of its operations, primarily in the U.K. This amount includes charges primarily related to employee severance, other expenses (primarily vendor contract termination costs) and early termination costs of a facility lease due to expire in 2017 in the amounts of $1.0 million, $0.4 million and $0.9 million, respectively. The Company expects to complete this restructuring plan by March 2015. Other related costs will be recognized as incurred.

The Company recorded a restructuring charge of $1.7 million in 2013 as a result of its decision to consolidate a portion of its European operations. This amount includes charges primarily related to employee severance and non-cash acceleration of vesting of RSUs in the amount of $0.8 million and $0.9 million, respectively. As of December 28, 2013, the Company had completed and settled in full all cash payments related to employee severance and non-cash acceleration of vesting of RSUs.

As of December 27, 2014 and December 28, 2013, respectively, the components of the Company's restructuring reserves were included in other current liabilities and were as follows (in thousands):

	Employee severance and benefits			Facility termination costs			Other			Total
Balance as of December 28, 2013	$	—		$	—		$	—		$	—
Charges	1,016			899			351			2,266
Cash Payments	(780		)	(201		)	(288		)	(1,269		)
Balance as of December 27, 2014	$	236		$	698		$	63		$	997

	Employee severance and benefits			Facility termination costs		Other		Total
Balance as of December 29, 2012	$	—		$	—	$	—	$	—
Charges	1,740			—		—		1,740
Cash Payments	(844		)	—		—		(844		)
Non-cash items	(896		)	—		—		(896		)
Balance as of December 28, 2013	$	—		$	—	$	—	$	—

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Stockholders' Equity and Stock-Based Compensation - Ranges of Outstanding and Exercisable Options (Details) (USD $)	12 Months Ended
	Dec. 27, 2014	Dec. 28, 2013
Share-based Compensation, Shares Authorized under Stock Option Plans, Exercise Price Range [Line Items]
Options Outstanding, Number Outstanding (in shares)	1,382,993	1,909,039
Options Outstanding, Weighted Average Remaining Contractual Life (Years)	3 years 4 months 28 days	4 years 0 months 7 days
Options Outstanding, Weighted Average Exercise Price (in dollars per share)	$ 13.92	$ 13.22
Options Exercisable, Number Exercisable (in shares)	1,052,110
Options Exercisable, Weighted Average Exercise Price (in dollars per share)	$ 13.15
$0.93-$7.50 [Member]
Share-based Compensation, Shares Authorized under Stock Option Plans, Exercise Price Range [Line Items]
Exercise Price, Lower Range Limit	$ 0.93
Exercise Price, Upper Range Limit	$ 7.50
Options Outstanding, Number Outstanding (in shares)	156,237
Options Outstanding, Weighted Average Remaining Contractual Life (Years)	1 year 3 months
Options Outstanding, Weighted Average Exercise Price (in dollars per share)	$ 3.67
Options Exercisable, Number Exercisable (in shares)	156,237
Options Exercisable, Weighted Average Exercise Price (in dollars per share)	$ 3.67
$8.81-$11.37 [Member]
Share-based Compensation, Shares Authorized under Stock Option Plans, Exercise Price Range [Line Items]
Exercise Price, Lower Range Limit	$ 8.81
Exercise Price, Upper Range Limit	$ 11.37
Options Outstanding, Number Outstanding (in shares)	237,214
Options Outstanding, Weighted Average Remaining Contractual Life (Years)	2 years 6 months 25 days
Options Outstanding, Weighted Average Exercise Price (in dollars per share)	$ 10.79
Options Exercisable, Number Exercisable (in shares)	237,214
Options Exercisable, Weighted Average Exercise Price (in dollars per share)	$ 10.79
$11.63-$14.80 [Member]
Share-based Compensation, Shares Authorized under Stock Option Plans, Exercise Price Range [Line Items]
Exercise Price, Lower Range Limit	$ 11.63
Exercise Price, Upper Range Limit	$ 14.80
Options Outstanding, Number Outstanding (in shares)	146,135
Options Outstanding, Weighted Average Remaining Contractual Life (Years)	3 years 10 months 20 days
Options Outstanding, Weighted Average Exercise Price (in dollars per share)	$ 13.68
Options Exercisable, Number Exercisable (in shares)	99,128
Options Exercisable, Weighted Average Exercise Price (in dollars per share)	$ 13.54
$14.88-$15.74 [Member]
Share-based Compensation, Shares Authorized under Stock Option Plans, Exercise Price Range [Line Items]
Exercise Price, Lower Range Limit	$ 14.88
Exercise Price, Upper Range Limit	$ 15.74
Options Outstanding, Number Outstanding (in shares)	143,682
Options Outstanding, Weighted Average Remaining Contractual Life (Years)	4 years 9 months 18 days
Options Outstanding, Weighted Average Exercise Price (in dollars per share)	$ 15.45
Options Exercisable, Number Exercisable (in shares)	75,875
Options Exercisable, Weighted Average Exercise Price (in dollars per share)	$ 15.47
$15.85-$15.98 [Member]
Share-based Compensation, Shares Authorized under Stock Option Plans, Exercise Price Range [Line Items]
Exercise Price, Lower Range Limit	$ 15.85
Exercise Price, Upper Range Limit	$ 15.98
Options Outstanding, Number Outstanding (in shares)	170,943
Options Outstanding, Weighted Average Remaining Contractual Life (Years)	2 years 11 months 12 days
Options Outstanding, Weighted Average Exercise Price (in dollars per share)	$ 15.92
Options Exercisable, Number Exercisable (in shares)	124,931
Options Exercisable, Weighted Average Exercise Price (in dollars per share)	$ 15.94
$16.00-$16.59 [Member]
Share-based Compensation, Shares Authorized under Stock Option Plans, Exercise Price Range [Line Items]
Exercise Price, Lower Range Limit	$ 16.00
Exercise Price, Upper Range Limit	$ 16.59
Options Outstanding, Number Outstanding (in shares)	45,567
Options Outstanding, Weighted Average Remaining Contractual Life (Years)	5 years 9 months 7 days
Options Outstanding, Weighted Average Exercise Price (in dollars per share)	$ 16.40
Options Exercisable, Number Exercisable (in shares)	9,214
Options Exercisable, Weighted Average Exercise Price (in dollars per share)	$ 16.32
$16.70-$16.70 [Member]
Share-based Compensation, Shares Authorized under Stock Option Plans, Exercise Price Range [Line Items]
Exercise Price, Lower Range Limit	$ 16.70
Exercise Price, Upper Range Limit	$ 16.70
Options Outstanding, Number Outstanding (in shares)	223,432
Options Outstanding, Weighted Average Remaining Contractual Life (Years)	3 years 2 months 19 days
Options Outstanding, Weighted Average Exercise Price (in dollars per share)	$ 16.70
Options Exercisable, Number Exercisable (in shares)	206,048
Options Exercisable, Weighted Average Exercise Price (in dollars per share)	$ 16.70
$16.89-$18.27 [Member]
Share-based Compensation, Shares Authorized under Stock Option Plans, Exercise Price Range [Line Items]
Exercise Price, Lower Range Limit	$ 16.89
Exercise Price, Upper Range Limit	$ 18.27
Options Outstanding, Number Outstanding (in shares)	155,483
Options Outstanding, Weighted Average Remaining Contractual Life (Years)	4 years 5 months 15 days
Options Outstanding, Weighted Average Exercise Price (in dollars per share)	$ 17.54
Options Exercisable, Number Exercisable (in shares)	83,466
Options Exercisable, Weighted Average Exercise Price (in dollars per share)	$ 17.51
$18.51-$19.77 [Member]
Share-based Compensation, Shares Authorized under Stock Option Plans, Exercise Price Range [Line Items]
Exercise Price, Lower Range Limit	$ 18.51
Exercise Price, Upper Range Limit	$ 19.77
Options Outstanding, Number Outstanding (in shares)	99,800
Options Outstanding, Weighted Average Remaining Contractual Life (Years)	4 years 6 months 21 days
Options Outstanding, Weighted Average Exercise Price (in dollars per share)	$ 18.94
Options Exercisable, Number Exercisable (in shares)	55,686
Options Exercisable, Weighted Average Exercise Price (in dollars per share)	$ 19.06
$19.84-$19.84 [Member]
Share-based Compensation, Shares Authorized under Stock Option Plans, Exercise Price Range [Line Items]
Exercise Price, Lower Range Limit	$ 19.84
Exercise Price, Upper Range Limit	$ 19.84
Options Outstanding, Number Outstanding (in shares)	4,500
Options Outstanding, Weighted Average Remaining Contractual Life (Years)	3 years 1 month 20 days
Options Outstanding, Weighted Average Exercise Price (in dollars per share)	$ 19.84
Options Exercisable, Number Exercisable (in shares)	4,311
Options Exercisable, Weighted Average Exercise Price (in dollars per share)	$ 19.84
$0.93-$19.84 [Member]
Share-based Compensation, Shares Authorized under Stock Option Plans, Exercise Price Range [Line Items]
Exercise Price, Lower Range Limit	$ 0.93
Exercise Price, Upper Range Limit	$ 19.84
Options Outstanding, Number Outstanding (in shares)	1,382,993
Options Outstanding, Weighted Average Remaining Contractual Life (Years)	3 years 4 months 27 days
Options Outstanding, Weighted Average Exercise Price (in dollars per share)	$ 13.92
Options Exercisable, Number Exercisable (in shares)	1,052,110
Options Exercisable, Weighted Average Exercise Price (in dollars per share)	$ 13.15

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Stockholders' Equity and Stock-Based Compensation - Stock-based Compensation Expense (Details) (USD $) In Thousands, unless otherwise specified	12 Months Ended
	Dec. 27, 2014	Dec. 28, 2013	Dec. 29, 2012
Employee Service Share-based Compensation, Allocation of Recognized Period Costs [Line Items]
Total stock-based compensation expense related to employee stock options and employee stock purchases	$ 6,752	$ 7,674	$ 5,890
Cost of products [Member]
Employee Service Share-based Compensation, Allocation of Recognized Period Costs [Line Items]
Total stock-based compensation expense related to employee stock options and employee stock purchases	268	207	164
Cost of service [Member]
Employee Service Share-based Compensation, Allocation of Recognized Period Costs [Line Items]
Total stock-based compensation expense related to employee stock options and employee stock purchases	287	278	230
Research and development [Member]
Employee Service Share-based Compensation, Allocation of Recognized Period Costs [Line Items]
Total stock-based compensation expense related to employee stock options and employee stock purchases	1,245	1,478	1,220
Selling [Member]
Employee Service Share-based Compensation, Allocation of Recognized Period Costs [Line Items]
Total stock-based compensation expense related to employee stock options and employee stock purchases	1,642	1,894	1,791
General and administrative [Member]
Employee Service Share-based Compensation, Allocation of Recognized Period Costs [Line Items]
Total stock-based compensation expense related to employee stock options and employee stock purchases	3,243	2,919	2,485
Restructuring [Member]
Employee Service Share-based Compensation, Allocation of Recognized Period Costs [Line Items]
Total stock-based compensation expense related to employee stock options and employee stock purchases	$ 67	$ 898	$ 0

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Stockholders' Equity and Stock-Based Compensation - Summary of Activity of Stock Options (Details) (USD $) In Thousands, except Share data, unless otherwise specified	12 Months Ended
	Dec. 27, 2014	Dec. 28, 2013
Activity of stock option plans [Roll Forward]
Number of Shares Outstanding (Options), Beginning Balance (in shares)	1,909,039
Number of Shares Outstanding (Options), Exercised (in shares)	(409,285)
Number of Shares Outstanding (Options), Granted (in shares)	74,300
Number of Shares Outstanding (Options), Cancelled (in shares)	(191,061)
Number of Shares Outstanding (Options), Ending Balance (in shares)	1,382,993	1,909,039
Number of Shares Outstanding (Options), Exercisable	1,052,110
Weighted average exercise price for stock option plans [Roll Forward]
Weighted Average Exercise Price, Beginning Balance (in dollars per share)	$ 13.22
Weighted Average Exercise Price, Exercised (in dollars per share)	$ 10.45
Weighted Average Exercise Price, Granted (in dollars per share)	$ 17.56
Weighted Average Exercise Price, Cancelled (in dollars per share)	$ 15.74
Weighted Average Exercise Price, Ending Balance (in dollars per share)	$ 13.92	$ 13.22
Weighted Average Exercise Price, Exercisable (in dollars per share)	$ 13.15
Weighed Average Remaining Contractual Term, Opening	3 years 4 months 28 days	4 years 0 months 7 days
Weighed Average Remaining Contractual Term, Closing	3 years 4 months 28 days	4 years 0 months 7 days
Weighed Average Remaining Contractual Term, Exercisable	2 years 10 months 2 days
Aggregate Intrinsic Value, Opening	$ 10,341
Aggregate Intrinsic Value, Closing	4,108	10,341
Aggregate Intrinsic Value, Exercisable	$ 3,867

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Stockholders' Equity and Stock-Based Compensation (Tables)

12 Months Ended

Dec. 27, 2014

Share-based Compensation Arrangement by Share-based Payment Award [Line Items]

Share repurchases

Shares repurchased and retired for the indicated periods of the applicable repurchase programs with the associated cost of repurchase and amount available for repurchase at the end of the respective periods are as follows (in thousands, except number of shares and weighted average price per share):

	Fiscal Year 2014		Fiscal Year 2013		Fiscal Year 2012
Number of shares of common stock repurchased	362,633		332,771		587,766
Weighted average price per share	$	14.74	$	15.03	$	14.47
Total cost of repurchase	$	5,344	$	5,000	$	8,504
Amount available for repurchase at end of period	$	6,118	$	11,462	$	16,462

Option plans

The Nanometrics option plans are as follows:

Plan Name	Participants	Shares Authorized
2005 Equity Incentive Plan	Employees, consultants and directors	7,292,594
2002 Non-statutory Stock Option Plan	Employees and consultants	1,200,000
2000 Employee Stock Option Plan	Employees and consultants	2,450,000
2000 Director Stock Option Plan	Non-employee directors	250,000
Accent Optical Technologies, Inc. Stock Incentive Plan	Employees and consultants	205,003

Stock options assumptions

The weighted-average fair value calculations are based on the following average assumptions:

	Fiscal Year 2014	Fiscal Year 2013	Fiscal Year 2012
Stock Options:
Expected life	4.6 years	4.5 years	4.5 years
Volatility	54.9%	69.9%	77.3%
Risk free interest rate	1.54%	1.05%	0.80%
Dividends	—	—	—
Employee Stock Purchase Plan:
Expected life	0.5 years	0.5 years	0.5 years
Volatility	31.2%	26.8%	45.5%
Risk free interest rate	0.54%	0.11%	0.12%
Dividends	—	—	—

Ranges of outstanding and exercisable options

The following table summarizes ranges of outstanding and exercisable options as of December 27, 2014.

Exercise Prices	Options Outstanding				Options Exercisable
	Number Outstanding	Weighted  Average Remaining Contractual Life (Years)	Weighted Average Exercise Price		Number Exercisable	Weighted Average Exercise Price
$0.93-$7.50	156,237	1.25	$	3.67	156,237	$	3.67
$8.81-$11.37	237,214	2.57	$	10.79	237,214	$	10.79
$11.63-$14.80	146,135	3.89	$	13.68	99,128	$	13.54
$14.88-$15.74	143,682	4.80	$	15.45	75,875	$	15.47
$15.85-$15.98	170,943	2.95	$	15.92	124,931	$	15.94
$16.00-$16.59	45,567	5.77	$	16.40	9,214	$	16.32
$16.70-$16.70	223,432	3.22	$	16.70	206,048	$	16.70
$16.89-$18.27	155,483	4.46	$	17.54	83,466	$	17.51
$18.51-$19.77	99,800	4.56	$	18.94	55,686	$	19.06
$19.84-$19.84	4,500	3.14	$	19.84	4,311	$	19.84
$0.93-$19.84	1,382,993	3.41	$	13.92	1,052,110	$	13.15

Stock-based compensation expense for all share-based payment awards

Stock-based compensation expense for all share-based payment awards made to the Company’s employees and directors pursuant to the employee stock option and employee stock purchase plans by function were as follows (in thousands):

	Fiscal Year 2014		Fiscal Year 2013		Fiscal Year 2012
Cost of products	$	268	$	207	$	164
Cost of service	287		278		230
Research and development	1,245		1,478		1,220
Selling	1,642		1,894		1,791
General and administrative	3,243		2,919		2,485
Restructuring	67		898		—
Total stock-based compensation expense related to employee stock options and employee stock purchases	$	6,752	$	7,674	$	5,890

Stock Options and Restricted Stock Units [Member]

Share-based Compensation Arrangement by Share-based Payment Award [Line Items]

Stock option plans activity

A summary of activity under the Company’s stock option plans including options and RSUs during fiscal year 2014, 2013 and 2012 and shares available for grant as of the respective period end dates, is as follows:

	Fiscal Year 2014		Fiscal Year 2013		Fiscal Year 2012
Shares available for grant at beginning of fiscal year	2,937,001		1,093,565		1,391,930
Increase in authorized shares	—		2,600,000		—
Options - granted	(74,300	)	(430,800	)	(281,085	)
Options - cancelled	191,061		150,459		139,376
Options - expired plan shares	(17,491	)	(53,607	)	(53,102	)
RSUs - granted	(805,120	)	(664,902	)	(103,554	)
RSUs - cancelled	167,404		133,418		—
RSUs - shares issued to satisfy tax withholding obligations	65,527		108,868		—
Shares available for grant at end of fiscal year	2,464,082		2,937,001		1,093,565

Stock Options [Member]

Share-based Compensation Arrangement by Share-based Payment Award [Line Items]

Stock option plans activity

A summary of activity of stock options in 2014 is as follows:

	Number of Shares Outstanding (Options)		Weighted Average Exercise Price		Weighted Average Remaining Contractual Term (Years)	Aggregate Intrinsic Value (in Thousands)
Options
Outstanding at December 28, 2013	1,909,039		$	13.22	4.02	$	10,341
Exercised	(409,285	)	10.45		—	—
Granted	74,300		17.56		—	—
Cancelled	(191,061	)	15.74		—	—
Outstanding at December 27, 2014	1,382,993		$	13.92	3.41	$	4,108
Exercisable at December 27, 2014	1,052,110		$	13.15	2.84	$	3,867

Restricted Stock Units (RSUs) [Member]

Share-based Compensation Arrangement by Share-based Payment Award [Line Items]

Stock option plans activity

A summary of activity for RSUs is as follows:

RSU	Number of RSUs		Weighted Average Fair Value
Outstanding RSUs as of December 28, 2013	334,444		$	18.61
Granted	473,600		17.14
Released	(146,234	)	17.60
Cancelled	(98,473	)	17.12
Outstanding RSUs as of December 27, 2014	563,337		$	17.90

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Warranties - Textual (Details)	12 Months Ended
	Dec. 27, 2014
Product Warranties Disclosures [Abstract]
Product warranty period	12 months

XML

Defined Benefit Pension Plan

12 Months Ended

Dec. 27, 2014

Compensation and Retirement Disclosure [Abstract]

Defined Benefit Pension Plan

Defined Benefit Pension Plan

Nanometrics sponsors a statutory government mandated defined benefit pension plan (the “Benefit Plan”) in Taiwan for its local employees. The fair value of plan assets was $0.2 million, $0.2 million and $0.2 million for the fiscal years ended 2014, 2013 and 2012, respectively; and the net funding deficiency of the Benefit Plan was $0.3 million, $0.2 million, and $0.3 million for the fiscal years ended December 27, 2014, December 28, 2013, and December 29, 2012, respectively. Based on the nature and limited extent of the pension plan, we determined this pension plan was not material for separate disclosure.

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Fair Value Measurements and Disclosures (Tables)

12 Months Ended

Dec. 27, 2014

Fair Value Disclosures [Abstract]

Assets and liabilities measurements at estimated fair value on recurring basis excluding accrued interest components

The following tables present the Company’s assets and liabilities measured at estimated fair value on a recurring basis, excluding accrued interest components, categorized in accordance with the fair value hierarchy (in thousands), as of the following dates:

	December 27, 2014								December 28, 2013
	Fair Value Measurements Using Input Types								Fair Value Measurements Using Input Types
	Level 1		Level 2		Level 3		Total		Level 1		Level 2		Level 3		Total
Assets:
Cash equivalents:
Money market funds	$	610	$	—	$	—	$	610	$	876	$	—	$	—	$	876
Commercial paper and corporate debt securities	—		—		—		—		—		750		—		$	750
Total cash equivalents	610		—		—		610		876		750		—		1,626
Marketable securities:
U.S. Treasury, U.S. Government and U.S. Government agency debt securities	2,497		20,537		—		23,034		5,036		11,980		—		17,016
Commercial paper, municipal securities and corporate debt securities	—		26,252		—		26,252		—		31,081		—		31,081
Total marketable securities	2,497		46,789		—		49,286		5,036		43,061		—		48,097
Total(1)	$	3,107	$	46,789	$	—	$	49,896	$	5,912	$	43,811	$	—	$	49,723
Liabilities:
Contingent consideration payable	$	—	$	—	$	2,397	$	2,397	$	—	$	—	$	2,783	$	2,783

(1) Excludes $34.1 million and $43.1 million held in operating accounts as of December 27, 2014 and December 28, 2013, respectively.

Fair value measurement on recurring basis, unobservable input reconciliation

Changes in Level 3 liabilities (in thousands)
Fair value at December 29, 2012	$	2,462
Payments made to Zygo Corporation	(1,004		)
Change in fair value included in earnings	1,325
Fair value at December 28, 2013	2,783
Payments made to Zygo Corporation	(587		)
Change in fair value included in earnings	201
Fair value at December 27, 2014	$	2,397

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Goodwill and Intangible Assets - Textual (Details) (USD $)	12 Months Ended
	Dec. 27, 2014	Dec. 28, 2013	Dec. 29, 2012
Finite-Lived Intangible Assets [Line Items]
Total amortization expense	$ 3,100,000	$ 3,300,000	$ 3,300,000
Impairment charges	$ 0
Minimum [Member]
Finite-Lived Intangible Assets [Line Items]
Finite-lived intangibles estimated lives	2 years
Maximum [Member]
Finite-Lived Intangible Assets [Line Items]
Finite-lived intangibles estimated lives	10 years

XML

Fair Value Measurements and Disclosures - Textual (Details) (Fair Value, Measurements, Recurring [Member], Zygo Corporation [Member], USD $) In Millions, unless otherwise specified	Dec. 27, 2014	Dec. 28, 2013
Fair Value, Measurements, Recurring [Member] | Zygo Corporation [Member]
Fair Value Measurements and Disclosures (Textual) [Abstract]
Liabilities resulting from the acquisition of certain assets from acquisitions, measured at fair value	$ 2.4	$ 2.8
Current liability at fair value	1.4	1.3
Long-term liability at fair value	$ 1.0	$ 1.5

XML

Consolidated Statements of Comprehensive Income (Loss) (USD $) In Thousands, unless otherwise specified	12 Months Ended
	Dec. 27, 2014	Dec. 28, 2013	Dec. 29, 2012
Statement of Comprehensive Income [Abstract]
Net income (loss)	$ (31,118)	$ (14,146)	$ 4,465
Other comprehensive income (loss):
Change in foreign currency translation adjustment	(3,239)	(818)	(264)
Employee benefit plan adjustment	(106)	151	(11)
Net change on unrealized gains (losses) on available-for-sale investments	(36)	7	(2)
Other comprehensive loss	(3,381)	(660)	(277)
Comprehensive income (loss)	$ (34,499)	$ (14,806)	$ 4,188

XML

Fair Value Measurements and Disclosures

12 Months Ended

Dec. 27, 2014

Fair Value Disclosures [Abstract]

Fair Value Measurements and Disclosures

Fair Value Measurements and Disclosures

Fair value is defined as the price that would be received upon the sale of an asset or paid to transfer a liability in an orderly transaction between market participants at the measurement date. The standard assumes that the transaction to sell the asset or transfer the liability occurs in the principal or most advantageous market for the asset or liability and establishes that the fair value of an asset or liability shall be determined based on the assumptions that market participants would use in pricing the asset or liability.

The Company determines the fair values of its financial instruments based on the fair value hierarchy established in FASB Accounting Standards Codification ("ASC") 820, Fair Value Measurement, which requires an entity to maximize the use of observable inputs and minimize the use of unobservable inputs when measuring fair value. The classification of a financial asset or liability within the hierarchy is based upon the lowest level input that is significant to the fair value measurement. The fair value hierarchy prioritizes the inputs into the following three levels that may be used to measure fair value:

Level 1 — Quoted prices in active markets for identical assets or liabilities.

Level 2 — Inputs other than Level 1 that are observable, either directly or indirectly, such as quoted prices for similar assets and liabilities in active markets or inputs that are observable for the asset or liability, either directly or indirectly through market corroboration, for substantially the full term of the financial instrument.

Level 3 — Unobservable inputs that are supported by little or no market activity and are significant to the fair value of the assets or liabilities. Such unobservable inputs include an estimated discount rate used in the Company's discounted present value analysis of future cash flows, which reflects the Company's estimate of debt with similar terms in the current credit markets. As there is currently minimal activity in such markets, the actual rate could be materially different.

The following tables present the Company’s assets and liabilities measured at estimated fair value on a recurring basis, excluding accrued interest components, categorized in accordance with the fair value hierarchy (in thousands), as of the following dates:

	December 27, 2014								December 28, 2013
	Fair Value Measurements Using Input Types								Fair Value Measurements Using Input Types
	Level 1		Level 2		Level 3		Total		Level 1		Level 2		Level 3		Total
Assets:
Cash equivalents:
Money market funds	$	610	$	—	$	—	$	610	$	876	$	—	$	—	$	876
Commercial paper and corporate debt securities	—		—		—		—		—		750		—		$	750
Total cash equivalents	610		—		—		610		876		750		—		1,626
Marketable securities:
U.S. Treasury, U.S. Government and U.S. Government agency debt securities	2,497		20,537		—		23,034		5,036		11,980		—		17,016
Commercial paper, municipal securities and corporate debt securities	—		26,252		—		26,252		—		31,081		—		31,081
Total marketable securities	2,497		46,789		—		49,286		5,036		43,061		—		48,097
Total(1)	$	3,107	$	46,789	$	—	$	49,896	$	5,912	$	43,811	$	—	$	49,723
Liabilities:
Contingent consideration payable	$	—	$	—	$	2,397	$	2,397	$	—	$	—	$	2,783	$	2,783

(1) Excludes $34.1 million and $43.1 million held in operating accounts as of December 27, 2014 and December 28, 2013, respectively.

The fair values of the marketable securities that are classified as Level 1 in the table above were derived from quoted market prices for identical assets or liabilities in active markets that the Company has the ability to access. The fair value of marketable securities that are classified as Level 2 in the table above were derived from non-binding market consensus prices that were corroborated by observable market data, quoted market prices for similar instruments, or pricing models, such as discounted cash flow techniques with all significant inputs derived from or corroborated by observable market data. There were no transfers of instruments between Level 1, Level 2 and Level 3 during the financial periods presented.

Changes in Level 3 liabilities (in thousands)
Fair value at December 29, 2012	$	2,462
Payments made to Zygo Corporation	(1,004		)
Change in fair value included in earnings	1,325
Fair value at December 28, 2013	2,783
Payments made to Zygo Corporation	(587		)
Change in fair value included in earnings	201
Fair value at December 27, 2014	$	2,397

As of December 27, 2014, the Company had liabilities of $2.4 million resulting from the acquisition of certain assets from Zygo Corporation (“Zygo”), which are measured at fair value on a recurring basis, and changes in fair value recorded in Other income (expense), net. Of the $2.4 million of Zygo liabilities at December 27, 2014, $1.4 million was a current liability and $1.0 million was a long-term liability. As of December 28, 2013, the Company had liabilities of $2.8 million resulting from the acquisition of certain assets from Zygo which are measured at fair value on a recurring basis. Of the $2.8 million of Zygo liability at December 28, 2013, $1.3 million was a current liability and $1.5 million was a long-term liability. The fair values of these liabilities were determined using Level 3 inputs using a discounted cash flow model incorporating assumptions that market participants would use in their estimates of fair value. Some of these assumptions included estimates for discount rate, and timing and the amount of cash flows.

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Stockholders' Equity and Stock-Based Compensation - Textual (Details) (USD $)	0 Months Ended		1 Months Ended		12 Months Ended			0 Months Ended		12 Months Ended		0 Months Ended	2 Months Ended
	Feb. 22, 2010	Nov. 30, 2008	Dec. 27, 2008	Nov. 30, 2008	Dec. 27, 2014	Dec. 28, 2013	Dec. 29, 2012	Nov. 21, 2011	Jun. 30, 2012	Dec. 31, 2011	Jan. 01, 2011	May 24, 2013	Feb. 24, 2015	Nov. 29, 2010	May 29, 2012
Share-based Compensation Arrangement by Share-based Payment Award [Line Items]
Shares of common stock					47,000,000	47,000,000
Common stock, par value per share (in dollars per share)					$ 0.001	$ 0.001
Shares of preferred stock					3,000,000	3,000,000
Preferred stock, par value per share (in dollars per share)					$ 0.001	$ 0.001
Total cost of repurchase					$ 5,344,000	$ 5,000,000	$ 8,504,000
Common stock repurchased and retired, shares					362,633	332,771	587,766
Weighted average price (in dollars per share)					$ 14.74	$ 15.03	$ 14.47
Shares purchased under the ESPP					122,112	126,068	113,512
Estimated forfeiture rate					10.70%	11.90%	7.60%
Excess tax benefit					0	(53,000)	910,000
Initial vesting percentage	25.00%	33.33%
Option term		7 years
Vesting rate, percentage			33.33%	2.78%
Period of vesting	4 years	3 years
Weighted average fair value per share of stock options (in dollars per share)					$ 8.13	$ 8.58	$ 10.00
Closing stock price (in dollars per share)					$ 16.59
Intrinsic value of options exercised					3,000,000	2,900,000	4,900,000
Fair value of options vested					3,200,000	3,700,000	3,600,000
Employee Stock Purchase Plan [Member]
Share-based Compensation Arrangement by Share-based Payment Award [Line Items]
Maximum percentage of salary withholdings					10.00%
Purchase price of common stock, percent					85.00%
Shares remaining for issuance under the ESPP					400,000
Weighted average price of shares issued (in dollars per share)					$ 13.76	$ 12.36	$ 14.16
Restricted Stock Units (RSUs) [Member]
Share-based Compensation Arrangement by Share-based Payment Award [Line Items]
Vesting rate, percentage								33.33%
RSUs granted (in shares)					473,600	348,328
RSUs cancelled (in shares)					98,473
Unrecognized compensation costs					5,700,000
Weighted average remaining amortization period for unrecognized compensation costs					1 year 10 months 16 days
Shares per unit granted					1.7
Restricted Stock Units (RSUs) [Member] | Minimum [Member]
Share-based Compensation Arrangement by Share-based Payment Award [Line Items]
Period of vesting					1 year
Restricted Stock Units (RSUs) [Member] | Maximum [Member]
Share-based Compensation Arrangement by Share-based Payment Award [Line Items]
Period of vesting					3 years
Stock Options [Member]
Share-based Compensation Arrangement by Share-based Payment Award [Line Items]
Unrecognized compensation costs					2,500,000
Weighted average remaining amortization period for unrecognized compensation costs					2 years 2 months 15 days
November 29, 2010 Program [Member]
Share-based Compensation Arrangement by Share-based Payment Award [Line Items]
Maximum amount of common stock approved to repurchase, Value														10,000,000.0
Total cost of repurchase							4,900,000			4,300,000	800,000
Common stock repurchased and retired, shares									667,406
Weighted average repurchase price of common stock (in dollars per share)									$ 14.97
May 29, 2012 Program [Member]
Share-based Compensation Arrangement by Share-based Payment Award [Line Items]
Maximum amount of common stock approved to repurchase, Value															20,000,000.0
Common stock repurchased and retired, shares							250,400
Weighted average repurchase price of common stock (in dollars per share)							$ 14.15
2005 Equity Incentive Plan [Member]
Share-based Compensation Arrangement by Share-based Payment Award [Line Items]
Ratio of restricted stock units against available for grant pool	2											1.7
Number of shares of common stock authorized					7,292,594							2,600,000
RSUs granted (in shares)					805,120
RSUs cancelled (in shares)					167,404
Subsequent Event [Member]
Share-based Compensation Arrangement by Share-based Payment Award [Line Items]
Total cost of repurchase													$ 1,700,000
Common stock repurchased and retired, shares													111,050
Weighted average price (in dollars per share)													$ 15.49
Remaining shares available for future repurchase (in shares)													4,400,000

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Income Taxes - Provision (Benefit) for Income Taxes (Details) (USD $) In Thousands, unless otherwise specified	12 Months Ended
	Dec. 27, 2014	Dec. 28, 2013	Dec. 29, 2012
Current:
Federal	$ 358	$ 119	$ (2,403)
State	(151)	5	(492)
Foreign	1,327	933	270
Total current	1,534	1,057	(2,625)
Deferred:
Federal	17,368	(10,686)	1,753
State	550	(325)	379
Foreign	45	535	647
Total deferred	17,963	(10,476)	2,779
Provision (benefit) for income taxes	$ 19,497	$ (9,419)	$ 154

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Cash and Investments (Tables)

12 Months Ended

Dec. 27, 2014

Investments, Debt and Equity Securities [Abstract]

Cash, Cash Equivalents and Available-for-sale Investments

The following table presents cash, cash equivalents, and available-for-sale investments as of the following dates (in thousands):

	December 27, 2014
	Amortized Cost		Gross Unrealized Gains		Gross Unrealized Losses			Estimated Fair Market Value
Cash	$	34,066	—		$	—		$	34,066
Cash equivalents:
Money market funds	610		—		—			610
Marketable securities:
Commercial paper	805		—		—			805
U.S. Treasury securities	2,498				(1		)	2,497
U.S. Government agency securities	20,556		1		(19		)	20,538
Municipal securities	3,755		1		(7		)	3,749
Corporate debt securities	21,722		1		(26		)	21,697
Total cash, cash equivalents, and marketable securities	$	84,012	$	3	$	(53	)	$	83,962
	December 28, 2013
	Amortized Cost		Gross Unrealized Gains		Gross Unrealized Losses			Estimated Fair Market Value
Cash	$	43,139	$	—	$	—		$	43,139
Cash equivalents:
Money market funds	876		—		—			876
Commercial paper	750		—		—			750
Marketable securities:
U.S. Treasury Securities	5,036		—		—			5,036
U.S. Government agency securities	11,980		4		(4		)	11,980
Municipal securities	9,756		11		(4		)	9,763
Corporate debt securities	21,316		7		(5		)	21,318
Total cash, cash equivalents, and marketable securities	$	92,853	$	22	$	(13	)	$	92,862

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Segment, Geographic, Product and Significant Customer Information - Net Revenue (Details) (USD $) In Thousands, unless otherwise specified	12 Months Ended
	Dec. 27, 2014 segment	Dec. 28, 2013	Dec. 29, 2012
Revenues from External Customers and Long-Lived Assets [Line Items]
Number of operating segments	1
Total net revenues:
Total net revenues	$ 166,443	$ 144,307	$ 182,881
United States [Member]
Total net revenues:
Total net revenues	36,123	47,019	44,811
South Korea [Member]
Total net revenues:
Total net revenues	41,381	34,873	79,555
China [Member]
Total net revenues:
Total net revenues	28,702	13,063	5,323
Taiwan [Member]
Total net revenues:
Total net revenues	19,790	9,645	16,757
Other [Member]
Total net revenues:
Total net revenues	$ 40,447	$ 39,707	$ 36,435

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Recent Accounting Pronouncements (Details) (USD $)	12 Months Ended			3 Months Ended
	Dec. 27, 2014	Dec. 28, 2013	Dec. 29, 2012	Mar. 29, 2014
Income tax expense (benefit)	$ 19,497,000	$ (9,419,000)	$ 154,000
Increase (decrease) in long-term income taxes payable	(212,000)	(666,000)	346,000
Restatement Adjustment [Member]
Income tax expense (benefit)				(300,000)
Increase (decrease) in deferred tax assets				(300,000)
Increase (decrease) in long-term income taxes payable				$ (600,000)

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Stockholders' Equity and Stock-Based Compensation

12 Months Ended

Dec. 27, 2014

Disclosure of Compensation Related Costs, Share-based Payments [Abstract]

Stockholders' Equity and Stock-Based Compensation

Stockholders' Equity and Stock-Based Compensation

Stockholders' Equity

Preferred and Common Stock

The authorized capital stock of Nanometrics consists of 47,000,000 shares of common stock, par value $0.001 per share, and 3,000,000 shares of preferred stock, par value $0.001 per share.

Stock Repurchase

On November 29, 2010, the Company's Board of Directors approved a program to repurchase up to $10.0 million of the Company's common stock, referred to as the 2010 program. Stock repurchases under this program occurred as follows: fiscal year 2010, $0.8 million; fiscal year 2011, $4.3 million; and fiscal year 2012, $4.9 million. As of June 30, 2012, the Company repurchased and retired an aggregate of 667,406 shares of its common stock at a weighted average price of $14.97 per share under the 2010 program utilizing the entire $10.0 million approved by the Board on November 29, 2010, for the repurchase of shares of its common stock.

On May 29, 2012, the Company's Board of Directors approved a program to repurchase up to $20.0 million of its common stock, referred to as the 2012 program. Stock repurchases under this program may be made through open market and privately negotiated transactions, at times and in such amounts as management deems appropriate. The timing and actual number of shares repurchased is dependent on a variety of factors including price, corporate and regulatory requirements and other market conditions. During fiscal year 2012, the Company repurchased and retired 250,400 shares of its common stock under this approved program at the weighted average price of $14.15 per share. Shares repurchased and retired for the indicated periods of the applicable repurchase programs with the associated cost of repurchase and amount available for repurchase at the end of the respective periods are as follows (in thousands, except number of shares and weighted average price per share):

	Fiscal Year 2014		Fiscal Year 2013		Fiscal Year 2012
Number of shares of common stock repurchased	362,633		332,771		587,766
Weighted average price per share	$	14.74	$	15.03	$	14.47
Total cost of repurchase	$	5,344	$	5,000	$	8,504
Amount available for repurchase at end of period	$	6,118	$	11,462	$	16,462

Subsequent to December 27, 2014, the Company repurchased 111,050 shares at an average purchase price of $15.49 per share for a total of $1.7 million. After these purchases, $4.4 million remained available for the future repurchase of the Company's common stock under the 2012 program.

Stock Option Plans

The Nanometrics option plans are as follows:

Plan Name	Participants	Shares Authorized
2005 Equity Incentive Plan	Employees, consultants and directors	7,292,594
2002 Non-statutory Stock Option Plan	Employees and consultants	1,200,000
2000 Employee Stock Option Plan	Employees and consultants	2,450,000
2000 Director Stock Option Plan	Non-employee directors	250,000
Accent Optical Technologies, Inc. Stock Incentive Plan	Employees and consultants	205,003

Employee Stock Purchase Plan

Under the 2003 Employee Stock Purchase Plan (“ESPP”), eligible employees are allowed to have salary withholdings of up to 10% of their base compensation to purchase shares of common stock at a price equal to 85% of the lower of the market value of the stock at the beginning or end of each six-month offering period, subject to an annual statutory limitation. At the end of the fiscal year ended December 27, 2014, the Company had 0.4 million shares remaining for issuance under the ESPP. Shares purchased under the ESPP were 122,112 shares, 126,068 shares and 113,512 shares in 2014, 2013 and 2012 at a weighted average price of $13.76, $12.36 and $14.16, respectively.

Stock-based Compensation

The Company measures and recognizes compensation expense for all share-based payment awards made to employees and directors including employee stock options, restricted stock units and employee stock purchases related to the Employee Stock Purchase Plan (collectively “Employee Stock Purchases”) based on estimated fair values. The fair value of share-based payment awards is estimated on the date of grant using an option-pricing model. The value of the portion of the award that is ultimately expected to vest is recognized as expense over the requisite service periods in the Company's consolidated statement of operations.

Stock-based compensation expense recognized during the period is based on the value of the portion of share-based payment awards that is ultimately expected to vest during the period. As stock-based compensation expense recognized in the consolidated statement of operations for the years ended December 27, 2014, December 28, 2013 and December 29, 2012 is based on awards expected to vest, it has been reduced for estimated forfeitures. ASC 740 requires forfeitures to be estimated at the time of grant and revised, if necessary, in subsequent periods if actual forfeitures differ from those estimates. The Company's estimated forfeiture rates in 2014, 2013 and 2012 of 10.7%, 11.9%, and 7.6%, respectively, were based on historical forfeiture experience, which the Company believes is the best available information to estimate the future forfeiture rate. Tax benefits resulting from tax deductions in excess of the compensation cost recognized for those options are required to be separately classified in the consolidated statements of cash flows. The Company recognized zero, $0.1 million and $0.9 million of excess tax benefit in fiscal years 2014, 2013 and 2012, respectively.

Valuation and Expense Information

The fair value of stock-based awards to employees is calculated using the Black-Scholes option pricing model, which requires subjective assumptions, including future stock price volatility and expected time to exercise. The expected life of options granted were calculated using the simplified method allowed by the SAB 107. The risk-free rates were based on the U.S Treasury rates in effect during the corresponding period of grant. The expected volatility were based on the historical volatility of the Company's stock price. These factors could change in the future, which would affect the stock-based compensation expense in future periods.

The weighted-average fair value of stock-based compensation to employees is based on the single option valuation approach. Forfeitures are estimated and it is assumed no dividends will be declared. The estimated fair value of stock-based compensation awards to employees is amortized over the vesting period of the options. The weighted-average fair value calculations are based on the following average assumptions:

	Fiscal Year 2014	Fiscal Year 2013	Fiscal Year 2012
Stock Options:
Expected life	4.6 years	4.5 years	4.5 years
Volatility	54.9%	69.9%	77.3%
Risk free interest rate	1.54%	1.05%	0.80%
Dividends	—	—	—
Employee Stock Purchase Plan:
Expected life	0.5 years	0.5 years	0.5 years
Volatility	31.2%	26.8%	45.5%
Risk free interest rate	0.54%	0.11%	0.12%
Dividends	—	—	—

Stock Options and Restricted Stock Units ("RSUs")

Prior to December 2008, the majority of options granted by the Compensation Committee vested at a rate of 33 ¹/3 percent over the first three years of the seven-year option term on each of the first, second and third anniversary of such grants. Starting in December 2008, the majority of the options granted to employees employed for less than one year vest one-third (  ¹/3^rd ) of the shares subject to the option on the first anniversary of the grant date, and vest one thirty sixth ( ¹/36^th ) each month for the following two years, for a total three year vesting period with a seven-year option term. Starting in November 2008, the majority of the options granted for employees employed for more than one year vest one thirty-sixth ( ¹/36^th ) of the shares subject to the options in equal monthly installments starting on the monthly anniversary of the date of grant with a seven-year option term. On February 22, 2010, the Compensation Committee reviewed best practice with regard to stock option vesting and made the following changes: existing employees generally receive vesting terms of monthly ratable vesting for a total period of four years. New employees, in general, receive vesting terms that are equivalent to 25% vesting on the one year anniversary of the grant with monthly vesting thereafter for a total of four years. All other terms remained the same. Grant of each Restricted Stock Unit (“RSU”) counts against the Company's available for grant pool at a ratio of 2:1 against the 2005 Equity Incentive Plan as depicted below under “RSUs granted.” On May 24, 2013, the Company approved further amendments to the 2005 Equity Incentive Plan including: increasing the number of shares of common stock authorized by 2.6 million shares, changing the multiplier ratio from 2:1 to 1.7:1 against the plan for each award, other than a stock option or stock appreciation right, and providing the maximum term of stock options to be seven years. All other terms remained the same.

The number of RSUs granted during fiscal year 2014 was 473,600, which counted as 805,120 shares against the 2005 Equity Incentive Plan. The number of RSUs cancelled during fiscal year 2014 was 98,473, which counted as 167,404 shares against the 2005 Equity Incentive Plan. Each RSU represents an amount equal to the fair value of one share of the Company's common stock.

A summary of activity under the Company’s stock option plans including options and RSUs during fiscal year 2014, 2013 and 2012 and shares available for grant as of the respective period end dates, is as follows:

	Fiscal Year 2014		Fiscal Year 2013		Fiscal Year 2012
Shares available for grant at beginning of fiscal year	2,937,001		1,093,565		1,391,930
Increase in authorized shares	—		2,600,000		—
Options - granted	(74,300	)	(430,800	)	(281,085	)
Options - cancelled	191,061		150,459		139,376
Options - expired plan shares	(17,491	)	(53,607	)	(53,102	)
RSUs - granted	(805,120	)	(664,902	)	(103,554	)
RSUs - cancelled	167,404		133,418		—
RSUs - shares issued to satisfy tax withholding obligations	65,527		108,868		—
Shares available for grant at end of fiscal year	2,464,082		2,937,001		1,093,565

Options

The weighted average fair value per share of the stock options awarded in fiscal years 2014, 2013, and 2012 was $8.13, $8.58 and $10.00, respectively. A summary of activity of stock options in 2014 is as follows:

	Number of Shares Outstanding (Options)		Weighted Average Exercise Price		Weighted Average Remaining Contractual Term (Years)	Aggregate Intrinsic Value (in Thousands)
Options
Outstanding at December 28, 2013	1,909,039		$	13.22	4.02	$	10,341
Exercised	(409,285	)	10.45		—	—
Granted	74,300		17.56		—	—
Cancelled	(191,061	)	15.74		—	—
Outstanding at December 27, 2014	1,382,993		$	13.92	3.41	$	4,108
Exercisable at December 27, 2014	1,052,110		$	13.15	2.84	$	3,867

The aggregate intrinsic value in the above table represents the total pretax intrinsic value, based on the Company’s closing stock price of $16.59 as of December 27, 2014, which would have been received by the option holders had all option holders exercised their options as of that date. The total intrinsic value of options exercised during 2014, 2013 and 2012 was $3.0 million, $2.9 million and $4.9 million, respectively. The fair value of options vested during 2014, 2013 and 2012 was $3.2 million, $3.7 million and $3.6 million, respectively.

The following table summarizes ranges of outstanding and exercisable options as of December 27, 2014.

Exercise Prices	Options Outstanding				Options Exercisable
	Number Outstanding	Weighted  Average Remaining Contractual Life (Years)	Weighted Average Exercise Price		Number Exercisable	Weighted Average Exercise Price
$0.93-$7.50	156,237	1.25	$	3.67	156,237	$	3.67
$8.81-$11.37	237,214	2.57	$	10.79	237,214	$	10.79
$11.63-$14.80	146,135	3.89	$	13.68	99,128	$	13.54
$14.88-$15.74	143,682	4.80	$	15.45	75,875	$	15.47
$15.85-$15.98	170,943	2.95	$	15.92	124,931	$	15.94
$16.00-$16.59	45,567	5.77	$	16.40	9,214	$	16.32
$16.70-$16.70	223,432	3.22	$	16.70	206,048	$	16.70
$16.89-$18.27	155,483	4.46	$	17.54	83,466	$	17.51
$18.51-$19.77	99,800	4.56	$	18.94	55,686	$	19.06
$19.84-$19.84	4,500	3.14	$	19.84	4,311	$	19.84
$0.93-$19.84	1,382,993	3.41	$	13.92	1,052,110	$	13.15

As of December 27, 2014, the total unrecognized compensation costs related to unvested stock options was $2.5 million and is expected to be recognized as an expense over a weighted average remaining amortization period of 2.21 years.

Restricted Stock Units ("RSUs")

Each RSU counts against the Company's “2005 Equity Incentive Plan” at a ratio of one and seven tenths shares for each unit granted but represents an amount equal to the fair value of one share of the Company's common stock. The Company granted 473,600 and 348,328 RSUs during the years ended December 27, 2014 and December 28, 2013, respectively, to key employees with vesting periods spanning from one to three years.

A summary of activity for RSUs is as follows:

RSU	Number of RSUs		Weighted Average Fair Value
Outstanding RSUs as of December 28, 2013	334,444		$	18.61
Granted	473,600		17.14
Released	(146,234	)	17.60
Cancelled	(98,473	)	17.12
Outstanding RSUs as of December 27, 2014	563,337		$	17.90

As of December 27, 2014, the total unrecognized compensation costs related to RSU's was $5.7 million and is expected to be recognized as an expense over a weighted average remaining amortization period of 1.88 years.

Stock-based Compensation Expense

Stock-based compensation expense for all share-based payment awards made to the Company’s employees and directors pursuant to the employee stock option and employee stock purchase plans by function were as follows (in thousands):

	Fiscal Year 2014		Fiscal Year 2013		Fiscal Year 2012
Cost of products	$	268	$	207	$	164
Cost of service	287		278		230
Research and development	1,245		1,478		1,220
Selling	1,642		1,894		1,791
General and administrative	3,243		2,919		2,485
Restructuring	67		898		—
Total stock-based compensation expense related to employee stock options and employee stock purchases	$	6,752	$	7,674	$	5,890