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Other Current Liabilities (Details) (USD $)
In Thousands, unless otherwise specified
Sep. 27, 2014
Dec. 28, 2013
Summary of other current liabilities    
Accrued warranty $ 2,990 $ 3,426
Accrued professional services 726 545
Customer deposits 3 867
Fair value of contingent payments to Zygo Corporation related to acquisition - current portion 930 1,344
Other 3,185 1,811
Total other current liabilities $ 7,834 $ 7,993