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Geographic and Significant Customer Information (Tables)
9 Months Ended
Sep. 27, 2014
Segment Reporting [Abstract]  
Total net revenue
The following tables summarize total net revenues (based on the deployments and service location of the systems) and long-lived assets (excluding intangible assets) attributed to significant geographic regions (in thousands):
 

 
Three Months Ended
 
Nine Months Ended
 
September 27, 2014
 
September 28, 2013
 
September 27, 2014
 
September 28, 2013
United States
$
5,511

 
$
15,665

 
$
25,554

 
$
41,426

Japan
4,099

 
2,387

 
10,005

 
9,617

Taiwan
640

 
3,737

 
11,337

 
6,959

China
2,848

 
901

 
27,694

 
6,952

South Korea
6,327

 
9,805

 
30,589

 
18,946

Other
7,708

 
6,549

 
21,559

 
14,248

Total net revenues
$
27,133

 
$
39,044

 
$
126,738

 
$
98,148

Long-lived tangible assets
 
At
 
September 27, 2014
 
December 28, 2013
United States
$
50,061

 
$
44,775

Japan
82

 
125

South Korea
337

 
445

All Other
256

 
2,094

Total long-lived tangible assets
$
50,736

 
$
47,439

Customers accounted for 10% or more of total accounts receivable
The following customers accounted for 10% or more of total accounts receivable as of the following dates:
 
September 27, 2014
 
December 28, 2013
SK Hynix
26
%
 
22
%
Taiwan Semiconductor Mfg. Co.
***

 
12
%
Global Foundries
14
%
 
***

Samsung Electronics Co. Ltd.
***

 
27
%
Intel Corporation
***

 
14
%
Micron Technology, Inc.
12
%
 
***



     *** The customer accounted for less than 10% of total accounts receivable as of that period end.
Customers accounted for 10% or more of total revenue
The following customers accounted for 10% or more of total net revenues:
 
Three Months Ended
 
Nine Months Ended
 
September 27,
2014
 
September 28,
2013
 
September 27,
2014
 
September 28,
2013
Intel Corporation
***

 
34
%
 
14
%
 
30
%
SK Hynix
27
%
 
23
%
 
16
%
 
18
%
Samsung Electronics Co. Ltd.
***

 
***

 
28
%
 
***

Micron Technology, Inc.
25
%
 
***

 
***

 
***


     *** The customer accounted for less than 10% of total net revenues for that period.