Fair Value Measurements and Disclosures (Details Textual) (USD $)	Jun. 28, 2014	Dec. 28, 2013
Fair Value, Assets and Liabilities Measured on Recurring and Nonrecurring Basis [Line Items]
Fair value liabilities, unobservable inputs	$ 2,588,000	$ 2,783,000
Fair Value, Measurements, Recurring [Member] | Zygo Corporation [Member]
Fair Value, Assets and Liabilities Measured on Recurring and Nonrecurring Basis [Line Items]
Liabilities resulting from the acquisition of certain assets from Zygo Corporation measured at fair value	2,600,000	2,800,000
Current liability at fair value	1,200,000	1,300,000
Long-term liability at fair value	$ 1,400,000	$ 1,500,000