Geographic and Significant Customer Information (Tables)

3 Months Ended

Mar. 29, 2014

Geographic and Significant Customer Information [Abstract]

Total net revenue

The following tables summarize total net revenues (based on the deployments and service location of the systems) and long-lived assets (excluding intangible assets) attributed to significant geographic regions (in thousands):

	Three Months Ended
	March 29, 2014		March 30, 2013
Total net revenues:
United States	$	6,741	$	9,433
Japan	3,684		5,212
Taiwan	4,416		2,310
China	15,488		644
South Korea	15,889		3,547
Other	5,358		3,406
Total net revenues	$	51,576	$	24,552

Long-lived tangible assets

	At
	March 29, 2014		December 28, 2013
Long-lived tangible assets:
United States	$	44,545	$	44,775
Japan	122		125
South Korea	401		445
All Other	2,063		2,094
Total long-lived tangible assets	$	47,131	$	47,439

Customers accounted for 10% or more of total accounts receivable

The following customers accounted for 10% or more of total accounts receivable:

	At
	March 29, 2014		December 28, 2013
Intel Corporation	19.0	%	14.4	%
SK Hynix	10.9	%	21.8	%
Samsung Electronics Co. Ltd.	21.9	%	27.4	%
Taiwan Semiconductor Mfg. Co.	18.1	%	12.1	%

Customers accounted for 10% or more of total revenue

The following customers accounted for 10% or more of total net revenues:

	Three Months Ended
	March 29, 2014		March 30, 2013
Intel Corporation	13.1	%	29.3	%
Samsung Electronics Co. Ltd.	51.7	%	***

*** The customer accounted for less than 10% of total net revenues for that period.