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Other Current Liabilities (Tables)
3 Months Ended
Mar. 29, 2014
Other Liabilities Disclosure [Abstract]  
Summary of other current liabilities
Other current liabilities consist of the following (in thousands):
 
At
 
March 29,
2014
 
December 28,
2013
Accrued warranty
$
3,575

 
$
3,426

Accrued professional services
799

 
545

Customer deposits
947

 
867

Fair value of contingent payments to Zygo Corporation related to acquisition - current portion
1,205

 
1,344

Other
1,659

 
1,811

Total other current liabilities
$
8,185

 
$
7,993