Other Current Liabilities

3 Months Ended

Mar. 29, 2014

Other Liabilities Disclosure [Abstract]

Other Current Liabilities

Other Current Liabilities

Other current liabilities consist of the following (in thousands):

	At
	March 29, 2014		December 28, 2013
Accrued warranty	$	3,575	$	3,426
Accrued professional services	799		545
Customer deposits	947		867
Fair value of contingent payments to Zygo Corporation related to acquisition - current portion	1,205		1,344
Other	1,659		1,811
Total other current liabilities	$	8,185	$	7,993