Commitments and Contingencies (Details Textual) (USD $)	0 Months Ended	3 Months Ended	12 Months Ended
	Jan. 13, 2013	Dec. 31, 2011	Dec. 28, 2013	Dec. 29, 2012	Dec. 31, 2011
Commitments and Contingencies (Textual) [Abstract]
Liabilities recorded for obligations			$ 0	$ 0
One time payment to KLA	2,500,000
Legal settlement in operating expense		2,500,000
Long-term Purchase Commitment [Line Items]
Rent expense			2,000,000	2,200,000	1,800,000
Inventories [Member]
Long-term Purchase Commitment [Line Items]
Purchase commitment			25,100,000
Inventories [Member] | Zygo Corporation [Member]
Long-term Purchase Commitment [Line Items]
Purchase commitment			2,800,000
Purchase commitment, estimated future amount			$ 3,500,000