Intangible Assets (Details Textual) (USD $)	3 Months Ended	12 Months Ended							12 Months Ended						12 Months Ended	0 Months Ended
	Mar. 31, 2012	Dec. 28, 2013	Dec. 29, 2012	Dec. 31, 2011	Dec. 28, 2013 Minimum [Member]	Dec. 28, 2013 Maximum [Member]	Dec. 28, 2013 Patented Technology [Member]	Dec. 29, 2012 Patented Technology [Member]	Dec. 28, 2013 Patented Technology [Member] Minimum [Member]	Dec. 28, 2013 Patented Technology [Member] Maximum [Member]	Nov. 21, 2011 Nanda [Member]	Nov. 21, 2011 Nanda [Member] Total identifiable intangible assets acquired [Member]	Dec. 29, 2012 Nanda [Member] Research and Development in Process [Member]	Nov. 21, 2011 Nanda [Member] Research and Development in Process [Member]	Dec. 29, 2012 Real Time Metrology Inc. [Member]	Dec. 09, 2010 Real Time Metrology Inc. [Member] Patented Technology [Member]
Intangible Assets (Textual) [Abstract]
Acquired percentage of the outstanding shares of Nanda Technologies GmbH											100.00%
Fair Value as of acquisition date		$ 31,927,000	$ 31,497,000				$ 2,252,000	$ 2,252,000				$ 10,570,000		$ 330,000
Payments to Acquire Intangible Assets																400,000
Legal expenses capitalized																100,000
Finite-lived intangibles estimated lives					2 years	10 years	7 years 3 months		7 years	10 years
Intangibles acquired													300,000	308,000
Total amortization expense		3,300,000	3,300,000	1,700,000
Reduction in fair value of royalty payments	600,000														600,000
Reduction in fair value of goodwill	400,000		500,000												400,000
Reduction in fair value of intangible assets	200,000														200,000
Other adjustment to intangible assets		$ 0