Fair Value Measurements and Disclosures (Details 1) (Level 3 [Member], USD $) In Thousands, unless otherwise specified	12 Months Ended
Dec. 28, 2013	Dec. 29, 2012
Fair value measurement on recurring basis, unobservable input reconciliation
Fair value, beginning balance	$ 2,462	$ 3,194
Change in fair value included in earnings, Zygo	1,325	129
Fair Value, ending balance	2,783	2,462
Zygo Corporation [Member]
Fair value measurement on recurring basis, unobservable input reconciliation
Payments made to Zygo Corporation	(1,004)	(300)
Nanda [Member]
Fair value measurement on recurring basis, unobservable input reconciliation
Addition: Fair value of royalty payment to RTM related to acquisition of Nanda		$ (561)

Fair Value Measurement with Unobservable Inputs Reconciliations Addition for Royalty Payments Related to Acquisition

No definition available.

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- Details

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- Definition

Amount of gain (loss) recognized on the income statement for financial instrument classified as a liability measured using unobservable inputs that reflect the entity's own assumption about the assumptions market participants would use in pricing.

+ References

Reference 1: http://www.xbrl.org/2003/role/presentationRef

-Publisher FASB

-Name Accounting Standards Codification

-Topic 820

-SubTopic 10

-Section 50

-Paragraph 2

-Subparagraph (c)(1)

-URI http://asc.fasb.org/extlink&oid=25499696&loc=d3e19207-110258

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- Definition

Amount of settlements of financial instrument classified as a liability measured using unobservable inputs that reflect the entity's own assumption about the assumptions market participants would use in pricing.

+ References

Reference 1: http://www.xbrl.org/2003/role/presentationRef

-Publisher FASB

-Name Accounting Standards Codification

-Topic 820

-SubTopic 10

-Section 50

-Paragraph 2

-Subparagraph (c)(2)

-URI http://asc.fasb.org/extlink&oid=25499696&loc=d3e19207-110258

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- Definition

Fair value of financial instrument classified as a liability measured using unobservable inputs that reflect the entity's own assumption about the assumptions market participants would use in pricing.

+ References

Reference 1: http://www.xbrl.org/2003/role/presentationRef

-Publisher FASB

-Name Accounting Standards Codification

-Topic 820

-SubTopic 10

-Section 50

-Paragraph 2

-Subparagraph (c)

-URI http://asc.fasb.org/extlink&oid=25499696&loc=d3e19207-110258

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