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Stockholders' Equity (Tables)
12 Months Ended
Dec. 28, 2013
Equity [Abstract]  
Option Plans
The Nanometrics option plans are as follows:
 
Plan Name
Participants
Shares
Authorized
2005 Equity Incentive Plan
Employees, consultants and directors
7,292,594

2002 Non-statutory Stock Option Plan
Employees and consultants
1,200,000

2000 Employee Stock Option Plan
Employees and consultants
2,450,000

2000 Director Stock Option Plan
Non-employee directors
250,000

Accent Optical Technologies, Inc. Stock Incentive Plan
Employees and consultants
205,003