Other Current Liabilities (Tables)

12 Months Ended

Dec. 28, 2013

Other Liabilities Disclosure [Abstract]

Summary of other current liabilities

Other current liabilities consist of the following (in thousands):

	At
	December 28, 2013		December 29, 2012
Accrued warranty	$	3,426	$	4,203
Accrued professional services	545		584
Customer deposits	867		27
Fair value of current portion of contingent payments to Zygo Corporation related to acquisition	1,344		649
Other	1,754		2,359
Total other current liabilities	$	7,936	$	7,822