Fair Value Measurements and Disclosures (Tables)

12 Months Ended

Dec. 28, 2013

Fair Value Disclosures [Abstract]

Assets and liabilities measurements at estimated fair value on recurring basis excluding accrued interest components

The following table presents the Company’s assets and liabilities measured at estimated fair value on a recurring basis, excluding accrued interest components, categorized in accordance with the fair value hierarchy (in thousands):

	December 28, 2013								December 29, 2012
	Fair Value Measurements Using Input Types								Fair Value Measurements Using Input Types
	Level 1		Level 2		Level 3		Total		Level 1		Level 2		Level 3		Total
Assets:
Cash equivalents:
Money market funds	$	876	$	—	$	—	$	876	$	110	$	—	$	—	$	110
Commercial paper and corporate debt securities	—		750		—		750		—		2,600		—		$	2,600
Cash and Cash Equivalents	876		750		—		1,626		110		2,600		—		2,710
Marketable Securities:
U.S. Treasury, U.S. Government and U.S. Government agency debt securities	5,036		11,980		—		17,016		4,997		19,130		—		24,127
Commercial paper and corporate debt securities	—		31,081		—		31,081		—		22,866		—		22,866
Total	5,036		43,061		—		48,097		4,997		41,996		—		46,993
Total assets:	$	5,912	$	43,811	$	—	$	49,723	$	5,107	$	44,596	$	—	$	49,703
Liabilities:
Contingent consideration payable	$	—	$	—	$	2,783	$	2,783	$	—	$	—	$	2,462	$	2,462

Fair value measurement on recurring basis, unobservable input reconciliation

Changes in Level 3 liabilities
Fair value at December 31, 2011	$	3,194
Payments made to Zygo Corporation	(300		)
Addition: Fair value of royalty payment to RTM related to acquisition of Nanda	(561		)
Change in fair value included in earnings, Zygo	129
Fair value at December 29, 2012	2,462
Payments made to Zygo Corporation	(1,004		)
Change in fair value included in earnings, Zygo	1,325
Fair Value at December 28, 2013	$	2,783