Fair Value Measurements and Disclosures (Details Textual) (Fair Value, Measurements, Recurring [Member], Zygo Corporation [Member], USD $) In Millions, unless otherwise specified	Sep. 28, 2013	Dec. 29, 2012
Fair Value, Measurements, Recurring [Member] \| Zygo Corporation [Member]
Fair Value Measurements and Disclosures (Textual) [Abstract]
Liabilities resulting from the acquisition of certain assets from Zygo Corporation measured at fair value	$ 2.8	$ 2.5
Current liability at fair value	1.0	0.7
Long-term liability at fair value	$ 1.8	$ 1.8

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Amount of liabilities due within one year or within the normal operating cycle, if longer, assumed at the acquisition date.

+ References

Reference 1: http://www.xbrl.org/2003/role/presentationRef

-Publisher FASB

-Name Accounting Standards Codification

-Topic 805

-SubTopic 20

-Section 50

-Paragraph 1

-Subparagraph (c)

-URI http://asc.fasb.org/extlink&oid=6910749&loc=d3e4845-128472

+ Details

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- Definition

Amount of liabilities assumed at the acquisition date.

+ References

+ Details

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- Definition

Amount of liabilities due after one year or the normal operating cycle, if longer, assumed at the acquisition date.

+ References

+ Details

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