Fair Value Measurements and Disclosures (Details Textual) (USD $)	3 Months Ended	12 Months Ended					12 Months Ended
	Mar. 31, 2012	Dec. 29, 2012	Nov. 21, 2011 Nanda [Member]	Dec. 29, 2012 Fair Value, Measurements, Recurring [Member] Zygo Corporation [Member]	Dec. 31, 2011 Fair Value, Measurements, Recurring [Member] Zygo Corporation [Member]	Dec. 31, 2011 Fair Value, Measurements, Recurring [Member] Nanda [Member]	Dec. 29, 2012 Real Time Metrology Inc. [Member]
Fair Value Measurements and Disclosures (Textual) [Abstract]
Liabilities resulting from the acquisition of certain assets from Zygo Corporation measured at fair value			$ 1,603,000	$ 2,500,000	$ 2,600,000	$ 600,000
Current liability at fair value				700,000	700,000
Long-term liability at fair value				1,800,000	1,900,000
Fair Value Measurements and Disclosures (Additional Textual) [Abstract]
Reduction in fair value of royalty payments	600,000						600,000
Reduction in fair value of goodwill	400,000	500,000					400,000
Reduction in fair value of intangible assets	$ 200,000						$ 200,000
Maximum maturity period of Available-for-sale marketable securities, classified as cash equivalents		90 days
Minimum maturity period of Available-for-sale marketable securities, classified as marketable securities		90 days
Maximum period of available for sale securities debt maturities		2 years