Fair Value Measurements and Disclosures (Details 1) (Level 3 [Member], USD $) In Thousands, unless otherwise specified	12 Months Ended
Dec. 29, 2012	Dec. 31, 2011
Fair value measurement on recurring basis, unobservable input reconciliation
Fair value, beginning balance	$ 3,194	$ 2,652
Change in fair value related to foreign currency exchange rate		(25)
Change in fair value included in earnings	129	413
Fair Value, ending balance	2,462	3,194
Zygo Corporation [Member]
Fair value measurement on recurring basis, unobservable input reconciliation
Payments made to Zygo Corporation	(300)	(432)
Nanda [Member]
Fair value measurement on recurring basis, unobservable input reconciliation
Addition: Fair value of royalty payment to RTM related to acquisition of Nanda		586
Adjustment to the purchase price allocation of royalty payments to RTM related to acquisition of Nanda Technologies GmbH	$ (561)

Fair Value Measurement with Unobservable Inputs Reconciliations Addition for Royalty Payments Related to Acquisition

No definition available.

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- Definition

Fair Value Measurement with Unobservable Inputs Reconciliations Adjustment for Foreign Currency Exchange Rate

+ References

No definition available.

+ Details

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- Definition

Fair value measurement with unobservable inputs reconciliations adjustment to purchase price allocation of royalty payments related to acquisition.

+ References

No definition available.

+ Details

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- Definition

Amount of gain (loss) recognized in earnings, arising from liabilities measured at fair value on a recurring basis using unobservable inputs (level 3).

+ References

Reference 1: http://www.xbrl.org/2003/role/presentationRef

-Publisher FASB

-Name Accounting Standards Codification

-Topic 820

-SubTopic 10

-Section 50

-Paragraph 2

-Subparagraph (c)(1)

-URI http://asc.fasb.org/extlink&oid=7578670&loc=d3e19207-110258

Reference 2: http://www.xbrl.org/2003/role/presentationRef

-Publisher FASB

-Name Statement of Financial Accounting Standard (FAS)

-Number 157

-Paragraph 32

-Subparagraph c(1)

-LegacyDoc This reference is SUPERSEDED by the Accounting Standards Codification effective for interim and annual periods ending after September 15, 2009. This reference is included to help users transition from the previous accounting hierarchy and will be removed from future versions of this taxonomy.

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- Definition

Settlements that have taken place during the period in relation to liabilities measured at fair value and categorized within Level 3 of the fair value hierarchy.

+ References

+ Details

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- Definition

This element represents a liability measured at fair value using significant unobservable inputs (Level 3) which is required for reconciliation purposes of beginning and ending balances.

+ References

+ Details

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