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Business acquisition, preliminary purchase price allocation period.

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Business Acquisition, Pro Forma Adjustments, Amortization

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Business Acquisition, Pro Forma Adjustments, Stock-based Compensation

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Business Acquisition, Purchase Price Allocation, Contingent Liabilities

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Proceeds from escrow.

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Reduction in fair value of goodwill.

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Reduction in fair value of intangible assets.

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Reduction in fair value of royalty payment.

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Royalty payments to be remitted for the first three years subsequent to the acquisition

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Royalty payments to be remitted subsequent to the first three years after the acquisition

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Amount of cash paid to acquire the entity.

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Percentage of voting equity interests acquired in the business combination.

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The amount of acquisition cost of a business combination allocated to an identifiable intangible asset that will be amortized.

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Amount of goodwill arising from a business combination, which is the excess of the cost of the acquired entity over the amounts assigned to assets acquired and liabilities assumed.

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Useful life of finite-lived intangible assets, in 'PnYnMnDTnHnMnS' format, for example, 'P1Y5M13D' represents the reported fact of one year, five months, and thirteen days.

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Carrying amount as of the balance sheet date, which is the cumulative amount paid and (if applicable) the fair value of any noncontrolling interest in the acquiree, adjusted for any amortization recognized prior to the adoption of any changes in generally accepted accounting principles (as applicable) and for any impairment charges, in excess of the fair value of net assets acquired in one or more business combination transactions.

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The amount of impairment loss recognized in the period resulting from the write-down of the carrying amount of an intangible asset (excluding goodwill) to fair value.

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Acquisition, Goodwill Impairment and Long-lived Asset Impairment (Details Textual) (USD $)	3 Months Ended	12 Months Ended			12 Months Ended				0 Months Ended				12 Months Ended
	Mar. 31, 2012	Dec. 29, 2012	Dec. 31, 2010	Dec. 31, 2011	Dec. 29, 2012 Nanda [Member]	Dec. 31, 2011 Nanda [Member]	Jan. 01, 2011 Nanda [Member]	Nov. 21, 2011 Nanda [Member]	Nov. 21, 2011 Developed technology [Member] Nanda [Member]	Nov. 21, 2011 Customer relationships [Member] Nanda [Member]	Dec. 29, 2012 In-process research and development [Member] Nanda [Member]	Nov. 21, 2011 In-process research and development [Member] Nanda [Member]	Dec. 29, 2012 Maximum [Member]	Dec. 29, 2012 Maximum [Member] Developed technology [Member]	Dec. 29, 2012 Maximum [Member] Customer relationships [Member]	Dec. 29, 2012 Real Time Metrology Inc. (RTM) [Member]	Dec. 29, 2012 Real Time Metrology Inc. (RTM) [Member] Nanda [Member]	Nov. 21, 2011 Real Time Metrology Inc. (RTM) [Member] Nanda [Member]
Acquisition Goodwill Impairment and Long Lived Asset Impairment (Textual) [Abstract]
Preliminary purchase price allocation period													1 year
Reduction in fair value of royalty payments	$ 600,000															$ 600,000
Reduction in fair value of goodwill	400,000	500,000														400,000
Reduction in fair value of intangible assets	200,000															200,000
Proceeds from escrow					500,000
Acquired percentage of the outstanding shares of Nanda Technologies GmbH								100.00%
Net purchase price in cash								24,600,000
Goodwill		11,352,000		11,990,000	11,400,000
Intangibles aquired									9,042,000	1,040,000	300,000	308,000
Finite-lived intangibles estimated lives									5 years	3 years			10 years	10 years	10 years
Goodwill acquired								11,610,000
Royalty payments to be remitted for the first three years subsequent to the acquisition																	100.00%
Royalty payments to be remitted subsequent to the first three years after the acquisition																	50.00%
Contingent liabilities																		600,000
Pro forma adjustments, amortization						2,400,000	2,600,000
Pro forma adjustments, stock-based compensation						800,000	1,900,000
Impairment of intangible assets			$ 500,000