Other Current Liabilities (Tables)

12 Months Ended

Dec. 29, 2012

Other Liabilities Disclosure [Abstract]

Summary of other current liabilities

Other current liabilities consist of the following (in thousands):

	At
	December 29, 2012		December 31, 2011
Accrued warranty	$	4,203	$	4,797
Accrued professional services	584		1,497
Customer deposits	27		4,912
Fair value of current portion of contingent payments to Zygo Corporation related to acquisition	649		679
Legal settlement	—		2,500
Other	2,359		2,324
Total other current liabilities	$	7,822	$	16,709