Fair Value Measurements and Disclosures (Tables)

12 Months Ended

Dec. 29, 2012

Fair Value Disclosures [Abstract]

Assets and liabilities measurements at estimated fair value on recurring basis excluding accrued interest components

The following table presents the Company’s assets and liabilities measured at estimated fair value on a recurring basis, excluding accrued interest components, categorized in accordance with the fair value hierarchy (in thousands):

	December 29, 2012								December 31, 2011
	Fair Value Measurements Using Input Types								Fair Value Measurements Using Input Types
	Level 1		Level 2		Level 3		Total		Level 1		Level 2		Level 3		Total
Assets:
Cash equivalents:
Money market funds	$	60,315	$	—	$	—	$	60,315	$	97,699	$	—	$	—	$	97,699
Commercial paper and corporate debt securities	—		2,600		—		2,600		—		—		—		—
Cash and Cash Equivalents	60,315		2,600		—		62,915		97,699		—		—		97,699
Marketable Securities:
U.S. Treasury, U.S. Government and U.S. Government agency debt securities	24,127		—		—		24,127		—		—		—		—
Commercial paper and corporate debt securities	—		22,866		—		22,866		—		—		—		—
Total	24,127		22,866		—		46,993		—		—		—		—
Total assets:	$	84,442	$	25,466	$	—	$	109,908	$	97,699	$	—	$	—	$	97,699
Liabilities:
Contingent consideration payable	$	—	$	—	$	2,462	$	2,462	$	—	$	—	$	3,194	$	3,194

Fair value measurement on recurring basis, unobservable input reconciliation

Changes in Level 3 liabilities
Fair value at January 1, 2011	$	2,652
Payments made to Zygo Corporation	(432		)
Addition: Fair value of royalty payment to RTM related to acquisition of Nanda	586
Change in fair value related to foreign currency exchange rate	(25		)
Change in fair value included in earnings, Zygo	413
Fair value at December 31, 2011	3,194
Payments made to Zygo Corporation	(300		)
Change in fair value included in earnings, Zygo	129
Adjustment to the purchase price allocation of royalty payments to RTM related to acquisition of Nanda Technologies GmbH	(561		)
Fair Value at December 29, 2012	$	2,462