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Defined Benefit Pension Plan
12 Months Ended
Dec. 29, 2012
Compensation and Retirement Disclosure [Abstract]  
Defined Benefit Pension Plan
Defined Benefit Pension Plan
Nanometrics sponsors a statutory government mandated defined benefit pension plan (the “Benefit Plan”) in Taiwan for its local employees. The fair value of plan assets was $0.2 million for fiscal year ended 2012, and $0.1 million for each of the fiscal years ended 2011 and 2010 respectively; and the net funding deficiency of the Benefit Plan was $0.3 million, $0.2 million and $0.3 million for the fiscal years ended December 29, 2012, December 31, 2011 and January 1, 2011, respectively. Based on the nature and limited extent of the pension plan, we have determined this pension plan is not material for separate disclosure.