Fair Value Measurements and Disclosures (Details Textual) (USD $) In Millions, unless otherwise specified	3 Months Ended		9 Months Ended
	Jun. 30, 2012	Mar. 31, 2012	Sep. 29, 2012	Sep. 29, 2012 Fair Value, Measurements, Recurring [Member] Zygo Corporation [Member]	Dec. 31, 2011 Fair Value, Measurements, Recurring [Member] Zygo Corporation [Member]	Dec. 31, 2011 Fair Value, Measurements, Recurring [Member] Nanda [Member]
Fair Value Measurements and Disclosures (Textual) [Abstract]
Liabilities resulting from the acquisition of certain assets from Zygo Corporation measured at fair value				$ 2.7	$ 2.6	$ 0.6
Current liability at fair value				1.0	0.7
Long-term liability at fair value				1.7	1.9
Fair Value Measurements and Disclosures (Additional Textual) [Abstract]
Reduction in fair value of royalty payments		0.6	0.6
Reduction in fair value of goodwill	0.5	0.4	0.4
Reduction in fair value of intangible assets		$ 0.2	$ 0.2
Maximum maturity period of Available-for-sale marketable securities, classified as cash equivalents			90 days
Minimum maturity period of Available-for-sale marketable securities, classified as marketable securities			90 days
Maximum period of available for sale securities debt maturities			2 years