Other Current Liabilities

9 Months Ended

Sep. 29, 2012

Other Liabilities Disclosure [Abstract]

Other Current Liabilities

Note 9. Other Current Liabilities

Other current liabilities consist of the following (in thousands):

	At
	September 29, 2012		December 31, 2011
Accrued warranty	$	4,649	$	4,797
Accrued professional services	610		1,497
Customer deposits	590		4,912
Fair value of current portion of contingent payments to Zygo Corporation related to acquisition	1,049		679
Legal settlement	—		2,500
Other	2,209		2,324
Total other current liabilities	$	9,107	$	16,709