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Defined Benefit Pension Plan	12 Months Ended
Defined Benefit Pension Plan	Dec. 31, 2011
Defined Benefit Pension Plan [Abstract]
Defined Benefit Pension Plan	Defined Benefit Pension Plan Nanometrics sponsors a statutory government mandated defined benefit pension plan (the “Benefit Plan”) in Taiwan for its local employees. The fair value of plan assets was $0.1 million for each of the fiscal years ended 2011, 2010 and 2009 respectively; and the net funding deficiency of the Benefit Plan was $0.2 million, $0.3 million and $0.2 million for the fiscal years ended December 31, 2011, January 1, 2011 and January 2, 2010, respectively. Based on the nature and limited extent of the pension plan, we have determined this pension plan is not material for separate disclosure.

The entire disclosure for pension and other postretirement benefits.

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