Net Intangible Assets (Detail) (USD $) In Thousands, unless otherwise specified	3 Months Ended
	Dec. 31, 2011 Year	Oct. 01, 2011
Finite-Lived Intangible Assets [Line Items]
Net intangible assets	$ 27,270	$ 29,565
Wedge bonder developed technology
Finite-Lived Intangible Assets [Line Items]
Intangible assets	33,200	33,200
Accumulated amortization	(15,416)	(14,230)
Intangible assets net	17,784	18,970
Intangible assets, average estimated useful lives (in years)	7.0
Wedge bonder customer relationships
Finite-Lived Intangible Assets [Line Items]
Intangible assets	19,300	19,300
Accumulated amortization	(12,545)	(11,580)
Intangible assets net	6,755	7,720
Intangible assets, average estimated useful lives (in years)	5.0
Wedge bonder trade name
Finite-Lived Intangible Assets [Line Items]
Intangible assets	4,600	4,600
Accumulated amortization	(1,869)	(1,725)
Intangible assets net	2,731	2,875
Intangible assets, average estimated useful lives (in years)	8.0
Wedge bonder other intangible assets
Finite-Lived Intangible Assets [Line Items]
Intangible assets	2,500	2,500
Accumulated amortization	$ (2,500)	$ (2,500)
Intangible assets, average estimated useful lives (in years)	1.9